JPH0649555B2 - Handrail drive for passenger conveyor - Google Patents

Handrail drive for passenger conveyor

Info

Publication number
JPH0649555B2
JPH0649555B2 JP16700686A JP16700686A JPH0649555B2 JP H0649555 B2 JPH0649555 B2 JP H0649555B2 JP 16700686 A JP16700686 A JP 16700686A JP 16700686 A JP16700686 A JP 16700686A JP H0649555 B2 JPH0649555 B2 JP H0649555B2
Authority
JP
Japan
Prior art keywords
handrail
pressure roller
passenger conveyor
spring
bracket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16700686A
Other languages
Japanese (ja)
Other versions
JPS6327389A (en
Inventor
豊廣 開田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16700686A priority Critical patent/JPH0649555B2/en
Publication of JPS6327389A publication Critical patent/JPS6327389A/en
Publication of JPH0649555B2 publication Critical patent/JPH0649555B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、エレベータ、移動通路のような乗客コンベ
アの手摺駆動装置に関するものである。
Description: TECHNICAL FIELD The present invention relates to a handrail drive device for passenger conveyors such as elevators and moving passages.

〔従来の技術〕[Conventional technology]

第5図は例えば実開昭59−97977号公報に示され
た従来の乗客コンベアの手摺駆動装置の概略縦断側面図
である。第5図において、1は乗客コンベアの骨格を形
成するトラス、2はトラス1に固着立設された欄干、3
は欄干2の外周に配置された移動手摺、4は無端状に連
結されて踏段レール5,6に沿って移動する踏段、7は
トラス1の上階側の機械室に設置され電動機,減速機,
電磁ブレーキなどで構成された駆動機、8は踏段4を連
結する無端状の踏段鎖、9は駆動機7から駆動力が伝達
され踏段鎖8を介して踏段4を駆動するための鎖歯車機
構である。
FIG. 5 is a schematic vertical sectional side view of a conventional handrail drive device for passenger conveyors disclosed in Japanese Utility Model Laid-Open No. 59-97977. In FIG. 5, 1 is a truss that forms the skeleton of a passenger conveyor, 2 is a balustrade fixedly installed on the truss 1, 3
Is a handrail arranged on the outer periphery of the balustrade 2, 4 is a step which is connected endlessly and moves along the step rails 5 and 6, and 7 is an electric motor and a speed reducer installed in the machine room on the upper floor of the truss 1. ,
A drive machine composed of an electromagnetic brake, 8 is an endless step chain connecting the steps 4, and 9 is a chain gear mechanism for driving the step 4 via the step chain 8 to which driving force is transmitted from the drive machine 7. Is.

そして、手摺駆動装置10は、踏段4を駆動するための
鎖歯車機構9を介して駆動機7から駆動力が伝達される
手摺駆動用鎖歯車機構11の最終段鎖歯車12と同軸に
駆動ローラ13が固定され、駆動ローラ13がトラス1
に固定された手摺駆動装置本体15に装着され、加圧ロ
ーラ14が上記装置本体15に吊持され、駆動ローラ1
3と加圧ローラ14によって移動手摺3を挟持し、駆動
ローラ13から駆動力を移動手摺3に伝達してこれらの
移動手摺3が踏段4と同期して走行するように構成され
ている。
Then, the handrail drive device 10 is coaxial with the final stage chain gear 12 of the handrail drive chain gear mechanism 11 to which the driving force is transmitted from the drive machine 7 via the chain gear mechanism 9 for driving the steps 4. 13 is fixed, and the drive roller 13 is the truss 1.
Mounted on the handrail drive device main body 15 fixed to the drive roller 1 and the pressure roller 14 is suspended on the device main body 15.
The moving handrail 3 is sandwiched between the moving handrail 3 and the pressure roller 14 and the driving force is transmitted from the drive roller 13 to the moving handrail 3 so that the moving handrail 3 travels in synchronization with the step 4.

また、手摺駆動装置は、第6図に示すように、加圧ロー
ラ14がほぼアングル状のブラケット16に固定したロ
ーラ軸17に玉軸受19を介して加圧ローラ14が回転
自在に軸支され、上記ブラケット16上にガイドピン1
8が突出した加圧ローラ組立体20と、上記手摺駆動装
置本体15に固定されたほぼアングル状のばね受部材2
1と、ばね受部材21上に上,下ばね座24,24を介
して支持されたばね22と加圧ローラ組立体20のブラ
ケット16,ばね受部材21の孔16a,21a、ばね
座24,ばね22,ばね座24を下方からそれぞれ軸方
向に移動可能に貫通した締結ボルト23および締結ボル
ト23の上ばね座24から突出した先端部に締付けられ
たダブルナット25からなる締結部材26とを備え、ガ
イドピン18がばね受部材21のガイド孔21bに摺動
自在に嵌挿されている。
Further, in the handrail drive device, as shown in FIG. 6, the pressure roller 14 is rotatably supported via a ball bearing 19 on a roller shaft 17 in which the pressure roller 14 is fixed to a substantially angled bracket 16. , The guide pin 1 on the bracket 16
A pressure roller assembly 20 having a protruding portion 8 and a substantially angle-shaped spring receiving member 2 fixed to the handrail driving device body 15.
1, the spring 22 supported on the spring receiving member 21 via the upper and lower spring seats 24, 24, the bracket 16 of the pressure roller assembly 20, the holes 16a and 21a of the spring receiving member 21, the spring seat 24, and the spring. 22 and a fastening member 26 including a fastening bolt 23 penetrating the spring seat 24 movably in the axial direction from below and a double nut 25 fastened to a tip portion protruding from the upper spring seat 24 of the fastening bolt 23, The guide pin 18 is slidably fitted in the guide hole 21b of the spring receiving member 21.

以上のように構成された手摺駆動装置では、ばね22の
ばね力で加圧ローラ14を駆動ローラ13側に付勢し、
これらのローラ14,13で移動手摺3の帰路を挟持す
ることで、駆動ローラ13から移動手摺3に駆動力を伝
達するのに適する摩擦力を得ている。なお、加圧ローラ
組立体20のブラケット16は上板16cの乗客コンベ
ア幅方向外側から側板16dが直角に下方に屈曲され、
側板16dに幅方向中央側に突出するローラ軸17が固
定されている。
In the handrail drive device configured as described above, the pressure roller 14 is biased toward the drive roller 13 by the spring force of the spring 22,
By sandwiching the return path of the moving handrail 3 with these rollers 14 and 13, a frictional force suitable for transmitting a driving force from the driving roller 13 to the moving handrail 3 is obtained. In the bracket 16 of the pressure roller assembly 20, the side plate 16d is bent downward at a right angle from the outside of the upper plate 16c in the passenger conveyor width direction,
A roller shaft 17 protruding toward the center in the width direction is fixed to the side plate 16d.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

上記のような乗客コンベアの手摺駆動装置は、加圧ロー
ラ14,玉軸受19,ガイドピン18の摩耗,損傷時に
加圧ローラ組立体20を交換する必要があるが、従来の
手摺駆動装置では、加圧ローラ組立体20の取外し時に
締結ボルト23,ナット25などからなる締結部材25
をばね受部材21から取外す必要があり、また加圧ロー
ラ組立体20の取付け時には、ばね22のばね圧の再調
整が必要となるので、加圧ローラ組立体20の脱着作業
が面倒であり、時間が長くかかるという問題点があっ
た。
In the handrail driving device for the passenger conveyor as described above, it is necessary to replace the pressure roller assembly 20 when the pressure roller 14, the ball bearing 19, and the guide pin 18 are worn or damaged, but in the conventional handrail driving device, A fastening member 25 including a fastening bolt 23, a nut 25 and the like when the pressure roller assembly 20 is removed.
Need to be removed from the spring receiving member 21, and when the pressure roller assembly 20 is attached, the spring pressure of the spring 22 must be readjusted, so that the attaching and detaching work of the pressure roller assembly 20 is troublesome. There was a problem that it took a long time.

この発明は、上記のような問題点を解決して、加圧ロー
ラ組立体を、交換時などに容易に短い時間脱着できる乗
客コンベアの手摺駆動装置を提供することを目的として
いる。
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and provide a handrail drive device for a passenger conveyor that allows the pressure roller assembly to be easily attached and detached for a short period of time, such as when it is replaced.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る乗客コンベアの手摺駆動装置は、手摺駆
動装置本体に設けたばね受部材にばねを介して軸方向に
移動可能に装着した締結部材に、加圧ローラ組立体のブ
ラケットに形成した切欠部を係脱可能に係合支持させ
て、加圧ローラを上記装置本体側に吊持させたものであ
る。
A handrail drive device for a passenger conveyor according to the present invention includes a fastening member movably mounted in a spring receiving member provided on a main body of the handrail drive device via a spring, and a notch formed in a bracket of a pressure roller assembly. Is releasably engaged and supported, and the pressure roller is suspended on the apparatus main body side.

〔作 用〕[Work]

この発明における手摺駆動装置は、加圧ローラ組立体の
交換時に、ばねおよび締結部材をばね受部材上すなわち
手摺駆動装置本体側に残したまま、加圧ローラ組立体の
ブラケットを引抜いて切欠部と締結部材との係合を外す
ことで、上記ローラ組立体を取外すことができ、また上
記ブラケットの切欠部を締結部材に係合させてローラ組
立体を押込むことで、加圧ローラ組立体を上記装置本体
側に吊持させることで、締結部材をばね受部材に対し脱
着する必要がなく、またばねのばね圧の調整を必要とし
ない。
In the handrail drive device according to the present invention, when the pressure roller assembly is replaced, the bracket of the pressure roller assembly is pulled out to form a cutout portion while leaving the spring and the fastening member on the spring receiving member, that is, on the handrail drive device main body side. The roller assembly can be removed by releasing the engagement with the fastening member, and the pressure roller assembly can be removed by engaging the notch of the bracket with the fastening member and pushing the roller assembly. By suspending the fastening member from the spring receiving member, it is not necessary to adjust the spring pressure of the spring by suspending the fastening member from the device body side.

〔実施例〕〔Example〕

以下、この発明の一実施例を第1図ないし第4図につい
て説明する。
An embodiment of the present invention will be described below with reference to FIGS.

第1図ないし第4図において、第5図,第6図と同一符
号は相当部分を示し、27は手摺駆動装置本体15に固
定された駆動ローラ軸であり、2本の駆動ローラ軸27
の先端部に、ばね受部材21の乗客コンベア軸方向中央
側に位置する起立部21cがボルト28によって着脱可
能に固定されている。上記駆動ローラ軸27には手摺駆
動用鎖歯車機構11の最終段鎖歯車12と駆動ローラ1
3とが一体に軸受29を介してそれぞれ回転自在に軸支
されている。16eは加圧ローラ組立体20に設けたブ
ラケット16の上板16先端部すなわち側板16dと反
対側に開口し乗客コンベアの幅方向に延びる切欠部であ
り、切欠部16eには締結ボルト23が軸方向に移動可
能に係合されている。30は締結ボルト23の頭部23
aが溶接によって固定されたL形の回り止め板であり、
締結ボルト23の頭部23aで回り止め板30を介して
ブラケット16の上板16c下面が支持されて、加圧ロ
ーラ組立体20がばね22を介してばね受部材21に吊
持されている。また、ブラケット16は側板16dが移
動手摺3よりも乗客コンベアの幅方向中央側に配設され
ている。さらに、31は手摺駆動用鎖歯車機構11の最
終段鎖歯車12に駆動力を伝達する無端鎖、32は無端
鎖31の張力調整用鎖歯車であり、この鎖歯車32が枢
着された取付板33は上記装置本体15側に上下方向の
位置調整可能にボルト34によって固定され、また張力
調整用鎖歯車32は装置本体15の長手方向中央部に配
設されている。なお、この実施例の上述した以外の構成
は、第5図,第6図に示す従来の手摺駆動装置と同様で
ある。
In FIGS. 1 to 4, the same reference numerals as those in FIGS. 5 and 6 indicate corresponding parts, and 27 is a drive roller shaft fixed to the handrail drive device main body 15, and two drive roller shafts 27 are provided.
An upright portion 21c, which is located on the central side in the axial direction of the passenger conveyor of the spring receiving member 21, is detachably fixed to the front end portion of the with a bolt 28. The drive roller shaft 27 includes the final stage chain gear 12 of the handrail drive chain gear mechanism 11 and the drive roller 1.
3 and 3 are integrally rotatably supported by bearings 29. Reference numeral 16e designates a notch portion that is open to the tip end of the upper plate 16 of the bracket 16 provided on the pressure roller assembly 20, that is, the side plate 16d and extends in the width direction of the passenger conveyor. The notch 16e is provided with a fastening bolt 23. Movably engaged in the direction. 30 is the head 23 of the fastening bolt 23
a is an L-shaped detent plate fixed by welding,
The lower surface of the upper plate 16c of the bracket 16 is supported by the head 23a of the fastening bolt 23 via the rotation stop plate 30, and the pressure roller assembly 20 is suspended by the spring receiving member 21 via the spring 22. The side plate 16d of the bracket 16 is arranged closer to the center in the width direction of the passenger conveyor than the moving handrail 3. Further, 31 is an endless chain that transmits a driving force to the final stage chain gear 12 of the handrail drive chain gear mechanism 11, and 32 is a tension adjusting chain gear of the endless chain 31, and the chain gear 32 is attached to the chain gear 32 in a pivoted manner. The plate 33 is fixed to the device body 15 side by a bolt 34 so that the position can be adjusted in the vertical direction, and the tension adjusting chain gear 32 is arranged in the central portion of the device body 15 in the longitudinal direction. The structure of this embodiment other than that described above is the same as that of the conventional handrail drive device shown in FIGS. 5 and 6.

以上のように構成された実施例の手摺駆動手摺装置は、
加圧ローラ組立体20のブラケット16の上板16cか
ら下方に屈曲した側板16dが移動手摺3より乗客コン
の幅方向中央側に位置し、締結部材26の締結ボルト2
3が係合する切欠部16eが上板16cの側板16dと
反対側の乗客コンベアの幅方向外側に開口させてあるの
で、ブラケット16を幅方向中央側から引抜くことで、
切欠部16eと締結ボルト23の係合を外して加圧ロー
ラ組立体20を取外すことができる。そして、この場合
に、締結ボルト23は、装置本体15に固着されたばね
受部材21から引抜くことなく、ばね22,ばね座2
4,24と共にばね受部材21上に残したままで、上記
ローラ組立体20を取外すことができる。また、新しい
組立体20の取付けは、ブラケット16の切欠部16e
を締結ボルト23に嵌め、ブラケット6の上板16cを
締結ボルト23の頭部23a上に回り止め板が支持され
るようにブラケット6を幅方向中央側から外側に向って
締結ボルト23に押込むことで、新しいローラ組立体2
0をばね22を介し締結部材26によってばね受部材2
1で吊持した状態に取付けることができる。したがっ
て、ローラ組立体20の交換時に脱着作業が容易にしか
も短時間でできる。また、加圧ローラ組立体20のブラ
ケット16に設けた側板16dが移動手摺3より乗客コ
ンベアの幅方向中央側に位置しているため、締結ボルト
23の頭部23aに係合させる回り止めスパナが入らな
いが、上記頭部23aを回り止め板30に溶接し、回り
止め板30をブラケット16の上板16cに係合させた
ので、ナット25をスパナで回してばね22のばね力を
調整する操作が支障なく容易にできる。
The handrail drive handrail device of the embodiment configured as described above,
The side plate 16d bent downward from the upper plate 16c of the bracket 16 of the pressure roller assembly 20 is located closer to the center in the width direction of the passenger compartment than the moving handrail 3, and the fastening bolt 2 of the fastening member 26 is provided.
Since the notch 16e with which 3 engages is opened to the width direction outer side of the passenger conveyor on the side opposite to the side plate 16d of the upper plate 16c, by pulling out the bracket 16 from the width direction center side,
The pressure roller assembly 20 can be removed by disengaging the notch 16e and the fastening bolt 23. In this case, the fastening bolt 23 does not need to be pulled out from the spring receiving member 21 fixed to the apparatus body 15, and the spring 22 and the spring seat 2 are not pulled out.
The roller assembly 20 can be removed while leaving the spring assembly 4 and 24 on the spring receiving member 21. Further, the attachment of the new assembly 20 is performed by cutting the bracket 16 with the cutout portion 16e.
Is fitted to the fastening bolt 23, and the bracket 6 is pushed into the fastening bolt 23 from the center side in the width direction outward so that the upper plate 16c of the bracket 6 is supported on the head 23a of the fastening bolt 23 by the rotation stop plate. By doing so, the new roller assembly 2
0 through the spring 22 by the fastening member 26
It can be mounted in the state of being suspended by 1. Therefore, when the roller assembly 20 is replaced, the attachment / detachment work can be easily performed in a short time. Further, since the side plate 16d provided on the bracket 16 of the pressure roller assembly 20 is located closer to the center in the width direction of the passenger conveyor than the moving handrail 3, a detent wrench that engages with the head portion 23a of the fastening bolt 23 is provided. Although it does not enter, since the head 23a is welded to the detent plate 30 and the detent plate 30 is engaged with the upper plate 16c of the bracket 16, the nut 25 is turned with a spanner to adjust the spring force of the spring 22. The operation can be done easily without any trouble.

〔発明の効果〕〔The invention's effect〕

以上説明したように、この発明によれば、手摺駆動装置
本体に設けたばね受部材上にばねを介して軸方向に移動
可能に装着した締結部材に、加圧ローラ組立体のブラケ
ットに形成した切欠部を係脱可能に係合支持させたの
で、上記ローラ組立体を、締結部材を、ばね受部材から
引抜くことなくばねと共に上記ばね受部材上に残したま
ま脱着できることにより、ローラ組立体の脱着作業が容
易にしかも短時間でできる乗客コンベアの手摺駆動装置
を提供できるという効果が得られる。
As described above, according to the present invention, the notch formed in the bracket of the pressure roller assembly is attached to the fastening member movably mounted in the axial direction through the spring on the spring receiving member provided in the handrail drive device main body. Since the parts are engaged and supported so as to be engageable and disengageable, the roller assembly can be attached and detached while the fastening member is left on the spring receiving member together with the spring without pulling out the fastening member from the spring receiving member. It is possible to provide an effect that a handrail drive device for a passenger conveyor can be provided, which enables easy desorption work in a short time.

【図面の簡単な説明】[Brief description of drawings]

第1図はこの発明の一実施例による乗客コンベアの手摺
駆動装置を示す第5図のI部に相当する部分の拡大側面
図、第2図および第3図は第1図のII−II線およびIII
−III線断面図、第4図は第3図のIV−IV線断面図、第
5図は従来の乗客コンベアの手摺駆動装置を示す概略縦
断側面図、第6図は第5図に示す手摺駆動装置の第3図
相当図である。 1……トラス、3……移動手摺、7……駆動機、13…
…駆動ローラ、14……加圧ローラ、15……手摺駆動
装置本体、16……ブラケット、20……加圧ローラ組
立体、16c……側板、16e……切欠部、21……ば
ね受部材、22……ばね、23……締結ボルト、25…
…ナット、26……締結部材、30……回り止め板。 なお、図中同一符号は同一または相当部分を示す。
FIG. 1 is an enlarged side view of a portion corresponding to part I in FIG. 5 showing a handrail drive device for a passenger conveyor according to an embodiment of the present invention, and FIGS. 2 and 3 are II-II lines in FIG. And III
-III line sectional view, FIG. 4 is a IV-IV line sectional view of FIG. 3, FIG. 5 is a schematic vertical sectional side view showing a conventional handrail driving device for a passenger conveyor, and FIG. 6 is a handrail shown in FIG. It is a figure corresponding to FIG. 3 of a drive device. 1 ... Truss, 3 ... Moving handrail, 7 ... Driving machine, 13 ...
... drive roller, 14 ... pressure roller, 15 ... handrail driving device main body, 16 ... bracket, 20 ... pressure roller assembly, 16c ... side plate, 16e ... notch portion, 21 ... spring receiving member , 22 …… Spring, 23 …… Fastening bolt, 25…
... nuts, 26 ... fastening members, 30 ... rotation stop plates. The same reference numerals in the drawings indicate the same or corresponding parts.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】駆動機によって駆動される駆動ローラと、
ばねによって上記駆動ローラ側に付勢される加圧ローラ
と、乗客コンベアのトラスに固定され上記駆動ローラを
装着すると共に上記加圧ローラを吊持した手摺駆動装置
本体とを備え、移動手摺の帰路部を駆動ローラと加圧ロ
ーラで挟持して上記移動手摺を駆動する乗客コンベアの
手摺駆動装置において、上記加圧ローラをブラケットに
枢着した加圧ローラ組立体を有し、上記装置本体側に設
けたばね受部材にばねを介して軸方向に移動可能に装着
した締結部材に、上記ブラケットに形成した切欠部を係
脱可能に係合支持させたことを特徴とする乗客コンベア
の手摺駆動装置。
1. A drive roller driven by a drive machine,
A return path for moving handrails, which includes a pressure roller urged to the drive roller side by a spring, and a handrail drive device main body that is fixed to a truss of a passenger conveyor and is equipped with the drive roller and suspends the pressure roller. A handrail drive device for a passenger conveyor that drives the moving handrail by sandwiching a portion between a drive roller and a pressure roller, and has a pressure roller assembly in which the pressure roller is pivotally attached to a bracket, and the device main body side is provided. A handrail drive device for a passenger conveyor, characterized in that a notch portion formed in the bracket is removably engaged with and supported by a fastening member mounted on a provided spring receiving member so as to be axially movable via a spring.
【請求項2】加圧ローラ組立体は、ブラケットの切欠部
を移動手摺より乗客コンベアの幅方向外側に開口させ、
幅方向中央部側から脱着可能にしてある特許請求の範囲
第1項に記載の乗客コンベアの手摺駆動装置。
2. A pressure roller assembly, wherein a notch portion of a bracket is opened outside a moving handrail in a width direction of a passenger conveyor,
The handrail drive device for a passenger conveyor according to claim 1, wherein the handrail drive device is detachable from the center portion side in the width direction.
JP16700686A 1986-07-16 1986-07-16 Handrail drive for passenger conveyor Expired - Lifetime JPH0649555B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16700686A JPH0649555B2 (en) 1986-07-16 1986-07-16 Handrail drive for passenger conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16700686A JPH0649555B2 (en) 1986-07-16 1986-07-16 Handrail drive for passenger conveyor

Publications (2)

Publication Number Publication Date
JPS6327389A JPS6327389A (en) 1988-02-05
JPH0649555B2 true JPH0649555B2 (en) 1994-06-29

Family

ID=15841631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16700686A Expired - Lifetime JPH0649555B2 (en) 1986-07-16 1986-07-16 Handrail drive for passenger conveyor

Country Status (1)

Country Link
JP (1) JPH0649555B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2507622B2 (en) * 1989-08-19 1996-06-12 三菱電機株式会社 Handrail drive for passenger conveyor
US7887714B2 (en) 2000-12-25 2011-02-15 Nissan Chemical Industries, Ltd. Cerium oxide sol and abrasive
WO2012101871A1 (en) 2011-01-25 2012-08-02 コニカミノルタホールディングス株式会社 Fine abrasive particles and process for producing same
JP6694653B2 (en) 2017-04-10 2020-05-20 信越化学工業株式会社 Polishing agent for synthetic quartz glass substrate, manufacturing method thereof, and polishing method for synthetic quartz glass substrate
JP6985116B2 (en) 2017-11-17 2021-12-22 信越化学工業株式会社 Abrasive for synthetic quartz glass substrate and polishing method for synthetic quartz glass substrate
JP2021183655A (en) 2020-05-21 2021-12-02 信越化学工業株式会社 Abrasive agent for polishing synthetic quartz glass substrate and manufacturing method abrasive agent, and polishing method of synthetic quartz glass substrate

Also Published As

Publication number Publication date
JPS6327389A (en) 1988-02-05

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