JPH0660338A - Magneto-resistance effect type head, inspection device for magneto-resistance effect type head and magnetic storage device mounting magneto-resistance effect type head - Google Patents

Magneto-resistance effect type head, inspection device for magneto-resistance effect type head and magnetic storage device mounting magneto-resistance effect type head

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Publication number
JPH0660338A
JPH0660338A JP21689092A JP21689092A JPH0660338A JP H0660338 A JPH0660338 A JP H0660338A JP 21689092 A JP21689092 A JP 21689092A JP 21689092 A JP21689092 A JP 21689092A JP H0660338 A JPH0660338 A JP H0660338A
Authority
JP
Japan
Prior art keywords
magnetoresistive
head
electrodes
magneto
resistance effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21689092A
Other languages
Japanese (ja)
Inventor
Hiroaki Koyanagi
広明 小柳
Hiroji Kawakami
寛児 川上
Shinji Narushige
真治 成重
Kazuo Shiiki
一夫 椎木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21689092A priority Critical patent/JPH0660338A/en
Publication of JPH0660338A publication Critical patent/JPH0660338A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent the generation of damages to the magneto-resistance effect type head by providing a protection circuit for short-circuiting between a pair of electrodes when current more than a specified value is impressed to the pair of electrodes. CONSTITUTION:Electrodes 110 are mutually linked at the rear parts of the electrodes 110 via a Schottky diode 100 and a metal line 120. This diode 100 is a protection circuit in which no electricity is conducted when a specified driving power of a magneto-resistance effect type head 40 is applied. For example, current value of about 24mA and voltage of about 200mV are applied and when a voltage more than 300mV is instantaneously impressed, electricity is connected and the interval between the electrodes 110 is short-circuited. No electricity is conducted in the head 40 constituted like this by a normal driving power and when excess current generated by charge and static electricity through human intervention during an inspection process, etc., is given, electricity is conducted in the diode 100, the rear end part of the electrode is short-circuited and thus, the impression of the excess current to a magneto- resistance effect element 85 is prevented. Thus, damages to the element 85 is prevented by the short-circuiting between the electrode 110.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、過電流破壊を防止する
ことができる磁気抵抗効果型ヘッド及び該磁気抵抗効果
型ヘッドの検査装置並びに該磁気抵抗効果型ヘッドを搭
載した磁気記憶装置に関する.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetoresistive head capable of preventing overcurrent breakdown, an inspection device for the magnetoresistive head, and a magnetic storage device equipped with the magnetoresistive head.

【0002】[0002]

【従来の技術】一般に磁気抵抗効果型ヘッドは、薄膜技
術により製造される磁気抵抗効果素子が外部磁場変化に
対して抵抗が変化する特性を利用し、磁気抵抗効果素子
にバイアス電流を流して素子の抵抗変化を電圧変化で読
み取ることによりデータの再生を行なう再生専用の高感
度の磁気ヘッドであり、例えば磁気ディスク装置又は磁
気テープ装置等の磁気記録装置に適用されている。この
該磁気抵抗効果素子は、外部磁場に対する感度を高める
ために反磁界を低減する必要があり、このために該磁気
抵抗効果素子の厚みを薄く(20nm〜50nm程度)
するのが一般的である。
2. Description of the Related Art Generally, a magnetoresistive head uses the characteristic that a magnetoresistive element manufactured by a thin film technique changes its resistance in response to a change in an external magnetic field. Is a high-sensitivity read-only magnetic head for reading data by reading the resistance change of the device by a voltage change, and is applied to a magnetic recording device such as a magnetic disk device or a magnetic tape device. In this magnetoresistive effect element, it is necessary to reduce the demagnetizing field in order to increase the sensitivity to an external magnetic field. Therefore, the thickness of the magnetoresistive effect element is thin (about 20 nm to 50 nm).
It is common to do.

【0003】このため磁気抵抗効果型ヘッドは、製造過
程において電極に帯電している電荷,浮遊電荷,人体に
帯電している電荷等が薄い磁気抵抗効果型素子に印加し
た場合、該素子が破壊する可能性があると共に、装置駆
動時においても磁気抵抗効果型ヘッドが磁気ディスクに
接触した際の電位差等による過電流が発生した際に前記
薄い磁気抵抗効果素子が破壊される可能性があった。
Therefore, in the magnetoresistive head, when electric charges, floating charges, electric charges, etc. charged on the electrodes are applied to a thin magnetoresistive element in the manufacturing process, the element is destroyed. The thin magnetoresistive effect element may be destroyed when an overcurrent occurs due to a potential difference when the magnetoresistive head contacts the magnetic disk even when the apparatus is driven. .

【0004】例えば、磁気抵抗効果膜(NiFe)の膜
厚が20nmでトラック幅3μm,MR高さ3μm,シ
ャントとソフトフィルム構造を組み合わせた複合バイア
ス方式でシャント膜が10nm,ソフトフィルム膜が2
0nmの磁気抵抗効果型ヘッドでは、素子抵抗が約7Ω
(オ−ム)、電流密度を2×107A/cm2(電流値は
約24mA)としたとき素子にかかる電圧が約200m
Vとなる。この時素子破壊電流密度としては約3×10
7A/cm2(電流値は約36mA,電圧換算約300m
V)程度であり、約300mV以上の電圧が瞬時に印加
されると破壊し、電流密度3×107A/cm2(電流値
は約36mA)では約1秒で素子は破断すると言う不具
合があった。
For example, the magnetoresistive film (NiFe) has a film thickness of 20 nm, a track width of 3 μm, an MR height of 3 μm, and a shunt film of 10 nm and a soft film film of 2 by a combined bias system combining a shunt and a soft film structure.
In a 0 nm magnetoresistive head, the element resistance is about 7Ω.
(Ohm), the voltage applied to the device is about 200 m when the current density is 2 × 10 7 A / cm 2 (current value is about 24 mA).
It becomes V. At this time, the device breakdown current density is about 3 × 10
7A / cm2 (current value is about 36mA, voltage conversion is about 300m
There is a problem that the device is broken when a voltage of about 300 mV or more is instantaneously applied, and the device breaks in about 1 second when the current density is 3 × 10 7 A / cm 2 (current value is about 36 mA).

【0005】この過大電圧等による破断を防止するため
従来技術による磁気抵抗効果型ヘッドは、例えば特開平
2−94103号公報記載の様に、磁気抵抗効果素子に
流れる中心電位を検出して駆動側の電流値をフィードバ
ック制御することにより、磁気抵抗効果型ヘッドと記録
媒体表面との接触による短絡電流に起因する素子破壊を
防止する保護回路を設けるものが提案されている。
In order to prevent breakage due to this excessive voltage or the like, a magnetoresistive head according to the prior art detects a center potential flowing in a magnetoresistive element and detects the driving side, as described in, for example, Japanese Patent Application Laid-Open No. 2-94103. It has been proposed to provide a protection circuit for preventing element destruction due to a short-circuit current due to contact between the magnetoresistive head and the surface of the recording medium by performing feedback control of the current value of (1).

【0006】[0006]

【発明が解決しようとする課題】しかしながら、この様
な保護回路は、装置設置時には有効であるものの、前述
した製造過程における人手の介在による電荷や静電気等
により発生する過電流で素子が破壊することがあり歩留
低下や磁気抵抗効果型ヘッドの性能低下が課題であっ
た。例えば、製造過程においては磁気抵抗効果型ヘッド
製造過程における薄膜加工段階でのウェハーへの人手/
機器等との接触による電荷や静電気により過電流が発生
して素子破壊が発生し、抵抗値の検査過程においては磁
気抵抗効果素子の端子部分に接触させる探針間や磁気抵
抗効果型ヘッドの端子間に電位差が生じた場合に電位差
に対応した過電流が流れて素子破壊が発生すると言う不
具合があった。
However, although such a protection circuit is effective when the device is installed, the element is destroyed by an overcurrent generated by electric charge or static electricity due to human intervention in the manufacturing process described above. However, there are problems such as a decrease in yield and a decrease in performance of the magnetoresistive head. For example, in the manufacturing process, it is necessary to manually attach a wafer to the thin film processing step in the magnetoresistive head manufacturing process.
Overcurrent occurs due to electric charge or static electricity due to contact with equipment, etc., causing element destruction, and in the process of checking the resistance value, between the probes to be brought into contact with the terminal part of the magnetoresistive effect element or the terminal of the magnetoresistive effect type head When a potential difference occurs between them, there is a problem that an overcurrent corresponding to the potential difference flows and element destruction occurs.

【0007】本発明の目的は、前記従来技術による不具
合を除去することであり、ウエハー段階及び素子検査段
階及び装置組込段階での過電流に対する素子破壊を防止
し歩留向上を図った磁気抵抗効果型ヘッド及び該磁気抵
抗効果型ヘッドの検査装置並びに該磁気抵抗効果型ヘッ
ドを搭載した磁気記憶装置を提供することである。
An object of the present invention is to eliminate the above-mentioned problems caused by the prior art, and to prevent yielding of elements due to overcurrent at the wafer stage, device inspection stage and device assembly stage, and to improve the yield. An object of the present invention is to provide an effect type head, an inspection apparatus for the magnetoresistive effect type head, and a magnetic memory device equipped with the magnetoresistive effect type head.

【0008】[0008]

【課題を解決するための手段】前記目的を達成するため
本発明による磁気抵抗効果型ヘッドは、前記一対の電極
に所定値以上の電流が印加された場合に前記一対の電極
間を短絡する保護回路を設けたことを特徴とする。
In order to achieve the above object, a magnetoresistive head according to the present invention is a protection for short-circuiting a pair of electrodes when a current of a predetermined value or more is applied to the pair of electrodes. It is characterized in that a circuit is provided.

【0009】前記目的を達成するため本発明による磁気
抵抗効果型ヘッドの検査装置は、磁気抵抗効果素子の電
極に接触させる一対の探針に所定値以上の電流が印加さ
れた場合、前記電極間を短絡する保護回路を設けたこと
を特徴とする。
In order to achieve the above-mentioned object, the magnetoresistive head inspection apparatus according to the present invention has a structure in which, when a current of a predetermined value or more is applied to a pair of probes contacting the electrodes of the magnetoresistive element, It is characterized in that a protection circuit for short-circuiting is provided.

【0010】前記目的を達成するため本発明による磁気
記録装置は、データを記録した磁気記録媒体と、該磁気
抵抗効果型ヘッドにより磁気記録媒体からデータを再生
するデータ再生回路と、前記一対の電極に所定値以上の
電流が印加された場合に前記一対の電極間を短絡するか
或いは接地する保護回路を含む磁気抵抗効果型ヘッドを
備えたことを特徴とする。
To achieve the above object, a magnetic recording apparatus according to the present invention comprises a magnetic recording medium on which data is recorded, a data reproducing circuit for reproducing data from the magnetic recording medium by the magnetoresistive head, and the pair of electrodes. Is provided with a magnetoresistive head including a protection circuit that short-circuits or grounds the pair of electrodes when a current of a predetermined value or more is applied.

【0011】[0011]

【作用】前記磁気抵抗効果型ヘッドは、保護回路が電極
に所定値以上の電流が印加された場合に一対の電極間を
短絡することにより、磁気抵抗効果型素子に過電流が印
加されるのを阻止して磁気抵抗効果型ヘッドの破損を防
止することができる。
In the magnetoresistive head, the protection circuit short-circuits the pair of electrodes when a current of a predetermined value or more is applied to the electrodes, thereby applying an overcurrent to the magnetoresistive element. Can be prevented to prevent damage to the magnetoresistive head.

【0012】前記磁気抵抗効果型ヘッドの検査装置は、
保護回路が磁気抵抗効果素子の電極に接触させる一対の
探針に所定値以上の電流が印加された場合、前記電極間
を短絡或いは接地することによって、磁気抵抗効果型素
子に過電流が印加されるのを阻止して検査時における磁
気抵抗効果型ヘッドの破損を防止することができる。
The inspection device for the magnetoresistive head is
When a current greater than a predetermined value is applied to the pair of probes that the protection circuit contacts the electrodes of the magnetoresistive effect element, an overcurrent is applied to the magnetoresistive effect element by short-circuiting or grounding the electrodes. It is possible to prevent the magnetoresistive head from being damaged during inspection.

【0013】前記磁気抵抗効果型ヘッドを備える磁気記
録装置は、磁気抵抗効果型ヘッドの保護回路が一対の電
極に所定値以上の電流が印加された場合に前記一対の電
極間を短絡することによって、例えばヘッドと磁気記録
媒体の接触による電位差に起因する過電流が磁気抵抗効
果型ヘッドに印加されるのを阻止して磁気抵抗効果型ヘ
ッドの破損を防止することができる。
In the magnetic recording apparatus having the magnetoresistive head, the protection circuit of the magnetoresistive head short-circuits the pair of electrodes when a current of a predetermined value or more is applied to the pair of electrodes. For example, it is possible to prevent the overcurrent resulting from the potential difference due to the contact between the head and the magnetic recording medium from being applied to the magnetoresistive head, and prevent the magnetoresistive head from being damaged.

【0014】[0014]

【実施例】【Example】

<第1の実施例>以下、本発明の一実施例による磁気抵
抗効果型ヘッドを図面を参照して詳細に説明する。図1
は本実施例による磁気抵抗効果型ヘッドの電圧−電流特
性を説明するための図、図2は本実施例による磁気抵抗
効果型ヘッドを組込んだ薄膜磁気ヘッドアッセンブリー
の部分拡大分解斜視図、図3は図2における磁気抵抗効
果型ヘッド部分の斜視図、図4は図3のA−A断面図で
ある。
<First Embodiment> A magnetoresistive head according to an embodiment of the present invention will be described in detail below with reference to the drawings. Figure 1
Is a diagram for explaining the voltage-current characteristics of the magnetoresistive head according to this embodiment, and FIG. 2 is a partially enlarged exploded perspective view of a thin film magnetic head assembly incorporating the magnetoresistive head according to this embodiment. 3 is a perspective view of the magnetoresistive head portion in FIG. 2, and FIG. 4 is a sectional view taken along line AA of FIG.

【0015】まず本実施例による磁気抵抗効果型ヘッド
を含む薄膜磁気ヘッドアッセンブリーは、図2に示す如
く、セラミック系基板1上に形成された下部シ−ルド膜
30及びバルクハウゼンノイズ防止用の磁区制御膜45
と、これらの上に設けられた磁気抵抗効果素子85と、
該磁気抵抗効果素子85に電流を印加して抵抗変化を電
圧変化で読み取るための一対の電極110とから読出専
用の磁気抵抗効果型ヘッド40を構成し、更に該読出専
用磁気ヘッド40の上部に設けられた上部シールド膜1
30,該上部シールド膜130の上方に設けられた下部
磁性膜150,導体180,上部磁性膜190を含む書
込み専用の書込ヘッド20を構成している。
First, as shown in FIG. 2, a thin film magnetic head assembly including a magnetoresistive head according to this embodiment has a lower shield film 30 formed on a ceramic substrate 1 and a magnetic domain for Barkhausen noise prevention. Control film 45
And a magnetoresistive effect element 85 provided on these,
A read-only magnetoresistive head 40 is composed of a pair of electrodes 110 for reading a resistance change by a voltage change by applying a current to the magnetoresistive element 85, and further on the read-only magnetic head 40. Provided upper shield film 1
A write-only write head 20 including a lower magnetic film 150 provided above the upper shield film 130, a conductor 180, and an upper magnetic film 190.

【0016】更に本実施例による磁気抵抗効果型ヘッド
40は、図3に示す様に前記電極110の後端部分にシ
ョットキーダイオード100及び金線120を介して互
に連結している。このショットキーダイオード100
は、磁気抵抗効果型ヘッドの所定の駆動電力、例えば電
流値が約24mA/電圧が約200mVの場合には通電
せず、所定値以上の電力、例えば約300mV以上の電
圧が瞬時に印加されたときに導通して各電極110間の
後端部分を短絡する様に特性を設定した保護回路に相当
する。また、この保護回路は、図3のA−A断面を示す
図4の様に、下部シ−ルド膜30上の電極110の一方
にショットキーダイオード100を半導体製造技術によ
って設け、次いで該ショットキーダイオード100と他
方の電極110を金線120により接続し、これらを感
光性材料等の樹脂90により密閉保護される様に製造さ
れ、本工程を終了後に前述した書き込み専用ヘッドを形
成している。尚、前記保護回路に使用される素子は逆接
続した2つのショットキーダイオード100に限られる
ことなく、2つの電極110に対する双方向での過電流
に対して有効に作用する双方向ダイオード,PN接合型
ダイオードあるいはコンデンサ−等の双方向過電流が印
加された場合のみに通電する素子であっても良い。
Further, the magnetoresistive head 40 according to this embodiment is connected to the rear end portion of the electrode 110 via a Schottky diode 100 and a gold wire 120 as shown in FIG. This Schottky diode 100
Does not energize when a predetermined drive power of the magnetoresistive head, for example, a current value is about 24 mA / voltage is about 200 mV, and an electric power of a predetermined value or more, for example, a voltage of about 300 mV or more is instantaneously applied. This corresponds to a protection circuit whose characteristics are set so that the electrodes 110 are sometimes conducted to short-circuit the rear end portions between the electrodes 110. In this protection circuit, a Schottky diode 100 is provided on one of the electrodes 110 on the lower shield film 30 by a semiconductor manufacturing technique as shown in FIG. 4 showing the AA cross section of FIG. The diode 100 and the other electrode 110 are connected by a gold wire 120, and these are manufactured so as to be hermetically sealed and protected by a resin 90 such as a photosensitive material. After the completion of this step, the write-only head described above is formed. The element used in the protection circuit is not limited to the two Schottky diodes 100 connected in reverse, but a bidirectional diode and a PN junction that effectively act on a bidirectional overcurrent with respect to the two electrodes 110. It may be an element such as a diode or a capacitor that conducts current only when a bidirectional overcurrent is applied.

【0017】また、ショットキーダイオード100によ
る磁気抵抗効果型ヘッドの動作電圧/電流特性は、図1
に示す如く、磁気抵抗効果素子85のV−I(電圧−電
流)特性Y、且つ正常駆動動作電力が電流I1及び電圧
1であり、該素子85の破壊電流がI2及び電圧V2
場合、該正常駆動動作電力の範囲においてはほとんど導
通せず、何等かの要因によって該素子85に例えば所定
電流I1を越える過電流が印加されると、ダイオード1
00がそのV−I特性Xに示す如く電流及び電圧が徐々
に増加し、破壊電流I2及び破損電圧V2に達する前に導
通するものである。
The operating voltage / current characteristics of the magnetoresistive head using the Schottky diode 100 are shown in FIG.
As shown in FIG. 11, the VI (voltage-current) characteristic Y of the magnetoresistive effect element 85, the normal driving operation power is the current I 1 and the voltage V 1 , and the breakdown current of the element 85 is I 2 and the voltage V 2. In such a case, the diode 1 hardly conducts in the range of the normal driving operation power, and when an overcurrent exceeding the predetermined current I 1 is applied to the element 85 due to some factor, the diode 1
00 indicates that the current and the voltage gradually increase as indicated by the VI characteristic X, and conducts before the breakdown current I 2 and the breakdown voltage V 2 are reached.

【0018】この様に構成した磁気抵抗効果型ヘッド
は、通常の駆動電力、例えば電流値が約24mA/電圧
が約200mVの場合には通電せず、製造過程或いは検
査過程他における人手の介在による電荷や静電気等によ
り発生する過電流が磁気抵抗効果型ヘッドの電極110
に印加された場合、ショットキーダイオード100が導
通して金線120を介して互いの電極110の後端部分
を短絡することによって過電流が磁気抵抗効果素子85
に印加されるのを防止する様に動作する。このため本実
施例による磁気抵抗効果型ヘッドは、ウエハー段階等の
製造工程において何等かの要因によって過電流が印加さ
れた場合、磁気抵抗効果素子85の前段の電極110間
を短絡して磁気抵抗効果素子85の破壊を防止すること
ができる。
The magnetoresistive head thus constructed does not energize under normal driving power, for example, when the current value is about 24 mA / voltage is about 200 mV, and it is due to human intervention during the manufacturing process or inspection process. An overcurrent generated due to electric charge or static electricity causes an electrode 110 of the magnetoresistive head.
When applied to the magnetoresistive effect element 85, the Schottky diode 100 becomes conductive and short-circuits the rear end portions of the electrodes 110 via the gold wire 120.
It operates so as to prevent being applied to. Therefore, in the magnetoresistive head according to the present embodiment, when an overcurrent is applied due to some factor in a manufacturing process such as a wafer stage, the electrodes 110 in the preceding stage of the magnetoresistive effect element 85 are short-circuited and the magnetoresistive effect is generated. The destruction of the effect element 85 can be prevented.

【0019】尚、本実施例による磁気抵抗効果型ヘッド
は、製造又は検査工程における過電流印加時のみに限ら
ず、装置実装時において過電流が印加された場合も、前
記ショットキーダイオード100が導通して金線120
を介して互いの電極110の後端部分を短絡することに
よって過電流が磁気抵抗効果素子85に印加されるのを
防止することができるのは言うまでもない。
In the magnetoresistive head according to the present embodiment, the Schottky diode 100 is conductive not only when an overcurrent is applied in the manufacturing or inspection process but also when an overcurrent is applied when the device is mounted. Then gold wire 120
Needless to say, it is possible to prevent an overcurrent from being applied to the magnetoresistive effect element 85 by short-circuiting the rear end portions of the electrodes 110 with each other via.

【0020】<第2の実施例>次に本発明による磁気抵
抗効果型ヘッドの検査装置を図5及び図6を参照して説
明する。図5は本検査装置の検査対象となる磁気抵抗効
果型ヘッドを組込んだ薄膜磁気ヘッドアッセンブリーの
全体概略構成を示す図、図6はこの磁気ヘッドアッセン
ブリーの抵抗値等の検査を行なう検査装置を説明するた
めの図である。
<Second Embodiment> Next, an inspection apparatus for a magnetoresistive head according to the present invention will be described with reference to FIGS. FIG. 5 is a diagram showing an overall schematic configuration of a thin film magnetic head assembly incorporating a magnetoresistive head to be inspected by the present inspection device, and FIG. 6 is an inspection device for inspecting the resistance value and the like of this magnetic head assembly. It is a figure for explaining.

【0021】まず本検査の対象となる薄膜磁気ヘッドア
ッセンブリーの全体概略は、図5に示す如く下部シール
ド膜30上に図2同様に配置された読出専用の磁気抵抗
効果型ヘッド52と、該ヘッド52の上方に上部シール
ド膜130を介して設けられた書込専用の薄膜磁気ヘッ
ド53とから成り、該薄膜磁気ヘッド53の端子51が
内側,磁気抵抗効果型ヘッド52の端子50が外側に位
置する様に配置されている。
First, a general outline of the thin film magnetic head assembly which is the subject of this inspection is shown in FIG. 5, in which a read-only magnetoresistive head 52 arranged on the lower shield film 30 in the same manner as in FIG. And a thin-film magnetic head 53 dedicated to writing provided above the upper shield film 130 via the upper shield film 130. The terminal 51 of the thin-film magnetic head 53 is located inside and the terminal 50 of the magnetoresistive head 52 is located outside. It is arranged to do.

【0022】この磁気抵抗効果型ヘッド52の抵抗値を
検査する検査装置は、図6に示す如く2本の探針63,
該探針63夫々と接続する端子64,該2つの端子64
を相互に接続する2つのショットキーダイオード61を
支持する探針支持部62と、前記2つの端子64と接続
して2本の探針63間の抵抗値を測定する抵抗値測定部
65とから構成され、前記ショットキーダイオード61
は夫々互いの端子64を逆並列に所定電圧または電流以
上にならないと通電しない様に設定されている。この様
に構成された検査装置は、前記薄膜磁気ヘッドアッセン
ブリーの磁気抵抗効果型ヘッド52の端子50に探針6
3をそれぞれ接触して抵抗測定部65によってヘッド5
2の抵抗値の測定を行なうものであり、もし探針63間
や端子50間に電位差があった場合、その電位差による
過電流は前記ショットキーダイオード61を介して通電
するため、過電流が磁気抵抗効果型ヘッド52の磁気抵
抗効果型素子に印加して破壊されることを薄膜磁気ヘッ
ドアッセンブリーに何等工夫することなく防止すること
ができる。従って薄膜磁気ヘッドアッセンブリーの検査
工程における磁気抵抗効果型素子の破壊を防止すること
ができる。尚、本実施例においては過電流印加時にショ
ットキーダイオード61を介して各端子64間を短絡す
る例を示したが、本発明はこれに限られることなく例え
ば各探針63を高抵抗(10kΩ程度)を介して接地
(ア−ス接続)することによっても同様の保護回路を形
成することもできる。
The inspection device for inspecting the resistance value of the magnetoresistive head 52 has two probes 63, as shown in FIG.
A terminal 64 connected to each of the probe 63 and the two terminals 64
From a probe supporting portion 62 that supports two Schottky diodes 61 that interconnect each other, and a resistance value measuring portion 65 that connects to the two terminals 64 and measures the resistance value between the two probes 63. The Schottky diode 61
Are set so that the terminals 64 will not be energized in antiparallel unless the voltage or current exceeds a predetermined voltage. In the inspection device thus configured, the probe 6 is attached to the terminal 50 of the magnetoresistive head 52 of the thin film magnetic head assembly.
3 are brought into contact with each other and the head 5 is
The resistance value of No. 2 is measured. If there is a potential difference between the probes 63 or between the terminals 50, the overcurrent due to the potential difference is conducted through the Schottky diode 61. The thin film magnetic head assembly can be prevented from being destroyed by being applied to the magnetoresistive effect element of the resistance effect head 52 without any modification. Therefore, it is possible to prevent the magnetoresistive element from being destroyed in the inspection process of the thin film magnetic head assembly. In the present embodiment, an example in which each terminal 64 is short-circuited via the Schottky diode 61 when an overcurrent is applied has been described, but the present invention is not limited to this, and each probe 63 may have a high resistance (10 kΩ, for example). A similar protection circuit can also be formed by grounding (ground connection) via a (degree).

【0023】<第3の実施例>次に本発明の他の実施例
による磁気ディスク装置を図7を参照して説明する。図
7は本実施例による磁気ディスク装置の全体構成を示す
図であり、本装置は、内蔵スピンドルモータ214によ
って高速回転されるスピンドル軸212と、該スピンド
ル軸212に取り付けられた8枚の磁気ディスク210
と、該磁気ディスク210の両面に配置された15個の
データヘッド200及び1個のサーボヘッド202と、
前記ヘッド200及び202を円板半径方向に高速移動
する駆動源であるボイスコイルモータ220と、前記サ
ーボヘッド202から読み出されるサーボデータに基づ
いてボイスコイルモータ220にデータヘッド200の
位置決め動作を指示するボイスコイルモータ制御回路2
11と、該データヘッド200によって磁気ディスク2
10にデータの記録再生を行なうリード/ライト回路2
13と、該リード/ライト回路213を介して上位装置
等とデータのやり取りを行なうインターフェース回路2
23とから構成される。
<Third Embodiment> A magnetic disk device according to another embodiment of the present invention will be described with reference to FIG. FIG. 7 is a diagram showing the overall configuration of the magnetic disk device according to the present embodiment. This device has a spindle shaft 212 rotated at a high speed by a built-in spindle motor 214 and eight magnetic disks mounted on the spindle shaft 212. 210
And fifteen data heads 200 and one servo head 202 arranged on both sides of the magnetic disk 210,
A voice coil motor 220, which is a drive source for moving the heads 200 and 202 in the radial direction of the disk at a high speed, and a voice coil motor 220 is instructed to perform a positioning operation of the data head 200 based on servo data read from the servo head 202. Voice coil motor control circuit 2
11 and the magnetic disk 2 by the data head 200
Read / write circuit 2 for recording / reproducing data to / from 10
13 and an interface circuit 2 for exchanging data with a higher-level device or the like via the read / write circuit 213.
And 23.

【0024】本実施例によるデータヘッド200及びサ
ーボヘッド202は磁気抵抗効果型ヘッドを含む薄膜磁
気ヘッドアッセンブリーであり、この磁気抵抗効果型ヘ
ッドは、前記図2乃至図4を参照した第1の実施例の如
く、磁気抵抗効果型素子に接続される電極の後端部分を
ショットキーダイオード及び金線を介して互に連結し、
このショットキーダイオードが磁気抵抗効果型ヘッドの
所定の駆動電力の場合には通電せず、所定値以上の電力
が瞬時に印加されたときに導通して各電極の後端部分を
短絡する保護回路を備えている。
The data head 200 and the servo head 202 according to this embodiment are a thin film magnetic head assembly including a magnetoresistive head. The magnetoresistive head is the first embodiment with reference to FIGS. 2 to 4. As in the example, the rear end portions of the electrodes connected to the magnetoresistive element are connected to each other via a Schottky diode and a gold wire,
When the Schottky diode has a predetermined drive power for the magnetoresistive head, the Schottky diode is not energized. When a power more than a predetermined value is instantaneously applied, the Schottky diode conducts to short-circuit the rear end of each electrode. Is equipped with.

【0025】従ってこの様に構成された磁気ディスク装
置は、装置駆動時において前記データヘッド200及び
サーボヘッド202の磁気抵抗効果型ヘッドが磁気ディ
スク210に接続して通電し、その電位差等によって磁
気抵抗効果型ヘッドに所定駆動電流を越える過電流が印
加された場合、前述の実施例同様に該素子の電極後端に
接続されたショットキーダイオードを含む保護回路が通
電して磁気抵抗効果型素子に過電流が印加されることを
阻止して磁気抵抗効果型素子の破損を防止することがで
きる。
Therefore, in the magnetic disk device constructed as described above, the magnetoresistive heads of the data head 200 and the servo head 202 are connected to the magnetic disk 210 to energize when the device is driven, and the magnetic resistance is caused by the potential difference or the like. When an overcurrent exceeding a predetermined drive current is applied to the effect type head, a protection circuit including a Schottky diode connected to the rear end of the electrode of the element is energized and the magnetoresistive effect element is applied to the magnetoresistive effect element. It is possible to prevent application of overcurrent and prevent damage to the magnetoresistive element.

【0026】この様に本実施例による磁気ディスク装置
は、磁気抵抗効果型ヘッドに過電流印加時に導通する保
護回路を設けたことによって装置実装駆動状態において
磁気抵抗効果型ヘッドの破損を防止することができる。
また保護回路を磁気抵抗効果型ヘッドに配置したことに
よりリ−ド/ライト回路に特別な静電気破壊防止回路を
付加することなく設計でき、装置全体としてコストダウ
ンを図ることができる。尚、本実施例においては磁気抵
抗効果型ヘッドの電極が相互接続されるショットキーダ
イオード及び金線から成る保護回路を用いる例を説明し
たが、本発明はこれに限られるものではなく例えば双方
向ダイオードあるいはコンデンサ−等の双方向過電流が
印加された場合のみに通電する素子を使用することによ
っても実現することができる。また本発明は、磁気ディ
スク装置に限られることなく例えば磁気テープ記憶装置
等の他の磁気記録装置にも適用することができる。
As described above, in the magnetic disk device according to the present embodiment, the magnetoresistive head is provided with the protection circuit that conducts when an overcurrent is applied, so that the magnetoresistive head is prevented from being damaged in the drive state of mounting the device. You can
Further, by disposing the protection circuit in the magnetoresistive head, the read / write circuit can be designed without adding a special electrostatic breakdown prevention circuit, and the cost of the entire apparatus can be reduced. In the present embodiment, the example of using the protection circuit composed of the Schottky diode and the gold wire in which the electrodes of the magnetoresistive head are interconnected has been described, but the present invention is not limited to this and, for example, bidirectional It can also be realized by using an element such as a diode or a capacitor that conducts electricity only when a bidirectional overcurrent is applied. Further, the present invention is not limited to the magnetic disk device and can be applied to other magnetic recording devices such as a magnetic tape storage device.

【0027】[0027]

【発明の効果】以上述べた如く本発明による磁気抵抗効
果型ヘッドは、保護回路が電極に所定値以上の電流が印
加された場合に一対の電極間を短絡することにより、磁
気抵抗効果型素子に過電流が印加されるのを阻止して磁
気抵抗効果型ヘッドの破損を防止することができる。こ
れにより製造工程におけるウエハー段階における歩留を
向上することができる。
As described above, in the magnetoresistive head according to the present invention, the protective circuit short-circuits the pair of electrodes when a current of a predetermined value or more is applied to the electrodes. It is possible to prevent overcurrent from being applied to the head and prevent damage to the magnetoresistive head. As a result, the yield at the wafer stage in the manufacturing process can be improved.

【0028】また本発明による磁気抵抗効果型ヘッドの
検査装置は、保護回路が磁気抵抗効果素子の電極に接触
させる一対の探針に所定値以上の電流が印加された場
合、前記電極間を短絡又は接地することによって、磁気
抵抗効果型素子に過電流が印加されるのを阻止して検査
時における磁気抵抗効果型ヘッドの破損を防止すること
ができる。これにより検査工程における破損を防止して
歩留を向上することができる。
Further, in the magneto-resistance effect type head inspection apparatus according to the present invention, when a current of a predetermined value or more is applied to the pair of probes which the protection circuit contacts the electrodes of the magneto-resistance effect element, the electrodes are short-circuited. Alternatively, grounding can prevent an overcurrent from being applied to the magnetoresistive effect element and prevent damage to the magnetoresistive effect head during inspection. As a result, damage in the inspection process can be prevented and the yield can be improved.

【0029】更に本発明による磁気抵抗効果型ヘッドを
備える磁気記録装置は、磁気抵抗効果型ヘッドの保護回
路が一対の電極に所定値以上の電流が印加された場合に
前記一対の電極間を短絡することによって、例えばヘッ
ドと磁気記録媒体の接触による電位差に起因する過電流
が磁気抵抗効果型ヘッドに印加されるのを阻止して磁気
抵抗効果型ヘッドの破損を防止することができる。
Further, in the magnetic recording apparatus having the magnetoresistive head according to the present invention, the protection circuit of the magnetoresistive head short-circuits the pair of electrodes when a current of a predetermined value or more is applied to the pair of electrodes. By doing so, for example, it is possible to prevent an overcurrent resulting from a potential difference due to contact between the head and the magnetic recording medium from being applied to the magnetoresistive head, and prevent damage to the magnetoresistive head.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による磁気抵抗効果型ヘッドの電圧−電
流特性を説明するための図。
FIG. 1 is a diagram for explaining voltage-current characteristics of a magnetoresistive head according to the present invention.

【図2】本発明による磁気抵抗効果型ヘッドを含む薄膜
磁気ヘッドアッセンブリーの部分拡大分解斜視図。
FIG. 2 is a partially enlarged exploded perspective view of a thin film magnetic head assembly including a magnetoresistive head according to the present invention.

【図3】図2における磁気抵抗効果型ヘッドの斜視図。3 is a perspective view of the magnetoresistive head shown in FIG.

【図4】図3に示す磁気抵抗効果型ヘッドのA−A断面
図。
FIG. 4 is a cross-sectional view taken along the line AA of the magnetoresistive head shown in FIG.

【図5】本発明による検査装置の対象となる薄膜磁気ヘ
ッドアッセンブリーの全体概略構成を示す図。
FIG. 5 is a diagram showing an overall schematic configuration of a thin film magnetic head assembly which is a target of the inspection apparatus according to the present invention.

【図6】図5に示す磁気ヘッドアッセンブリーの抵抗値
等の検査を行なう検査装置を説明するための図。
6 is a diagram for explaining an inspection device for inspecting the resistance value and the like of the magnetic head assembly shown in FIG.

【図7】本発明による磁気記録装置の一実施例を示す
図。
FIG. 7 is a diagram showing an embodiment of a magnetic recording device according to the present invention.

【符号の説明】[Explanation of symbols]

1:セラミック系基板,20:記録専用薄膜磁気ヘッ
ド,30:下部シールド膜,40:再生専用磁気抵抗効
果型ヘッド,45:磁区制御膜,85:磁気抵抗効果素
子,100:ショットキーダイオード,110:電極,
120:金線,61:ショットキーダイオード,63:
探針,64:端子,65:抵抗測定部,200:データ
ヘッド,202:サーボヘッド,210:磁気ディス
ク,213:リード/ライト回路。
1: ceramic substrate, 20: thin film magnetic head for recording, 30: lower shield film, 40: magnetoresistive head for reproduction, 45: magnetic domain control film, 85: magnetoresistive effect element, 100: Schottky diode, 110 :electrode,
120: Gold wire, 61: Schottky diode, 63:
Probe, 64: terminal, 65: resistance measuring unit, 200: data head, 202: servo head, 210: magnetic disk, 213: read / write circuit.

フロントページの続き (72)発明者 椎木 一夫 神奈川県小田原市国府津2880番地 株式会 社日立製作所小田原工場内Front Page Continuation (72) Inventor Kazuo Shiiki 2880 Kozu, Odawara City, Kanagawa Stock Company Hitachi Ltd. Odawara Plant

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 磁気抵抗効果型素子及び該磁気抵抗効果
素子に所定値電流を印加して抵抗変化を電圧変化で読み
取るための一対の電極とを備える磁気抵抗効果型ヘッド
において、前記一対の電極に所定値以上の電流が印加さ
れた場合に前記一対の電極間を短絡する保護回路を設け
たことを特徴とする磁気抵抗効果型ヘッド。
1. A magnetoresistive head comprising: a magnetoresistive effect element; and a pair of electrodes for reading a resistance change by a voltage change by applying a current of a predetermined value to the magnetoresistive effect element. A magnetoresistive head having a protection circuit for short-circuiting the pair of electrodes when a current of a predetermined value or more is applied to the head.
【請求項2】 磁気抵抗効果型素子及び該磁気抵抗効果
素子に所定値電流を印加して抵抗変化を電圧変化で読み
取るための一対の電極とを備える磁気抵抗効果型ヘッド
の電極に一対の探針を接触させて抵抗値の測定を行なう
磁気抵抗効果型ヘッドの検査装置において、前記一対の
探針に所定値以上の電流が印加された場合に前記一対の
電極間を短絡するか或いは接地する保護回路を設けたこ
とを特徴とする磁気抵抗効果型ヘッドの検査装置。
2. A pair of electrodes for a magnetoresistive head including a magnetoresistive element and a pair of electrodes for reading a resistance change by a voltage change by applying a current of a predetermined value to the magnetoresistive element. In a magnetoresistive head inspection device that measures resistance by contacting a needle, short-circuit or ground the pair of electrodes when a current of a predetermined value or more is applied to the pair of probes. An inspection device for a magnetoresistive head, which is provided with a protection circuit.
【請求項3】 磁気抵抗効果型素子及び該磁気抵抗効
果素子に所定値電流を印加して抵抗変化を電圧変化で読
み取るための一対の電極とを備える磁気抵抗効果型ヘッ
ドと、データを記録した磁気記録媒体と、該磁気抵抗効
果型ヘッドにより磁気記録媒体からデータを再生するデ
ータ再生回路とを備える磁気記憶装置において、前記磁
気抵抗効果型ヘッドが前記一対の電極に所定値以上の電
流が印加された場合に前記一対の電極間を短絡する保護
回路を備えたことを特徴とする磁気記憶装置。
3. A magnetoresistive head including a magnetoresistive element and a pair of electrodes for reading a resistance change by a voltage change by applying a current of a predetermined value to the magnetoresistive element, and recording data. In a magnetic storage device comprising a magnetic recording medium and a data reproducing circuit for reproducing data from the magnetic recording medium by the magnetoresistive head, the magnetoresistive head applies a current of a predetermined value or more to the pair of electrodes. A magnetic storage device comprising a protection circuit that short-circuits the pair of electrodes when exposed.
JP21689092A 1992-08-14 1992-08-14 Magneto-resistance effect type head, inspection device for magneto-resistance effect type head and magnetic storage device mounting magneto-resistance effect type head Pending JPH0660338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21689092A JPH0660338A (en) 1992-08-14 1992-08-14 Magneto-resistance effect type head, inspection device for magneto-resistance effect type head and magnetic storage device mounting magneto-resistance effect type head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21689092A JPH0660338A (en) 1992-08-14 1992-08-14 Magneto-resistance effect type head, inspection device for magneto-resistance effect type head and magnetic storage device mounting magneto-resistance effect type head

Publications (1)

Publication Number Publication Date
JPH0660338A true JPH0660338A (en) 1994-03-04

Family

ID=16695518

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPH0660338A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0651375A1 (en) * 1993-10-29 1995-05-03 International Business Machines Corporation Magnetoresistive head
EP0867864A2 (en) * 1997-03-24 1998-09-30 TDK Corporation Magnetic head with spin valve effect magnetoresistive element and its manufacturing method
US5903415A (en) * 1997-12-11 1999-05-11 International Business Machines Corporation AP pinned spin valve sensor with pinning layer reset and ESD protection
US6721140B2 (en) 2000-11-22 2004-04-13 Tdk Corporation Magnetoresistive device and method of manufacturing same and thin-film magnetic head and method of manufacturing same
WO2004097808A1 (en) * 2003-04-28 2004-11-11 Hitachi, Ltd. Magnetic head wafer and composite magnetic head manufacturing method
KR100510449B1 (en) * 1998-01-15 2005-11-01 삼성전자주식회사 Electrostatic damage preventing circuit

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0651375A1 (en) * 1993-10-29 1995-05-03 International Business Machines Corporation Magnetoresistive head
EP0867864A2 (en) * 1997-03-24 1998-09-30 TDK Corporation Magnetic head with spin valve effect magnetoresistive element and its manufacturing method
EP0867864A3 (en) * 1997-03-24 1999-03-17 TDK Corporation Magnetic head with spin valve effect magnetoresistive element and its manufacturing method
US5903415A (en) * 1997-12-11 1999-05-11 International Business Machines Corporation AP pinned spin valve sensor with pinning layer reset and ESD protection
KR100510449B1 (en) * 1998-01-15 2005-11-01 삼성전자주식회사 Electrostatic damage preventing circuit
US6721140B2 (en) 2000-11-22 2004-04-13 Tdk Corporation Magnetoresistive device and method of manufacturing same and thin-film magnetic head and method of manufacturing same
WO2004097808A1 (en) * 2003-04-28 2004-11-11 Hitachi, Ltd. Magnetic head wafer and composite magnetic head manufacturing method

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