JPH0645329Y2 - 研磨パッド用ドレッサー - Google Patents

研磨パッド用ドレッサー

Info

Publication number
JPH0645329Y2
JPH0645329Y2 JP1989151347U JP15134789U JPH0645329Y2 JP H0645329 Y2 JPH0645329 Y2 JP H0645329Y2 JP 1989151347 U JP1989151347 U JP 1989151347U JP 15134789 U JP15134789 U JP 15134789U JP H0645329 Y2 JPH0645329 Y2 JP H0645329Y2
Authority
JP
Japan
Prior art keywords
dressing
dresser
pad
polishing pad
ridges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989151347U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0393069U (OSRAM
Inventor
健一郎 塩澤
Original Assignee
千代田株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 千代田株式会社 filed Critical 千代田株式会社
Priority to JP1989151347U priority Critical patent/JPH0645329Y2/ja
Publication of JPH0393069U publication Critical patent/JPH0393069U/ja
Application granted granted Critical
Publication of JPH0645329Y2 publication Critical patent/JPH0645329Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1989151347U 1989-12-29 1989-12-29 研磨パッド用ドレッサー Expired - Lifetime JPH0645329Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989151347U JPH0645329Y2 (ja) 1989-12-29 1989-12-29 研磨パッド用ドレッサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989151347U JPH0645329Y2 (ja) 1989-12-29 1989-12-29 研磨パッド用ドレッサー

Publications (2)

Publication Number Publication Date
JPH0393069U JPH0393069U (OSRAM) 1991-09-24
JPH0645329Y2 true JPH0645329Y2 (ja) 1994-11-24

Family

ID=31697649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989151347U Expired - Lifetime JPH0645329Y2 (ja) 1989-12-29 1989-12-29 研磨パッド用ドレッサー

Country Status (1)

Country Link
JP (1) JPH0645329Y2 (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0413083Y2 (OSRAM) * 1985-05-04 1992-03-27
JPS6211561U (OSRAM) * 1985-07-04 1987-01-24

Also Published As

Publication number Publication date
JPH0393069U (OSRAM) 1991-09-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term