JPH0663581B2 - Vacuum gate valve - Google Patents
Vacuum gate valveInfo
- Publication number
- JPH0663581B2 JPH0663581B2 JP31105490A JP31105490A JPH0663581B2 JP H0663581 B2 JPH0663581 B2 JP H0663581B2 JP 31105490 A JP31105490 A JP 31105490A JP 31105490 A JP31105490 A JP 31105490A JP H0663581 B2 JPH0663581 B2 JP H0663581B2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- valve
- angle
- seal
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体製造装置等における真空容器の仕切弁と
して用いる真空用ゲート弁に係り、特にそのシール構造
に関する。The present invention relates to a vacuum gate valve used as a gate valve of a vacuum container in a semiconductor manufacturing apparatus or the like, and more particularly to a seal structure thereof.
従来、この種のゲート弁においては、特開昭63-312574
号に示されるような、カムなどの手段により弁板を押圧
するものがあるが、このような機械的な機構の第１従来
例においては、部材同士の摺動による磨耗粉が発生する
などの課題がある。Conventionally, in this type of gate valve, Japanese Patent Laid-Open No. 63-312574
There is a device for pressing the valve plate by means of a cam or the like as shown in No. 1, but in the first conventional example of such a mechanical mechanism, abrasion powder is generated due to sliding between members. There are challenges.
これを解決するものとして、特開平１−261573号に示さ
れる仕切弁のように、ベローズを用いて形成された空間
に圧力気体を導入しシールを達成するようにしたものも
提案されているが、この第２従来例では弁開閉時の導入
圧力の切り換えの煩雑さやベローズ破損の場合、圧力気
体が真空容器中に流入することになるなどの課題があ
る。As a solution to this problem, there has been proposed a sluice valve disclosed in Japanese Patent Laid-Open No. 1-261573, which introduces a pressure gas into a space formed by using a bellows to achieve sealing. In the second conventional example, however, there is a problem in that the pressure gas will flow into the vacuum container when the introduction pressure is changed when the valve is opened and closed or the bellows is broken.
これらを解決するものとして、特開平１−218628号（第
３従来例）に示されるような密封面及び閉鎖部材を用い
たシール構造が提案されている。As a solution to these problems, a sealing structure using a sealing surface and a closing member has been proposed as disclosed in JP-A-1-218628 (third conventional example).
上記第３従来例の構造では、閉鎖部材の両側の室に圧力
差が生じた場合、閉鎖部材に開口軸線方向の大きな力が
作用し、ピストンロッドが曲がったり、あるいは閉鎖部
材が軸線方向にわずかではあるが移動し、シール材の損
傷が懸念されている等の課題がある。In the structure of the third conventional example, when a pressure difference occurs between the chambers on both sides of the closing member, a large force acts on the closing member in the direction of the opening axis, and the piston rod bends or the closing member moves slightly in the axial direction. However, there are problems such as movement and concern about damage to the sealing material.
本発明ゲート弁は上記の課題を解決するため、第１図〜
第３図示のように開口軸Ａ−Ａに沿って貫通された開口
２０と開口２０から開口軸Ａ−Ａに直交する一方向に外
部へ開口されると共にその内孔横断面形状が開口を横断
する方向に略長円形状である挿入口２１とを有する弁座
１６と、前記弁座１６に弁箱６０を介して連結された駆
動源８０によりステム軸５０を介して前記挿入口２１か
ら前記開口２０内へ往復移動されると共に開口２０を開
閉可能に設けられた弁体４０とで構成される真空用ゲー
ト弁において、前記弁座１６には、挿入口２１の外部開
口周縁部に沿って開口軸Ａ−Ａを含む平面Ｂに平行する
略トラック形閉鎖帯状をなして形成されると共に平面Ｂ
に対して第１角度αをもって内側に傾斜する第１シール
面１０Ａと、前記第１シール面１０Ａの対向する両円弧
状部Ｒ内周の各１箇所から挿入口２１の軸方向に挿入口
２１内部に沿って延設されると共に前記平面Ｂに対して
第２角度βをもって内側に傾斜する第２シール面１０
Ｂ，１０Ｂと、前記第２シール面１０Ｂ，１０Ｂの両延
設端から開口２０の周方向に開口２０内部に沿うと共に
両延設端を接続して形成される第３シール面１０Ｃとで
構成されるシール座面１０が設けられ、前記弁体４０に
は、前記第１〜第３シール面１０Ａ，１０Ｂ，１０Ｂ，
１０Ｃにそれぞれ密着され、互いに連接される第１〜第
３シール材部分３０Ａ，３０Ｂ，３０Ｂ，３０Ｃよりな
るシール材３０が装着されることを特徴とするものであ
る。In order to solve the above-mentioned problems, the gate valve of the present invention is shown in Figs.
As shown in FIG. 3, an opening 20 penetrating along the opening axis A-A and an opening from the opening 20 to the outside in one direction orthogonal to the opening axis A-A, and a cross-sectional shape of the inner hole crossing the opening. The valve seat 16 having a substantially elliptical insertion port 21 in the direction of rotation, and the drive source 80 connected to the valve seat 16 via the valve box 60, from the insertion port 21 via the stem shaft 50. In a vacuum gate valve composed of a valve element 40 that is reciprocally moved into the opening 20 and is capable of opening and closing the opening 20, in the valve seat 16, the valve seat 16 is provided along the outer opening peripheral edge portion of the insertion opening 21. It is formed in a substantially track-shaped closed band shape parallel to the plane B including the opening axis A-A, and the plane B is also formed.
With respect to the first sealing surface 10A that inclines inward at the first angle α, and from each one of the inner circumferences of the opposing arcuate portions R of the first sealing surface 10A, the insertion opening 21 extends in the axial direction of the insertion opening 21. A second seal surface 10 extending along the inside and inclined inward at a second angle β with respect to the plane B.
B and 10B, and a third sealing surface 10C formed by connecting both extending ends along the inside of the opening 20 in the circumferential direction of the opening 20 from both extending ends of the second sealing surfaces 10B and 10B. Is provided on the valve body 40, and the valve body 40 has the first to third sealing surfaces 10A, 10B, 10B,
The sealing material 30 is composed of first to third sealing material portions 30A, 30B, 30B and 30C which are closely attached to and connected to 10C, respectively.
以上のような構成を有するので、弁閉時にはシール材30
を装着した弁体40を、第１〜第３シール面10A,10B,10B,
10Cにそれぞれシール材30の第１〜第３シール材部分30
A,30B,30B,30Cが密着するよう移動させると、第１シー
ル材部分30Aは第１シール面10Aの第１角度αによるテー
パ効果によって、第２シール材部分30B,30Bは第２のシ
ール面10B,10Bの第２角度βによるテーパ効果によっ
て，第３シール材部分30Cは第３シール面10Cに弁体40の
移動による押付けによってシール材30が押しつぶされて
シールを達成することになる。また弁開時には弁体40を
逆方向に移動させることにより、開口20を開放すること
になる。With the above configuration, the sealing material 30
The valve body 40 with the first to third sealing surfaces 10A, 10B, 10B,
First to third sealing material portions 30 of the sealing material 30 at 10C, respectively
When the A, 30B, 30B and 30C are moved so as to be in close contact with each other, the first sealing material portion 30A is tapered by the first angle α of the first sealing surface 10A, and the second sealing material portions 30B and 30B are secondly sealed. Due to the taper effect of the surfaces 10B and 10B by the second angle β, the third sealing material portion 30C is pressed against the third sealing surface 10C by the movement of the valve body 40, and the sealing material 30 is crushed to achieve the sealing. Further, when the valve is opened, the opening 20 is opened by moving the valve body 40 in the opposite direction.
以下図面に基づいて本発明の実施例を説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第１図は本発明ゲート弁の一実施例における弁座の説明
用斜視図、第２図は同じく弁体の説明用斜視図、第３図
は本実施例の全体構成を弁体側と弁座側に分けて示した
斜視図である。FIG. 1 is a perspective view for explaining a valve seat in an embodiment of the gate valve of the present invention, FIG. 2 is a perspective view for explaining the valve body, and FIG. It is the perspective view divided and shown to the side.
本実施例においては、第１図示のように、開口軸Ａ−Ａ
に沿って貫通された開口２０と開口２０から開口軸Ａ−
Ａに直交する一方向に（図においては上方向）外部へ開
口されると共にその内孔横断面形状が開口を横断する方
向に略長円形状である挿入口２１とを有する弁座１６
に、挿入口２１の外部開口周縁部に沿って開口軸Ａ−Ａ
を含む平面Ｂに平行する略トラック形閉鎖帯状をなして
形成されると共に平面Ｂに対して第１角度αをもって内
側に傾斜する第１シール面１０Ａと、前記第１シール面
１０Ａの対向する両円弧状部Ｒ内周の各１箇所から挿入
口２１の軸方向に挿入口２１内部に沿って延設されると
共に前記平面Ｂに対して第２角度βをもって内側に傾斜
する第２シール面１０Ｂ，１０Ｂと、前記第２シール面
１０Ｂ，１０Ｂの両延設端から開口２０の周方向に開口
２０内部に沿うと共に両延設端を接続して形成される第
３シール面１０Ｃとで構成されるシール座面１０が設け
られている。In the present embodiment, as shown in the first illustration, the opening axis A-A
20 penetrating along the opening 20 and the opening axis A-
A valve seat 16 that has an opening 21 that is open to the outside in one direction orthogonal to A (upward in the figure) and that has an insertion hole 21 whose inner hole cross-sectional shape is substantially elliptical in a direction that intersects the opening.
And the opening axis A-A along the outer peripheral edge of the insertion opening 21.
A first sealing surface 10A that is formed in a substantially track-shaped closed strip shape that is parallel to the flat surface B including and that is inclined inward at a first angle α with respect to the flat surface B, and both of the first sealing surface 10A facing each other. A second sealing surface 10B that extends along the inside of the insertion opening 21 from each one position on the inner circumference of the arcuate portion R along the inside of the insertion opening 21 and inclines inward at a second angle β with respect to the plane B. , 10B, and a third seal surface 10C formed by connecting both extended ends along the inside of the opening 20 in the circumferential direction of the opening 20 from both extended ends of the second seal surfaces 10B, 10B. A seal seat surface 10 is provided.
弁座16に、これらの第１〜第３シール面10A,10B,10B,10
Cで囲まれる開口軸A-Aの方向に貫通する開口20が設けら
れている。この弁座16は第３図示のように下方部に配設
されて密閉箱型の弁箱60が形成される。弁箱60の上方部
には弁板40側が収容される。弁板40は挿入口２１から嵌
挿されて開口20を開閉する。The valve seat 16 has these first to third sealing surfaces 10A, 10B, 10B, 10
An opening 20 penetrating in the direction of the opening axis AA surrounded by C is provided. The valve seat 16 is disposed in the lower portion as shown in FIG. 3 to form a closed box type valve box 60. The valve plate 40 side is accommodated in the upper portion of the valve box 60. The valve plate 40 is inserted from the insertion port 21 to open and close the opening 20.
弁板40には第２図示のように第１〜第３シール面10A,10
B,10B,10Cにそれぞれ密着され、互いに連接された第１
〜第３シール材部分30A,30B,30B,30Cよりなるシール材3
0が装着されている。弁板40は水平面Ｂと直交する軸方
向に移動可能ならしめられている。シール材30は各第１
〜第３シール面10A,10B,10B,10Cと全ての部分が密着可
能な寸法になっている。30ABは第１シール材部分30Aと
第２シール材部分30B,30BのＴ字交差部である。弁板40
の上面中心部はスラム軸50が連結され、ステム軸50は第
３図示のように弁側ボンネットフランジ70を貫通して該
フランジ70に取付けたエアシリンダ等の駆動源80に連結
されている。その連結部は伸縮可能なベローズ（図示せ
ず）等を用いて直線運動導入式の密封構造になってい
る。As shown in the second illustration, the valve plate 40 has first to third sealing surfaces 10A and 10A.
B, 10B, 10C each closely and connected to each other 1st
~ Sealing material 3 consisting of the third sealing material part 30A, 30B, 30B, 30C
0 is installed. The valve plate 40 is movably mounted in the axial direction orthogonal to the horizontal plane B. Sealing material 30 is the first
~ The size is such that all parts can be brought into close contact with the third sealing surfaces 10A, 10B, 10B, 10C. 30AB is a T-shaped intersection of the first sealing material portion 30A and the second sealing material portions 30B, 30B. Valve plate 40
A slam shaft 50 is connected to the central portion of the upper surface of the shaft, and the stem shaft 50 penetrates the valve side bonnet flange 70 as shown in the third drawing and is connected to a drive source 80 such as an air cylinder attached to the flange 70. The connecting portion has a linear motion introducing type sealing structure using an expandable bellows (not shown) or the like.
弁側ボンネットフランジ部70は弁箱60の弁箱側ボンネッ
トフランジ65にＯリング等のシール材を用いてボルト等
により密封結合される。駆動源80はステム軸50を介して
弁板40の移動を行い、弁座16の開口20の開閉を行う。The valve-side bonnet flange portion 70 is hermetically coupled to the valve-box-side bonnet flange 65 of the valve box 60 with a bolt or the like using a sealing material such as an O-ring. The drive source 80 moves the valve plate 40 via the stem shaft 50 to open and close the opening 20 of the valve seat 16.
以上のように構成してあるので、弁閉時には弁板40を水
平面Ｂと直交する軸方向に第３図において下方に移動さ
せ、弁板40に装着したシール材30を弁座16の各シール面
10A,10B,10B,10Cに押し付け、開口20を閉鎖しシールを
達成する。弁開時においては、弁板40を第３図において
上方に移動させ、開口20を開放する。With the above configuration, when the valve is closed, the valve plate 40 is moved downward in the axial direction orthogonal to the horizontal plane B in FIG. 3, and the sealing material 30 attached to the valve plate 40 is attached to each seal of the valve seat 16. surface
Press against 10A, 10B, 10B, 10C to close opening 20 and achieve a seal. When the valve is opened, the valve plate 40 is moved upward in FIG. 3 to open the opening 20.
また、第１シール面10Aと第２シール面10B,10Bが開閉面
Ｂとなす第１角度α及び第２角度βは、必ずしも同一で
ある必要はないが、同一でない場合は両シール面10A,10
B,10Bの接続部は滑らかな曲線となり、同一角度とした
方がシール面の加工が容易である。この角度はシール面
とシール材のすべり量の程度，テーパによるシール材の
押しつぶし力の程度から約60度が適当であるが、その他
の角度でもシール機構上の差異がないことは明らかであ
る。Further, the first angle α and the second angle β formed by the first seal surface 10A and the second seal surfaces 10B, 10B and the opening / closing surface B do not necessarily have to be the same, but if they are not the same, both seal surfaces 10A, Ten
The connection part of B and 10B has a smooth curve, and if the angles are the same, it is easier to process the sealing surface. It is appropriate that this angle be about 60 degrees, depending on the amount of slip between the seal surface and the seal material and the crushing force of the seal material due to the taper, but it is clear that there is no difference in the seal mechanism at other angles.
また、第１シール面10A及びそれと対応する第１シール
材部分30Aの両弧状部Ｒは第４図(a)示のように、その断
面形状が半円形または第４図(b)示のように一部直接部
Ｌを含んだものでもよく、またその他類似の形状でもよ
い。The first seal surface 10A and the corresponding arcuate portions R of the first seal material portion 30A corresponding to the first seal surface 10A have a semicircular cross section as shown in FIG. 4 (a) or a cross section shown in FIG. 4 (b). May partially include the direct portion L, or may have a similar shape.
また、第３のシール面10Cは必ずしも直線的である必要
はなく、例えば円弧の一部でもよい。The third seal surface 10C does not necessarily have to be linear, and may be a part of a circular arc, for example.
上述のように本発明によれば、開口軸Ａ−Ａに沿って貫
通された開口２０と開口２０から開口軸Ａ−Ａに直交す
る一方向に外部へ開口されると共にその内孔横断面形状
が開口を横断する方向に略長円形状である挿入口２１と
を有する弁座１６と、前記弁座１６に弁箱６０を介して
連結された駆動源８０によりステム軸５０を介して前記
挿入口２１から前記開口２０内へ往復移動されると共に
開口２０を開閉可能に設けられた弁体４０とで構成され
る真空用ゲート弁において、前記弁座１６には、挿入口
２１の外部開口周縁部に沿って開口軸Ａ−Ａを含む平面
Ｂに平行する略トラック形閉鎖帯状をなして形成される
と共に平面Ｂに対して第１角度αをもって内側に傾斜す
る第１シール面１０Ａと、前記第１シール面１０Ａの対
向する両円弧状部Ｒ内周の各１箇所から挿入口２１の軸
方向に挿入口２１内部に沿って延設されると共に前記平
面Ｂに対して第２角度βをもって内側に傾斜する第２シ
ール面１０Ｂ，１０Ｂと、前記第２シール面１０Ｂ，１
０Ｂの両延設端から開口２０の周方向に開口２０内部に
沿うと共に両延設端を接続して形成される第３シール面
１０Ｃとで構成されるシール座面１０が設けられ、前記
弁体４０には、前記第１〜第３シール面１０Ａ，１０
Ｂ，１０Ｂ，１０Ｃにそれぞれ密着され、互いに連接さ
れる第１〜第３シール材部分３０Ａ，３０Ｂ，３０Ｂ，
３０Ｃよりなるシール材３０が装着されることを特徴と
するので、ゲート弁の開閉，シール及びシール解放動作
は弁体40を、弁座16のシール座面10に押付け、離脱駆動
のみで行なえるため、従来のような機械的摺動部が全く
なく、発塵が防止でき、また、弁閉時には第１シール面
10A部分において弁体40の第１シール材部分30Aの両側
（両開口面）が、シール材30を密着させることによって
弁座16により支持されているため、弁体両側の室の圧力
差によって弁体40が移動する等の不具合が全くなく、確
実なシールを得ることができる。また、弁閉時には弁箱
60内空間は、両側開口201,202のいずれの空間とも封止
分離されるため、弁箱60内壁からのアウトガス等がゲー
ト弁の開口に接続される真空容器へ侵入することを防止
でき、この真空容器の排気時間を短縮できる。As described above, according to the present invention, the opening 20 penetrating along the opening axis AA and the opening from the opening 20 to the outside in one direction orthogonal to the opening axis AA and the inner hole cross-sectional shape thereof. Is inserted through the stem shaft 50 by a valve seat 16 having an insertion opening 21 having a substantially oval shape in a direction traversing the opening, and a drive source 80 connected to the valve seat 16 through a valve box 60. In a vacuum gate valve that is reciprocally moved from the opening 21 into the opening 20 and includes a valve body 40 that is capable of opening and closing the opening 20, the valve seat 16 has a peripheral edge of an external opening of the insertion opening 21. A first sealing surface 10A that is formed in a substantially track-shaped closed strip shape that is parallel to a plane B including the opening axis AA and that is inclined inward at a first angle α with respect to the plane B; Both arcuate portions of the first sealing surface 10A facing each other Second sealing surfaces 10B, 10B extending from the respective ones on the inner circumference in the axial direction of the insertion opening 21 along the inside of the insertion opening 21 and inclined inward at a second angle β with respect to the plane B, The second sealing surface 10B, 1
A seal seat surface 10 is provided, which is formed from both extended ends of 0B along the inside of the opening 20 in the circumferential direction of the opening 20 and is formed by connecting both extended ends to each other. The body 40 includes the first to third sealing surfaces 10A and 10A.
First to third sealing material portions 30A, 30B, 30B, which are closely attached to B, 10B, 10C and are connected to each other.
Since the seal member 30 made of 30C is mounted, the gate valve can be opened / closed, and the seal and the seal release operation can be performed only by pushing the valve body 40 against the seal seat surface 10 of the valve seat 16 and releasing the valve. Therefore, there is no mechanical sliding part as in the past, dust can be prevented, and when the valve is closed, the first sealing surface
At the portion 10A, both sides (both opening surfaces) of the first sealing material portion 30A of the valve body 40 are supported by the valve seat 16 by bringing the sealing material 30 into close contact with each other. A reliable seal can be obtained without any problem such as movement of the body 40. Also, when the valve is closed, the valve box
Since the inner space of 60 is sealed and separated from the space of both openings 20 1 and 20 2 , it is possible to prevent outgas from the inner wall of the valve box 60 from entering the vacuum container connected to the opening of the gate valve. The evacuation time of this vacuum container can be shortened.
逆に、接続される真空容器が腐食性のガスを扱うような
場合には、腐食ガスが弁箱60内空間に侵入することも防
止できるため、弁箱60内壁の腐食を最小限に止めること
ができる。さらに、両側開口201,202に正逆の方向性が
なく、両側開口の圧力差に応じて取付方向を使い分けな
ければならないなどの煩雑さがなくなる。On the contrary, when the connected vacuum container handles corrosive gas, it is possible to prevent the corrosive gas from entering the inner space of the valve box 60, so the corrosion of the inner wall of the valve box 60 should be minimized. You can Further, there is no directivity between the openings 20 1 and 20 2 on both sides, which eliminates the need for different mounting directions depending on the pressure difference between the openings on both sides.
第１図は本発明ゲート弁の一実施例における弁座の説明
用斜視図、第２図は同じく弁体の説明用斜視用、第３図
は本実施例の全体構成を弁体側と弁座側に分けて示した
斜視図、第４図(a),(b)はそれぞれ本発明における弁座
の開口軸を含む平面の平面形状の２例を示す説明図、第
４図(c)は弁箱の側面図である。 A-A……開口軸、Ｂ……（水）平面、１０……シール座
面、α……第１角度、１０Ａ……第１シール面、β……
第２角度、10B……第２シール面、10C……第３シール
面、16……弁座、20……開口、２１……挿入口、30……
シール材、30A……第１シール材部分、30B……第２シー
ル材部分、30C……第３シール材部分、30AB……Ｔ字交
差部、40……弁体（弁板）、Ｒ……弧状部、Ｌ……直線
部。FIG. 1 is a perspective view for explaining a valve seat in an embodiment of the gate valve of the present invention, FIG. 2 is a perspective view for explaining the valve body, and FIG. FIGS. 4 (a) and 4 (b) are explanatory views showing two examples of the plane shape of the plane including the opening axis of the valve seat according to the present invention, and FIG. It is a side view of a valve box. AA ... Opening axis, B ... (Horizontal) plane, 10 ... Seal seat surface, α ... First angle, 10A ... First seal surface, β ...
Second angle, 10B ... Second sealing surface, 10C ... Third sealing surface, 16 ... Valve seat, 20 ... Opening, 21 ... Insertion port, 30 ...
Seal material, 30A ... first seal material portion, 30B ... second seal material portion, 30C ... third seal material portion, 30AB ... T-shaped crossing portion, 40 ... valve element (valve plate), R ... … Arc part, L …… straight part.
Claims (3)
（２０）と開口（２０）から開口軸（Ａ−Ａ）に直交す
る一方向に外部へ開口されると共にその内孔横断面形状
が開口を横断する方向に略長円形状である挿入口（２
１）とを有する弁座（１６）と、前記弁座（１６）に弁
箱（６０）を介して連結された駆動源（８０）によりス
テム軸（５０）を介して前記挿入口（２１）から前記開
口（２０）内へ往復移動されると共に開口（２０）を開
閉可能に設けられた弁体（４０）とで構成される真空用
ゲート弁において、前記弁座（１６）には、挿入口（２
１）の外部開口周縁部に沿って開口軸（Ａ−Ａ）を含む
平面（Ｂ）に平行する略トラック形閉鎖帯状をなして形
成されると共に平面（Ｂ）に対して第１角度（α）をも
って内側に傾斜する第１シール面（１０Ａ）と、前記第
１シール面（１０Ａ）の対向する両円弧状部（Ｒ）内周
の各１箇所から挿入口（２１）の軸方向に挿入口（２
１）内部に沿って延設されると共に前記平面（Ｂ）に対
して第２角度（β）をもって内側に傾斜する第２シール
面（１０Ｂ，１０Ｂ）と、前記第２シール面（１０Ｂ，
１０Ｂ）の両延設端から開口（２０）の周方向に開口
（２０）内部に沿うと共に両延設端を接続して形成され
る第３シール面（１０Ｃ）とで構成されるシール座面
（１０）が設けられ、前記弁体（４０）には、前記第１
〜第３シール面（１０Ａ，１０Ｂ，１０Ｂ，１０Ｃ）に
それぞれ密着され、互いに連接される第１〜第３シール
材部分（３０Ａ，３０Ｂ，３０Ｂ，３０Ｃ）よりなるシ
ール材（３０）が装着されることを特徴とする真空用ゲ
ート弁。1. An opening (20) penetrating along an opening axis (AA), and an opening from the opening (20) to the outside in one direction orthogonal to the opening axis (AA) and an inner hole thereof. An insertion opening (2) whose cross-sectional shape is substantially oval in the direction crossing the opening (2
1) having a valve seat (16) and a drive source (80) connected to the valve seat (16) through a valve box (60), and the insertion port (21) through a stem shaft (50). A valve body (40) reciprocally moved from the inside to the opening (20) and opening and closing the opening (20), the vacuum gate valve is inserted into the valve seat (16). Mouth (2
1) is formed in a substantially track-shaped closed strip shape parallel to the plane (B) including the opening axis (AA) along the outer opening peripheral portion of 1), and at the first angle (α) with respect to the plane (B). ), The first seal surface (10A) is inclined inward, and the first seal surface (10A) is inserted in the axial direction of the insertion opening (21) from each one of the inner circumferences of the opposing arcuate portions (R). Mouth (2
1) A second seal surface (10B, 10B) extending along the inside and inclined inward at a second angle (β) with respect to the plane (B), and the second seal surface (10B,
10B) a seal seat surface that is formed from both extended ends along the inside of the opening (20) in the circumferential direction of the opening (20) and that is formed by connecting both extended ends to a third seal surface (10C). (10) is provided, and the valve body (40) is provided with the first
~ Sealing material (30) consisting of first to third sealing material parts (30A, 30B, 30B, 30C) closely attached to the third sealing surfaces (10A, 10B, 10B, 10C) and connected to each other is mounted. A vacuum gate valve characterized by the following.
ことを特徴とする請求項第１項記載の真空用ゲート弁。2. The vacuum gate valve according to claim 1, wherein the first angle (α) is equal to the second angle (β).
０度であることを特徴とする請求項第２項記載の真空用
ゲート弁。3. The first angle (α) and the second angle (β) are about 6
The vacuum gate valve according to claim 2, wherein the gate valve is 0 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31105490A JPH0663581B2 (en) | 1990-11-16 | 1990-11-16 | Vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31105490A JPH0663581B2 (en) | 1990-11-16 | 1990-11-16 | Vacuum gate valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04185985A JPH04185985A (en) | 1992-07-02 |
| JPH0663581B2 true JPH0663581B2 (en) | 1994-08-22 |
Family
ID=18012556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31105490A Expired - Fee Related JPH0663581B2 (en) | 1990-11-16 | 1990-11-16 | Vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0663581B2 (en) |
-
1990
- 1990-11-16 JP JP31105490A patent/JPH0663581B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04185985A (en) | 1992-07-02 |
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