JPH0652195B2 - Infrared thermometer - Google Patents
Infrared thermometerInfo
- Publication number
- JPH0652195B2 JPH0652195B2 JP60078832A JP7883285A JPH0652195B2 JP H0652195 B2 JPH0652195 B2 JP H0652195B2 JP 60078832 A JP60078832 A JP 60078832A JP 7883285 A JP7883285 A JP 7883285A JP H0652195 B2 JPH0652195 B2 JP H0652195B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- filter
- thermometer
- sensor
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 12
- 230000005855 radiation Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000002074 melt spinning Methods 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0022—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は赤外線温度計に関する。更に詳しくは、高速で
走行する微小物体の温度を計測するための赤外線温度計
に関する。The present invention relates to an infrared thermometer. More specifically, the present invention relates to an infrared thermometer for measuring the temperature of a minute object traveling at high speed.
（従来技術） 走行物体の温度計測には、接触式の温度計及び非接触型
の赤外温度計が知られている。接触式のものは、低速で
熱容量が大なるものでは、接触による摩擦抵抗を消去し
て測定が可能であるが、熱容量の小さなもの、溶融状態
で変形するものなどは、パイプライン中などを除いて
又、移動速度が早く温度変化を生じるものなどは測定
が、不可能である。(Prior Art) A contact type thermometer and a non-contact type infrared thermometer are known for measuring the temperature of a moving object. For the contact type, if the speed is low and the heat capacity is large, it is possible to measure by eliminating the frictional resistance due to contact, but for those with a small heat capacity, those that deform in the molten state, etc., except in the pipeline, etc. In addition, it is impossible to measure a moving speed that causes a temperature change.
他方、赤外センサーを用いて物体の放射する赤外線量を
計測することにより温度を測定する公知の赤外線温度計
は、赤外線の発生量が大なるもの、対象物が大なるもの
では、±0.5℃以上の感度を有するか、対象物が微小
で、かつ放射赤外線量が著しく少ないものは、測定が困
難であり更に高速で移動する場合には測定が不可能であ
つた。On the other hand, known infrared thermometers that measure temperature by measuring the amount of infrared radiation emitted by an object using an infrared sensor have a large amount of infrared radiation, and a large target, ± 0.5 ° C. Those having the above-mentioned sensitivity, or having a minute object and a remarkably small amount of radiated infrared rays were difficult to measure, and could not be measured when moving at a higher speed.
（発明の目的） 本発明者らは、高速走行中の微小物体の温度を非接触で
計測する赤外線温度計を提供することを目的とする。(Object of the Invention) It is an object of the present inventors to provide an infrared thermometer that measures the temperature of a minute object during high-speed traveling without contact.
（問題点を解決するための手段） 本発明の構成は、計測部から出力部に向って順に、集光
レンズ(b)、コリメータ(c)、フィルタ(d)、ハーフミラ
ー(e)、スキャニングミラー(g)(g′)、センサ(i)
(i′)、アンプ(k)(k′)、マルチプレクサ(m)、演算回路
(o)を主要部として配設し、フィルタ(d)で波長２〜２５
μｍを選択的に検出し、スキャニングミラー(g)(g′)を
介して２現象のパターンをとらえ、センサ(i)(i′)、ア
ンプ(k)(k′)を介して必要な電気信号に変換し、マルチ
プレクサ(m)、演算回路(o)を介して被測定物体からの放
射赤外線エネルギーの検出と、放射物体の幅を補正する
機能が組み込まれていることを特徴とする赤外線温度計
である。(Means for Solving Problems) The configuration of the present invention has a condensing lens (b), a collimator (c), a filter (d), a half mirror (e), and a scanning unit in order from the measuring unit toward the output unit. Mirror (g) (g '), sensor (i)
(i ′), amplifier (k) (k ′), multiplexer (m), arithmetic circuit
(o) is arranged as a main part, and the wavelength is 2 to 25 with the filter (d).
μm is selectively detected, the patterns of two phenomena are captured through the scanning mirrors (g) (g ′), and the necessary electrical power is obtained through the sensors (i) (i ′) and amplifiers (k) (k ′). Infrared temperature, which has a function to convert the signal into a signal and detect the radiated infrared energy from the measured object via the multiplexer (m) and the arithmetic circuit (o) and to correct the width of the radiated object. It is total.
本発明は、微小赤外センサーを多数配列した検出部を有
する単に放射赤外線分布を可視化したものとは異なり対
象物体の形状を放射赤外線を２方向から走査しつつ検出
することで高速走行によるふれによって生じるぶれを補
正し、同時に合成パターンより形状を検知し、微小物体
においては、検出感度に応じた輻射率補正を行うこと
で、放射赤外線が微少でかつ高速走行する微小な対象物
体の温度を正確に測定することを可能とした。The present invention detects a shape of a target object while scanning the emitted infrared rays from two directions, unlike the one in which the emitted infrared rays distribution is visualized, which has a detection unit in which a large number of minute infrared sensors are arranged. By correcting the blurring that occurs and at the same time detecting the shape from the composite pattern, and correcting the emissivity of the micro object according to the detection sensitivity, the temperature of the micro object that emits very little infrared light and travels at high speed can be accurately measured. It was possible to measure.
以下に図をもって本発明の構成を詳述する。The configuration of the present invention will be described in detail below with reference to the drawings.
図−１は、本発明温度計の１実施態様を示す概略図であ
る。FIG. 1 is a schematic view showing one embodiment of the thermometer of the present invention.
図中(a)の高速走行中の糸条から放射される赤外線はレ
ンズ(b)を介してレンズ(c)でコリメートされフイルター
(d)で対象物体からの放射赤外線を選択検出する。フイ
ルターは特定波長のみを検出する。赤外域の波長の中で
特有の赤外吸収スペクトルから求められる吸収率の高い
波長２〜２５μｍで、相変化により吸収スペクトル強度
が変化しない波長、例えば、大部分の有機物がもつ、炭
素−水素（Ｃ−Ｈ）の結合が示す１３６０cm−１（１３
８０cm−１は、結晶性により変化するので好ましくな
い。）のみを選択することで対象物体を黒体に近似した
扱いとすることができる。このとき選択波長は、±0.2
μｍ以内の範囲に特定するフイルターを用いることで、
他の外乱を除去できるので好ましい。選択波長幅を広く
すると外乱が大きくなり、黒体に近似できなくなり、検
出精度が低下し、輻射率補正が問題となる。フイルター
は分割のため偏光フイルターが好ましい。フイルターで
選択された特定波長の放射赤外線は、ハーフミラー(e)
で２等分に分割されレンズ(f)及び(f′)を介して、モー
ター(h)，(h′)を介してミラー(g)，(g′)を互に逆転方
向に走査する。ミラーの走査速度は６０サイクル以上が
好ましい。Infrared rays emitted from the high-speed yarn in (a) in the figure are collimated by the lens (c) via the lens (b) and are filtered by the filter.
In step (d), infrared radiation emitted from the target object is selectively detected. The filter detects only specific wavelengths. A wavelength of 2 to 25 μm having a high absorptance obtained from a unique infrared absorption spectrum among wavelengths in the infrared region, and a wavelength at which the absorption spectrum intensity does not change due to a phase change, for example, carbon-hydrogen ( C-H) bond shows 1360 cm -1 (13
80 cm −1 is not preferable because it changes depending on crystallinity. ) Can be selected to treat the target object as a black body. At this time, the selected wavelength is ± 0.2
By using a filter that specifies within the range of μm,
This is preferable because it can remove other disturbances. When the selected wavelength width is widened, the disturbance becomes large, it becomes impossible to approximate a black body, the detection accuracy decreases, and emissivity correction becomes a problem. Since the filter is divided, a polarization filter is preferable. The infrared radiation of the specific wavelength selected by the filter is a half mirror (e).
The mirrors (g) and (g ') are scanned in the reverse direction through the lenses (f) and (f') and the motors (h) and (h '). The scanning speed of the mirror is preferably 60 cycles or more.
互いに逆転方向となるように走査するミラー(g)及び
(g′)で放射赤外線を集めセンサー(i)で検出する。Mirrors (g) that scan in opposite directions to each other and
Infrared radiation is collected at (g ') and detected by sensor (i).
ミラー(g)，(g′)の走査方向が互に逆転しているので、
糸ユレが生じていれば、走査方向が振れ方向と同じのと
きは、例えば(k)のアンプでは、図−２、Ｉ−Ａのイの
パターン、(k′)のアンプではロのパターンの２現象の
パターンがセンサー(i)及び(i′)よりインテグレーター
を通じて電気信号として出力される。Since the scanning directions of the mirrors (g) and (g ') are reversed,
If the yarn twist occurs, when the scanning direction is the same as the shake direction, for example, in the case of the amplifier of (k), the pattern of I-A in FIG. The patterns of the two phenomena are output as electric signals from the sensors (i) and (i ') through the integrator.
すなわち、図−２のＩ−Ａはｔｏからｔｉまで走査した
ときの放射線の検出強度パターンである。センサーは、
検出波長と必要応答速度及び感度のバランスから、適切
なものを選択する。本発明実施においては応答速度は、
中速（ msec）以上のものが好ましい。 That is, I-A in FIG. 2 is a radiation detection intensity pattern when scanning from to to ti. The sensor is
Select an appropriate one from the balance of detection wavelength, required response speed and sensitivity. In the present invention, the response speed is
A medium speed (msec) or higher is preferable.
センサーは、出力の安定性を保障するため必要に応じた
冷却を行うのが好ましい。又、センサーは、単体のもの
から、必要に応じ２次元的に集積されていてもよい。微
小な物体から、微小な放射赤外線を検出するためにはセ
ンサーはできるだけ微小化したものを用いるのが好まし
い。The sensor is preferably cooled as needed to ensure the stability of the output. Further, the sensor may be a single element and may be two-dimensionally integrated if necessary. In order to detect a minute emitted infrared ray from a minute object, it is preferable to use a sensor that is as small as possible.
センサーより出力される信号は、インテグレーター
(k)、(l)及び(k′)、(l′)を介して公知の方法で必要な
電気信号に変換されマルチプレクサー(m)で２現象を交
互にＡＤコンバーター(n)を介して又はＡＤコンバータ
ーを介して、コンピユーターに一担記憶させ演算回路
(o)に入力され、図−２ Ｉ−Ａの２現象をＩ−Ｂの合
成パターンに変換し、このパターンから糸径(D)は走査
速度と視野幅との相対値から求められ、温度は、検出し
たピーク出力(H)（黒体基準器で交正した変換係数を介
して）から求められる。The signal output from the sensor is the integrator.
Through (k), (l) and (k '), (l') are converted into necessary electric signals by a known method, and two phenomena are alternately performed by a multiplexer (m) through an AD converter (n). Or, via an AD converter, a computer is responsible for storing and computing circuits.
It is input to (o) and the two phenomena of IA in Fig. 2 are converted into a composite pattern of IB. From this pattern, the yarn diameter (D) is calculated from the relative value of the scanning speed and the field width, and the temperature Is calculated from the detected peak output (H) (via the conversion factor corrected by the blackbody standard).
インテグレーターを構成するアンプは、可能な限り高性
能なものを使用するのが好ましく、ＡＤコンバーターも
処理速度の早い（μsec以下）容量の大きいもの（少な
くとも１６ビット以上のもの）が好ましい。It is preferable to use an amplifier having a high performance as much as possible as an amplifier constituting the integrator, and an AD converter having a high processing speed (μsec or less) and a large capacity (at least 16 bits or more) is also preferable.
検出された糸径Ｄが、微小なためセンサーの検出感度か
ら、校正された補正が必要な経ＤＬ以下であれば、糸径
が仮定ＤＬあったものとして増幅処理を演算回路で補正
して出力Ｈ″を求めるようにすることで瞬間的につかま
えた現象でも実質的には補正した温度として検出するこ
とができる。ここで糸径が著しく小さい（例えば、ＤＬ
の1/2以下）場合であっても糸ユレがなく再現性が保障
できるときは補正が可能である。If the detected yarn diameter D is so small that it is equal to or less than the warp DL that requires calibrated correction from the detection sensitivity of the sensor, the yarn diameter is assumed to be DL and the amplification processing is corrected by the arithmetic circuit and output. By obtaining H ″, it is possible to detect even a phenomenon caught momentarily as the temperature substantially corrected. Here, the yarn diameter is extremely small (for example, DL
Even if it is less than 1/2), it is possible to correct it if there is no yarn twist and the reproducibility can be guaranteed.
又、対象物の輻射率が判明しているものは、増幅器で輻
射率をセツトできるものである。If the emissivity of the object is known, the emissivity can be set by an amplifier.
本発明に用いるセンサーは好ましくは、電子冷却でも出
力保障が可能なものを用いることで、冷却媒体として
（Ｈｅ（ヘリウム））液体窒素など使用しないでもよい
ので検出部分がコンパクトにできる。The sensor used in the present invention is preferably a sensor capable of ensuring output even with electronic cooling, and it is not necessary to use (He (helium)) liquid nitrogen as a cooling medium, so that the detection portion can be made compact.
又、検出パターンのノイズ処理は、通常加重平均で処理
する。上述した本発明温度計を用いて、ポリエステルの
溶融紡糸での細化パターンの検出を行つた結果を図−３
に示す。The noise processing of the detection pattern is usually a weighted average. FIG. 3 shows the result of detection of a thinning pattern in melt spinning of polyester using the thermometer of the present invention described above.
Shown in.
（発明の効果） 本発明の温度計を用いて例えばポリエステルの溶融紡糸
での紡速６０００ｍ／分、糸径５０μｍの物体のような
従来測定不可能であつた高速で走行する微小物体の温度
を計測することが可能となつた。(Effect of the Invention) Using the thermometer of the present invention, for example, the temperature of a minute object running at a high speed, which cannot be measured conventionally, such as an object having a spinning speed of 6000 m / min in melt spinning of polyester and a yarn diameter of 50 μm, It was possible to measure.
更に微小物体の形状の同時計測が可能となつた。Furthermore, it is possible to measure the shapes of minute objects at the same time.
図−１は、本発明温度計の１実施態様を示す概略図、 図−２は、検出パターン及び校正された合成パターンの
一例 図−３は、本発明温度計を用いて行つた高速紡糸時の細
化パターン計測例 図−４は、従来の赤外線温度計の概略を示す図である。 (a)：走行糸条、(l)：増幅器 (b)，(f)，(f′)：レンズ、(m)：マルチプレクサー (c)：コリメータ、(n)：ＡＤコンバーター (d)：フイルター、(o)：コンピユーター演算回路 (e)：ハーフミラー、(p)：バツフアー (g)，(g′)：スキヤニングミラー、(q)：プリンター (h)，(h′)：モーター、(r)：レジスター (i)，(i′)：センサー、イ：パターンイ (j)，(j′)：冷却器、ロ：パターンロ (k)，(k′)：アンプ to：走査スタート時間０ ti：走査完了時間 Ｈ：検出ピーク出力 Ｄ：糸径FIG. 1 is a schematic view showing one embodiment of the thermometer of the present invention, FIG. 2 is an example of a detection pattern and a calibrated synthetic pattern, and FIG. 3 is a high-speed spinning operation using the thermometer of the present invention. FIG. 4 is a diagram schematically showing a conventional infrared thermometer. (a): traveling yarn, (l): amplifier (b), (f), (f '): lens, (m): multiplexer (c): collimator, (n): AD converter (d): Filter, (o): Computer arithmetic circuit (e): Half mirror, (p): Buffer (g), (g '): Scanning mirror, (q): Printer (h), (h'): Motor, (r): Register (i), (i ′): Sensor, a: Pattern i (j), (j ′): Cooler, b: Pattern b (k), (k ′): Amplifier to: Scan start Time 0 ti: Scan completion time H: Detection peak output D: Thread diameter
Claims (1)
と、集光された赤外線のうち２〜２５μｍの波長のみを
透過するフィルタと、該フィルタを透過した赤外線を２
等分するハーフミラーと、該ハーフミラーにて分割され
た赤外線を各々対応する２つのセンサーに入射させる２
つのスキャニングミラーと、該センサーの出力信号をア
ンプ及びマルチプレクサを介して入力する演算回路とか
らなる赤外線温度計であって、 前記２つのセンサーの各検出箇所が走行物体の走行方向
に対して互いに逆方向に走査されるよう前記２つのスキ
ャニングミラーを制御するとともに、前記演算回路にて
前記２つのセンサーの各出力から前記走行物体の温度及
び幅を検出することを特徴とする赤外線温度計。1. A lens and a collimator for condensing infrared rays, a filter for transmitting only a wavelength of 2 to 25 μm of the condensed infrared rays, and two infrared rays for transmitting the filter.
A half mirror that divides the light equally and an infrared ray split by the half mirror is incident on two corresponding sensors.
An infrared thermometer comprising two scanning mirrors and an arithmetic circuit for inputting an output signal of the sensor through an amplifier and a multiplexer, wherein detection points of the two sensors are opposite to each other with respect to a traveling direction of a traveling object. An infrared thermometer, wherein the two scanning mirrors are controlled to be scanned in a direction, and the arithmetic circuit detects the temperature and width of the traveling object from the outputs of the two sensors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60078832A JPH0652195B2 (en) | 1985-04-13 | 1985-04-13 | Infrared thermometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60078832A JPH0652195B2 (en) | 1985-04-13 | 1985-04-13 | Infrared thermometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61237028A JPS61237028A (en) | 1986-10-22 |
| JPH0652195B2 true JPH0652195B2 (en) | 1994-07-06 |
Family
ID=13672801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60078832A Expired - Lifetime JPH0652195B2 (en) | 1985-04-13 | 1985-04-13 | Infrared thermometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0652195B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0897259A (en) * | 1994-09-21 | 1996-04-12 | Nec Corp | Bare chip carrier and mechanism for aligning semiconductor with the same |
| US8880420B2 (en) | 2011-12-27 | 2014-11-04 | Grubhub, Inc. | Utility for creating heatmaps for the study of competitive advantage in the restaurant marketplace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6027826A (en) * | 1983-07-26 | 1985-02-12 | Chino Works Ltd | Radiation thermometer |
-
1985
- 1985-04-13 JP JP60078832A patent/JPH0652195B2/en not_active Expired - Lifetime
Non-Patent Citations (2)
| Title |
|---|
| 吉永弘編朝倉書店昭和４８年１１月２５日発行「応用分光学ハンドブック」２７１〜２８４頁 |
| 計測自動制御学会、温度計測部会編「温度計測」第２版２５３〜２５４頁昭和５７年９月３０日 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0897259A (en) * | 1994-09-21 | 1996-04-12 | Nec Corp | Bare chip carrier and mechanism for aligning semiconductor with the same |
| US8880420B2 (en) | 2011-12-27 | 2014-11-04 | Grubhub, Inc. | Utility for creating heatmaps for the study of competitive advantage in the restaurant marketplace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61237028A (en) | 1986-10-22 |
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