JPH0658739B2 - How to make a magnetic recording medium - Google Patents

How to make a magnetic recording medium

Info

Publication number
JPH0658739B2
JPH0658739B2 JP23757883A JP23757883A JPH0658739B2 JP H0658739 B2 JPH0658739 B2 JP H0658739B2 JP 23757883 A JP23757883 A JP 23757883A JP 23757883 A JP23757883 A JP 23757883A JP H0658739 B2 JPH0658739 B2 JP H0658739B2
Authority
JP
Japan
Prior art keywords
substrate
film
medium
magnetic recording
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP23757883A
Other languages
Japanese (ja)
Other versions
JPS60129931A (en
Inventor
明 青山
守 杉本
聡 根橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP23757883A priority Critical patent/JPH0658739B2/en
Publication of JPS60129931A publication Critical patent/JPS60129931A/en
Publication of JPH0658739B2 publication Critical patent/JPH0658739B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Description

【発明の詳細な説明】 〔技術分野〕 本発明は、高分子成形物基板上へ磁気記録面に対して垂
直方向に磁化容易軸を持つ垂直磁気記録媒体を作成する
方法に関する。
TECHNICAL FIELD The present invention relates to a method for producing a perpendicular magnetic recording medium having an easy axis of magnetization in a direction perpendicular to a magnetic recording surface on a polymer molding substrate.

〔従来技術〕 従来、高分子成形物基板上への垂直磁気記録媒体の製造
方法として、蒸着・スパツタ等の薄膜製造技術が用いら
れてきた。蒸着・スパツタで垂直磁気記録媒体を製造す
る場合、出来るだけ基板温度を高温にすれば磁気特性上
良好な垂直磁気記録媒体が得られ、しかも磁性膜の密着
強度の向上が計られた。しかしながら、これら蒸着・ス
パツタ法は、真空中で高エネルギーの金属原子を基板に
衝突させることで磁性膜を形成するため、基板はさらに
高温になる。つまり、溶融あるいは昇華あるいは分解温
度を持つ高分子成形物基板では、無制限に基板温度を高
くすることはできず、通常これら溶融・昇華・分解温度
より100℃程度低い温度が上限である。
[Prior Art] Conventionally, thin film manufacturing techniques such as vapor deposition and sputtering have been used as a method for manufacturing a perpendicular magnetic recording medium on a polymer molded product substrate. When manufacturing a perpendicular magnetic recording medium by vapor deposition / sputtering, the perpendicular magnetic recording medium having good magnetic characteristics was obtained by raising the substrate temperature as high as possible, and the adhesion strength of the magnetic film was improved. However, these vapor deposition / sputtering methods form a magnetic film by colliding high-energy metal atoms with a substrate in a vacuum, so that the temperature of the substrate becomes higher. That is, in the case of a polymer molded product substrate having a melting, sublimation, or decomposition temperature, the substrate temperature cannot be increased indefinitely, and the upper limit is usually about 100 ° C. lower than the melting, sublimation, or decomposition temperature.

ところが、高分子成形物基板には、組成中に未反応の単
量体や低重合度の重合体(以下、オリゴマーと呼ぶ)が
必ず含まれているため、高温に保持した時、このオリゴ
マーが基板表面に析出し、その上に軟磁性膜(パーマロ
イ・CoTi・CoTa・CoZrNb等)や垂直磁化膜(CoCr,C
oW,CoMo,CoV等)を作成した場合、基板表面のオリゴ
マーの悪影響、つまり凹凸により膜そのものにも凹凸が
生じるため、媒体−ヘツド間のヘツドタツチが悪くなり
再生出力の劣化が生じる。又、この凹凸により軟磁性膜
は磁壁のピンニングをうけ磁気特性の劣化が生じる。さ
らに回転する媒体上の凸部は、ヘツドとの衝突部分を作
るため、媒体へのキズ・膜ハゲの原因になり耐久性の非
常な劣化となる。そしてこの凹凸によるヘツドタツチの
不安定は、媒体からの磁束のヘツドへの吸収の不安定要
因ともなり、エンベローブ特性の著しい劣化・記録密度
特性D50の劣化etc.はなはだしい悪影響を及ぼすもので
あった。
However, since the polymer molded product substrate always contains unreacted monomers and low-polymerization degree polymers (hereinafter referred to as oligomers) in its composition, these oligomers are deposited on the substrate surface, the soft magnetic film (permalloy · C o T i · C o T a · C o Z r Nb , etc.) or a perpendicular magnetization film formed thereon (C o C r, C
o W, C o Mo , C o V, etc.), the bad influence of the oligomer on the substrate surface, that is, the unevenness also causes unevenness on the film itself, resulting in poor head touch between the media and the head and deterioration of the reproduction output. Occurs. Further, due to the unevenness, the soft magnetic film undergoes the pinning of the domain wall and the magnetic characteristics are deteriorated. Further, since the convex portion on the rotating medium creates a collision portion with the head, it causes scratches and film baldness on the medium, resulting in extremely deteriorated durability. The instability of the head touch due to the unevenness also becomes an unstable factor of the absorption of the magnetic flux from the medium into the head, and the envelope characteristics are remarkably deteriorated and the recording density characteristics D 50 are deteriorated.

従来は、膜形成した後オリゴマーによる凹凸を無くすた
め、バフ研磨によって突起を削って平滑度を向上させて
いたが、膜の連続性を損うのみか、摩耗粉でさらに膜面
を傷つけるという欠点を有していた。
In the past, in order to eliminate irregularities due to oligomers after forming a film, buffing was used to scrape the protrusions to improve the smoothness, but the drawback is that not only the continuity of the film is impaired, but the film surface is further damaged by abrasion powder Had.

そこで、高分子成形物基板へ直接スパツタ・蒸着等する
前に、高分子成形物基板を前記基板の溶融あるいは昇華
あるいは分解の温度以下で熱処理を行ない、前記基板に
析出したオリゴマーを溶剤で洗浄した後、磁性層を形成
し凹凸の非常に少ない磁気記録媒体を作成していた。し
かしながら、このオリゴマーを溶剤で洗浄した基板に
は、オリゴマーの析出跡が出来てしまい、オリゴマーに
よる凸部は無くなったものの逆に析出跡による凹部が増
加するという難点があった。
Therefore, before directly sputtering or vapor deposition on the polymer molded product substrate, the polymer molded product substrate is heat-treated at a temperature below the melting, sublimation or decomposition of the substrate, and the oligomer deposited on the substrate is washed with a solvent. After that, a magnetic layer was formed to produce a magnetic recording medium having very few irregularities. However, there is a problem in that oligomer-deposited traces are formed on the substrate obtained by washing the oligomer with a solvent, and the protrusions due to the oligomer are eliminated, but concavities due to the deposition traces are increased.

尚、このオリゴマーは、高分子成形物基板を製造するた
めに製法上避けられないばかりでなく、フイルムに加工
する際の延伸性の付与のため意識的に含まれているもの
である。
It should be noted that this oligomer is not only inevitable in the production method for producing a polymer molded article substrate, but is also intentionally included for imparting stretchability when it is processed into a film.

〔目的〕〔Purpose〕

本発明は上記の点に鑑み、膜形成前に全ての面で悪影響
を及ぼすオリゴマーを除去し、平滑性・磁気特性・耐久
性・再生出力・エンベロープ特性・記録密度特性等の優
れた垂直磁気記録媒体を得ることを目的とするものであ
る。
In view of the above points, the present invention eliminates oligomers that adversely affect all surfaces before film formation, and provides excellent perpendicular magnetic recording such as smoothness, magnetic characteristics, durability, reproduction output, envelope characteristics, and recording density characteristics. The purpose is to obtain a medium.

〔概要〕〔Overview〕

本発明は、垂直磁気記録媒体において、前記媒体の高分
子成形物基板を溶剤に浸した後、前記基板を前記基板の
溶融あるいは昇華あるいは分解の温度以下で熱処理を行
ない、前記基板表面に析出したオリゴマーを除去した
後、磁性層を形成し凹凸の極めて少ない磁気記録媒体を
作成しようというものである。
According to the present invention, in a perpendicular magnetic recording medium, a polymer molded product substrate of the medium is immersed in a solvent, and then the substrate is subjected to heat treatment at a temperature not higher than melting, sublimation or decomposition of the substrate to deposit on the substrate surface. After removing the oligomer, a magnetic layer is formed to produce a magnetic recording medium having extremely few irregularities.

〔実施例〕〔Example〕

以下、図・表とともに本発明の実施例について述べる。 Examples of the present invention will be described below with reference to the drawings and tables.

本実施例として、高分子成形物基板にはPET(ポリエ
チレンテレフタラート)を用い、溶剤としてアセトンを
用いた。この溶剤は他にトリクレン・キシレン等を使用
してもよい。第1図は本発明の媒体作成のための工程の
流れ図である。まずPETをアセトンに浸す、次に前記
PETを180℃1時間恒温槽内へ入れておき、残ったオ
リゴマーを析出させ、再度前記PETをアセトンに浸
す、さらにPET上にアセトンの蒸発残りを無くすため
アルコールに浸す、その後PET上に残ったアアルコー
ルを吹きつけ窒素にて吹き飛ばし、スパツタ装置内にP
ETをセツトし、その上に軟磁性膜としてCoTi、垂直磁
化膜としてCoCr膜を基板温度150℃でスパツタした。
第2図の(a)は本発明によって出来た垂直磁気記録媒体
であり、1はオリゴマーを析出した後アセトン処理をし
たPET,2はCoTi軟磁性膜0.5μm,3はCoCr垂直
磁化膜0.5μmである。第2図の(b)は従来法の媒体
である。つまりPETを熱処理し、オリゴマーを析出さ
せアセトンで洗浄した後、スパツタしたものである。4
はPET,2はCoTi膜、3はCoCr膜、5はオリゴマーの
アセトン洗浄による抜け跡である。尚、本発明、従来法
による媒体とも基板温度は150℃でスパツタしてあ
る。表1に上記媒体の表面荒さを示す。
In this example, PET (polyethylene terephthalate) was used for the polymer molded product substrate, and acetone was used as the solvent. Other than this, trichlene, xylene, etc. may be used. FIG. 1 is a flow chart of steps for producing a medium of the present invention. First, soak PET in acetone, then put the PET in a constant temperature bath at 180 ° C. for 1 hour to precipitate the remaining oligomers, soak the PET in acetone again, and to eliminate the evaporation residue of acetone on PET. Immerse in alcohol, then blow the alcohol remaining on the PET and blow it off with nitrogen, and put P in the sputter device.
And excisional the ET, C o T i as a soft magnetic film thereon, and the C o C r film sputtered at a substrate temperature of 0.99 ° C. as a vertical magnetization film.
Of FIG. 2 (a) is a perpendicular magnetic recording medium made by the present invention, 1 to the acetone treatment was precipitated oligomer PET, 2 is C o T i soft magnetic film 0.5 [mu] m, 3 is C o The C r perpendicular magnetization film is 0.5 μm. FIG. 2 (b) shows a conventional medium. That is, PET was heat-treated to precipitate oligomers, washed with acetone, and then sputtered. Four
Is PET, 2 is a Co Ti film, 3 is a Co Cr film, and 5 is a trace of oligomers removed by acetone washing. The substrate temperature of both the medium of the present invention and the medium of the conventional method is 150 ° C. Table 1 shows the surface roughness of the medium.

これら第2図、表1から明らかなように本発明による媒
体の表面性は従来法から比較して、非常に平滑であるこ
とがわかる。また表2に磁気特性を示す。
As is apparent from FIG. 2 and Table 1, the surface properties of the medium according to the present invention are very smooth as compared with the conventional method. Table 2 shows the magnetic characteristics.

これからも、わかるように本発明による媒体は垂直磁化
膜として良い特性を示している。次に第3図・第4図で
再生出力・記録密度特性・エンベロープを示す。これら
はすべて媒体回転数300rpm.線速度2m/sヘツド主磁極
膜厚0.5μmで測定したものである。第3図は記録密
度特性で(a)が本発明による媒体、(b)が従来法による媒
体である。この第3図のデータを表3にまとめる。
As can be seen from the above, the medium according to the present invention exhibits good characteristics as a perpendicular magnetization film. Next, FIGS. 3 and 4 show reproduction output, recording density characteristics, and envelope. All of these were measured at a medium rotation speed of 300 rpm and a linear velocity of 2 m / s and a head main magnetic pole film thickness of 0.5 μm. FIG. 3 shows recording density characteristics, (a) shows the medium according to the present invention, and (b) shows the medium according to the conventional method. The data in FIG. 3 are summarized in Table 3.

これら第3図・表3からわかるように再生出力では、本
発明媒体は2倍の出力が出ている、また、出力が半分に
なる記録密度D50も40%近く伸びている。第4図はエン
ベロープ特性を示す。(a)は本発明媒体、(b)は従来法媒
体である。このエンベロープは記録密度が5KBPIのもの
である。本発明による媒体は非常に良いエンベロープ特
性を示している。一方従来法による媒体のエンベロープ
は再生出力にバラツキがある。
As can be seen from FIG. 3 and Table 3, the reproduction output of the medium of the present invention is doubled, and the recording density D 50 at which the output is halved is also increased by nearly 40%. FIG. 4 shows the envelope characteristic. (a) is the medium of the present invention, and (b) is the conventional method medium. This envelope has a recording density of 5 KBPI. The medium according to the invention exhibits very good envelope characteristics. On the other hand, the envelope of the medium according to the conventional method has variations in reproduction output.

〔効果〕〔effect〕

以上述べたごとく、本発明による垂直磁気記録媒体は従
来法に比較して、種々の効果がある。以下にその効果を
まとめる。
As described above, the perpendicular magnetic recording medium according to the present invention has various effects as compared with the conventional method. The effects are summarized below.

◎再生出力の向上 ◎記録密度特性の向上 ◎エンベロープ特性の向上 ◎磁気特性の向上 なお、本実施例では、高分子成形物基板としてPETを
使用したが、アラミド、ポリイミド等の耐熱高分子成形
物基板の場合でも本発明は有効である。又、本実施例に
使用した溶剤は、アセトン・トリクレン・キシレン等で
あるがこれらをアルコール類で希釈して用いても本発明
は有効である。さらに、上記溶剤を蒸気洗浄として用い
ても本発明は一層の効果がある。又、本実施例は軟磁性
膜としてCoTi・垂直磁化膜としてCoCr膜を使用したが、
これら以外の軟磁性膜(パーマロイ,スーパーマロイ,
CoTa,CoZrNb等)・垂直磁化膜(CoW,CoV等)でも本発
明は有効である。さらに、2層膜媒体以外にCoCr単層で
も有効であり、Ba-Ferrite塗布型垂直磁化膜にも有効と
なるものである。また、本実施例は、フロツピー用媒体
として作成したが、16mmVTR用テープ・8mmVTR用
テープ・オーデイオ用テープとしても同様の効果を発揮
する。
◎ Improvement of reproduction output ◎ Improvement of recording density characteristic ◎ Improvement of envelope characteristic ◎ Improvement of magnetic characteristic In this example, PET was used as the polymer molded article substrate, but a heat resistant polymer molded article such as aramid or polyimide was used. The present invention is effective even in the case of a substrate. Further, the solvent used in this example is acetone, trichlene, xylene and the like, but the present invention is effective even if these are diluted with alcohols. Furthermore, even if the above solvent is used for steam cleaning, the present invention has further effects. Further, in this embodiment, the Co T i film was used as the soft magnetic film, and the Co C r film was used as the perpendicular magnetization film.
Other soft magnetic films (permalloy, supermalloy,
C o T a, C o Z r Nb , etc.), a perpendicular magnetic film (C o W, C o V, etc.) even present invention is effective. Furthermore, in addition to two-layer film medium is also effective in C o C r monolayer is made also effective in B a -F e rrite coating type perpendicular magnetic film. Further, although the present embodiment is prepared as a medium for floppy disk, the same effect can be obtained as a 16 mm VTR tape, 8 mm VTR tape, and audio tape.

尚、本実施例ではPETを恒温槽で180℃、1時間保
持しているが、温度は溶融・昇華・分解温度以下であれ
ば何度でもよく、また時間は保持温度、PETの種類・
PETの厚みで変わるものであり一概に言えない。
In this embodiment, PET is held in a constant temperature bath at 180 ° C. for 1 hour, but the temperature may be any temperature as long as it is below the melting / sublimation / decomposition temperature, and the time is the holding temperature and the type of PET.
This cannot be generally stated because it depends on the thickness of PET.

また、本実施例ではPETを恒温槽で熱処理することに
よりオリゴマーを析出させているが、真空中で熱処理を
すればオリゴマーの析出時間の短縮になる。また、本実
施例では析出したオリゴマーの除去に溶剤を用いている
が、超音波・紫外線照射・荷電粒子照射・オゾンによる
酸化も有効である。
Further, in this embodiment, the oligomer is precipitated by heat-treating PET in a constant temperature bath, but heat treatment in vacuum shortens the oligomer precipitation time. Further, in this example, the solvent is used for removing the precipitated oligomer, but ultrasonic waves, ultraviolet rays irradiation, charged particle irradiation, and oxidation by ozone are also effective.

【図面の簡単な説明】[Brief description of drawings]

第1図は、本発明による垂直磁気記録媒体の作成のため
の製造工程図である。第2図(a)(b)はそれぞれ本発明媒
体・従来法媒体の断面図である。第3図は記録密度特
性、第4図はエンベロープを示す。 1……熱処理する前にPETをアセトンに浸しその後熱
処理しオリゴマーを析出させた後、アセトン処理をした
PET。 2……CoTiスパツタ膜 3……CoCrスパツタ膜 4……PET(オリゴマーを析出させた後アセトン処理
をしたもの) 5……オリゴマーをアセトン処理した後の、オリゴマー
の抜け跡。 (a)……本発明による媒体 (b)……従来法による媒体
FIG. 1 is a manufacturing process diagram for producing a perpendicular magnetic recording medium according to the present invention. 2 (a) and 2 (b) are cross-sectional views of the medium of the present invention and the medium of the conventional method, respectively. FIG. 3 shows the recording density characteristic, and FIG. 4 shows the envelope. 1 ... PET which was soaked in acetone before heat treatment and then heat treated to precipitate oligomers, and then treated with acetone. 2 …… C o T i spatter film 3 …… C o C r sputter film 4 …… PET (those obtained by precipitating an oligomer and then treated with acetone) 5 …… A trace of the oligomer after the oligomer is treated with acetone . (a) ... medium according to the present invention (b) ... medium according to conventional method

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】磁気記録面に対して垂直方向に磁化容易軸
を持つ垂直磁気記録媒体において、前記媒体の高分子成
形物基板を前記基板から析出するオリゴマーを除去でき
る溶剤に浸した後、前記基板の溶融あるいは昇華あるい
は分解のいずれかの温度以下で前記基板の熱処理を行な
い、前記基板表面に析出したオリゴマーを除去した高分
子成形物基板上に磁性層を形成することを特徴とする磁
気記録媒体の作成方法。
1. In a perpendicular magnetic recording medium having an easy axis of magnetization perpendicular to the magnetic recording surface, a polymer molded product substrate of the medium is immersed in a solvent capable of removing oligomers precipitated from the substrate, Magnetic recording characterized in that the substrate is heat-treated at a temperature below melting, sublimation or decomposition of the substrate to form a magnetic layer on the polymer molded product substrate from which oligomers precipitated on the substrate surface are removed. How to make media.
JP23757883A 1983-12-16 1983-12-16 How to make a magnetic recording medium Expired - Lifetime JPH0658739B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23757883A JPH0658739B2 (en) 1983-12-16 1983-12-16 How to make a magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23757883A JPH0658739B2 (en) 1983-12-16 1983-12-16 How to make a magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS60129931A JPS60129931A (en) 1985-07-11
JPH0658739B2 true JPH0658739B2 (en) 1994-08-03

Family

ID=17017389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23757883A Expired - Lifetime JPH0658739B2 (en) 1983-12-16 1983-12-16 How to make a magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0658739B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0833983B2 (en) * 1986-09-01 1996-03-29 株式会社日立製作所 Magnetic recording media
US20070191745A1 (en) * 2003-12-30 2007-08-16 Una Tucker Massage device set

Also Published As

Publication number Publication date
JPS60129931A (en) 1985-07-11

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