JPH06341377A - Rotating fluid feeder for ultrahigh vacuum - Google Patents

Abstract

PURPOSE: To provide an all metal sealed type rotation fluid deliverty device for supplying fluid to a device such as an electron beam source assembly under a ultra high vacuum environment. CONSTITUTION: An ultra high vacuum compression gasket forms an ultra high vacuum seal between a spindle 14 and a turntable 70. A first end of bellows 80 is installed to inlet 32 and outlet 34 ports, while opposed ends are installed to the opposed inlet 66 and outlet 68 lines extending to a rotatable device and extended to a housing through the spindle 14 and the turntable 70. The bellows 80 are wound up inside the housing and divided by a non-abrasive material. After installation to the ports and lines, the overall length of respective bellows 80, 82 is maintained within a single plane during the rotation along the same axis as the rotation axis of the device. When the spindle 14 is rotated up to 360 deg., the oppositely wound bellows move along the rotation axis of the spindle 14, and on the same plane, one of them is wound up while the other is unwound.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an ultra high vacuum.
vacuum, UHV) rotary fluid supply for use in an environment, and more particularly, an all-metal sealed rotary for supplying coolant to a rotary multi-crucible electron beam evaporation source assembly for use in an ultra-high vacuum environment. Possible regarding bellows.

[0002]

Rotating assemblies for use in high vacuum environments, rather than ultra-high vacuum environments, are known in the art. Generally, a rotating device is a rotating hearth.
Multiple crucibles (crucible) formed in a circular array on the top of the
s). The rotating hearth continuously moves the crucible to the target area where, for example, an electron beam from a radiation mechanism vaporizes the material within the crucible to deposit a thin film on the substrate. Rotating crucible assemblies generally require a fluid supply for supplying coolant to a cooling channel formed in the crucible assembly. Prior art fluid supply devices for rotating devices in high vacuum environments generally use a rotating device made of an elastomeric material or ferrofluid and with seals located at the connection points to provide ambient coolant supply. Maintaining a pressure differential between the source and the high vacuum environment of the actuator. The elastomeric material and ferrofluid form a flexible seal that can withstand the twisting that occurs at the juncture as the hearth rotates. For example, the ultra high vacuum environment used in physical vapor deposition thin film forming methods and semiconductor fabrication processes for integrated circuits requires exposing the assembly to high temperatures. Elastomer materials and magnetic fluids used as seals in high vacuum environments cannot be used in ultra high vacuum environments for several reasons. The first reason is that these materials cannot secure an ultra-high vacuum environment, and the second reason is that these materials cannot withstand high temperatures. The ultra high vacuum environment requires an all-metal sealed fluid supply to prevent outgassing.

All-metal sealed fluid supply devices for ultra-high vacuum environments are known in the prior art. Generally, such devices use welded bellows with metal compression seals, and the metal seals cannot withstand the torsion caused by rotation, so the crucibles are arranged in a linear array. . For thin film deposition, for example, the crucible is continuously moved through a radiating mechanism using a long all-metal welded bellows assembly. In general, linear assemblies are longer and cumbersome than the preferred rotary type devices used in high vacuum environments. Applicant's pending U.S. patent application 07 / 972,131 discloses a novel ultra-high vacuum all-metal sealed rotary fluid supply for supplying fluid to rotating assemblies operating in ultra-high vacuum environments. Have been described. This preferred embodiment uses an inlet bellows and an outlet bellows that are rolled and unwound together in the same plane in response to rotation of the crucible. According to a feature of the present invention, the inlet bellows and the outlet bellows are wound in opposite directions, so that when the crucible is rotated, one bellows is unwound when the other bellows is unwound. Torque is reduced. According to another characteristic of the invention, the coaxially arranged inlet and outlet bellows pairs are wound and unwound in the same direction.

[0004]

The broad object of the present invention is to:
It is an object of the present invention to provide an all-metal sealed rotatable fluid supply device for a rotating device in an ultra-high vacuum environment that can solve the limitations and drawbacks of the prior art. A particular object of the present invention is to provide an all-metal sealed rotatable fluid supply for ultra-high vacuum for cooling multiple crucibles in a rotating electron beam evaporation source assembly for thin film deposition in ultra-high vacuum environments. Especially. Another special object of the present invention is to provide an ultra-high vacuum all-metal sealed rotatable fluid supply device for a rotating device comprising a bellows assembly, the axis of rotation of which is substantially the same as the axis of rotation of the bellows assembly. To provide. Another special object of the invention is
It is an object of the present invention to provide a compact, inexpensive and simple all-metal seal type rotatable fluid supply device suitable for operating conditions up to 10 ^-11 Torr and 250 ° C. Another special object of the present invention is to provide an ultrahigh vacuum rotatable fluid supply device having a mechanism for maintaining a separation state between an inlet bellows and an outlet bellows to prevent wear and entanglement of both bellows. Especially.

Another special object of the present invention is to provide an all-metal sealed fluid supply device for ultra-high vacuum in which the inlet bellows and the outlet bellows are wound in opposite directions, and the torque of the rotating crucible can be reduced. Especially. Yet another particular object of the present invention is to provide a coaxially mounted bellows device in which the inlet and outlet bellows pairs are unwound and wound together in the same direction.

[0006]

SUMMARY OF THE INVENTION An all-metal sealed rotatable fluid supply device according to the present invention for use in an ultra high vacuum environment has a cylindrical housing having a side wall of the housing with a fluid inlet port and a fluid inlet port. A fluid outlet port is formed. The inlet and outlet molded bellows have their first ends attached to the inlet and outlet ports, respectively. Both bellows are located in a cylindrical housing and separated from each other by a plate made of non-abrasive material. Opposite ends of both bellows are respectively attached to opposite ends of an inlet line and an outlet line extending from a rotating device such as an electron gun assembly. The length of each bellows remains in a single plane after being installed in the appropriate ports and lines. The inlet and outlet lines form a bend of approximately 90 ° before being passed through an opening in a cylindrical toroidal turntable formed in the upper flat surface of the housing. The turntable is bolted to the base of the spindle of the rotating device, between which is formed an ultrahigh vacuum seal and a watertight seal with a ductile ultrahigh vacuum compression gasket. When the spindle rotates up to 360 °, the bellows is rolled and unwound along the axis of rotation of the spindle. Since both bellows are mounted at opposite inlets, one bellows is rolled when the other is unwound, the unrolling and unrolling occurring respectively in the same horizontal plane within the housing.

According to another feature of the invention, at least one
Two additional bellows pairs are provided and the bellows housing is slightly larger to accommodate two inlet bellows and two opposing outlet bellows. According to yet another feature of the invention, one bellows of the bellows pair is coaxially mounted inside the other bellows, with the inlet and outlet bellows being rolled and unwound together in the same direction. With respect to this feature, a pair of coaxially mounted bellows is added and the coaxial inlet line is positioned opposite the coaxial outlet line so that the coaxially mounted outlet line is wound when the coaxially mounted inlet line is wound. It can also be configured so that the line is unraveled. These and other objects, advantages and features of the present invention will become more apparent from the following detailed description of the preferred embodiments of the invention which is set forth in connection with the accompanying drawings.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An ultrahigh vacuum rotary fluid supply apparatus embodying the principles of the present invention and suitable for operation in an ultrahigh vacuum environment is shown generally at 50 in FIGS. The vacuum rotary fluid supply device 50 supplies water for cooling the electron gun assembly generally designated by the numeral 10. The illustrated electron gun assembly 10 is for illustration purposes only and is pending for a pending U.S. patent application Ser.
It is described in more detail in 07 / 972,131. It will be appreciated that other electron gun assemblies can be used, the fluid supply 50 and in an ultra-high vacuum environment can be used with any rotating device that requires a supply of circulating fluid. Although the fluid supply is suitable for temperatures up to 250 ° C, the exemplary environment has the following specifications: 10
^-11 torr vacuum and 220 ° C temperature. The exemplary electron beam source assembly 10 is used to evaporate material to deposit a thin film on a substrate in an ultra high vacuum environment.
The shielded electron gun mechanism is generally designated by the numeral 20, and the electron gun mechanism 20 includes a recess 22 at one end of the block 2.
It is housed inside. This electron gun mechanism and magnetic structure
It is fully described in the above-referenced US patent application Ser. No. 07 / 972,131 and is merely exemplary in the present application. Other electron gun assemblies may be used in place of this electron gun mechanism.

As shown in FIGS. 1 and 2, the electron beam source assembly 10 includes four cylindrical copper crucibles 3, 5, 7, and 9.
To form a generally circular copper block 2, each crucible having a frustoconical side wall 6 and a bottom wall 8. The unitary structure block 2 further forms a spindle 14, and in the hole of the base plate 4, the spindle 1
Bearings 16 are provided to support 4.
A drive shaft 24 extends from a conventional drive mechanism 26 to conventional bevel gears 28, 29 that mesh with each other.
4 rotates the spindle 14 in a manner well known in the art. The drive mechanism 26 can be located on the side or rear of the assembly 10 as is well known in the art. The block 2 is formed with a number of conventional water passages 12 for circulating water or other suitable coolant. The water passage 12 allows water to flow spirally around the crucible. Ultra-high vacuum rotary fluid supply device 50
Supplies fluid to and from the fluid inlet and outlet ports, the housing, and the electron source assembly 10.
And a bellows assembly within the housing for returning fluid from the.

A cylindrically machined OFHC copper housing defines a flat top wall 54, a flat bottom wall 56 and a stainless steel alloy side wall 58. Top wall 54
And a plurality of bolts 6 to secure the bottom wall 56 to the side wall 58.
0 is used. Inside the housing 52, between the top wall 54 and the bottom wall 56, is provided a separating wall 62 made from a non-abrasive material, preferably a soft metal such as copper. The side walls 58 are provided with openings (not shown) that receive conventional water source port inlets 32 and water port outlets 34 for supplying water to and returning water from the channels 12. The housing 52 further defines a cylindrical flanged annular recess 64 for receiving the base 15 of the spindle 14. Inside the annular recess 64, a cylindrical toroidal turntable 70 is attached to the base 15 of the spindle 14 by bolts 72. A high vacuum gasket 74 made of ductile copper is provided between the flat sealing surface of the turntable 70 and the base portion 15 of the spindle 14 to form an ultra high vacuum sealing structure according to the principle well known in the prior art. There is. The copper gasket 74 forms a knife edge (not shown), and when clamped between the base 15 and the turntable 70, an ultra-high vacuum joint formed by the turntable 70 and the base 15. A seal is formed to prevent water from leaking between them. Those skilled in the art will appreciate the gasket 74
It will be appreciated that other suitable soft metallic materials can be used as.

Water inlet line 66 and water outlet line 68
From the passage 12 through the spindle 14 and through the mating holes formed in the base 15 and turntable 70 into the housing 52. Both water lines 66 and 68
Are the inlet end of the bellows 80 and the bellows 8 respectively.
2 to form substantially opposite right-angled bends to be attached to the outlet ends of the two, and the inlet line 66 is the outlet line 68.
Are oriented at an angle of approximately 180 °. Bellows 8
0 and 82 are bellows made of stainless steel, and the ports 32 and 34 and the lines 66 and 6 are provided at both ends of each bellows.
8 is provided with a mounting flange 83. As shown in FIG. 2, when attached to ports and lines, the overall length of bellows 80, 82 is maintained within a single plane and within the axis of rotation of spindle 14. The water supply is maintained at ambient "A" inside the bellows 80, 82 isolated from the ultra-high vacuum environment "V" within the housing 52 and electron source assembly 10. The copper separation wall 62 allows the inlet bellows 80 and the outlet bellows 82 to operate independently, and the fact that the wall 62 is made of soft copper material means that the copper top wall 54 and bottom wall 56 of the housing 52 are made. In cooperation with both bellows 80, 82 to prevent entanglement and wear. If it is desired to place both bellows next to each other, the separating wall 62 can be placed vertically within the housing 52. Alternatively, the separation wall 62 can be omitted if a single bellows is used or if a pair of coaxial bellows is used.

3-6 illustrate crucibles 3, 5, 7, 9 for bombardment by an electron beam from radiation assembly 20.
7 illustrates the position of the outlet bellows 82 above when the electron source assembly 10 is rotated in turn to position each of the. FIG. 3 shows the fully wound bellows 82 as the crucible 3 is exposed to the electron beam. FIG. 4 shows the crucible turned into position, which causes the bellows 82 to begin to unravel. Figure 5
FIG. 6 shows a position where the crucible 7 is rotated to a predetermined position and the bellows 82 is further unraveled. FIG. 6 shows a position where the crucible 5 is exposed to the electron beam and the bellows 82 is unraveled. It is a thing. In FIG. 7, both bellows 8
The state where 0 and 82 are attached facing each other is shown. During assembly of the device, the spindle 14 is preferably positioned in its fully wound position (indicated by the arrow "W") so that the crucible 9 is in the first position and the crucible 9 is in the first position. In this configuration, the lower inlet bellows 8
0 is installed in the unwind position shown and outlet bellows 82 is installed in its fully wound position. When the electron source assembly 10 is operating, rotating the spindle 14 in the opposite direction (indicated by the arrow direction "U") causes the bellows 80 to be rolled and the bellows 82 to be unwound.

3-6 show a 270 ° rotation. 27
A suitable stopper (not shown) may be provided to prevent rotation above 0 °. As is apparent from the drawings, the bellows 80, 82 act as compression springs that unwind and unwind in a single plane as they rotate along the axis of rotation of the spindle 14. Bellows 80, 8
The opposite unwinding / unwinding action of 2 effectively cancels the torque generated on the spindle 14 by the unwinding and unwinding of the bellows. The rotation of the spindle 14 is performed smoothly and uniformly. A person skilled in the art can use the device of the present invention to
It will be appreciated that a rotation of 60 ° can be achieved. FIG. 8 shows another feature of the invention with two pairs of bellows in opposite directions. The housing 52 includes two inlet bellows 80 ', 80 "and two opposite outlet bellows 8.
Larger to accommodate 2 ', 82 ". Separation wall 62
In addition, copper separation walls 62 'and 62 "are provided to maintain the separation between the two inlet bellows 80' and 80" and the two outlet bellows 82 'and 82 ". There are two inlet lines 66, 66 'and an inlet port 32 attached to these two pairs of bellows and two outlet lines 68, 68' and an outlet port 34. Alternatively, the second A second housing for the pair of bellows, and a single inlet and outlet line, each line provided with a split coupling end for attachment to each pair of bellows, It can also be provided.

FIG. 9 illustrates another feature of the present invention in which one bellows 800 is coaxially mounted within another bellows 820. In this regard, both bellows 80
0 and 820 are wound and unwound together during rotation.
The inlet line 660, the outlet line 680, the inlet port and the outlet port are also arranged coaxially. One skilled in the art can provide two pairs of coaxial bellows,
In this case, it is understood that the coaxial inlet line and the coaxial outlet line can be arranged in opposite directions so that the coaxial inlet bellows is wound when the coaxial outlet bellows is unwound. See. From the foregoing, those skilled in the art to which the present invention pertains will suggest a wide variety of modifications to the embodiments and implementations of the principles of the invention. For example, the rotary fluid supply device of the present invention can be used in any high vacuum environment and ultra high vacuum environment using a rotary device that requires a gas-containing fluid supply. The present invention relates to a technique for producing an electron beam source for producing a thin solid film coating on a substrate such as semiconductor industry, material research for superconductivity, coating for lenses and mirrors, jewelry and other decorative coatings and automotive coatings. Applicable. Furthermore, the bellows have bellows in opposite directions.
As long as it can rotate in the same substantially single plane as the axis of rotation of the rotating device to be supplied, it can be arranged in another configuration which is 90 ° perpendicular to the configuration shown. Also, the bellows housing can be positioned at any position that supplies fluid to the axis of the rotating mechanism of the device to allow rotation of the bellows housing. Also, the housing may be permanently attached to the spindle of the rotating assembly by welding rather than bolting. The description and description herein should not be construed as limiting the scope of the invention, which is set forth in more detail in the claims.

[Brief description of drawings]

FIG. 1 is a plan view of an ultra-high vacuum rotary fluid supply device embodying the principles of the present invention, showing the use of the device in an electron gun assembly.

2 is a cross-sectional view of the device of FIG. 1 taken along line 2-2.

FIG. 3 is a plan view showing one of the bellows together with a spindle and a crucible, one of the winding and unwinding positions of the bellows when the spindle is rotated 270 ° from the first crucible position to the fourth crucible position. Is shown.

FIG. 4 is a plan view showing one of the bellows together with a spindle and a crucible, one of the unwinding and unwinding positions of the bellows when the spindle is rotated 270 ° from the first crucible position to the fourth crucible position. Is shown.

FIG. 5 is a plan view showing one of the bellows together with a spindle and a crucible, one of the unwinding and unwinding positions of the bellows when the spindle is rotated 270 ° from the first crucible position to the fourth crucible position. Is shown.

FIG. 6 is a plan view showing one of the bellows together with the spindle and the crucible, one of the unwinding and unwinding positions of the bellows when the spindle is rotated 270 ° from the first crucible position to the fourth crucible position. Is shown.

FIG. 7 is a plan view with the upper housing removed and the lower bellows shown in dashed lines, with the crucible fully rotated, the upper bellows rolled and the lower bellows fully unwound. Is.

FIG. 8 is a cross-sectional view showing another feature of the invention with two inlet lines, two outlet lines, two inlet bellows and two outlet bellows.

FIG. 9 is a cross-sectional view showing another feature of the present invention showing a coaxial bellows configuration with one bellows located inside the other bellows.

[Explanation of symbols]

2 blocks 3 copper crucible 4 base plate 5 copper crucible 7 copper crucible 9 copper crucible 10 electron gun assembly (electron beam source assembly, electron source assembly) 12 water passage (channel) 14 rotating spindle 15 rotating spindle base 24 drive shaft 26 Drive Mechanism 32 Water Source Port Inlet 34 Water Port Outlet 50 Rotating Fluid Supply Device for Ultra High Vacuum 52 Housing 62 Separation Wall 66 Water Inlet Line 68 Water Outlet Line 70 Toroidal Turntable 80 Inlet Bellows 82 Outlet Bellows 660 Inlet Line 680 Outlet Line 800 Bellows 820 Bellows

Claims (21)

[Claims] 1. An all-metal sealed rotatable fluid supply device for supplying fluid to a rotating device in an ultra-high vacuum environment, comprising: rotating means connected to the rotating device and having one rotation axis; At least one first and second molded bellows means coupled to the means and rolled and unwound with the rotating means within the axis of rotation of the rotating means; and one of the at least one first and second molded bellows means.
A fluid inlet means supported in one side and extending to said rotator, and a fluid outlet means supported in one of said at least one first and second shaped bellows means and extending from said rotator. An all-metal sealed rotatable fluid supply device having. 2. The all-metal sealed rotatable fluid supply device of claim 1, further comprising housing means for said at least one first and second molded bellows means. 3. The all metal seal type rotating machine according to claim 2, further comprising ductile sealing means for forming a fluid seal and an ultra-high vacuum seal between the rotating means and the rotating device. Fluid supply device. 4. The all-metal sealed rotatable fluid supply device of claim 3, wherein the housing means further comprises a hole in which the rotating means is mounted. 5. Port means into said housing means for connecting said fluid inlet means to one first end of at least one shaped bellows means and a second end of said at least one shaped bellows means. 5. An all-metal seal according to claim 4, further comprising inlet line means for attaching to the section, the inlet line means extending into the rotating means and extending into the rotating device. Type rotatable fluid supply device. 6. Port means into said housing means for connecting said fluid outlet means to one first end of at least one shaped bellows means and a second end of said at least one shaped bellows means. 6. An all-metal sealed mold as claimed in claim 5, further comprising outlet line means for attaching to the section, the outlet line means extending into the rotating means and into the rotating device. Rotatable fluid supply device. 7. The all-metal sealed rotatable fluid supply device according to claim 6, wherein the inlet line means and the outlet line means face each other. 8. The method of claim 7 further comprising separating means within the housing means for maintaining the at least one first and second molded bellows means in a separated state. All metal seal type rotatable fluid supply device. 9. During rotation of the all-metal sealed rotatable fluid supply device, one of said at least one first and second molded bellows means is wound within the axis of rotation of the rotating means and the other is rotated by the rotating means. An all-metal sealed rotatable fluid supply device according to claim 8, characterized in that it is unwound in the axis. 10. The at least one first and second shaped bellows means comprises one inlet bellows and one opposing outlet bellows, the inlet line means being attached to the one inlet bellows. 10. An inlet line comprising one inlet line, said outlet line means comprising one outlet line opposite said inlet line means and attached to said one opposing outlet bellows. All metal seal type rotatable fluid supply device. 11. The at least one first and second shaped bellows means comprises at least two inlet bellows and at least two opposed outlet bellows, the inlet line means attached to the at least two inlet bellows. At least two inlet lines, said outlet line means comprising at least two outlet lines opposite said at least two inlet line means and attached to said at least two opposing outlet bellows. The all-metal sealed rotatable fluid supply device according to claim 9. 12. The separating means comprises a first wall between the at least two inlet bellows and at least two opposing outlet bellows, a second wall between the at least two inlet bellows, and at least two outlets. The all-metal sealed rotatable fluid supply device according to claim 11, further comprising a third wall between the bellows. 13. The all-metal sealed rotatable fluid supply device of claim 9, wherein the device is a rotating electron beam source assembly having a plurality of crucibles. 14. The at least one first and second shaped bellows means comprises a first bellows coaxially mounted within a second bellows, the first and second bellows being wound together. The all-metal sealed rotatable fluid supply device according to claim 6, characterized in that it is unwound. 15. The at least two coaxially mounted at least one first and second shaped bellows means.
15. The all-metal sealed rotatable fluid supply device of claim 14 having one inlet bellows and at least two opposing outlet bellows mounted coaxially. 16. Further comprising separating means within said housing means for maintaining said at least two inlet bellows separated from said at least two opposing outlet bellows. Claim 15
The all-metal seal type rotatable fluid supply device according to [4]. 17. One of the inlet line means and the outlet line means is coaxially mounted inside the other, and the inlet port means and the outlet port means are
15. The all-metal sealed rotatable fluid supply device according to claim 14, wherein one of these is coaxially mounted inside the other. 18. An all-metal sealed fluid supply device for supplying fluid to a rotating device in an ultra-high vacuum environment, comprising: a rotating means connected to the rotating device so as to rotate with the rotating device; Housing means with holes for mounting the means, fluid inlet line means and fluid outlet line means extending from the device through the rotating means and into the interior of the housing means, and through port holes in the housing means. A fluid inlet port means and a fluid outlet port means extending therethrough and at least one pair of shaped bellows means mounted within the housing means, the shaped bellows means comprising the fluid inlet line means and the fluid. A first end connected to the outlet line means and a second end connected to the fluid inlet port means and the fluid outlet port means A first shaped bellows of the at least one pair of shaped bellows means is wound within the axis of rotation of the rotating means, while a second shaped bellows of the at least one pair of shaped bellows means is rotated by the rotating means. To be solved in the axis,
An all-metal sealed fluid supply device characterized by: 19. An all-metal sealed fluid supply device for supplying fluid to a rotating device in an ultra-high vacuum environment, the rotating means being connected to the rotating device so as to rotate together with the rotating device, and the rotating device. Housing means with holes for mounting the means, fluid inlet line means and fluid outlet line means extending from the device through the rotating means and into the interior of the housing means, and through port holes in the housing means. A fluid inlet port means and a fluid outlet port means extending therethrough and at least one pair of molded bellows means coaxially mounted within the housing means, the molded bellows means comprising the fluid inlet line means. And a first end connected to the fluid outlet line means and a second end connected to the fluid inlet port means and the fluid outlet port means. And a section, all metal seal type fluid supply apparatus, wherein the coaxially attached molded bellows means is released the wound with the rotation axis of the rotating means and. 20. The coaxially mounted shaped bellows means comprises an inlet bellows and an outlet bellows coaxially mounted to the coaxially mounted inlet and outlet lines. Item 20. The all-metal sealed fluid supply device according to Item 19. 21. The coaxially mounted molded bellows means includes a pair of coaxially mounted inlet bellows and a pair of coaxially mounted opposed outlet bellows. 20. The all-metal sealed fluid supply device according to claim 19.