JPH0658683B2 - Length measuring device - Google Patents
Length measuring deviceInfo
- Publication number
- JPH0658683B2 JPH0658683B2 JP59238989A JP23898984A JPH0658683B2 JP H0658683 B2 JPH0658683 B2 JP H0658683B2 JP 59238989 A JP59238989 A JP 59238989A JP 23898984 A JP23898984 A JP 23898984A JP H0658683 B2 JPH0658683 B2 JP H0658683B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- measurement
- measuring device
- length measuring
- contour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は測長装置に係り、輪郭の不明確な、かつ夾雑物
等の存在し得る物体の微小寸法を測定するに好適な測長
装置に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a length measuring device, and relates to a length measuring device suitable for measuring a minute size of an object having an unclear contour and capable of containing impurities and the like. .
微小な粒体または超ＬＳＩのパターンなどの粒径、及び
パターン巾等の測定に、光学顕微鏡または走査電子顕微
鏡等が用いられている。この像をテレビカメラ等では一
旦フレームメモリ上に記憶せしめ、前記巾、又は径に相
当する断面の強度分布、プロフイルをテレビモニタ上に
表示して、所望の巾等を算出する。しかし、この方法で
は測定箇所が不明で、時に誤つた測定を行つていても測
定者には判らない欠点があつた。An optical microscope, a scanning electron microscope, or the like is used to measure the grain size of a fine grain or a pattern of VLSI, the pattern width, and the like. This image is temporarily stored in a frame memory in a television camera or the like, and the intensity distribution of the cross section corresponding to the width or the diameter and the profile are displayed on the television monitor to calculate the desired width or the like. However, this method has a drawback that the measurement location is unknown and sometimes the measurement person does not understand even if incorrect measurement is performed.
本発明の目的は超ＬＳＩのレジストパターン、または鉄
鋼中の炭化物等の如く、輪郭の不明瞭な箇所のある非測
定物の寸法を計測するのに適した測長装置を提供するこ
とにある。An object of the present invention is to provide a length measuring device suitable for measuring the size of a non-measurement object such as a resist pattern of a VLSI or a carbide in steel having an unclear contour.
第１図は画像をフレームメモリ上にとり込む１例であ
る。１はテレビカメラ、２は光学顕微鏡筒、３は超ＬＳ
Ｉウエハの如き非測定物、４は顕微鏡のホルダで、像は
ＡＤ変換器５により、デジタル像としてフレーメモリ６
に記憶される。記憶された像はＤＡ変換器８を通してテ
レビモニタ９により表示される。第２図はレジストパタ
ーンの像、およびＸ−Ｘ′の線で切つた断面の強度分布
とする。このパターンの巾を測定するに、頂部の巾Ａ、
分布の変曲点の巾Ｂ、またはある強度のしきい値の巾Ｃ
の何れかをとることが通常行われている。ところがレジ
ストの輪郭は第２図に示すように、陥没した欠陥もしく
は、エツチング残渣などが突起として存在し、ある判定
条件ではパターン巾の開始点と誤認せしめることが多
い。本発明になる測定の１例を第３図に示す。FIG. 1 shows an example of loading an image on a frame memory. 1 is a TV camera, 2 is an optical microscope tube, 3 is a super LS
A non-measurement object such as an I-wafer, 4 is a holder for a microscope, and an image is obtained by the AD converter 5 as a digital image in the frame memory 6
Memorized in. The stored image is displayed on the television monitor 9 through the DA converter 8. FIG. 2 shows the image of the resist pattern and the intensity distribution of the cross section cut along the line XX '. To measure the width of this pattern, the top width A,
Width B of the inflection point of the distribution, or width C of the threshold of certain intensity
It is usually performed to take either of the above. However, as shown in FIG. 2, the contour of the resist has a dented defect, an etching residue, or the like as a projection, which is often mistaken as a starting point of the pattern width under a certain judgment condition. An example of the measurement according to the present invention is shown in FIG.
レジストパターンはＸ及びＹの４本のカーソル線で囲ま
れた範囲を測定対象とする。カーソルはキーボード10よ
りコンピュータ11を経て、制御される。キーボードはた
とえば第５図に示すようなもので、Ｘ，Ｙ４本のカーソ
ルが自由に動くようになつている。カーソル制御用のキ
ーボードからの入力があると、コンピユータ１１はカー
ソル表示用メモリ７に書かれているデータを変更する。
カーソル表示用メモリの内容はＤＡ変換器８を通して通
常モニタ９上に表示される。つまり、像とカーソルは同
時にモニタ９上に表示される。パタンの巾の測長は上よ
り、カーソル線Ｘ１Ｘ２で挾さまれた範囲を等分に分割
された箇所が測長される。カーソル線Ｙ１Ｙ２を基準と
してパターンまでの長さを測定する。その際、水平走査
線と画像輪郭との交点を測長の開始点および終点、つま
りパターン検出点として、図の如く、像の輪郭に重ねて
表示すれば、前記の陥没した点Ｄ．Ｆ、夾雑物Ｅ等の障
害を容易に識別でき、また周辺の強度が不明瞭で、パタ
ーンの輪郭ではしきい値に達しない部分、たとえばＦな
どを避けることができる。The resist pattern is measured in a range surrounded by four X and Y cursor lines. The cursor is controlled by the keyboard 10 via the computer 11. The keyboard is, for example, as shown in FIG. 5, and four X, Y cursors can be freely moved. When there is an input from the cursor control keyboard, the computer 11 changes the data written in the cursor display memory 7.
The contents of the cursor display memory are normally displayed on the monitor 9 through the DA converter 8. That is, the image and the cursor are simultaneously displayed on the monitor 9. From the top, the width of the pattern is measured from the top, where the area sandwiched by the cursor lines X 1 X 2 is equally divided. The length to the pattern is measured with reference to the cursor lines Y 1 Y 2 . At this time, if the intersections of the horizontal scanning line and the image contour are displayed as the measurement start and end points, that is, the pattern detection points, by superimposing them on the image contour as shown in FIG. Obstacles such as F and contaminants E can be easily identified, and a portion where the strength of the periphery is unclear and the contour of the pattern does not reach the threshold, such as F, can be avoided.
第４図はこれを避けて測長した例である。カーソルＹ１
Ｙ２をパターンに接近せしめ、またＸ１Ｘ２のカーソル
によつて、欠陥部を避けることができ、精度のよい測長
が可能となる。FIG. 4 shows an example of length measurement avoiding this. Cursor Y 1
By making Y 2 close to the pattern and by using the cursor X 1 X 2 , it is possible to avoid a defective portion and to perform accurate length measurement.
なお、パターン測定の開始点や終点を測定点ないしは検
出点として像と重ね合せて表示するには、その地点の画
像データを最高輝度のデータに書き変えることによつて
実現できる。The start point and the end point of the pattern measurement can be displayed as a measurement point or a detection point in an overlapping manner with the image by rewriting the image data at that point into the data of the highest brightness.
本発明によれば測長の開始点、もしくは終点を両面の被
測定物周辺に重畳せしめることによつて、測定者が所望
の測定を行なつているか否かを確認でき、かつ、Ｘ及び
Ｙのカーソルによつて、測定精度を阻害する要因をとり
除くことができ、測長装置の使用上、実用に益するとこ
ろ大である。According to the present invention, it is possible to confirm whether or not the measurer is performing a desired measurement by superimposing the start point or the end point of the length measurement around the object to be measured on both sides, and X and Y With the cursor, it is possible to remove a factor that hinders the measurement accuracy, which is a great advantage in practical use of the length measuring device.
第１図は本発明にもとづく一実施例を示す測長装置のブ
ロツク図、第２図は従来例による測定例、第３図，第４
図は本発明の一実施例による測定例、第５図は第１図の
キーボードの一具体例である。 １……テレビカメラ、２……鏡筒、３……被測定物、４
……ホルダ、５……ＡＤ変換器、６……フレームメモ
リ、７……カーソル表示用メモリ、８……ＤＡ変換器、
９……モニタ部、１０……キーボード、１１……コンピ
ュータ。FIG. 1 is a block diagram of a length measuring apparatus showing an embodiment based on the present invention, and FIG. 2 is a measurement example according to a conventional example, FIGS.
FIG. 5 shows a measurement example according to an embodiment of the present invention, and FIG. 5 shows a specific example of the keyboard shown in FIG. 1 ... TV camera, 2 ... lens barrel, 3 ... DUT, 4
...... Holder, 5 ... AD converter, 6 ... Frame memory, 7 ... Cursor display memory, 8 ... DA converter,
9 ... Monitor section, 10 ... Keyboard, 11 ... Computer.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 片桐 信二郎 茨城県勝田市市毛1040番地 日立那珂精器 株式会社内 (56)参考文献 特開 昭57−4134（ＪＰ，Ａ) 特開 昭57−123477（ＪＰ，Ａ) 特開 昭55−122107（ＪＰ，Ａ) 特開 昭53−82244（ＪＰ，Ａ) 特開 昭55−908（ＪＰ，Ａ) 特開 昭55−109902（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shinjiro Katagiri 1040 Igemo, Katsuta-shi, Ibaraki Hitachi Naka Seiki Co., Ltd. (56) References JP 57-4134 (JP, A) JP 57- 123477 (JP, A) JP-A-55-122107 (JP, A) JP-A-53-82244 (JP, A) JP-A-55-908 (JP, A) JP-A-55-109902 (JP, A)
Claims (1)
ブラウン管を表示し、その画像上の所望箇所の距離を測
定する測長装置において、 ＸおよびＹのカーソル線をもって測定の範囲を制限する
手段と、 前記制限された範囲内において、測定しようとする画像
の輪郭と水平走査線との交点を自動的に検出する手段
と、 前記検出された交点を、測長の開始点および終点とし
て、測定しようとする画像の輪郭上に重畳して表示する
手段とを具備したことを特徴とする測長装置。1. A length measuring device for displaying an image stored in a frame memory on a monitor cathode ray tube and measuring a distance of a desired position on the image, and means for limiting the range of measurement with X and Y cursor lines. , Means for automatically detecting the intersection of the contour of the image to be measured and the horizontal scanning line within the limited range, and measuring the detected intersection as the measurement start point and end point And a means for displaying the image so as to be superimposed on the contour of the image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59238989A JPH0658683B2 (en) | 1984-11-12 | 1984-11-12 | Length measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59238989A JPH0658683B2 (en) | 1984-11-12 | 1984-11-12 | Length measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116606A JPS61116606A (en) | 1986-06-04 |
| JPH0658683B2 true JPH0658683B2 (en) | 1994-08-03 |
Family
ID=17038263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59238989A Expired - Lifetime JPH0658683B2 (en) | 1984-11-12 | 1984-11-12 | Length measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0658683B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6363907A (en) * | 1986-09-04 | 1988-03-22 | Tamuron:Kk | Non-contact type height measurement |
| FR2609551B1 (en) * | 1987-01-09 | 1991-09-20 | Cattarino Yvan | METHOD AND DEVICE FOR AUTOMATICALLY DETECTING AND MEASURING THE POSITION OF SHAPES OR SHADES OF AN IMAGE PROVIDED BY A VIDEO CAMERA |
| JPH01250806A (en) * | 1988-03-31 | 1989-10-05 | Nachi Fujikoshi Corp | Method and device for measuring width |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037949B2 (en) * | 1978-06-14 | 1985-08-29 | 株式会社東芝 | image display device |
| JPS55109902A (en) * | 1979-02-16 | 1980-08-23 | Hitachi Denshi Ltd | Oblique image pickup correction system of subject size measuring instrument |
| JPS55122107A (en) * | 1979-03-15 | 1980-09-19 | Hitachi Denshi Ltd | System for measuring dimension of photographic object |
-
1984
- 1984-11-12 JP JP59238989A patent/JPH0658683B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61116606A (en) | 1986-06-04 |
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