JPH0648511Y2 - Split mask for laser marking - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a mask portion for forming a marking character of a semiconductor product of a laser marking machine, and more particularly to a mask for designating a marking character of a semiconductor product.

[Conventional technology]

Conventionally, in this type of mask, one product name of the semiconductor product marking is composed of one mask, and whenever the semiconductor product marking display changes, the mask is replaced with a mask having the matching product name and laser marking is performed.

[Problems to be solved by the invention]

Since the conventional masks described above correspond to one mask for each semiconductor product name, a mask with a large variety of products must be made for each product, which requires cost, delivery time, and mask management. It also has the drawback that it is difficult to do.

[Means for solving problems]

The dividing mask of the present invention is a laser marking dividing mask for forming a series of marking characters on a semiconductor product by selectively passing a laser beam, wherein the first part of the series of marking characters and the above A first mask having a window through which laser light passes, and a second portion of the series of imprinted characters and a second mask at which a window through which laser light passes are formed; The second portion formed on the second mask is located in the window of the first mask, and the first portion formed on the first mask is in the window of the second mask. The first mask and the second mask are used so as to overlap each other.

〔Example〕

 Next, the present invention will be described with reference to the drawings.

FIG. 1 is a diagram of an embodiment of the present invention. In this embodiment, in the mask for semiconductor product marking characters used in the laser marking machine, the semiconductor product marking characters are divided into the product name, the plan, the lot, etc. It is characterized in that a semiconductor product is imprinted by inserting characters, incorporating them into a mask holder, and aligning respective positions. The mask after combination is A and the split mask is composed of B, C, D and E. The divided mask B corresponding to the first mask has a character "NE μP" which is a part 10 of a series of marking characters.
A rectangular window 20 having a "C" and also for passing laser light.
Are formed. Mask C corresponding to the second mask
Has another portion 40 of the series of imprinted characters, and
It has two windows 30 for passing laser light. Similarly, masks D and E, which correspond to the remaining second mask, also have a portion of the series of characters and a window. The character "1" of the division mask C, the character "2" of the division mask D and the character "A" of the division mask E are aligned with the window 20 of the division mask B.

Next, as shown in FIG. 2, the divided mask is assembled into the holder F, set on the jig composed of the upper lid I, the side plate H, the base J, and the shaft G, and the necessary characters are combined for each semiconductor marking character. use.

FIG. 3 shows another embodiment.

[Effect of device]

As described above, the present invention divides the semiconductor imprinting mask and puts all the necessary characters in the semiconductor imprinting character for each of the divided masks, so that effects such as low cost, space saving, and easy management are achieved. There is.

[Brief description of drawings]

FIG. 1 is a split mask of the present invention A: a combined mask, B: first split mask, C: second split mask, D: third split mask, E: split mask The fourth sheet, FIG. 2 is a diagram in which a split mask is incorporated in a holder F ... Holder, G ... Shaft, H ... Side plate, I ... Top lid, J ... Base, and FIG. 3 is of another embodiment. Split mask.

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Tsunehiko Tsuchiya 5-33-1 Shiba, Minato-ku, Tokyo Inside NEC Corporation (56) References JP-A-52-81580 (JP, A)

Claims (1)

[Scope of utility model registration request] 1. A laser marking division mask for forming a series of marking characters on a semiconductor product by selectively passing a laser beam, the first portion (10) and the first portion (10) of the series of marking characters. A first mask (B) having a window (20) for passing the laser beam, a second portion (40) of the series of imprinted characters, and a window (30) for passing the laser beam are provided. A second mask (C) formed, wherein the second portion formed on the second mask is the first mask.
Overlapping the first and second masks such that the first portion formed in the first mask is located in the window of the second mask and the first portion formed in the first mask is located in the window of the second mask. A divided mask for laser marking, which is used as a mask.