JPH0638316Y2 - Holding device for resistance heating element for electric furnace - Google Patents

Holding device for resistance heating element for electric furnace

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Publication number
JPH0638316Y2
JPH0638316Y2 JP2445188U JP2445188U JPH0638316Y2 JP H0638316 Y2 JPH0638316 Y2 JP H0638316Y2 JP 2445188 U JP2445188 U JP 2445188U JP 2445188 U JP2445188 U JP 2445188U JP H0638316 Y2 JPH0638316 Y2 JP H0638316Y2
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JP
Japan
Prior art keywords
heating element
resistance heating
holding
holding device
electric furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2445188U
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Japanese (ja)
Other versions
JPH01136400U (en
Inventor
昭市 松内
Original Assignee
島津金属株式会社
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Priority to JP2445188U priority Critical patent/JPH0638316Y2/en
Publication of JPH01136400U publication Critical patent/JPH01136400U/ja
Application granted granted Critical
Publication of JPH0638316Y2 publication Critical patent/JPH0638316Y2/en
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Expired - Lifetime legal-status Critical Current

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  • Furnace Details (AREA)

Description

【考案の詳細な説明】 (産業上の利用分野) 本考案はコイル状の抵抗発熱体の保持装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a holding device for a coil-shaped resistance heating element.

本考案による抵抗発熱体の保持装置は筒状の電気炉に内
設されるコイル状の抵抗発熱体を、その抵抗発熱体の膨
縮に適応させて支承するに有用である。
The resistance heating element holding device according to the present invention is useful for supporting a coil-shaped resistance heating element provided in a cylindrical electric furnace by adapting the expansion and contraction of the resistance heating element.

(従来の技術) 従来、この種の電気炉にあつては被熱処理物を収容する
収容筒の周囲にコイル状の抵抗発熱体が配設され、更に
抵抗発熱体の周囲に断熱層が配設されると共に、抵抗発
熱体が保持部材を介して断熱層に支承されている。この
とき保持部材としては一般に第6図および第7図に示す
ものが提供されている。当該保持部材(1)は一部が断
熱層(6)に没入されると共に、特に第6図に示す如く
電気炉収容筒の軸線方向に沿う断面が半径方向内方に開
放されてE字状をなしていて、収容筒の軸線方向に沿つ
て連設され、且つ円周方向に互いに離間して配列され
る。この場合保持部材(1)の凹部(7)にコイル状の
抵抗発熱体(5)が収容、保持されることになる。
(Prior Art) Conventionally, in this type of electric furnace, a coil-shaped resistance heating element is disposed around a housing cylinder that accommodates an object to be heat-treated, and a heat insulating layer is disposed around the resistance heating element. At the same time, the resistance heating element is supported by the heat insulating layer via the holding member. At this time, the holding members generally shown in FIGS. 6 and 7 are provided. A part of the holding member (1) is immersed in the heat insulating layer (6), and in particular, as shown in FIG. 6, the cross section along the axial direction of the electric furnace housing is opened inward in the radial direction and is E-shaped. And are continuously provided along the axial direction of the housing cylinder and are spaced apart from each other in the circumferential direction. In this case, the coil-shaped resistance heating element (5) is housed and held in the recess (7) of the holding member (1).

また第8図および第9図に示す如く、電気炉の抵抗発熱
体に対し上述と同様の保持機能を有する保持部材(1a)
が提供されており、当該保持部材(1a)は各々被熱処理
物の収容筒の軸線方向において一側に凹部(7a)、且つ
他側に突部(7b)が具備され、互いに隣接する保持部材
(1a)の凹部(7a)に突部(7b)が嵌合され、連設され
るように設けられる。更に保持部材(1a)の凹部(7a
並びに突部(7b)には両者が互いに嵌合されたときコイ
ル状の抵抗発熱体(5a)を収容する切欠部(8a),(8
b)が形成されていて、これにより保持部材(1a)を連
設させた状態で抵抗発熱体(5a)が凹部(7a)と突部
7b)間に収容・保持され得る。
Further, as shown in FIGS. 8 and 9, a holding member (1a) having a holding function similar to the above for the resistance heating element of the electric furnace.
Each of the holding members (1a) is provided with a recess (7a) on one side and a protrusion (7b) on the other side in the axial direction of the axis of the container to be heat treated, and the holding members are adjacent to each other. The projection (7b) is fitted in the recess (7a) of (1a) and is provided so as to be continuously provided. Furthermore, the concave part ( 7a ) of the holding member (1a)
And projections coiled resistance heating body when both are fitted to each other in (7b) notch for accommodating the (5a) (8a), ( 8
b ) is formed so that the resistance heating element (5a) can be housed and held between the recess ( 7a ) and the projection ( 7b ) in a state where the holding member (1a) is continuously provided.

(考案が解決しようとする問題点) 上述した従来の保持部材(1)において第6図および第
7図に開示のものは被処理体の収容筒に対する半径方向
内方の支持機能が不充分で、例えば抵抗発熱体(5)が
高温変形するとき、これを抑止できず、櫛歯(12)間か
ら抵抗発熱体(5)が逸脱する危惧があつた。また第8
図および第9図に示す保持部材(1a)にあつては相対的
に形状が複雑であるから製作面、組立製造面が極めて煩
雑となり、且つ抵抗発熱体を半径方向外方若しくは内方
のいずれの方向にも支承機能を果たすものの、抵抗発熱
体周辺の裕度が低いため抵抗発熱体の塑性変形によつて
楕円化する問題があつた。
(Problems to be solved by the invention) Among the above-mentioned conventional holding members (1) disclosed in FIGS. 6 and 7, the supporting function inward in the radial direction with respect to the container of the object to be processed is insufficient. For example, when the resistance heating element (5) is deformed at a high temperature, this cannot be suppressed, and there is a fear that the resistance heating element (5) may deviate from between the comb teeth (12). Also the 8th
Since the holding member (1a) shown in FIGS. 9 and 9 has a relatively complicated shape, the manufacturing surface and the assembly and manufacturing surface are extremely complicated, and the resistance heating element is arranged radially outward or inward. Although the bearing function is also achieved in the direction of, the margin around the resistance heating element is low, so there is a problem that the resistance heating element becomes elliptical due to plastic deformation.

しかして本考案の目的は電気炉の抵抗発熱体に対し半径
方向外方および内方のいずれの方向への支承機能をも果
たす上、製作が容易で製造組立を円滑に行ない得ると共
に、抵抗発熱体の塑性変形による損耗もなく、高信頼の
保持装置を提供するにある。
Therefore, the object of the present invention is to support the resistance heating element of the electric furnace both in the radial direction outward and inward, and at the same time, the manufacturing is easy and the manufacturing and assembling can be performed smoothly. It is an object to provide a highly reliable holding device without wear due to plastic deformation of the body.

(問題点を解決するための手段) 本考案によれば、上記の目的は被熱処理物を収容する収
容部の周囲にコイル状の抵抗発熱体(15)を周設し、抵
抗発熱体(15)の周囲に配設される断熱層(16)の内周
面で、抵抗発熱体(15)を支承する保持装置において、
収容部の半径方向に充分な長さを持つ複数の歯部(12)
を有した櫛歯状の保持本体(11)が収容部の軸線方向に
沿つて多数配列され、且各保持本体(11)の多数の歯部
(12)に対し収容部の軸線方向に延びる保持ロツド(1
4)が貫通せしめられてなることを特徴とすることによ
り、克服される。
(Means for Solving the Problems) According to the present invention, for the above-mentioned purpose, a coil-shaped resistance heating element (15) is provided around a housing portion for housing an object to be heat treated. In the holding device which supports the resistance heating element (15) on the inner peripheral surface of the heat insulating layer (16) arranged around
Multiple teeth (12) with sufficient length in the radial direction of the housing
A large number of comb-teeth-shaped holding bodies (11) having a plurality of teeth are arranged along the axial direction of the holding portion, and the holding bodies extending in the axial direction of the holding portion with respect to the large number of tooth portions (12) of each holding body (11). Rod (1
It is overcome by being characterized in that 4) is penetrated.

(作用) 上述のように構成された本考案の保持装置によれば、保
持本体(11)の歯部(12)間の基面(18)と保持ロツド
(14)とにより抵抗発熱体(15)が半径方向内、外方に
高温変形するようなときもこれを阻止し、抵抗発熱体
(15)を保持本体(11)から逸脱させることなく保持で
き、且つ歯部(12)と保持ロツド(14)とで区画される
保持空所(17)に抵抗発熱体(15)を嵌合させるから、
抵抗発熱体(15)周辺に充分な裕度を持たせることがで
き、抵抗発熱体(15)の塑性変形によつて損耗を生ずる
ことなく、良好な保持作用を実現できる。
(Operation) According to the holding device of the present invention configured as described above, the resistance heating element (15) is formed by the base surface (18) between the tooth portions (12) of the holding body (11) and the holding rod (14). ) Is prevented from deforming at high temperature inward and outward in the radial direction, the resistance heating element (15) can be held without deviating from the holding body (11), and the tooth portion (12) and the holding rod are retained. Since the resistance heating element (15) is fitted in the holding space (17) defined by (14) and
A sufficient margin can be provided around the resistance heating element (15), and a good holding action can be realized without causing wear due to plastic deformation of the resistance heating element (15).

(実施例) 第1図並びに第2図を参照すると、保持装置(10)には
櫛歯状の多数の保持本体(11)が包有される。図示の実
施例において、保持本体(11)は各々2本の歯部(12)
を有してF字状に設けられ、且つ保持部材(11)は対を
なして相互の歯部(12)が噛合うように対向して配置さ
れた上、被処理体の収容筒(13)の軸線方向に多数連続
して配列される。また保持本体(11)列は円周方向に相
互に離間し、例えば回転角で60度毎に配列され得る。且
つまた保持本体(11)列の夫々には各保持部材(11)の
歯部(12)に対し収容筒(13)の軸線方向に延びる保持
ロツド(14)が貫通される。
(Embodiment) Referring to FIGS. 1 and 2, the holding device (10) includes a large number of comb-shaped holding bodies (11). In the illustrated embodiment, the holding body (11) has two teeth (12) each.
And the holding members (11) are arranged in a pair so as to face each other so that the tooth portions (12) of the holding members engage with each other. ) Are continuously arranged in the axial direction. Further, the holding body (11) rows are spaced apart from each other in the circumferential direction, and can be arranged, for example, every 60 degrees in rotation angle. In addition, a holding rod (14) extending in the axial direction of the accommodating cylinder (13) penetrates through the tooth portion (12) of each holding member (11) through each of the holding body (11) rows.

この場合収容筒(13)の周囲に周設されたコイル状の抵
抗発熱体(15)は、抵抗発熱体(15)に対し周設された
断熱層(16)の内周面において保持装置(10)を介し支
承されることになる。ここでコイル状の抵抗発熱体(1
5)はその螺旋状部の一ピツチ毎に、半径方向に充分に
長く延びる保持本体(11)の歯部(12)と保持ロツド
(14)とで区画された空所(17)に遊合され得る。この
とき空所(17)に位置した抵抗発熱体(15)は歯部(1
2)間の基面(18)と保持ロツド(14)とにより半径方
向内、外方への変位が抑止され、抵抗発熱体(15)が高
温軟化により部分ダレ、楕円化し勝ちなときこれを有効
に抑止できる。
In this case, the coil-shaped resistance heating element (15) provided around the housing tube (13) has a holding device (on the inner peripheral surface of the heat insulating layer (16) provided around the resistance heating element (15). 10) will be supported. Here, the coiled resistance heating element (1
For each pitch of the spiral portion, 5) fits in a space (17) defined by the tooth portion (12) and the retaining rod (14) of the retaining body (11) extending sufficiently in the radial direction. Can be done. At this time, the resistance heating element (15) located in the void (17) has a tooth (1
The base surface (18) and the holding rod (14) between 2) prevent radial and inward displacements, and when the resistance heating element (15) is softened at high temperature, it partially sags or becomes elliptical and It can be effectively suppressed.

また保持本体(11)の歯部(12)間の基面(18)には夫
々透孔(19)が形成されており、この透孔(19)は抵抗
発熱体(15)の熱放射に寄与すると共に、半径方向外側
に配列した保持本体(11)の透孔(19)には断熱層(1
6)の外周部に基端部が固定された吊りボルト(20)の
先端部がナツトを介して固定され得る。当該吊りボルト
(20)により半径方向外側の保持本体(11)列、延いて
は保持ロツド(14)を介し半径方向内側の保持本体(1
1)列、即ち本考案による保持装置(10)全体が半径方
向外向きに牽引され、保持装置(10)の保持機能を安定
にできる。更に断熱層(16)の端部に耐熱部材(21)を
配設することによつて、第2図に示す如きいわゆる横型
の筒状電気炉の本体を構成できる。
Further, through holes (19) are formed in the base surface (18) between the tooth portions (12) of the holding body (11), and these through holes (19) are used for heat radiation of the resistance heating element (15). A heat insulating layer (1) is provided in the through holes (19) of the holding body (11) which are arranged to contribute to the outside in the radial direction.
The tip end of the suspension bolt (20), whose base end is fixed to the outer circumference of (6), can be fixed via a nut. By the suspension bolts (20), the holding body (11) row on the outer side in the radial direction, and further the holding body (1) on the inner side in the radial direction via the holding rod (14).
1) The row, that is, the entire holding device (10) according to the present invention is pulled outward in the radial direction, and the holding function of the holding device (10) can be stabilized. Further, by disposing the heat-resistant member (21) at the end portion of the heat insulating layer (16), a so-called horizontal type tubular electric furnace body as shown in FIG. 2 can be constructed.

尚、電気炉にあつて本考案による保持装置(10)は例え
ば第2図から明らかなように周知の保持装置(10a)と
併用してもよく、本考案による保持装置(10)を複数
列、配列することが好ましいが、本考案になる保持装置
(10)が少なくとも一列、配列されれば所期の目的を果
たし得ることが判明している。また保持本体(11)は2
本の歯部(12)を有してF字状に形成されるものとした
が、歯部(12)数を増減させてT字状あるいはE字状多
様の形状の内一を選定できる。且つ上述の保持装置(1
0)は横型の電気炉に適用する態様を示したが、竪型の
筒状電気炉にも採用できる。また第3図に示す如くコイ
ル状の抵抗発熱体(15)を四角形の形状を持つように形
成した実施態様にも上述と同様に有効に適用できる。且
つまた保持本体(11)、保持ロツド(14)は高純度アル
ミナ材で作成することが好ましく、吊りボルト(20)は
先端部にナツトを螺結する雄ネジを具備させ得るような
耐熱金属で作成することが好ましい。
For an electric furnace, the holding device (10) according to the present invention may be used together with a known holding device (10a) as is clear from FIG. It is preferable to arrange them, but it has been found that the holding device (10) according to the present invention can achieve the intended purpose if it is arranged in at least one row. The holding body (11) has 2
Although the toothed portion (12) has a book shape and is formed in an F shape, the number of toothed portions (12) can be increased or decreased to select one of T-shaped or E-shaped various shapes. And the holding device (1
Although 0) shows a mode applied to a horizontal electric furnace, it can also be adopted to a vertical cylindrical electric furnace. Further, it can be effectively applied to the embodiment in which the coil-shaped resistance heating element (15) is formed to have a rectangular shape as shown in FIG. Moreover, the holding body (11) and the holding rod (14) are preferably made of high-purity alumina material, and the suspension bolt (20) is made of a heat-resistant metal such that a male screw for connecting the nut can be provided at the tip. It is preferable to create.

更に、保持本体(11)はその本数を増減できることに加
え、対向して噛合わせることなく、第4図および第5図
に示すように収容筒(13)側のみに配列し、半径方向外
向きに延びる多数の櫛部(12)に対し軸線方向に延びる
保持ロツド(14)を貫通せしめて、保持装置(10a)を
構成してもよい。この場合も抵抗発熱体(15)は保持本
体(11)の歯部(12)と保持ロツド(14)とで区画され
た空所(17)に遊合される。尚第4図および第5図にお
いて保持本体(11)の櫛部(12)の本数を4本に示して
あるが、櫛部(12)の本数は適宜に増減できる。且つ第
5図には保持装置(10a)を、いわゆる竪型の筒状電気
炉に採用する態様を示したが、第2図あるいは第3図に
示す横型にも採用できる。
Further, in addition to the number of holding bodies (11) being increased or decreased, the holding bodies (11) are arranged only on the side of the housing cylinder (13) as shown in FIGS. 4 and 5 without facing each other and facing outward in the radial direction. The holding device (10a) may be configured by inserting a holding rod (14) extending in the axial direction through a large number of comb portions (12) extending in the direction of. Also in this case, the resistance heating element (15) is fitted in the space (17) defined by the tooth portion (12) of the holding body (11) and the holding rod (14). Although the number of comb portions (12) of the holding body (11) is shown as four in FIGS. 4 and 5, the number of comb portions (12) can be appropriately increased or decreased. Further, FIG. 5 shows a mode in which the holding device (10a) is adopted in a so-called vertical cylindrical electric furnace, but it can also be adopted in the horizontal type shown in FIG. 2 or 3.

加えて第1図および第2図の保持装置(10)を適用する
電気炉にあつて抵抗発熱体(15)を8.0mmφのカンタル
Aで、内径が268mmφ、全長が500mmのコイル態様に形成
したものと、本考案による保持装置(10)によらず周知
の保持装置を用い、且つ同様の抵抗発熱体を用いた電気
炉とを1300℃で約10時間毎30回昇温して比較したとこ
ろ、本考案による保持装置を用いた電気炉では抵抗発熱
体が殆んど垂れ下らなかつたのに対し、従来の保持装置
を採用した電気炉では大巾な垂れ下りが見られ、作動時
間が長期化すればこの傾向が増大することが予測され
た。
In addition, in an electric furnace to which the holding device (10) of FIG. 1 and FIG. 2 is applied, the resistance heating element (15) is made of Kanthal A of 8.0 mmφ, the inner diameter is 268 mmφ, and the total length is 500 mm. When compared with an electric furnace using a well-known holding device regardless of the holding device (10) according to the present invention and using a similar resistance heating element, the temperature was raised at 1300 ° C. about 30 times every 10 hours, In the electric furnace using the holding device according to the present invention, the resistance heating element hardly drooped, whereas in the electric furnace using the conventional holding device, a large droop was observed, and the operating time was long. It was predicted that this tendency would increase if the situation changed.

(発明の効果) 上述のように構成された本考案の保持装置によれば、抵
抗発熱体を安定して保持できるから、抵抗発熱体の塑性
変形を抑制でき、延いては抵抗発熱体の垂れ下りなどに
伴う温度分布の不均一等を有効に防止し得、抵抗発熱体
の長寿命化を図る上、抵抗発熱体の大型化を図つても塑
性変形を抑制できるから、電気炉の大型化あるいは高温
化に寄与し得る等の顕著な実用的効果を達成する。
(Effects of the Invention) According to the holding device of the present invention configured as described above, since the resistance heating element can be stably held, it is possible to suppress plastic deformation of the resistance heating element, and thus the resistance heating element sags. It is possible to effectively prevent uneven temperature distribution due to downhill, etc., to prolong the life of the resistance heating element, and to suppress plastic deformation even if the resistance heating element is made larger. Alternatively, it achieves remarkable practical effects such as contributing to higher temperatures.

【図面の簡単な説明】[Brief description of drawings]

第1図は本考案による抵抗発熱体の保持装置の一実施例
の部分斜視図、第2図は同保持装置を採用した横型電気
炉の一部を切開いて示す斜視図、第3図は同保持装置を
採用した別の態様の電気炉の断面図、第4図は本考案の
他の実施例の部分斜視図、第5図は同保持装置を採用し
た竪型電気炉の一部を切開いて示す斜視図、第6図は従
来の保持装置の側面図、第7図は第6図から90度回転し
た位置で切断した同断面図、第8図は従来の別の保持装
置の側面図、第9図は第8図から90度回転した位置で切
断した同断面図である。 11…保持本体、12…歯部、13…収容筒、14…保持ロツ
ド、15…抵抗発熱体、16…断熱層、17…空所、18…基
面、19…透孔、20…吊りボルト、21…耐熱部材
FIG. 1 is a partial perspective view of an embodiment of a holding device for a resistance heating element according to the present invention, FIG. 2 is a perspective view showing a partial cutaway of a horizontal electric furnace employing the holding device, and FIG. FIG. 4 is a partial perspective view of another embodiment of the present invention which employs a holding device, FIG. 4 is a partial perspective view of another embodiment of the present invention, and FIG. 5 is a partial incision of a vertical electric furnace which employs the holding device. FIG. 6 is a side view of a conventional holding device, FIG. 7 is a cross-sectional view taken at a position rotated 90 degrees from FIG. 6, and FIG. 8 is a side view of another conventional holding device. , FIG. 9 is a sectional view taken at a position rotated by 90 degrees from FIG. 11 ... Retaining body, 12 ... Tooth portion, 13 ... Retaining cylinder, 14 ... Retaining rod, 15 ... Resistance heating element, 16 ... Heat insulating layer, 17 ... Space, 18 ... Base surface, 19 ... Through hole, 20 ... Hanging bolt , 21 ... Heat resistant material

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】被処理物を収容する収容部の周囲にコイル
状の抵抗発熱体(15)を周設し、抵抗発熱体(15)の周
囲に配設される断熱層(16)の内周面で、抵抗発熱体
(15)を支承する保持装置において、収容部の半径方向
に充分な長さを持つ複数の歯部(12)を有した櫛歯状の
保持本体(11)が収容部の軸線方向に沿つて多数配列さ
れ、且つ各保持本体(11)の多数の歯部に対し収容部の
軸線方向に延びる保持ロツド(14)が貫通せしめられ、
抵抗発熱体(15)の各螺旋部が歯部(12)と保持ロツド
(14)とで形成される空所(17)に配置可能に設けられ
てなることを特徴とする保持装置。
1. A heat-insulating layer (16) provided around a resistance heating element (15) in which a coil-shaped resistance heating element (15) is provided around a storage portion for storing an object to be processed. In a holding device that supports a resistance heating element (15) on its peripheral surface, a comb-teeth-shaped holding body (11) having a plurality of teeth (12) having a sufficient length in the radial direction of the housing is housed. The holding rods (14), which are arranged in a large number along the axial direction of the housing portion and which extend in the axial direction of the housing portion, penetrate through the numerous tooth portions of each holding body (11),
A holding device, characterized in that each spiral portion of a resistance heating element (15) is provided so as to be arranged in a space (17) formed by a tooth portion (12) and a holding rod (14).
【請求項2】保持本体(11)はF字状に形成され、且つ
対をなして歯部(12)が噛合うように配列されてなる実
用新案登録請求の範囲第1項記載の保持装置。
2. The holding device according to claim 1, wherein the holding body (11) is formed in an F-shape, and the holding body (11) is arranged in pairs so that the tooth portions (12) mesh with each other. .
【請求項3】保持本体(11)の歯部(12)間の基面(1
8)には透孔(19)が具備され、且つ断熱層(16)の外
周部において基端部を固定した吊りボルト(20)の先端
部が透孔(19)に挿通されて固定可能に設けられてなる
実用新案登録請求の範囲第1項または第2項記載の保持
装置。
3. A base surface (1) between tooth portions (12) of a holding body (11).
8) is provided with a through hole (19), and the tip end of the hanging bolt (20) having the proximal end fixed to the outer peripheral portion of the heat insulating layer (16) can be fixed by being inserted into the through hole (19). The holding device according to claim 1 or 2, wherein the utility model registration is provided.
JP2445188U 1988-02-24 1988-02-24 Holding device for resistance heating element for electric furnace Expired - Lifetime JPH0638316Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2445188U JPH0638316Y2 (en) 1988-02-24 1988-02-24 Holding device for resistance heating element for electric furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2445188U JPH0638316Y2 (en) 1988-02-24 1988-02-24 Holding device for resistance heating element for electric furnace

Publications (2)

Publication Number Publication Date
JPH01136400U JPH01136400U (en) 1989-09-19
JPH0638316Y2 true JPH0638316Y2 (en) 1994-10-05

Family

ID=31244309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2445188U Expired - Lifetime JPH0638316Y2 (en) 1988-02-24 1988-02-24 Holding device for resistance heating element for electric furnace

Country Status (1)

Country Link
JP (1) JPH0638316Y2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5134595B2 (en) * 2009-07-09 2013-01-30 東京エレクトロン株式会社 Heat treatment furnace
TWI565367B (en) * 2010-06-25 2017-01-01 山特維克熱傳動公司 Support structure for heating element coil

Also Published As

Publication number Publication date
JPH01136400U (en) 1989-09-19

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