JPH0645878Y2 - Slit device for polar figure measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] A polarographic measuring device attached to a diffractometer is known as a device for examining the crystal orientation of a polycrystalline sample by X-ray diffraction. The present invention relates to a slit device used in this polar figure measuring device.

[Prior Art] A polar figure measuring method for examining the crystal orientation of a polycrystalline sample plate will be briefly described. The polar figure is completed by synthesizing the measurement result by the reflection method and the measurement result by the transmission method, but the configuration of the measuring device is largely different between the reflection method and the transmission method.

FIG. 4 shows a measuring apparatus of the reflection method. Point focus 52 for X-ray source
Is used to diffract X-rays on the surface of the sample plate 54 and the diffracted X-rays are detected by the counter 56. The X-rays incident on the sample plate 54 are appropriately diverged by the divergence slit 58 so that the lateral width of the sample plate 54 can be covered, thereby obtaining the intensity of the diffracted X-rays. The light receiving slit 60 is arranged at a position satisfying the concentration method. In practice, a vertical divergence limiting slit is arranged in front of the sample plate 54 in order to prevent divergence of incident X-rays in the vertical direction. In addition, before or after the light receiving slit 60, the diffraction X
A solar slit is placed to prevent the line from diverging vertically.

The counter 56 on the goniometer is fixed at a position where diffracted X-rays from a specific lattice plane of the sample plate come. The sample plate 54 is rotated in a predetermined manner by the polarographic measuring device attached to the goniometer. Then, the counter 56 measures the diffracted X-ray intensity at each rotational position. The rotation of the sample plate 54 will be described. The sample plate 54 is rotated by α around the AA axis passing through the sample surface, and is rotated by β around the B axis which is the normal to the sample surface. The angle α is defined as the angle of the sample surface with respect to the normal to the diffraction grating surface.
By writing the angle α, the angle β, and the X-ray diffraction intensity on the polar net, a polar figure for the target lattice plane can be obtained. This reflection method can cover the range of α = 40 to 90 degrees, that is, the inner portion of the polar figure.

FIG. 5 shows a measuring device of the transmission method. In this case, a line focus 62 is used as the X-ray source, the X-ray transmitted through the sample plate 54 is diffracted, and the diffracted X-ray is detected by the counter 56. Sample plate 54
The X-rays incident on are parallel or divergent beams. In the transmission method, the diffracted X-ray intensity is obtained by using the X-ray of the line focus. In an actual device, a solar slit that prevents vertical diffusion of diffracted X-rays is arranged in front of or behind the light receiving slit 64.

In the transmission method, unlike the reflection method in FIG. 4, the AA axis is vertically arranged as shown in FIG. Similar to the reflection method, the sample plate 54 is rotated by α around the AA axis and is rotated by β around the B axis. Similar to the reflection method, the measurement result of the transmission method is also written on the polar net. The transmission method can cover the range of α = 0 to 50 degrees, that is, the outer portion of the polar figure.

[Problems to be Solved by the Invention] As described above, the configuration of the measuring device is different between the reflection method and the transmission method. A particularly big difference is that the reflection method uses a point focus X-ray source and the transmission method uses a line focus X-ray source. Therefore, in order to complete one polar figure, it is necessary to replace the X-ray source, which is very troublesome.

Therefore, conventionally, a simple measurement method without replacing the X-ray source has been adopted. That is, only the line focus is used as the X-ray source, and the reflection method and the transmission method are dealt with only by switching the slit system. In this case, in the transmission method, the measurement can be performed with the same configuration as shown in FIG. However, in the case of the reflection method, the vertical length of the line focus X-ray is almost cut at the light receiving slit, and only the central portion is used. Since the line focus X-ray has a weaker X-ray intensity per unit cross-sectional area than the point focus X-ray, cutting the line focus X-ray in this way avoids that the diffracted X-ray intensity detected by the counter becomes weak. I can't. If the vertical limit is widened to gain strength, the diffraction peak will widen and the resolution will decrease.

There is also a simplified measurement method that uses only a point focus as an X-ray source. In this case, since the X-ray collimator is used, it is not necessary to replace the slit. However, since the collimator is used, it is inevitable that the X-ray intensity becomes weak especially in the transmission method.

This invention is an improvement of the above-mentioned simplified measurement method that uses only a point focus as an X-ray source, and its purpose is to provide a slit device that can be used for both the reflection method and the transmission method without significantly reducing the X-ray intensity. To provide.

[Means for Solving the Problems] In order to achieve the above object, a slit device according to the present invention is provided with a small hole into which an X-ray is incident and an X-hole separated from the small hole by a predetermined distance in the optical axis direction. And an elongated opening through which the line exits. The elongated aperture can be rotated at least 90 degrees around the optical axis.

[Operation] In the case of the reflection method, the elongated opening of the slit device is arranged in the plane including the diffractometer circle. When changing to the transmission method, the elongated aperture is rotated 90 degrees around the optical axis and is arranged perpendicular to the plane containing the diffractometer circle. Thereby, in any case, the X-ray emitted from the elongated aperture can be effectively used for the diffraction measurement. Moreover, the switching of the slit device can be achieved by simply rotating the elongated opening by 90 degrees.

[Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a partially cutaway perspective view of an embodiment of the slit device according to the present invention. The slit device 10 has a substantially rectangular truncated pyramid shape having a rectangular cross section as a whole. One end is a small square end face 12,
The other end is an elongated rectangular end surface 14. A small hole 16 having an inner diameter of 1 mm is formed in the square end face 12. The rectangular end surface 14 is formed with an elongated opening 18 having a size of 1 mm × 10 mm. The passage from the square end face 12 to the rectangular end face 14 has a gradually expanding rectangular cross section.

The dimensions of the small holes 16 and the elongated openings 18 can be other than the above values. For example, the size of the opening 18 is 1 mm × 5 mm
Can be

In this embodiment, the distance L from the small hole 16 to the elongated opening 18
Is designed so that the X-ray irradiation length on the sample surface is about 20 mm. This distance L depends on the length dimension of the elongated opening 18, the inner diameter dimension of the small hole 16, and the mutual distance between the X-ray focal point, the slit device, and the sample. Usually, the distance L is X
The value ranges from 1/2 to 4/5 of the distance from the line focus to the sample.

Next, a method of using this embodiment will be described. First, when the reflection method is used, the slit device 10 is arranged in the middle of the X-ray path in the state shown in FIG. 2 instead of the divergence slit 58 shown in FIG. That is, the elongated opening is arranged so as to be in the plane including the diffractometer circle (horizontal plane in the arrangement of FIG. 4). The X-ray emitted from the point focus 20 enters the small hole 16 at a predetermined divergence angle, and when exiting the elongated aperture,
It has a certain divergence angle in the horizontal plane. In the longitudinal direction, divergence is limited by elongated openings. That is, the X-rays are incident on the sample plate almost as in the case of FIG.

When using the transmission method, the slit device 10 in the state shown in FIG.
By rotating 90 degrees around the optical axis as shown by arrow 22,
The state shown in FIG. 3 is obtained. That is, the elongated openings are arranged perpendicular to the plane containing the diffractometer circle. The X-ray emitted from the point focus 20 enters the small hole 16 at a predetermined divergence angle, and has a predetermined divergence angle in the vertical direction when exiting the elongated aperture. Horizontal divergence is limited.

In both the reflection method and the transmission method described above, the X-rays from the point focus pass through the small holes and the elongated openings to form a linear X-ray beam and exit the slit device. Therefore, the X-ray from the point focus can be effectively used according to the measuring method.

In addition, in the above-described embodiment, the small hole and the elongated opening are formed in the integrated slit device, but the small hole and the elongated opening may be formed in separate parts. in this case,
It suffices that the component having the small hole is fixed and only the component having the elongated opening can be rotated.

[Effects of the Invention] As described above, the slit device for polarographic measuring apparatus according to the present invention is provided with a small hole into which an X-ray is incident and an elongated opening from which the X-ray is emitted, and the elongated opening is used as a light source. Since it can be rotated at least 90 degrees around the axis, the reflection method and the transmission method can be dealt with only by rotating the elongated aperture by 90 degrees, and the X-ray intensity does not decrease so much.

[Brief description of drawings]

FIG. 1 is a perspective view in which a part of an embodiment of the present invention is cut away, FIG. 2 is a perspective view showing a state in which this embodiment is used in a reflection method, and FIG. 3 is a transmission method in this embodiment. FIG. 4 is a perspective view showing a conventional apparatus configuration of the reflection method, and FIG. 5 is a perspective view showing a conventional apparatus configuration of the transmission method. 10 …… Slit device 16 …… Small hole for X-ray incidence 18 …… Slender opening for X-ray emission 20 …… Point-focus X-ray source

Claims (1)

[Scope of utility model registration request] 1. A slit device for arranging in the middle of an X-ray path from a point-focus X-ray source to a sample on a polarographic measuring device, wherein a small hole into which an X-ray is incident and an optical axis from this small hole are provided. A polarographic measurement characterized in that an elongated opening for emitting X-rays, which is separated by a predetermined distance in the direction, is provided in this slit device so that the elongated opening can be rotated at least 90 degrees around the optical axis. Slit device for equipment.