JPH06331362A - Vibration gyroscope - Google Patents

Vibration gyroscope

Info

Publication number
JPH06331362A
JPH06331362A JP5144314A JP14431493A JPH06331362A JP H06331362 A JPH06331362 A JP H06331362A JP 5144314 A JP5144314 A JP 5144314A JP 14431493 A JP14431493 A JP 14431493A JP H06331362 A JPH06331362 A JP H06331362A
Authority
JP
Japan
Prior art keywords
mode
vibration
resonance frequency
vibrator
gyro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5144314A
Other languages
Japanese (ja)
Inventor
Yuichi Kiyono
雄一 清野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP5144314A priority Critical patent/JPH06331362A/en
Publication of JPH06331362A publication Critical patent/JPH06331362A/en
Pending legal-status Critical Current

Links

Landscapes

  • Gyroscopes (AREA)

Abstract

PURPOSE:To reduce the generation of noises attributed to demodulation by a third vibration mode. CONSTITUTION:An H-shaped vibrator has four arms. The H-shaped vibrator has a first mode (a) in which the arms vibrate longitudinally as viewed from the front of the H shape thereof and a second mode (b) and a third mode (c) in which the arms vibrate horizontally. A resonance frequency of the first mode (a) is separated sufficiently from the resonance frequencies of the second mode (b) and the third mode (c) because of difference in the direction of vibration. Therefore, the resonance frequency of the third mode (c) is separated sufficiently from the resonance frequency of the drive mode (a). When a vibration gyroscope is carried on a vehicle, the vibration of the vehicle (external vibration) is transmitted to the vibrator but the vibration of the third mode will not be generated easily. Thus, there is limited possibility of generating noises attributed to the demodulation by the vibration of the third mode with respect to the output signal of the piezo-electric element for detection.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、振動子が振動モード
に関して、駆動モードおよびコリオリ力が作用した時に
振動する検出モード以外の第3の振動モードを持つ振動
ジャイロに関し、主としてH形の振動子を持つ振動ジャ
イロに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration gyro having a third vibration mode other than a drive mode and a detection mode in which a vibrator vibrates when a Coriolis force acts. Vibrating gyro with.

【0002】[0002]

【従来の技術】図4に従来の振動ジャイロの外観、図5
にその振動子の振動モード、図6にこの振動ジャイロに
おけるノイズ発生に関する振動ジャイロ出力を示す。振
動ジャイロ1は、縦寸法m・横寸法nの矩形断面の4本
のアーム2を有し高さ寸法hのH形の振動子3を持ち、
H形の正面から見て各アーム2の左右の外側にそれぞれ
駆動用圧電素子4を貼り付け、各アーム2の正面側にそ
れぞれ検出用圧電素子5を貼り付けている。
2. Description of the Related Art FIG. 4 is an external view of a conventional vibrating gyro, FIG.
FIG. 6 shows a vibration mode of the vibrator, and FIG. 6 shows a vibration gyro output regarding noise generation in this vibration gyro. The vibration gyro 1 has four arms 2 each having a rectangular cross section with a vertical dimension m and a horizontal dimension n, and an H-shaped vibrator 3 having a height dimension h,
The driving piezoelectric elements 4 are attached to the left and right outer sides of each arm 2 when viewed from the front of the H-shape, and the detecting piezoelectric elements 5 are attached to the front side of each arm 2.

【0003】このH形振動子3には、図5(a)に示す
ようにアーム2がH形の正面から見て前後に振動する第
1モード、図5(b)に示すように左右のアーム2どう
しは互いに反対向きで左右方向に振動し上下のアーム2
どうしも同じく互いに反対向きで左右方向に振動する第
2モード、図5(c)に示すように左右のアーム2どう
しは互いに反対向きで左右方向に振動し上下のアーム2
どうしは同じ向きで左右方向に振動する第3モードの各
振動モードがある。第2モードと第3モードとは同じく
左右方向の振動であるから、両者の共振周波数は互いに
近い。これに対して、第1モードの振動方向は第2モー
ドおよび第3モードの振動方向と直角で異なるから、第
1モードの共振周波数は第2モードや第3モードの共振
周波数から十分離れている。
The H-shaped vibrator 3 has a first mode in which the arm 2 vibrates back and forth when viewed from the front of the H-shape as shown in FIG. 5 (a), and as shown in FIG. The arms 2 vibrate in the left and right directions opposite to each other and the upper and lower arms 2 vibrate.
The second mode also vibrates in the left and right directions opposite to each other. As shown in FIG. 5C, the left and right arms 2 vibrate in the opposite directions and vibrate in the left and right directions.
There are vibration modes of the third mode that vibrate in the same direction in the left and right directions. Since the second mode and the third mode are vibrations in the left-right direction as well, their resonance frequencies are close to each other. On the other hand, since the vibration direction of the first mode is different from the vibration directions of the second mode and the third mode at right angles, the resonance frequency of the first mode is sufficiently separated from the resonance frequencies of the second mode and the third mode. .

【0004】上記従来の振動ジャイロ1の駆動・検出方
式は、駆動用圧電素子4の駆動により振動子3が図5
(b)の駆動モード(第2モード)bで振動し、この振
動子3に角速度が加わりコリオリ力が作用した時に図5
(a)の検出モード(第1モード)aで振動し、検出用
圧電素子5がこの検出モードaの振動を検出する方式で
ある。そして従来の振動子3においては、駆動モードb
の共振周波数と検出モードaの共振周波数との差が12
0Hz程度であった。これは、駆動モードbの共振周波
数と検出モードaの共振周波数とを互いに接近させると
振動ジャイロの感度が高くなること、および両共振周波
数が接近し過ぎると外部振動によるノイズが大きくなる
ことの両者を考慮し、その妥協点として120Hz程度
に設定していたものである。
In the conventional driving / detecting method of the vibration gyro 1 described above, the vibrator 3 is driven by the driving piezoelectric element 4 as shown in FIG.
When vibrating in the drive mode (second mode) b of (b), an angular velocity is applied to this oscillator 3 and a Coriolis force acts,
This is a method of vibrating in the detection mode (first mode) a of (a), and the detection piezoelectric element 5 detects the vibration of this detection mode a. In the conventional vibrator 3, the drive mode b
The difference between the resonance frequency of the
It was about 0 Hz. This is because when the resonance frequency of the drive mode b and the resonance frequency of the detection mode a are brought close to each other, the sensitivity of the vibration gyro becomes high, and when both resonance frequencies are too close, noise due to external vibration becomes large. In consideration of the above, the compromise was set to about 120 Hz.

【0005】[0005]

【発明が解決しようとする課題】ところで、上記従来の
振動ジャイロ1を例えば車両に搭載した場合、駆動して
いる振動ジャイロ1に車両の振動による外部振動が加わ
ると、駆動モードbの共振周波数に近似した共振周波数
を持つ第3モードcの振動が容易に発生する。この第3
モードcの振動が発生すると、この第3モードcの振動
が検出用圧電素子5の出力信号を振幅変調し、これが外
部振動によるノイズとなっていた。その様子を図6に示
す。図6(イ)はショック印加時のジャイロ出力、同図
(ロ)はその時のNull信号を示す。図示のように、
第3モードcの振動が検出用圧電素子5の出力信号を振
幅変調することによるノイズが明確に発生している。
By the way, when the conventional vibration gyro 1 is mounted on, for example, a vehicle, when the external vibration due to the vibration of the vehicle is applied to the driving vibration gyro 1, the resonance frequency of the drive mode b is increased. Vibration of the third mode c having an approximate resonance frequency easily occurs. This third
When the vibration of the mode c occurs, the vibration of the third mode c amplitude-modulates the output signal of the detection piezoelectric element 5, and this becomes noise due to external vibration. This is shown in FIG. FIG. 6A shows the gyro output when a shock is applied, and FIG. 6B shows the Null signal at that time. As shown,
Noise due to amplitude modulation of the output signal of the detection piezoelectric element 5 by the vibration of the third mode c is clearly generated.

【0006】本発明は上記従来の欠点を解消するために
なされたもので、振動子に駆動モードおよび検出モード
以外に第3の振動モードがある場合に、第3の振動モー
ドによる変調に起因するノイズ発生の少ない振動ジャイ
ロを提供することを目的とする。
The present invention has been made to solve the above-mentioned conventional drawbacks, and is caused by the modulation by the third vibration mode when the vibrator has the third vibration mode other than the drive mode and the detection mode. An object is to provide a vibration gyro with less noise generation.

【0007】[0007]

【課題を解決するための手段】上記課題を解決する本発
明は、振動子がその振動モードについて駆動モードと検
出モードとの関係にある2つの振動モード以外に第3の
振動モードを持つ振動ジャイロにおいて、前記振動子の
駆動モードとして、その共振周波数が他の振動モードの
共振周波数に対して最も離れた振動モードを選択したこ
とを特徴とする。
According to the present invention for solving the above-mentioned problems, a vibrating gyroscope having a third vibrating mode in addition to two vibrating modes in which a vibrating mode thereof has a relationship between a driving mode and a detecting mode. In the drive mode of the vibrator, a vibration mode whose resonance frequency is farthest from the resonance frequencies of other vibration modes is selected.

【0008】請求項2は、請求項1の振動ジャイロにお
いて、振動子の駆動モードの共振周波数と他の振動モー
ドの共振周波数との差を200Hz以上に設定したこと
を特徴とする。
According to a second aspect of the invention, in the vibrating gyroscope according to the first aspect, the difference between the resonance frequency of the drive mode of the vibrator and the resonance frequency of the other vibration mode is set to 200 Hz or more.

【0009】[0009]

【作用】上記構成において、駆動モードで振動している
振動子に外部振動が加わっても、駆動モードの共振周波
数が第3モードの共振周波数から十分離れているので、
第3モードの振動による振幅変調が行われるおそれは少
ない。したがって、変調に起因するノイズの発生のおそ
れは少ない。
In the above structure, even if external vibration is applied to the vibrator vibrating in the drive mode, the resonance frequency in the drive mode is sufficiently separated from the resonance frequency in the third mode.
It is unlikely that the amplitude modulation is performed by the third mode vibration. Therefore, it is unlikely that noise due to modulation will occur.

【0010】通常の車両(主として自動車)に発生し得
る振動の周波数は0〜200Hz程度であるから、振動
子の駆動モードの共振周波数と他の振動モードの共振周
波数との差を200Hz以上とすると、上述の第3の振
動モードによる振幅変調のおそれはなくなり、車両に搭
載した場合における振動ジャイロのノイズ発生は少なく
なる。
Since the frequency of vibration that can occur in a normal vehicle (mainly an automobile) is about 0 to 200 Hz, if the difference between the resonance frequency of the drive mode of the vibrator and the resonance frequency of other vibration modes is 200 Hz or more. The risk of amplitude modulation due to the above-mentioned third vibration mode is eliminated, and noise generation in the vibration gyro when mounted on a vehicle is reduced.

【0011】[0011]

【実施例】以下、本発明の一実施例を図面を参照して説
明する。図1に本発明の振動ジャイロの外観、図2にそ
の振動子の振動モード、図3にこの振動ジャイロにおけ
るノイズ発生に関する振動ジャイロ出力を示す。振動ジ
ャイロ11は、矩形断面の4本のアーム12を有するH
形の振動子13を持ち、H形の正面から見て各アーム1
2の左右の外側にそれぞれ検出用圧電素子15を貼り付
け、各アーム12の正面側にそれぞれ駆動用圧電素子1
4を貼り付けている。なお、検出用圧電素子15および
駆動用圧電素子14の枚数は一部を省略することは可能
である。そして、振動子11の各部の寸法は、振動子1
1のアーム12の矩形断面の縦寸法mは従来の振動子1
の縦寸法mと同寸法とし、横寸法n’は従来の振動子1
の横寸法nより小さくしている。なお、振動子11の高
さ寸法hは従来と同じである。したがって、この振動子
11の第1モードaの共振周波数と第2モードbの共振
周波数との差は、従来の振動子1における両モードa、
bの差より大きい。この第1モードaの共振周波数と第
2モードbの共振周波数との差は、従来は120Hz程
度であったのに対して、例えば200Hz程度にする。
200Hzとするのは、通常、車両(自動車)に発生し
得る振動の周波数が0〜200Hz程度であるからであ
り、これにより、当該振動ジャイロを車両に搭載した時
の第3モードcの振動(その共振周波数は第2モードb
の共振周波数と近似している)が発生することは少なく
なる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows an external view of the vibration gyro of the present invention, FIG. 2 shows a vibration mode of the vibrator, and FIG. 3 shows a vibration gyro output regarding noise generation in the vibration gyro. The vibrating gyro 11 has four arms 12 each having a rectangular cross section.
Each arm 1 with a H-shaped vibrator 13 when viewed from the front of the H-shape
Piezoelectric elements 15 for detection are attached to the outer sides of the left and right sides of 2, and the piezoelectric elements 1 for driving are attached to the front side of each arm 12.
4 is pasted. Note that it is possible to omit some of the numbers of the detection piezoelectric elements 15 and the driving piezoelectric elements 14. The dimensions of each part of the vibrator 11 are the same as those of the vibrator 1
The vertical dimension m of the rectangular cross section of the arm 12 of FIG.
The vertical dimension m is the same as the horizontal dimension n '
Is smaller than the lateral dimension n. The height h of the vibrator 11 is the same as the conventional one. Therefore, the difference between the resonance frequency of the first mode a of the vibrator 11 and the resonance frequency of the second mode b is
It is larger than the difference of b. The difference between the resonance frequency of the first mode a and the resonance frequency of the second mode b is about 120 Hz in the past, but is set to about 200 Hz, for example.
The frequency of 200 Hz is usually because the frequency of the vibration that can occur in the vehicle (automobile) is about 0 to 200 Hz, whereby the vibration of the third mode c when the vibration gyro is mounted in the vehicle ( The resonance frequency is the second mode b
(Which is close to the resonance frequency of) is less likely to occur.

【0012】振動子11のアーム12に対する検出用圧
電素子15および駆動用圧電素子14の貼り付け方から
分かる通り、本発明では第1モードaを駆動モード、第
2モードbを検出モードとしている。したがって、本発
明において第3モードcの共振周波数は、従来例の図5
の説明で述べた通り、第1モードである駆動モードaの
共振周波数から十分離れている。
As can be seen from how to attach the detecting piezoelectric element 15 and the driving piezoelectric element 14 to the arm 12 of the vibrator 11, the first mode a is the driving mode and the second mode b is the detecting mode in the present invention. Therefore, in the present invention, the resonance frequency of the third mode c is as shown in FIG.
As described in the above description, it is sufficiently separated from the resonance frequency of the drive mode a which is the first mode.

【0013】上記の振動ジャイロ11において、駆動用
圧電素子14を駆動すれば振動子13が図2(a)の駆
動モード(第1モード)aで振動し、この振動子13に
角速度が加わりコリオリ力が作用した時振動子11が図
2(b)の検出モード(第2モード)bで振動し、検出
用圧電素子5がこの検出モードbの振動を検出する。こ
の振動ジャイロ11を例えば車両に搭載した場合、駆動
している振動ジャイロ11に車両の振動による外部振動
が加わると、前述のように第3モードcの共振周波数は
駆動モードaの共振周波数から十分離れているので、こ
の第3モードcの振動は容易に発生しない。したがっ
て、この第3モードcの振動が検出用圧電素子5の出力
信号を振幅変調して外部振動によるノイズを発生させる
おそれは少ない。その様子を図3に示す。図3(イ)は
ショック印加時のジャイロ出力、同図(ロ)はその時の
Null信号を示す。図示のように、第3モードcの振
動が検出用圧電素子15の出力信号を振幅変調するノイ
ズは発生していない。
In the vibrating gyro 11, when the driving piezoelectric element 14 is driven, the vibrator 13 vibrates in the driving mode (first mode) a shown in FIG. 2A, and an angular velocity is applied to the vibrator 13 to cause Coriolis. When a force is applied, the vibrator 11 vibrates in the detection mode (second mode) b in FIG. 2B, and the detection piezoelectric element 5 detects the vibration in the detection mode b. When this vibration gyro 11 is mounted on a vehicle, for example, when external vibration due to vibration of the vehicle is applied to the driving vibration gyro 11, the resonance frequency of the third mode c is sufficiently larger than the resonance frequency of the drive mode a as described above. Since they are separated from each other, the vibration of the third mode c does not easily occur. Therefore, it is unlikely that the vibration of the third mode c amplitude-modulates the output signal of the detection piezoelectric element 5 to generate noise due to external vibration. The situation is shown in FIG. FIG. 3A shows the gyro output when a shock is applied, and FIG. 3B shows the Null signal at that time. As shown in the figure, there is no noise in which the vibration of the third mode c amplitude-modulates the output signal of the detection piezoelectric element 15.

【0014】駆動モードとする第1モードaと検出モー
ドとする第2モードbとの両共振周波数の差は、当該振
動ジャイロを搭載する対象物により適切に設定するとよ
い。すなわち、共振周波数差が搭載対象物に発生し得る
機械的振動の周波数範囲を越えるように設定するとよ
い。
The difference between the resonance frequencies of the first mode a, which is the driving mode, and the second mode b, which is the detection mode, may be set appropriately depending on the object on which the vibrating gyro is mounted. That is, the resonance frequency difference may be set to exceed the frequency range of mechanical vibration that can occur in the object to be mounted.

【0015】[0015]

【発明の効果】本発明によれば、振動子が駆動モード・
検出モード以外の第3の振動モードを持つ振動ジャイロ
において、振動子の駆動モードとして、その共振周波数
が他の振動モードの共振周波数に対して最も離れる振動
モードを選択しているので、振動子に外部振動が加わっ
ても、第3の振動モードが発生することは少ない。した
がって、検出用圧電素子の出力信号に対してこの第3の
振動モードの振動による振幅変調が行われるおそれは少
なく、この変調に起因するノイズ発生のおそれは少な
い。
According to the present invention, the vibrator is in the drive mode
In the vibration gyro having the third vibration mode other than the detection mode, the vibration mode whose resonance frequency is farthest from the resonance frequencies of the other vibration modes is selected as the driving mode of the vibrator. Even if external vibration is applied, the third vibration mode rarely occurs. Therefore, the output signal of the detecting piezoelectric element is less likely to be amplitude-modulated by the vibration of the third vibration mode, and the noise due to this modulation is less likely to occur.

【0016】請求項2の振動ジャイロによれば、振動子
の駆動モードの共振周波数と他の振動モードの共振周波
数との差が、通常の車両に発生し得る振動の周波数の範
囲200Hzを越えているので、第3の振動モードによ
る振幅変調のおそれはなくなり、車両に搭載した場合に
おける振動ジャイロのノイズ発生は少なくなる。
According to the vibration gyro of the present invention, the difference between the resonance frequency of the drive mode of the vibrator and the resonance frequency of the other vibration modes exceeds a frequency range of 200 Hz which can occur in a normal vehicle. Therefore, there is no fear of amplitude modulation due to the third vibration mode, and the noise generation of the vibration gyro when mounted on a vehicle is reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す振動ジャイロの斜視図
である。
FIG. 1 is a perspective view of a vibrating gyroscope showing an embodiment of the present invention.

【図2】本発明の振動ジャイロの振動子の振動モードに
ついての説明図である。
FIG. 2 is an explanatory diagram of a vibration mode of a vibrator of the vibration gyro of the present invention.

【図3】本発明の振動ジャイロにおけるノイズ発生に関
する振動ジャイロ出力の図である。
FIG. 3 is a diagram of a vibration gyro output related to noise generation in the vibration gyro of the present invention.

【図4】従来の振動ジャイロの斜視図である。FIG. 4 is a perspective view of a conventional vibrating gyro.

【図5】従来の振動ジャイロの振動子の振動モードにつ
いての説明図である。
FIG. 5 is an explanatory diagram of a vibration mode of a vibrator of a conventional vibration gyro.

【図6】従来の振動ジャイロにおけるノイズ発生に関す
る振動ジャイロ出力の図である。
FIG. 6 is a diagram of a vibration gyro output related to noise generation in a conventional vibration gyro.

【符号の説明】[Explanation of symbols]

11 振動ジャイロ 12 アーム 13 振動子 14 駆動用圧電素子 15 検出用圧電素子 11 Vibration Gyro 12 Arm 13 Vibrator 14 Driving Piezoelectric Element 15 Detecting Piezoelectric Element

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 振動子がその振動モードについて駆動モ
ードと検出モードとの関係にある2つの振動モード以外
に第3の振動モードを持つ振動ジャイロにおいて、 前記振動子の駆動モードとして、その共振周波数が他の
振動モードの共振周波数に対して最も離れる振動モード
を選択したことを特徴とする振動ジャイロ。
1. A vibrating gyroscope having a third vibrating mode in addition to two vibrating modes in which the vibrating mode has a relationship between a driving mode and a detecting mode, wherein the vibrating mode of the vibrating element has a resonance frequency as a driving mode. The vibration gyro is characterized in that the vibration mode selected is the farthest from the resonance frequency of other vibration modes.
【請求項2】 前記振動子の駆動モードの共振周波数と
他の振動モードの共振周波数との差を200Hz以上に
設定したことを特徴とする請求項1記載の振動ジャイ
ロ。
2. The vibration gyro according to claim 1, wherein a difference between a resonance frequency of a drive mode of the vibrator and a resonance frequency of another vibration mode is set to 200 Hz or more.
JP5144314A 1993-05-24 1993-05-24 Vibration gyroscope Pending JPH06331362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5144314A JPH06331362A (en) 1993-05-24 1993-05-24 Vibration gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5144314A JPH06331362A (en) 1993-05-24 1993-05-24 Vibration gyroscope

Publications (1)

Publication Number Publication Date
JPH06331362A true JPH06331362A (en) 1994-12-02

Family

ID=15359211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5144314A Pending JPH06331362A (en) 1993-05-24 1993-05-24 Vibration gyroscope

Country Status (1)

Country Link
JP (1) JPH06331362A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003028644A (en) * 2001-07-12 2003-01-29 Denso Corp Angular velocity sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003028644A (en) * 2001-07-12 2003-01-29 Denso Corp Angular velocity sensor

Similar Documents

Publication Publication Date Title
CN1782714B (en) Acceleration sensor
KR970702474A (en) A micromachine oscillator for oscillogyrometer
CA2263995C (en) Angular velocity detector
NO892345L (en) DEVICE AND PROCEDURE FOR AN ANTI-DISCOVERING RISK Vibration by a ring laser gyroscope.
KR100527351B1 (en) Vibrating gyroscope and angular velocity sensor
EP1054234B1 (en) Inertial sensor
JPH06331362A (en) Vibration gyroscope
JP3000888B2 (en) Vibrating gyro
US5578754A (en) Vibration-type angular-velocity sensor
JP3736257B2 (en) Vibrator and angular velocity detection device
JP3966719B2 (en) Angular velocity measuring device
JP2888244B2 (en) Vehicle
JP3006652B2 (en) Body mounting structure of vehicle angular velocity sensor
JP2671020B2 (en) Vibrating gyro
JP2614483B2 (en) Vibrating gyro
KR940005945A (en) Oscillator Gyroscope Measuring Device
JPH0326411Y2 (en)
JPH095086A (en) Tuning fork type angular speed detector
JP3028999B2 (en) Vibrating gyro
JP4591787B2 (en) Vibrator and angular velocity measuring device
EP0684450B1 (en) Supporting structure of vibrator
JP2009222666A (en) Oscillator for oscillating gyroscope, and manufacturing method therefor
JP2000009478A (en) Piezoelectric oscillation gyro
JPH04118515A (en) Angular speed detector and acceleration detector
JP3356012B2 (en) Vibrating gyro