JPH0637479A - Magnetic shield room - Google Patents

Abstract

PURPOSE:To make it possible to carry out underflow type airconditioning while maintaining magnetic shield effect by installing in a blow-off port for air conditioning a connecting section consisting of a highly permeable thin plate magnetically connected to another highly permeable thin film mounted to both sides of a floor member. CONSTITUTION:A permalloy connecting section 34 installed on the outer wall of a constant static pressure bucket 33 is magnetically connected to permalloy 42a of an inner floor member 42 on the wall of an air blow-out section 45, while a permalloy connecting section 36 to be connected between a synthetic resin blow-out port 31 and a wind rate controller 32 inside the bucket and to the side section of the wind rate controller 32 is installed. Accordingly, the permalloy 42a and permalloy 42b installed on both sides of the inner floor member 42 are connected through the permalloy connecting sections 34 and 36, respectively. A magnetic field externally coming through the permalloy 42a flows away through the permalloy 42a of the inner floor section 42, and a magnetic field coming through the permalloy 42b flows away through the permalloy 42b of the inner floor section 42, thereby being able to reduce the leakage of external magnetic field.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a magnetically shielded room such as a room for biomagnetic measurement or a room for EB exposure of semiconductor facilities.

[0002]

2. Description of the Related Art When a magnetically shielded room is installed, a thin plate of magnetic material, for example, a thin plate of permalloy having high magnetic permeability is used.

This permalloy needs to be finally heat-treated at 1000 ° C. in order to obtain magnetic characteristics after being machined to a predetermined size by cutting, drilling, or the like. In this case, a relatively narrow one is used because of deformation due to heat treatment and size of the heat treatment furnace.

In the case of magnetic shielding, it is known that if a magnetic bond is overlapped with a shield material by a certain size or more, a performance close to that of a single plate can be obtained. Therefore, in such a magnetically shielded room using permalloy, on-site installation is performed by sequentially attaching thin plates of magnetic material by stacking them one by one on the wall of structural material made of non-magnetic material. Was there.

However, the installation of such a conventional magnetically shielded room requires a lot of time on site and requires a construction space. In addition, the construction column requires construction time and cost, the construction cost of the magnetic shield room is high, and the permalloy plate is exposed on the surface of the magnetic shield room, so if a shock is applied to it, distortion will occur and the magnetic shield performance will increase. There was a problem such as a decrease in

Therefore, conventionally, a panel type shield room in which a plurality of shield panels are connected by a joint member has been proposed (see, for example, JP-A-1-150400).

According to this panel type shielded room, it is possible to solve the above-mentioned problems. And
For air conditioning in the magnetically shielded room, for example, a louver type outlet such as a honeycomb or punching metal is provided to prevent the shield performance from deteriorating.

[0008]

However, in the conventional magnetically shielded room as described above, since sufficient air conditioning cannot be performed, there is a possibility that experiments in the magnetically shielded room may be hindered.

Therefore, for example, in Japanese Utility Model Laid-Open No. 63-19603.
No. 9, Japanese Patent Laid-Open No. 2-136643, and Japanese Patent Laid-Open No. 2-
The use of the underfloor air-conditioning air outlet disclosed in Japanese Patent No. 136644, Japanese Unexamined Patent Publication No. 2-136645 and the like has been studied.

In this type of underfloor air conditioning outlet, however, the floor member is provided with an air outlet, so that there is a problem that magnetism enters from that portion. The present invention has been made to solve such conventional problems, and an object thereof is to provide a magnetically shielded room capable of underfloor type air conditioning while maintaining the magnetically shielding effect. is there.

[0011]

According to the present invention, in a magnetically shielded room surrounded by a magnetic shielding material and provided with a door on a wall surface, a plurality of high magnetic permeability materials such as permalloy and silicon steel sheet are provided on both surfaces of a non-magnetic plate. A thin plate is attached, and the wall member, floor member and ceiling member, which are formed by connecting the joints between the thin plates with a thin plate having a high magnetic permeability such as permalloy or silicon steel plate, are joined together, and each joint part is made of permalloy or silicon steel plate. A magnetic shield room frame member connected by a thin plate having a high magnetic permeability, an air blowing portion formed on a floor member of the magnetic shield room frame member, and an air conditioning outlet inserted into the air blowing portion. A space portion formed below the floor member of the magnetic shield room frame member, and the air-conditioning outlet has a high magnetic permeability such as permalloy or a silicon steel plate attached to both sides of the floor member. Thin plate Permalloy magnetically connected, in which the connecting portion made of a thin sheet of high permeability silicon steel plate or the like is provided.

[0012]

In the present invention, when a magnetic field enters from the outside, the magnetic field flows through a plurality of thin sheets having high magnetic permeability such as permalloy of the frame member for the magnetic shield room and silicon steel plate, and the magnetic field is blown by air. When it comes to the outlet, it passes through the thin plate of the magnetic shield room frame member on the downstream side through the connecting portion made of a thin plate of high permeability such as permalloy or silicon steel plate that is magnetically connected to the thin plate of the magnetic shield room frame member. It flows.

The air sent from the air conditioner is taken into the room from the space through the air outlet.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 show an embodiment in which the magnetic shield room according to the present invention is applied to a simplified magnetic shield room, and 10 represents the simplified magnetic shield room.

As shown in FIG. 3, the magnetically shielded room 10 includes an outer wall member 21, an outer floor member 22, and an outer ceiling member 23.
A frame member 10a for a magnetically shielded room, which includes an outer frame 20 formed by joining and an inner wall member 41, an inner floor member 42, and an inner ceiling member 43, and an inner frame inside the outer frame 20. 40 and a holding member 70 for disposing 40 through the space 60.

As shown in FIG. 4, the magnetically shielded room 10 is provided with an entrance / exit door 80 and a pipe 81 for communicating with the air conditioning equipment. The outer wall member 21, the outer floor member 22, and the outer ceiling member 23 that form the outer frame 20 include a plywood, a wood powder press plate, a plastic plate, an aluminum plate,
A plurality of thin sheets 25 having a high magnetic permeability such as permalloy or a silicon steel plate are attached to both sides of a non-magnetic plate 24 such as a lightweight concrete plate, and joints between the thin plates 25 are made of a thin sheet having a high magnetic permeability such as a permalloy or a silicon steel plate. They are connected. By joining the thin plates, each thin plate 25 is magnetically short-circuited.

In this embodiment, the outer wall member 21 and the outer floor member 2 are
As the outer ceiling member 23 and the outer ceiling member 23, for example, permalloy was adhered to both surfaces of hard urethane foam via aluminum thin plates, and permalloy was polymerized with tapping screws (M4 SUS) at each joint.

The outer wall member 21 and the outer floor member 22 are joined, for example, by disposing an aluminum frame inside. Permalloy is attached to the joint surface of the aluminum frame. Also, permalloy is tapping screw (M4 SUS) on the inner joint.
Have been polymerized in.

The outer floor member 22 and the outer ceiling member 23 are
For example, a square pipe made of aluminum is arranged inside, and the square pipe made of aluminum is joined via a bolt. This aluminum square pipe has
Permalloy is attached to the joint surface. In addition, permalloy has tapping screws (M4 SU
Polymerized in S).

On the other hand, the inner wall member 41, the inner floor member 42 and the inner ceiling member 43 constituting the inner frame 40 are provided on both sides of a non-magnetic plate such as plywood, wood powder press plate, plastic plate, aluminum plate and lightweight concrete plate. , Permalloy, silicon steel plates and the like having a plurality of high magnetic permeability, and joints between the thin plates are connected by high magnetic permeability thin plates such as permalloy and silicon steel.

The joint between the inner wall member 41 and the inner floor member 42 and the joint between the inner floor member 42 and the inner ceiling member 43 are
For example, in the inner joint, permalloy is polymerized with tapping bis (M4 SUS), and in the outer joint, permalloy is tapping bis (M4 SUS).
Polymerize with.

The holding member 70 is made of a non-magnetic material such as plywood, wood powder press plate, plastic plate, aluminum plate, and lightweight concrete plate. In this example, an aluminum frame was used.

The holding member 70 is also arranged so as to cover the joints of the inner floor member 42 of the inner frame 40 via the permalloy. Although not shown, permalloy is similarly arranged at the contact portion of the outer frame 20 with the floor member 22.

Then, as shown in FIG. 1, a floor material 44 is attached to the inner floor member 42 through an aluminum pipe 43. As shown in FIG. 1, the inner floor member 42 is provided with an air outlet 45 that communicates with the space 60 below the inner floor member 42.

In the air blowing portion 45, the permalloys 42a and 42b attached to both sides of the inner floor member 42 are extended and joined together. The air outlet 30 is inserted into the air outlet 45.

As shown in FIGS. 1 and 2, the air outlet 30 is a disc-shaped synthetic resin outlet 31 having a large number of outlets 31a, and a cylinder having a large number of notches 32a on its side wall. -Shaped in-bucket air flow rate regulator 32 and bottomed cylindrical static pressure constant bucket 3 having a large number of notches 33a on its side wall
And a bottomed cylindrical permalloy connection portion in which an opening 34a is provided in the outer wall of the static pressure constant bucket 33 in the same pattern as the notch 33a of the static pressure constant bucket 33. 34 are arranged.

The permalloy connecting portion 34 is magnetically connected to the permalloy 42a of the inner floor member 42. The air outlet 30 is attached to the air outlet 45 via a holding member 35 made of aluminum.

The air outlet 30 used in this embodiment is
Except for the connecting portion 34P36, it is basically a practically open Sho 63-1.
Japanese Unexamined Patent Publication No. 96039/1990, Japanese Unexamined Patent Publication No. 2-136643, Japanese Unexamined Patent Publication No. 2-163644, and Japanese Unexamined Patent Publication No. 2-136645.
It has the same configuration and operation as the air outlet for underfloor air conditioning disclosed in Japanese Patent Publication No.

Next, the operation of this embodiment thus constructed will be described. In this magnetically shielded room 10, when a magnetic field enters from the outside, it flows through the outer frame 20. Then, a part of the magnetic field enters the space 60 from the outer frame 20 and flows through the inner frame 40. Since the leaked magnetic field is a small amount as compared with the magnetic field flowing through the outer frame 20, there is no possibility of leaking into the inner frame 40, and the internal measurement is not adversely affected.

Further, the magnetic field invading from the outside causes the inner floor member 42.
When it comes to the air outlet 30 after flowing through the Permalloy 42a of
It flows to the edge of the air outlet 30 which opposes via the bottomed cylindrical permalloy connection part 34, and further flows through the permalloy 42a of the inner floor member 42 on the downstream side.

The air sent from the air conditioner is taken into the simplified magnetic shield room 10 from the space 60 via the air outlet 30. Then, the air in the simplified magnetic shield room 10 is exhausted to the outside through the ceiling-side space 60 via an exhaust duct (not shown).

According to the present embodiment thus constructed, the magnetic shield room 10 has the double structure of the outer frame 20 and the inner frame 40, so that the influence of the leakage of the magnetic field is made extremely small. It becomes possible.

Further, since the air outlet 30 is magnetically connected to the permalloys 42a and 42b of the inner floor member 42 through the bottomed cylindrical permalloy connection portion 34, the inner floor member 42 is formed. The magnetism flowing through the permalloys 42a, 42b of No. 1 does not flow into the room from the air outlet 45, and the permalloys 42a, 42b of the inner floor member 42 on the downstream side are
The leakage of the magnetic field from the outside can be reduced.

Therefore, it becomes possible to use the air outlet for the underfloor air conditioning, which could not be installed by the conventional method, in the magnetic shield room. FIG. 5 shows another embodiment in which the magnetic shield room according to the present invention is applied to a simple type magnetic shield room.

In this embodiment, the connection part 34 made of permalloy provided on the outer wall of the static pressure constant bucket 33 is magnetically connected to the permalloy 42a of the inner floor member 42 on the wall surface of the air blowing part 45, and is combined. A connection part 36 made of Permalloy that is connected between the resin outlet 31 and the in-bucket air flow rate adjuster 32 and to the side of the in-bucket air flow rate adjuster 32 is provided.

Therefore, the permalloys 42a and 42b provided on both sides of the inner floor member 42 are separately connected via the permalloy connecting portions 34 and 36. According to this embodiment thus configured, when the magnetic field invading from the outside flows through the permalloys 42a, 42b of the inner floor member 42 and reaches the air outlet 30, the magnetic field flowing through the permalloy 42a is The magnetic field that flows through the permalloy 42a of the inner floor member 42 of the air outlet 30 that opposes through the bottomed cylindrical permalloy connecting portion 34, and the magnetic field that flows through the permalloy 42b is made of permalloy. Permalloy 42b of the inner floor member 42 of the air outlet 30, which is opposed via the connecting portion 36.
The leakage of the magnetic field from the outside can be reduced.

In the above embodiment, the case of applying to the simplified magnetic shield room has been described, but the present invention is not limited to this. Further, in the above-mentioned embodiment, the case of using a thin plate of permalloy as the material of high magnetic permeability has been described, but a silicon steel plate may be used.

The magnetic permeability of the silicon steel sheet has directionality, and
Exhibits shielding ability against magnetic lines of force in only one direction. Therefore, by superposing one silicon steel sheet having a vertical shielding ability and one silicon steel sheet having a horizontal shielding ability, the shielding ability is exerted against the magnetic force from all directions. Is possible.

In addition to the field of biomagnetism, the present invention also includes an EB exposure room for semiconductor facilities, which requires a dust-free construction especially in a short construction period, and a geophysical mineral magnetic field measurement at low cost. Further, it can be used for experiments such as experiments on magnetic shields using a superconductor, in which the magnetic field flux due to the earth's magnetic field or the like is accumulated in the superconductor material.

[0040]

As described above, according to the present invention, the air outlet provided in the floor member is magnetically connected to the thin plate having a high magnetic permeability such as permalloy or silicon steel plate attached to both sides of the floor member. Since a connecting part made of a thin sheet of high magnetic permeability such as permalloy, silicon steel plate, etc. is provided, when a magnetic field invading from the outside comes to the air outlet, permalloy, silicon steel plate, etc. on the downstream side through the connecting part. It can flow to a thin plate with high magnetic permeability and does not flow into the room, enabling underfloor air conditioning.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view of a main part of a simplified magnetic shield room according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of an air conditioning outlet in FIG.

FIG. 3 is a longitudinal sectional view of a main part of the simplified magnetic shield room in FIG.

FIG. 4 is a front view of the simplified magnetic shield room in FIG.

FIG. 5 is a longitudinal sectional view of an essential part of a simplified magnetic shield room according to another embodiment of the present invention.

[Explanation of symbols]

 10 Simple Type Magnetic Shield Room 10a Frame Member for Magnetic Shield Room 20 Outer Frame 21 Outer Wall Member 22 Outer Floor Member 23 Outer Ceiling Member 30 Air Outlet 34, 36 Connection Portion 40 Inner Frame 41 Inner Wall Member 42 Inner Floor Member 43 Inner Ceiling Member 60 space 70 holding member

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kiyoaki Okuda 8-21-1, Ginza, Chuo-ku, Tokyo Stock company Takenaka Corporation Tokyo Main Store (72) Inventor Masahiro Fukui 4 Honmachi, Chuo-ku, Osaka-shi, Osaka Chome 1-13 Takenaka Corporation Osaka Main Store

Claims (1)

[Claims] 1. In a magnetically shielded room surrounded by a magnetically shielding material and provided with a door on a wall surface, a plurality of thin sheets having a high magnetic permeability such as permalloy and a silicon steel sheet are attached to both surfaces of a non-magnetic sheet, and each thin sheet is sandwiched between them. Join the wall member, floor member, and ceiling member, which are formed by connecting the joints with a thin plate having high magnetic permeability such as permalloy or silicon steel plate, and connect each joint with a thin plate having high magnetic permeability such as permalloy or silicon steel plate. A frame member for a magnetic shield room, an air blow-out portion formed on a floor member of the frame member for a magnetic shield room, an air-conditioning outlet inserted into the air blow-out portion, and the magnetic shield room frame member And a space portion formed on the lower side of the floor member, and the air-conditioning outlet is a part that is magnetically connected to a thin plate having high magnetic permeability such as permalloy or silicon steel plate attached to both sides of the floor member. Roy, magnetic shield room, wherein a connecting portion made of a thin plate of high permeability silicon steel plate or the like is provided.