JPH0634371Y2 - Melt surface observation tool - Google Patents
Melt surface observation toolInfo
- Publication number
- JPH0634371Y2 JPH0634371Y2 JP1990100580U JP10058090U JPH0634371Y2 JP H0634371 Y2 JPH0634371 Y2 JP H0634371Y2 JP 1990100580 U JP1990100580 U JP 1990100580U JP 10058090 U JP10058090 U JP 10058090U JP H0634371 Y2 JPH0634371 Y2 JP H0634371Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- melt
- melt surface
- tool
- surface observation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
【考案の詳細な説明】 ［考案の目的］ （産業上の利用分野） 本考案は引上げ法によって単結晶を製造するに際し、融
液表面を上方から観察する場合に使用する融液表面観察
用具に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial field of application) The present invention relates to a melt surface observing tool used for observing the melt surface from above when producing a single crystal by the pulling method. .
（従来の技術） 引上げ法とは単結晶を作成するための手法であり、とり
わけ第３図ではチョクラルスキー法（以下CZ法と称す）
が示されている。第３図に示すように単結晶育成炉１内
にるつぼ２を設け、この内部に原料を入れる。そして外
部から高周波加熱コイル３により加熱して融液４をつく
り、この融液内に種結晶５を浸し、この結晶を上方に引
上げることにより単結晶を製造する。(Prior Art) The pulling method is a method for producing a single crystal, and in particular, the Czochralski method (hereinafter referred to as the CZ method) is shown in FIG.
It is shown. As shown in FIG. 3, a crucible 2 is provided in a single crystal growth furnace 1 and a raw material is put therein. A high-frequency heating coil 3 is externally heated to form a melt 4, a seed crystal 5 is immersed in the melt, and the crystal is pulled upward to produce a single crystal.
又、上方への結晶の引上げは結晶の成長具合に合せて行
なう必要があり、育成炉１の横方向（方向）から結晶
を観察しながら慎重に行なっていた。Further, it is necessary to pull the crystal upward in accordance with the growth condition of the crystal, and it was carefully performed while observing the crystal from the lateral direction (direction) of the growth furnace 1.
（考案が解決しようとする課題） 上記従来装置の場合、育成状況の観察が斜め上方からで
あるため、視野が限られていた。そのため融液表面の流
れ及び結晶の育成状況の変化を正しく判断することは不
可能であった。またサーモビュア（放射温度計）等を用
い、育成に伴なう融液表面の温度分布の変化を知ること
は制御上必要であるにも拘らず、被測定物を鉛直方向か
ら観察することが困難なため、実施されてはいなかっ
た。(Problems to be Solved by the Invention) In the case of the above-mentioned conventional apparatus, the field of view is limited because the observation of the growing condition is performed obliquely from above. Therefore, it was impossible to correctly judge the change in the flow on the surface of the melt and the growth of crystals. In addition, it is difficult to observe the DUT from the vertical direction, although it is necessary for the control to know the change in the temperature distribution on the melt surface during growth using a thermoviewer (radiation thermometer). Therefore, it was not implemented.
本考案は上記事情に鑑みてなされたものであり、結晶の
成長過程を上方から観察することの可能な融液表面観察
用具を提供することを目的としている。The present invention has been made in view of the above circumstances, and an object thereof is to provide a melt surface observing tool capable of observing a crystal growth process from above.
［考案の構成］ （課題を解決するための手段及び作用） 上記目的を達成するため、本考案は引上げ法によって原
料融液から単結晶を製造する場合の用具であって、枠体
を用いて塔状の立体を形成し、上部を傾斜部とすると共
に、この傾斜部には中心部に孔を有するミラーを載置す
るよう構成した。[Structure of Device] (Means and Actions for Solving the Problem) In order to achieve the above object, the present invention is a tool for producing a single crystal from a raw material melt by a pulling method, which uses a frame body. A tower-shaped three-dimensional body was formed, and an upper portion was formed as an inclined portion, and a mirror having a hole in the central portion was placed on this inclined portion.
したがって上面から見た融液はミラーによって屈折し
て、外部から見ることができる。Therefore, the melt seen from the upper surface is refracted by the mirror and can be seen from the outside.
（実施例） 以下図面を参照して実施例を説明する。(Examples) Examples will be described below with reference to the drawings.
第１図は本考案による融液表面観察用具の一実施例の構
成図であり、斜視図として示す。FIG. 1 is a constitutional view of an embodiment of the melt surface observing tool according to the present invention, which is shown as a perspective view.
第１図において、10は融液表面観察用具本体であり、枠
体11とミラー12とからなる。In FIG. 1, 10 is a melt surface observation tool main body, which is composed of a frame 11 and a mirror 12.
枠体11は４本の柱11−１と部材11−２によって立体を形
成し、上方には部材11−３によって傾斜部を構成した。
なお、上方に設けた傾斜部の角度θは45°とする。ミラ
ー12は傾斜部に載置するものであり、その中心位置には
孔13が設けられ、かつミラーそものは２分割12−1,12−
２されている。The frame 11 forms a solid body with four pillars 11-1 and a member 11-2, and an inclined portion is formed above the member 11-3.
The angle θ of the inclined portion provided above is 45 °. The mirror 12 is mounted on an inclined portion, a hole 13 is provided at the center of the mirror 12, and the mirror itself is divided into two parts 12-1 and 12-.
2 has been done.
第２図は第１図のＸ−Ｘ′から見たミラーのみの断面図
であり、孔13の側壁は傾斜している。これは融液表面観
察用具本体10の傾斜部に載置したとき、孔13の側壁が鉛
直方向となるためであり、この部分には結晶の引上軸が
挿通される。そしてミラーの上面（第２図の上面）はス
リガラス状とし、下面（第２図の下面）は鏡面となって
いる。FIG. 2 is a sectional view of only the mirror viewed from XX 'in FIG. 1, and the side wall of the hole 13 is inclined. This is because the side wall of the hole 13 becomes vertical when it is placed on the inclined portion of the melt surface observation tool body 10, and the crystal pulling shaft is inserted through this portion. The upper surface (upper surface in FIG. 2) of the mirror has a ground glass shape, and the lower surface (lower surface in FIG. 2) is a mirror surface.
次に作用について説明する。Next, the operation will be described.
第１図に示す融液表面観察用具本体を、単結晶育成炉の
上方に据付ける。この場合、るつぼに浸す種結晶を上方
に引上げる引上軸（第３図の６）がミラーの孔13の中心
を通るように設定する。The melt surface observation tool body shown in FIG. 1 is installed above the single crystal growth furnace. In this case, the pulling shaft (6 in FIG. 3) for pulling up the seed crystal immersed in the crucible is set so as to pass through the center of the hole 13 of the mirror.
このようにすると育成中における融液表面は、上部にあ
るミラーに写し出され、これが45°の傾斜にて屈折して
外部から見ることができる。In this way, the surface of the melt during the growth is projected on the upper mirror, which is refracted at an inclination of 45 ° and can be seen from the outside.
上記実施例によれば傾斜部の角度を45°として説明した
が、これに限定されるものではない。なんとなれば反射
して見えてくる方向から見ればよいからでる。Although the angle of the inclined portion is 45 ° in the above embodiment, the angle is not limited to this. This is because you can see it from the direction in which it is reflected and visible.
［考案の効果］ 以上説明したように、本考案によれば枠体の上部を傾斜
させ、この傾斜部上に中心に孔を有するミラーを載置し
た構成としたので、この枠体を単結晶育成炉の上部に据
付けた場合、融液表面及び育成状況の変動を正確に知る
ことができ、その観察結果から育成条件を正しく制御す
ることができる。[Effects of the Invention] As described above, according to the present invention, the upper portion of the frame body is inclined, and the mirror having the hole at the center is placed on the inclined portion. When it is installed on the upper part of the growth furnace, it is possible to accurately know the fluctuation of the melt surface and the growth condition, and it is possible to correctly control the growth condition from the observation result.
そして、本考案では、ミラーの面積が大であるため視野
が広く、構造も単純であって安価である。又、枠体が容
器と別体であるため設定に自由度があり、かつミラーの
交換が容易である。更にミラーの上面を粗面としている
ために乱反射がなくなって像が鮮明となる。Further, in the present invention, since the area of the mirror is large, the field of view is wide, and the structure is simple and inexpensive. Further, since the frame body is separate from the container, there is a degree of freedom in setting and the mirror can be easily replaced. Furthermore, since the upper surface of the mirror is rough, diffuse reflection is eliminated and the image becomes clear.
第１図は本考案による融液表面観察用具の一実施例の構
成図、第２図は第１図のＸ−Ｘ′線から見たミラーの断
面図、第３図はCZ法を説明する図である。 １……単結晶育成炉、２……るつぼ ３……高周波加熱コイル、４……融液 ５……種結晶、６……引上軸10 ……融液表面観察用具、11……枠体 12……ミラー、13……孔FIG. 1 is a block diagram of an embodiment of a melt surface observing tool according to the present invention, FIG. 2 is a sectional view of a mirror taken along the line XX 'in FIG. 1, and FIG. 3 is a CZ method. It is a figure. 1 ... Single crystal growth furnace, 2 ... Crucible, 3 ... High-frequency heating coil, 4 ... Melt, 5 ... Seed crystal, 6 ... Pulling shaft, 10 ... Melt surface observation tool, 11 ... Frame 12 ... Mirror, 13 ... hole
Claims (1)
する場合に使用する用具であって、枠体を用いて育成炉
とは別体とした塔状の立体を形成し、前記立体の上部を
傾斜部とすると共に、この傾斜部には中心部に孔を有す
るミラーを２分割して載置し、このミラーの上面を粗面
とすることを特徴とする融液表面観察用具。1. A tool used when a single crystal is produced from a raw material melt by a pulling method, wherein a column-shaped solid body separate from a growth furnace is formed by using a frame body, A tool for observing a melt surface, characterized in that an upper part is an inclined part, and a mirror having a hole in the center part is placed on the inclined part in two parts, and the upper surface of the mirror is a rough surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990100580U JPH0634371Y2 (en) | 1990-09-26 | 1990-09-26 | Melt surface observation tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990100580U JPH0634371Y2 (en) | 1990-09-26 | 1990-09-26 | Melt surface observation tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456764U JPH0456764U (en) | 1992-05-15 |
| JPH0634371Y2 true JPH0634371Y2 (en) | 1994-09-07 |
Family
ID=31843341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990100580U Expired - Lifetime JPH0634371Y2 (en) | 1990-09-26 | 1990-09-26 | Melt surface observation tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634371Y2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63233100A (en) * | 1986-11-27 | 1988-09-28 | Sumitomo Electric Ind Ltd | Device for producing high-dissociation pressure compound single crystal |
-
1990
- 1990-09-26 JP JP1990100580U patent/JPH0634371Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0456764U (en) | 1992-05-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |