JPH0661124B2 - Perpendicular magnetic head and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention employs a perpendicular magnetic recording method in which magnetic recording is performed by magnetizing in a thickness direction of a medium perpendicular to a recording medium surface having a two-layer film structure. The main magnetic pole excitation type perpendicular magnetic head used for the floppy disk device described above, and a method for manufacturing the same.
In particular, the present invention relates to a case of manufacturing by a coil post-insertion method.

[Prior Art] In manufacturing the above perpendicular magnetic head, generally, a main magnetic pole portion and a soft magnetic material core portion having a magnetic core portion at the center are formed into a size capable of taking a large number of pieces, and both are integrally joined. Since the head alone is formed by slicing, the magnetic core portion to be wound has a closed shape, and therefore the coil cannot be attached to the magnetic core portion without manual winding. For this reason, not only the workability and the assemblability are poor, but also the coil cannot be wound in a line, the inductance cannot be reduced, and the sensitivity is hindered. In order to eliminate this drawback, the head tip side part with an unclosed magnetic core part is formed first, and after polishing the head tip surface, the coil wound in line with a winding machine etc. is attached to the magnetic core part. Then, a coil post-insertion manufacturing method was developed in which a back core made of a soft magnetic material was joined to the lower surface of the head tip side portion. The manufacturing process of the conventional perpendicular magnetic head by the coil post-insertion method will be described with reference to FIGS. 17 (a) to 17 (j).

First, an amorphous soft magnetic thin film is adhered and formed on one of two rectangular block-shaped non-magnetic materials 1 and 1 such as crystallized glass or ceramics by sputtering or the like, and then a plurality of magnetic thin films are left in vertical stripes by etching or the like. Main pole film 2
(FIG. (A)), and the non-magnetic materials 1 and 1 are adhesively bonded to each other to form the main magnetic pole portion base body 3 (FIG. (B)). By polishing, a plurality of plate-shaped main magnetic pole portions 4 are formed (FIG. 1C), while two parallel grooves 5a are formed on the upper surface of a rectangular block-shaped soft magnetic material such as ferrite or permalloy. , 5a are formed as relief grooves in the magnetic core forming process described later to form a plurality of block-like soft magnetic cores 5 (see the same figure).
(c)), the soft magnetic core 5 and the main magnetic pole portion 4 are adhesively bonded to each other to form a bonding block 6 ((d) in the same figure), and the bonding block 6 is sliced vertically as indicated by the arrow to form the head. A bonded thin piece body 7 integrally having the main magnetic pole portion 4 and the soft magnetic core 5 as a single body is formed (FIG. 8E), while the winding space groove 8 is formed.
A head upper body 9 is formed by sandwiching and bonding the joining thin piece body 7 with two sliders 8 made of a non-magnetic material such as glass which is provided with a and is formed in a concave shape (FIG. 2 (g)). The remaining portion of the groove of the magnetic core 5 is grooved and punched out to form the magnetic core portion 5b in a state of being separated from both side portions 5c thereof by the separation groove 5d (FIG. (H). (G). (h) is a perspective view of the inside upside down). In addition, when the magnetic core portion 5b and the both side portions 5c which are the return path portions of the magnetic flux are connected by the soft magnetic material,
Since the magnetic flux is not concentrated and spreads and does not function effectively as a perpendicular magnetic head, it is necessary to separate the magnetic core portion 5b and both side portions 5c thereof as described above. Next, the upper surface of the head upper body (that is, the above-mentioned head tip side portion) 9, that is, the head tip surface is mirror-finished into a hemispherical shape by lapping or the like ((i) in the same figure), and then with a winding machine or the like. The coil 10 wound in a line is mounted on the magnetic core portion 5b from the back side, the back core 11 made of a soft magnetic material is adhesively bonded to the back surface of the head upper body 9, and this is adhesively fixed to the terminal board 12 or the like to form the coil 10
The terminal is soldered to the terminal portion to complete the manufacture of the perpendicular magnetic head.

[Problems to be Solved by the Invention] The above-described conventional method has advantages in that it is possible to use coils wound in a line by a winding machine, so that inductance can be reduced and high sensitivity can be realized. There is such a drawback. That is, (i) the magnetic core portion 5b is formed by slicing the joint block 6 into a thin joint thin piece body 7 and then machining the separation groove 5d, and the central portion of the soft magnetic core 5 is formed. Since the portion to be the magnetic core portion is bonded to the main magnetic pole portion 4 only in a very small area, it is inferior in strength at the time of the groove processing and is easily damaged, resulting in poor yield.

(ii) Since the shape of the head tip portion, that is, the head upper body 9 has a three-layer structure of the bonding thin piece body 7 and the sliders 8 on both sides thereof, and the adhesive bonding portions thereof are present in the vicinity of the center. That is, the joining portions are present at both ends of the joining thin piece body 7 in the substantially central portion which slides on the medium at the head tip end portion. However, since the adhesive layer at the joint is softer than other parts, a slight dent causes a step when lapping is applied, resulting in a corner at the upper edge of the joint end face that sandwiches the adhesive layer. As a result, there is a drawback in that the medium sliding characteristics are damaged.

(iii) Joining When the thin piece body 7 and the slider 8 are fixed to a jig or the like and then adhesively joined to form the head upper body 9 having a three-layer structure, it is not possible to join them so that their upper and lower surfaces are strictly parallel to each other. It is difficult, and a slight taper is likely to occur between the upper and lower surfaces. Then, even if lapping is performed after joining, the taper between the upper and lower surfaces remains, making it difficult for the main magnetic pole film to be located at the apex on the hemispherical surface during tip polishing, resulting in highly accurate geometric dimensions. Absent.

The present invention has been made in order to solve the above-mentioned conventional drawbacks, and guarantees the strength shortage at the time of forming the magnetic core portion, has a good medium sliding property, and is capable of ensuring a highly accurate shape and dimension. An object of the present invention is to provide a magnetic head and a manufacturing method thereof, and to realize a coil post-insertion method in manufacturing a perpendicular magnetic head with high reliability.

[Means for Solving Problems] (1) In the first invention, which is the invention of the perpendicular magnetic head, the auxiliary core portion (26), the main magnetic pole portion (29), the coil (31), and the back A core (32), and the auxiliary core portion (26) is a groove for a back core formed on the upper and lower surfaces of a rectangular block made of a soft magnetic material so as to be orthogonal to each other and open to each other. (24a) and the winding space groove (24b), and the winding space groove (24b) has a winding space setting groove (25
(a) is formed by opening the recessed non-magnetic material reinforcing body (25) in which the magnetic block (24) is bonded and bonded and the back core groove (24a) is opposed to the bottom surface. E-shaped central part (22a) that is integrally connected to the thin groove (24c)
And both side portions (22b) are composed of a soft magnetic thin piece body (22) partially filled and joined by a non-magnetic material (21), and the non-magnetic material reinforcing body (25) of the auxiliary core portion (26). ), The fitting surface side is a soft magnetic thin piece body (22) filled with a non-magnetic material fitted in the thin groove (24c).
However, together with the magnetic block (24), the non-magnetic material reinforcement
The flat surface is formed by being sandwiched between (25) and exposed, and the main magnetic pole portion (29) is formed by sandwiching the main magnetic pole film (28) between the end faces of a pair of thin plate-shaped non-magnetic materials (27). And the upper surface of the auxiliary core portion (26) is adhesively bonded so that the main magnetic pole film is located in the central upper part of the magnetic core portion, and the coil (31) is the E-shaped portion serving as the magnetic core portion, Inserted in the central portion (22a) of the soft magnetic thin piece body (22) filled with a non-magnetic material, the back core (32) is fitted and adhered to the back core groove of the soft magnetic body block (24). It became the composition.

(2) In the second invention which is a method of manufacturing the perpendicular magnetic head of the first invention, two filling grooves (20a) parallel to each other are formed on one surface of the soft magnetic material block (20), A non-magnetic material (2
1) is filled, and two separation grooves (20b) are formed so as to face the two filling grooves (20a) and only a part of the filled non-magnetic material portion (21) remains from the opposite surface. And then sliced thinly to form E-shaped soft magnetic flakes filled with non-magnetic material
The step of forming (22), the back core groove (24a) and the winding space groove (24b) are formed in the upper and lower surfaces of the rectangular block made of the soft magnetic material in directions orthogonal to each other and opened to each other. The step of forming the soft magnetic material block (24) so as to form a non-magnetic material reinforcing member made of a non-magnetic material and having a groove (25a) for taking a winding space to form a concave block shape ( Step (25) of fitting and adhering to the winding space groove (24b) of the soft magnetic material block (24), and then the back core groove (2) of the soft magnetic material block (24).
4a), a step of forming a thin groove (24c) including the portion of the non-magnetic material reinforcing body (25), a soft magnetic thin piece body obtained by filling the thin groove (24c) with the non-magnetic material
Step of fitting and bonding (22), then, of the soft magnetic block (24) until the upper surface of the soft magnetic thin piece body (22) filled with the nonmagnetic material is exposed while being sandwiched between the nonmagnetic material reinforcing bodies. The step of polishing the non-magnetic material reinforcing body (25) to form the auxiliary core portion (26), and sandwiching the main magnetic pole film (28) between the end faces of the pair of thin plate-shaped non-magnetic materials (27) to integrate them. A step of forming a thin plate-shaped main magnetic pole part (29) formed by bonding the thin plate-shaped main magnetic pole part (29) to the upper surface of the auxiliary core body (26) so that the main magnetic pole film is located on the center of the magnetic core part. To form the head upper joined body (30), finish polishing the upper surface of the thin plate-shaped main magnetic pole part (29) of the head upper joined body (30), and after the finish polishing, the coil wound in alignment ( 31) is a soft magnetic thin piece body (22) filled with the non-magnetic material, which is a magnetic core part
The step of inserting the back core (32) made of a soft magnetic material into the groove for a back core of the soft magnetic material block and then adhering the back core (32) made of the soft magnetic material.

[Operation] The non-magnetic material portions 21 filled on both sides of the magnetic core portion (central portion 22a) reinforce and widen the bonding area to secure the mechanical strength of the magnetic core portion.

Since the groove processing of the separation groove 22b for forming the magnetic core portion 22a is performed in the block-shaped 20 before slicing,
There is no risk of damage during grooving.

Since the main magnetic pole portion 28 is wide and the adhesive joint does not come near the center of the medium sliding surface, the medium sliding characteristic is good.

Since the magnetic core portion is surrounded by the soft magnetic material (the side portions 22b and the soft magnetic material block 24) on all sides, a magnetic shield effect can be obtained.

Since the outer shape of the auxiliary core portion 26 is defined not by the layered structure but by the soft magnetic material block 24 which is an integral body, it is possible to set a reliable reference surface for processing.

[Embodiment] FIG. 1 is an exploded perspective view of a perpendicular magnetic head according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line II-II in FIG.
This structure will be clarified while explaining the manufacturing steps shown in FIGS.

First, two filling grooves 20a parallel to each other are formed on one surface of the rectangular soft magnetic block 20 (FIG. 3), and the filling grooves 20a are filled with a non-magnetic material such as glass 21 (fourth). Then, the two separation grooves 20b are grooved so that only the filled glass 21 remains from the opposite surface facing the two filling grooves 20a (FIG. 5), and then vertically as shown by arrows. Slice thinly. The separation groove 20b may be wider than the nonmagnetic material filling groove 20a in order to increase the number of windings. As a result, it has an E shape (a shape such that the letter E is laid sideways is called an E shape), and the central portion 22a and both side portions 22b are integrally joined at the lower portion by the glass 21 that is filled and joined. A soft magnetic thin piece body 22 filled with a non-magnetic material is formed (FIG. 6). Let its height be h ₁ and its width be w ₁ .

Separately from the above, the upper and lower surfaces of the rectangular block 23 (Fig. 7) of height H made of soft magnetic material are accurately finished parallel to each other by lapping or the like, and the depth h ₂ and the width w ₂ are formed on one surface thereof. A back core groove 24a is provided (FIG. 8), and the opposite groove surface is
A winding space groove 24b having a depth h ₃ and a width w ₃ is provided so as to be opened (arrow (a)) in a direction orthogonal to the back core groove 24a to form the soft magnetic block 24 ( (Fig. 9). That is, h ₂ + h ₃ ≧ H. Further, in the embodiment, approximately h ₂ = h ₃ is set. If w ₂ = w ₃ , the winding space can be efficiently taken.

Similarly, as shown in FIG. 9, a non-magnetic material reinforcing body 25 made of a non-magnetic material such as glass and having a concave block shape is formed by providing a groove 25a for taking a winding space. The material reinforcing body 25 is fitted into the winding space groove 24b and adhesively bonded. The thickness h ₅ of the non-magnetic material reinforcement 25 is slightly smaller than the depth h _{3 of the} winding space groove 24b, and the groove 25a
H ₆ is smaller than the height h ₁ of the thin piece 22 filled with the non-magnetic material.

After the non-magnetic material reinforcing body 25 is integrated, a thin groove 24c having a depth h ₄ and a width w ₄ is formed at the bottom of the back core groove 24a of the soft magnetic material block 24 including the non-magnetic material reinforcing body 25. Are formed (FIG. 10). The width w ₄ of the thin groove 24c is made slightly smaller than the width w ₁ of the non-magnetic material-filled thin piece body 22, and the filled thin piece body 22 is fitted into and bonded to the thin groove 24c (see FIG. 10, FIG. 1).
(Fig. 1). The depth h ₄ of the thin groove 24c is the same as the height h ₁ of the thin piece 22 filled with the non-magnetic material.

Next, the non-magnetic material reinforcing body 25 of the soft magnetic material block 24 laps the surface of the non-magnetic material until the thin piece 22 filled with the non-magnetic material is exposed to form the auxiliary core portion 26 (FIG. 11, FIG. 1).
(Fig. 2). Incidentally, the same city thickness of the bottom of the back core groove 24a and the depth h ₃ of the winding space groove 24b, the lapping h ₇
= Is set to h ₂ -h _6. It should be noted that h ₇ > h ₃ −h _{4 is} also acceptable. On the other hand, as shown in FIG. 13, a pair of thin plate-shaped non-magnetic materials 27, 2
The thin plate-shaped main magnetic pole portion 29 is formed by sandwiching the main magnetic pole film 28 between the end faces of the magnetic recording medium 7. This process is shown in FIG.
A method substantially similar to the method of forming the plate-shaped main magnetic pole portion 4 described in the conventional example of (c) is adopted, and a plurality of blocks are sliced and taken. However, the thin plate-shaped main magnetic pole portion 29 formed here is a single body having one main magnetic pole film 28, has the same area as the auxiliary core portion 26, and is sufficiently wider than the conventional one as a single main magnetic pole portion.

Next, the thin plate-shaped main magnetic pole portion 29 is attached to the auxiliary core portion 26.
To form an upper head joined body 30 by an adhesive (FIG. 14). Then, the upper surface of the head upper joined body 30, that is, the surface of the main magnetic pole portion 29 is formed into a hemispherical shape by lapping or the like. Mirror finish (Fig. 15). In this case, since the upper and lower surfaces of the auxiliary core portion 26 are processed in parallel with high precision, it is possible to polish the surface of the main magnetic pole portion 29 into a desired hemispherical surface without deviation.

Next, the coil 31 wound in a line by a winding machine or the like is attached to the central portion 22a of the non-magnetic material-filled thin piece body 22, that is,
Inserted in the magnetic core, then made of soft magnetic material, height h ₈ ,
A rectangular back core 32 having a width w ₈ is attached to the soft magnetic block 24.
16 is fitted and bonded to the back core groove 24a, is fixedly bonded to the terminal plate 33 and the like, and the end of the coil 31 is soldered to the terminal portion, whereby the perpendicular magnetic head is completed as shown in FIG. The height h ₈ of the back core 32 is slightly smaller than the depth h ₂ of the back core groove 24a.

The above dimensional relationships of height, depth, and width are one preferred embodiment, and are not necessarily limited thereto.

In forming the magnetic core part for mounting the coil in the above manufacturing process, the groove processing of the separation groove 20b is performed not in a thin slice but in a block shape (FIG. 5). A method of performing separation groove processing on the thin piece body 7, that is, after thinly slicing (first
Unlike FIGS. 7 (g) and 7 (h), the magnetic core is hardly damaged during the groove processing for forming the magnetic core.

Moreover, the magnetic core portion 22a of the non-magnetic material-filled thin piece body 22 is not bonded and joined to the main magnetic pole portion 29 simply by the cross-sectional area of the magnetic core portion as in the conventional case, but is integrally filled and joined on both sides. Since the glass portion 21 is adhesively bonded together, the glass portion 21 serves as a reinforcement, and the bonding strength is sufficiently higher than in the conventional case. Therefore, also in this respect, there is little possibility that the weakest magnetic core portion will be damaged in the subsequent steps. As described above, since the workability is excellent and the number of broken products is small, the yield is improved, the reliability of the manufacturing method by the coil post-insertion method is increased, and the coil post-insertion method becomes practically effective.

Further, since the main magnetic pole portion 29 has a wide surface, unlike the conventional one in which the joint portion is present near the center of the medium sliding surface, the medium is less likely to be damaged.

Further, since both side portions 22b of the non-magnetic material-filled thin piece 22 and the soft magnetic material block 24 are both soft magnetic material, the magnetic core portion 22a is surrounded on all sides by the soft magnetic material. Therefore, the magnetic shield effect is obtained,
Inductance is reduced, and high sensitivity can be expected in this respect as well.

In addition, when the auxiliary core portion 26 is formed by lapping the non-magnetic material-filled thin piece body 22 until it is exposed in the shape sandwiched by the non-magnetic material reinforcing body 25 (FIGS. 11 and 12), the soft magnetic material block is used. Since the opposite surface of 24, which has already been lapped, serves as a reliable reference surface, the upper and lower surfaces of the auxiliary core portion 26 are not tapered, and the upper and lower surfaces can be finished in parallel with high accuracy. It is possible to position the main magnetic pole film at the tip of the head at the apex of the hemispherical tip polishing.

In addition, the present invention is a coil post-insertion system, which does not require manual winding and can use coils that are aligned and wound mechanically, so that productivity is improved and sensitivity is increased by reducing inductance.

[Effects of the Invention] As described above, according to the present invention, the following various excellent effects are exhibited.

(i) Since the structure is filled with non-magnetic material on both sides of the magnetic core,
The filled non-magnetic material portion reinforces and the mechanical strength of the magnetic core portion is secured. (ii) Since the groove processing of the separation groove for forming the magnetic core portion is performed in the block shape before slicing, there is no possibility of damaging the magnetic core portion.

(iii) Due to the above, the workability is remarkably improved, the damage is less likely to occur, the yield is improved, the reliability of the coil post-insertion manufacturing method is increased, and it is practically effective.

(vi) Since the main magnetic pole portion is wide and the adhesive joint portion does not come to the center of the medium sliding surface, the medium sliding characteristic is improved.

(v) Since the magnetic core is surrounded on all sides by the soft magnetic material, the influence of the external magnetic field is small and the magnetic shield effect can be obtained.

(vi) Since one surface of the soft magnetic material block which is an integrated body can be used as a reliable reference surface for processing, highly accurate processing is possible.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of a perpendicular magnetic head showing an embodiment of the present invention, FIG. 2 is a sectional view taken along the line II--II in FIG. 1, and FIGS. FIGS. 17 (a) to 17 (j) are process diagrams illustrating a method of manufacturing a head, and FIGS. 17 (a) to 17 (j) are process diagrams illustrating a method of manufacturing a conventional perpendicular magnetic head. 20 ... Soft magnetic material block, 20a ... Filling groove, 20b ... Separation groove, 21 ... Glass (non-magnetic material), 22 ... Non-magnetic material filled soft magnetic thin piece (non-magnetic material filled thin piece), 22a ... Center Part (magnetic core part), 22b ... Both side parts (return path part), 24 ... Soft magnetic material block, 24a
... Back core groove, 24b ... Winding space groove, 24c ... Thin groove, 25 ... Non-magnetic material reinforcing body, 25a ... Groove, 26 ... Auxiliary core portion, 27 ... Non-magnetic material, 28 ... Main magnetic pole film, 29 ... thin plate-shaped main magnetic pole portion, 30 ... head upper joined body, 31 ... coil, 3
2 ... Back core (soft magnetic material)

Claims (2)

[Claims] 1. An auxiliary core portion (26) and a main magnetic pole portion (29).
And a coil (31) and a back core (32), and the auxiliary core portions (26) are orthogonal to each other and open in the upper and lower surfaces of the rectangular block made of a soft magnetic material. Groove for the back core (24
a) and a winding space groove (24b), and the winding space groove (24b) is provided with a winding space setting groove (25a) as a reinforcing member. The magnetic material block (24) embedded with the magnetic material reinforcing body (25) and bonded to the magnetic material block (24) and the thin groove (24 formed by opening the back core groove (24a) from the bottom to the opposite surface.
The central portion (22) having an E shape, which is integrally connected to c).
a) and both side parts (22b) are composed of a soft magnetic thin piece body (22) partly filled and joined with a non-magnetic material (21), and a non-magnetic material reinforcement body (26) of the auxiliary core part (26). Two
On the fitting surface side of 5), the non-magnetic material-filled soft magnetic thin piece body (22) fitted in the thin groove (24c) is attached to the non-magnetic material reinforcement body (25) together with the magnetic body block (24). A flat surface is formed by being sandwiched and exposed, and the main magnetic pole portion (29) includes a pair of thin plate-shaped nonmagnetic materials (2).
The main magnetic pole film (28) is sandwiched between the end faces of (7) to be integrated, and the main magnetic pole film is adhesively bonded to the upper surface of the auxiliary core portion (26) so that the main magnetic pole film is located above the center of the magnetic core. (31) is a central portion (22) of the E-shaped soft magnetic thin piece body (22) filled with a non-magnetic material, which is a magnetic core portion.
a), the back core (32) is inserted into the soft magnetic block (2).
A perpendicular magnetic head characterized by being fitted and adhered to the groove for a back core of 4). 2. A soft magnetic material block (20) is provided with two filling grooves (20a) parallel to each other on one surface thereof, and the filling grooves (20a) are filled with a non-magnetic material (21). Two separation grooves (20b) are formed so as to face only one filling groove (20a) and only a part of the filled non-magnetic material portion (21) remains from the opposite surface, and then sliced into thin pieces. , E-shaped soft magnetic thin film filled with a non-magnetic material (2
2) a step of forming a groove (24a) for a back core and a groove (24b) for a winding space in the upper and lower surfaces of a rectangular block made of a soft magnetic material.
A step of forming soft magnetic material blocks (24) by providing them so as to be orthogonal to each other and open to each other, a groove (25a) made of a non-magnetic material and having a winding space
To form a concave block-shaped non-magnetic material reinforcement (2
5) Step of fitting and adhering 5) to the winding space groove (24b) of the soft magnetic block (24), and then to the bottom of the back core groove (24a) of the soft magnetic block (24), Forming a thin groove (24c) including the portion of the non-magnetic material reinforcing body (25); fitting and bonding a soft magnetic thin piece body (22) filled with the non-magnetic material in the thin groove (24c) Step, then, the non-magnetic material reinforcing body (25) of the soft magnetic material block (24) until the upper surface of the soft magnetic thin piece body (22) filled with the non-magnetic material is exposed while being sandwiched by the non-magnetic material reinforcing body. A step of polishing the gutter surface to form the auxiliary core portion (26), the main magnetic pole film (2) between the end faces of the pair of thin plate-shaped non-magnetic materials (27).
8) A step of forming a thin plate-shaped main magnetic pole portion (29) formed by sandwiching and integrating the thin plate-shaped main magnetic pole portion (29) with the auxiliary core portion (26).
Forming a head upper joined body (30) by adhering the main magnetic pole film on the upper surface of the head core so that the main magnetic pole film is located on the center of the magnetic core portion; and the thin plate-shaped main magnetic pole portion (2) of the head upper joined body (30).
9) A step of finish polishing the upper surface of the coil, and a coil (31) which is aligned and wound after the finish polishing.
Is inserted into the central portion (22a) of the soft magnetic thin piece body (22) filled with the non-magnetic material, which is the magnetic core portion, and then the back core (32) of the soft magnetic material is attached to the back of the soft magnetic material block. A method for manufacturing a perpendicular magnetic head, comprising the step of fitting and adhering to a core groove.