JPH06323954A - Spot detection method and device - Google Patents

Spot detection method and device

Info

Publication number
JPH06323954A
JPH06323954A JP10928093A JP10928093A JPH06323954A JP H06323954 A JPH06323954 A JP H06323954A JP 10928093 A JP10928093 A JP 10928093A JP 10928093 A JP10928093 A JP 10928093A JP H06323954 A JPH06323954 A JP H06323954A
Authority
JP
Japan
Prior art keywords
change amount
grid
sensor
brightness
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10928093A
Other languages
Japanese (ja)
Other versions
JPH0799355B2 (en
Inventor
Tadashi Itagaki
忠司 板垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Engineering Corp
Original Assignee
Toshiba Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Engineering Corp filed Critical Toshiba Engineering Corp
Priority to JP10928093A priority Critical patent/JPH0799355B2/en
Publication of JPH06323954A publication Critical patent/JPH06323954A/en
Publication of JPH0799355B2 publication Critical patent/JPH0799355B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Optical Filters (AREA)
  • Image Processing (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To provide a spot detection device capable of detecting spots accurately without depending on the detection direction of an inspected target. CONSTITUTION:The detection device is constitution of an area sensor 3 to obtain brightness information at each plurality of pixels arranged two- dimensionally by photographing an inspection target, a brightness information adding part 5 to cut the brightness information at each pixel obtained with the area sensor 3 into grids constituted of pixel matrix in vertical and horizontal lines, add the brightness information of each pixel in each grid and obtain the brightness sum for each grid part, a variation calculation part 7 to obtain a variation of the brightness sum in the horizontal direction and that in the vertical direction in the matrix of 3X3 having the center in each grid and a detection part 9 detecting a spot in the case the variation in vertical direction and the variation in horizontal direction are larger than a specified value.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、検査物の一部分が周囲
と比較して境界が不鮮明でかつ輝度差が微少な斑を検出
する斑検出方法および装置に係り、例えば、液晶ディス
プレイ用のカラーフィルター等の斑を検出する斑検出方
法および装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spot detection method and apparatus for detecting spots in which a part of an inspection object has a blurred boundary and a small difference in brightness as compared with the surroundings. The present invention relates to a spot detection method and device for detecting spots such as a filter.

【0002】[0002]

【従来の技術】従来より、液晶ディスプレイ(以下LC
Dと記す)用のカラーフィルターでは染色斑等に起因し
てカラーフィルターの一部分がぼんやりと明るくなった
り、暗くなったりする欠陥が発生する場合がある。この
斑は、ラインセンサと画像処理装置等を備える斑検出装
置によって検出されている。しかし、斑は境界がはっき
りしていないため、ラインセンサから得られた輝度情報
のみでは検出しにくい。そのため、以下の方法によって
斑を強調することによって検出している。
2. Description of the Related Art Liquid crystal displays (hereinafter referred to as LC
In the color filter for (D), a part of the color filter may become vaguely bright or dark due to stain spots or the like. This spot is detected by a spot detection device including a line sensor and an image processing device. However, since the boundary of the spot is not clear, it is difficult to detect it with only the luminance information obtained from the line sensor. Therefore, it is detected by emphasizing the spots by the following method.

【0003】まず、被検査物をラインセンサで撮像する
ことによって図12に示すような画素毎の輝度情報G1,G
2,G3…を得る。これをグラフに示すと図13aのように
なる。
First, the image of the object to be inspected is picked up by a line sensor to obtain luminance information G1, G for each pixel as shown in FIG.
Get 2, G3 ... This is shown in a graph in FIG. 13a.

【0004】その後、所定の画素数(ここでは、7画素
とする)G1からG7までの輝度情報の加算結果a1をG8から
G14 までの輝度情報の加算結果a2から減算して、差分デ
ータN4を求める。この差分データN4を輝度情報G4に対応
する画素の差分データとする。
After that, the addition result a1 of the luminance information from a predetermined number of pixels (here, 7 pixels) G1 to G7 is obtained from G8.
Difference data N4 is obtained by subtracting from the addition result a2 of the brightness information up to G14. This difference data N4 is the difference data of the pixel corresponding to the brightness information G4.

【0005】次に、G2からG8までの輝度情報の加算結果
b1をG9からG15 までの輝度情報の加算結果b2から減算し
て、輝度情報G5に対応する画素の差分データN5を求め
る。同様にこの処理を続けて行い、全画素について差分
データを求める。求められた差分データをグラフに示す
と図13bのようになり、輝度情報そのまま示した図1
3aに比べて斑が強調されているのが分かる。
Next, the addition result of the luminance information from G2 to G8
The difference data N5 of the pixel corresponding to the brightness information G5 is obtained by subtracting b1 from the addition result b2 of the brightness information from G9 to G15. Similarly, this process is continuously performed to obtain difference data for all pixels. FIG. 13b is a graph showing the obtained difference data, and FIG.
It can be seen that the spots are emphasized compared to 3a.

【0006】そして被検査物をy軸方向に移動して同様
な処理を行なっていくことによって二次元的に斑を強調
して検出している。
Then, the object to be inspected is moved in the y-axis direction and the same processing is carried out, whereby the spots are two-dimensionally emphasized and detected.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、従来の
斑検出装置は、以下のような問題点がある。
However, the conventional spot detection device has the following problems.

【0008】(1)被検査物がLCD用のカラーフィル
ターのように表面が細かく格子状に分けられていて、図
14に示すように被検査物がラインセンサの検出ライン
と水平になっていない場合、ラインセンサの検出ライン
と格子の境界線とが交差してしまい斑の無いところでも
斑と検出する場合がある。
(1) The surface of the inspected object is finely divided into a grid like a color filter for LCD, and the inspected object is not horizontal to the detection line of the line sensor as shown in FIG. In this case, the detection line of the line sensor and the boundary line of the grid may cross each other, and the spot may be detected even when there is no spot.

【0009】(2)ラインセンサの検出ラインと垂直な
図15に示すような斑は検出できるが図16に示すよう
な水平方向全体に渡る斑はラインセンサの検出ライン内
で輝度情報に差が生じないため検出できない。
(2) Spots perpendicular to the detection line of the line sensor as shown in FIG. 15 can be detected, but spots over the entire horizontal direction as shown in FIG. 16 have a difference in luminance information within the detection line of the line sensor. It cannot be detected because it does not occur.

【0010】(3)ラインセンサの周波数特性により、
所定の周期で出力されない周波数があるため、この周期
に同期するような図17に示すような斑は検出できない
場合がある。
(3) Due to the frequency characteristics of the line sensor,
Since there is a frequency that is not output in a predetermined cycle, it may not be possible to detect a spot as shown in FIG. 17 that is synchronized with this cycle.

【0011】本発明は上記事情に鑑みて成されたもので
あり、その目的は、被検査物の検出方向に依存性がな
く、高精度に斑を検出することができる斑検出装置を提
供することにある。
The present invention has been made in view of the above circumstances, and an object thereof is to provide a spot detection apparatus which can detect spots with high accuracy without depending on the detection direction of an object to be inspected. Especially.

【0012】[0012]

【課題を解決するための手段】上記の目的を達成するた
めに本発明は、物被検査物の一部分が周囲と比較して境
界が不鮮明でかつ輝度差が微少な斑を検出する斑検出方
法において、前記被検査物を撮像して二次元に整列配置
された複数の画素毎の輝度情報をセンサで得る工程と、
前記センサによって得られた画素毎の輝度情報を縦横そ
れぞれ所定数の画素行列からなる格子に切り分け、その
各格子内の各画素の輝度情報を加算して各格子毎の輝度
加算値を求める輝度情報加算工程と、各格子間での輝度
加算値の変化量を水平方向および垂直方向のそれぞれに
ついて求める変化量算出工程と、前記水平方向の変化量
と垂直方向の変化量が所定より多い場合、斑と検出する
検出工程とから成ることを特徴としている。
In order to achieve the above object, the present invention provides a spot detecting method for detecting spots in which a part of an object to be inspected has an unclear boundary and a small brightness difference compared with the surroundings. In the step of imaging the object to be inspected with a sensor to obtain luminance information for each of a plurality of pixels arranged in a two-dimensional array,
Luminance information obtained by dividing the luminance information for each pixel obtained by the sensor into lattices each consisting of a predetermined number of vertical and horizontal pixel matrices, and adding the luminance information of each pixel in each lattice to obtain a luminance addition value for each lattice. An addition step, a change amount calculation step of obtaining a change amount of the brightness addition value between the respective grids in the horizontal direction and the vertical direction, and when the change amount in the horizontal direction and the change amount in the vertical direction are larger than a predetermined value, It is characterized by comprising a detection step of detecting.

【0013】また、前記センサが、ラインセンサ若しく
はエリアセンサであることを特徴としている。
The sensor is a line sensor or an area sensor.

【0014】さらに、前記変化量算出工程は、任意の格
子の輝度加算値を中心とした周囲のm行n列のN個(m
×n個)の輝度加算値を基に、予め設定される水平方向
の第1の係数テーブルと垂直方向の第2の係数テーブル
を用いて、水平方向の変化量と垂直方向の変化量を求め
る変化量算出工程であることを特徴としている。
Further, in the change amount calculating step, there are N (m) rows of m rows and n columns around the luminance added value of an arbitrary grid.
Based on the luminance added value of (× n), a horizontal change amount and a vertical change amount are obtained using a preset first horizontal coefficient table and vertical second coefficient table. It is characterized by a change amount calculation step.

【0015】さらに、被検査物の一部分が周囲と比較し
て境界が不鮮明でかつ輝度差が微少な斑を検出する斑検
出装置であって、前記被検査物を撮像して二次元に整列
配置された複数の画素毎の輝度情報を得るセンサと、前
記センサによって得られた画素毎の輝度情報を縦横それ
ぞれ所定数の画素行列からなる格子に切り分け、その各
格子内の各画素の輝度情報を加算して各格子毎の輝度加
算値を求める輝度情報加算部と、各格子間での輝度加算
値の変化量を水平方向および垂直方向のそれぞれについ
て求める変化量算出部と、前記水平方向の変化量と垂直
方向の変化量が所定より多い場合、斑と検出する検出部
とを具備することを特徴としている。
Further, there is provided a spot detecting device for detecting spots in which a part of the object to be inspected is less clear in boundary than the surroundings and has a small difference in luminance, and the object to be inspected is imaged and arranged two-dimensionally. The sensor for obtaining the brightness information for each of the plurality of pixels, and the brightness information for each pixel obtained by the sensor are divided into a grid composed of a predetermined number of pixel matrixes in each of the vertical and horizontal directions, and the brightness information of each pixel in each grid is obtained. A brightness information addition unit that adds the brightness addition value for each grid, a change amount calculation unit that calculates the change amount of the brightness addition value between the grids in each of the horizontal direction and the vertical direction, and the change in the horizontal direction. When the amount and the amount of change in the vertical direction are larger than a predetermined amount, a detection unit that detects a spot is provided.

【0016】さらに、前記センサが、ラインセンサ若し
くはエリアセンサであることを特徴としている。
Further, the sensor is a line sensor or an area sensor.

【0017】さらに、前記変化量算出部は、任意の格子
の輝度加算値を中心とした周囲のm行n列のN個(m×
n個)の輝度加算値を基に、予め設定される水平方向の
第1の係数テーブルと垂直方向の第2の係数テーブルを
用いて、水平方向の変化量と垂直方向の変化量を求める
変化量算出部であることを特徴としている。
Further, the change amount calculating section is arranged in N rows (m × n) (m × n) around the luminance added value of an arbitrary grid.
A change that obtains a horizontal change amount and a vertical change amount by using a preset horizontal first coefficient table and a vertical second coefficient table based on (n) luminance added values. It is characterized by being a quantity calculation unit.

【0018】[0018]

【作用】上記構成によれば、輝度情報加算部では、セン
サによって得られた画素毎の輝度情報を縦横それぞれ所
定数の画素行列からなる格子に切り分け、その各格子内
の各画素の輝度情報を加算する(輝度情報加算工程)。
そして変化量算出部では、各格子間での輝度加算値の変
化量を水平方向および垂直方向のそれぞれについて求め
る(変化量算出工程)。検出部では、求められた水平方
向の変化量と垂直方向の変化量が所定量より多い場合、
斑と検出する(検出工程)。
According to the above structure, the brightness information adding section divides the brightness information for each pixel obtained by the sensor into a grid consisting of a predetermined number of pixel matrixes in each of the vertical and horizontal directions, and calculates the brightness information of each pixel in each grid. Add (luminance information adding step).
Then, the change amount calculation unit obtains the change amount of the brightness addition value between the respective grids in each of the horizontal direction and the vertical direction (change amount calculation step). In the detection unit, when the obtained horizontal variation amount and vertical variation amount are larger than a predetermined amount,
A spot is detected (detection step).

【0019】[0019]

【実施例】図1は、本発明の斑検出装置の一実施例を示
すブロック図であり、センサにエリアセンサを用いた実
施例である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing an embodiment of the spot detecting device of the present invention, in which an area sensor is used as a sensor.

【0020】図1に示すように、斑検出装置1は、エリ
アセンサ3と、輝度情報加算部5と、変化量算出部7
と、検出部9と、表示部11とから構成されている。
As shown in FIG. 1, the spot detecting device 1 includes an area sensor 3, a brightness information adding section 5, and a change amount calculating section 7.
And a detection unit 9 and a display unit 11.

【0021】エリアセンサ3は、被検査物を撮像して二
次元に整列配置された複数の画素毎の輝度情報を得る。
The area sensor 3 picks up an image of an object to be inspected and obtains luminance information for each of a plurality of pixels arranged in a two-dimensional manner.

【0022】輝度情報加算部5は、エリアセンサ3によ
って得られた画素毎の輝度情報を縦横複数の画素行列か
らなる図2に示すような格子に切り分け、その各格子内
の各画素の輝度情報を加算して格子毎の輝度加算値を求
める。
The brightness information addition section 5 divides the brightness information for each pixel obtained by the area sensor 3 into a grid consisting of a plurality of vertical and horizontal pixel matrices as shown in FIG. 2, and the brightness information of each pixel in each grid. Is added to obtain a brightness addition value for each grid.

【0023】変化量算出部7は、各格子間での輝度加算
値の水平方向の変化量および垂直方向の変化量を3行3
列の行列内で求める。
The change amount calculation unit 7 calculates the change amount in the horizontal direction and the change amount in the vertical direction of the brightness addition value between the respective grids in 3 rows and 3 lines.
Find in a matrix of columns.

【0024】検出部9は、変化量算出部7によって求め
られた垂直方向の変化量と、水平方向の変化量を基に被
検査物の斑を検出する。
The detecting section 9 detects the spots on the inspection object based on the vertical variation and the horizontal variation obtained by the variation calculating section 7.

【0025】表示部11は、変化量算出部7によって求
められた垂直方向の変化量と、水平方向の変化量を表示
する。また、エリアセンサ3により得られた画素毎の輝
度情報や輝度情報加算部5によって加算された格子毎の
輝度加算値を表示する。
The display unit 11 displays the amount of change in the vertical direction and the amount of change in the horizontal direction obtained by the change amount calculating unit 7. Also, the brightness information for each pixel obtained by the area sensor 3 and the brightness addition value for each grid added by the brightness information addition unit 5 are displayed.

【0026】次に、本実施例の作用を図3のフローチャ
ートを用いて説明する。なお、ここでは図4に示す中央
部に斑のある光度情報を被検査物とする。
Next, the operation of this embodiment will be described with reference to the flowchart of FIG. In addition, here, the light intensity information having a spot in the central portion shown in FIG.

【0027】まず、被検査物である光度情報をエリアセ
ンサ3により撮像し、輝度を0〜255の256階調で
表した画素毎の輝度情報を得る(ステップST1)。図
4に示された線上の輝度情報を画面表示させると図5に
示すようになる。
First, the light intensity information of the object to be inspected is imaged by the area sensor 3 to obtain the luminance information for each pixel, which represents the luminance in 256 gradations of 0 to 255 (step ST1). When the luminance information on the line shown in FIG. 4 is displayed on the screen, it becomes as shown in FIG.

【0028】画素毎の輝度情報が得られると輝度情報加
算部5では、図2に示すように輝度情報を縦横複数の画
素行列からなる格子に切り分け、その各格子内の各画素
の輝度情報を加算して格子毎の輝度加算値を求める(ス
テップST3,ST5)。なお図2では、縦横とも10
画素ずつの10行10列の格子に区切っているがこれに
限らずこの数は任意に変更可能である。また、図4に示
された線上の格子の輝度加算値を求められた輝度加算値
の最大値で正規化して画面表示させると図6に示すよう
になる。
When the brightness information for each pixel is obtained, the brightness information addition section 5 divides the brightness information into a grid consisting of a plurality of vertical and horizontal pixel matrices, and the brightness information of each pixel in each grid is obtained. Addition is performed to obtain a brightness addition value for each grid (steps ST3 and ST5). In FIG. 2, the vertical and horizontal directions are 10
Although it is divided into a grid of 10 rows and 10 columns for each pixel, the number is not limited to this and this number can be arbitrarily changed. Further, when the luminance addition value of the grid on the line shown in FIG. 4 is normalized by the maximum value of the obtained luminance addition values and displayed on the screen, it becomes as shown in FIG.

【0029】そして、変化量算出部7では、各格子間で
の水平方向の輝度加算値の変化量Hijおよび垂直方向の
輝度加算値の変化量Vijを3行3列の行列内で求める
(ステップST7)。
Then, the change amount calculating section 7 obtains the change amount H ij of the horizontal luminance added value and the change amount V ij of the vertical luminance added value between the respective grids in a matrix of 3 rows and 3 columns. (Step ST7).

【0030】例えば、任意の格子の輝度加算値Σijの水
平方向の変化量Hijと垂直方向の変化量Vijは、図7に
示すようにΣijを中心とした3行3列の9つの格子の輝
度加算値を基に、図8に示す水平方向のSobelフィ
ルター(第1の係数テーブル)と図9に示す垂直方向の
Sobelフィルター(第2の係数テーブル)を用いて
以下に示す式(1)と式(2)によって求める。
For example, the horizontal change amount H ij and the vertical change amount V ij of the luminance addition value Σ ij of an arbitrary grid are 9 in 3 rows and 3 columns centering on Σ ij as shown in FIG. Based on the luminance added value of one grid, the following equation is obtained using the horizontal Sobel filter (first coefficient table) shown in FIG. 8 and the vertical Sobel filter (second coefficient table) shown in FIG. 9. It is obtained by (1) and the equation (2).

【0031】 Hij=|−Σi-1,j-1 −2Σi,j-1 −Σi+1,j-1 +Σi-1,j+1 +2Σi,j+1 +Σi+1,j+1 |…式(1) Vij=|−Σi-1,j-1 +Σi+1,j-1 −2Σi-1,j +2Σi+1,j −Σi-1,j+1 +Σi+1,j+1 |…式(2) そして、求められた水平方向の変化量Hijと垂直方向の
変化量Vijを加算したものをその格子の変化量Cijとす
る。そしてこの変化量Cijを各格子について求める。
H ij = | -Σ i-1, j-1 -2 Σ i, j-1i + 1, j-1 + Σ i-1, j + 1 +2 Σ i, j + 1 + Σ i + 1 , j + 1 | ... Expression (1) V ij = | −Σ i-1, j-1 + Σ i + 1, j-1 −2Σ i-1, j + 2Σ i + 1, j −Σ i-1, j + 1 + Σ i + 1, j + 1 | ... Expression (2) Then, the sum of the obtained horizontal variation amount H ij and vertical variation amount V ij is defined as the lattice variation amount C ij . To do. Then, the change amount C ij is obtained for each grid.

【0032】なお、一番外側の各格子については、その
各格子を中心としたとき格子が9つ存在しないので変化
量Cijが求められないが、一番外側の各格子の一つ内側
の各格子の変化量Cijを求めるときに一番外側の各格子
の輝度加算値を含めて求めているので、この一番外側の
各格子に斑があっても検出することができる。
For each of the outermost lattices, the amount of change C ij cannot be obtained because there are no nine lattices centered around the respective lattices, but the innermost one of the outermost lattices cannot be obtained. Since the brightness addition value of each outermost grid is included when the variation C ij of each grid is calculated, even if there is a spot on each outermost grid, it can be detected.

【0033】さらに、変化量CijはSobelフィルタ
ーを用いて求めているがこれに限らず、他の係数のフィ
ルターや他のマトリクス(2行2列、3行1列等)のフ
ィルターを用いても良い。
Furthermore, the change amount C ij is obtained using the Sobel filter, but the present invention is not limited to this, and it is possible to use other coefficient filters or filters of other matrices (2 rows, 2 columns, 3 rows, 1 column, etc.). Is also good.

【0034】そして検出部9では、求められた変化量C
ijと予め設定されている斑判定しきい値を比較し、求め
られた変化量Cijが予め設定されている斑判定しきい値
より大きい場合、斑と判定する。
Then, in the detecting section 9, the calculated change amount C
ij is compared with a preset spot determination threshold value, and if the obtained change amount C ij is larger than the preset spot determination threshold value, it is determined as spot.

【0035】一方、表示部11では求められた格子毎の
変化量Cijを以下の式(3)を用いて正規化して図10
のように表示する(ステップST9)。
On the other hand, on the display unit 11, the calculated variation C ij for each grid is normalized by using the following equation (3), and FIG.
Is displayed (step ST9).

【0036】Sij=Cij×255/CMax …式(3) ここで、Sijは正規化された変化量、CMax は求められ
た変化量Cijの最大値を示す。このとき図10に示され
た線上の格子の正規化された変化量Sijを表示すると図
11に示すようになり、図4に示された斑が強調されて
いることが分かる。
S ij = C ij × 255 / CMax (3) Here, S ij represents the normalized change amount, and C Max represents the maximum value of the obtained change amount C ij . At this time, when the normalized variation S ij of the grid on the line shown in FIG. 10 is displayed, it becomes as shown in FIG. 11, and it can be seen that the spots shown in FIG. 4 are emphasized.

【0037】このように、エリアセンサ3によって得ら
れた画素毎の被検査物の輝度情報を縦横複数の画素行列
からなる格子に切り分け、その各格子内の各画素の輝度
情報を加算して格子毎の輝度加算値を求めることにより
斑を強調し、各格子間での水平方向の輝度加算値の変化
量Hijおよび垂直方向の輝度加算値の変化量Vijを3行
3列の行列内で求めることによってさらに斑を強調して
いる。そして求められた各格子の変化量Cijと予め設定
してある斑判定しきい値とを比較し、求められた各格子
の変化量Cijが予め設定されている斑判定しきい値より
大きい場合、斑と判定する。
As described above, the brightness information of the object to be inspected for each pixel obtained by the area sensor 3 is divided into a grid consisting of a plurality of vertical and horizontal pixel matrices, and the brightness information of each pixel in each grid is added to form a grid. The unevenness is emphasized by obtaining the brightness addition value for each of the grids, and the change amount H ij of the brightness addition value in the horizontal direction and the change amount V ij of the brightness addition value in the vertical direction between the grids are stored in a matrix of 3 rows and 3 columns. The spots are further emphasized by seeking at. Then, the obtained variation amount C ij of each lattice is compared with a preset spot determination threshold value, and the obtained variation amount C ij of each lattice is larger than the preset spot determination threshold value. In that case, it is determined to be mottled.

【0038】したがって、水平方向と垂直方向の両方で
変化量Hij,Vijを求めて斑をより強調しているため、
被検査物の検出方向に関係なく斑が検出でき、また、被
検査物がLCD用のカラーフィルターのように表面が細
かく格子状に分けられ境界線がある場合でも斑の検出精
度は被検査物の傾きに依存しなくなる。さらに、ライン
センサを用いた場合に検出しにくかった図17のような
所定周期で発生している斑も周期に関係なく検出するこ
とができる。
Therefore, since the variation amounts H ij and V ij are obtained in both the horizontal and vertical directions, the spots are further emphasized.
Irregularities can be detected regardless of the detection direction of the inspected object, and even if the inspected object is divided into fine grid-like surfaces such as an LCD color filter and there are boundary lines, the inspected object can be detected accurately. No longer depends on the slope of. Furthermore, it is possible to detect spots generated in a predetermined cycle as shown in FIG. 17, which is difficult to detect when the line sensor is used, regardless of the cycle.

【0039】なお、本実施例では、水平方向の変化量H
ijと垂直方向の変化量Vijを加算したものをその格子の
変化量Cijとし、その変化量Cijと予め設定してある斑
判定しきい値を比較して斑を判定しているが、水平方向
の変化量Hijと垂直方向の変化量Vijを加算せずに独立
に判定するようにしても良い。
In the present embodiment, the horizontal change amount H
ij is added to the vertical direction change amount V ij to obtain the lattice change amount C ij , and the change amount C ij is compared with a preset spot determination threshold value to determine the spot. Alternatively , the horizontal variation amount H ij and the vertical variation amount V ij may be determined independently without adding.

【0040】また、本実施例では、中央に斑のある光度
情報の斑の検出をしているが、液晶ディスプレイ用のカ
ラーフィルターの斑の検出をはじめ、テレビ用のシャド
ウマスク、各種フィルム、各種シート等の斑を検出する
ことが可能である。
Further, in the present embodiment, the spot of the light intensity information having a spot in the center is detected. However, in addition to the spot of the color filter for the liquid crystal display, the shadow mask for TV, various films, various It is possible to detect spots on a sheet or the like.

【0041】さらに、本実施例では、センサにエリアセ
ンサ3を用いているがこれに限らず、ラインセンサを用
いることも可能である。
Further, although the area sensor 3 is used as the sensor in the present embodiment, it is not limited to this and a line sensor can be used.

【0042】[0042]

【発明の効果】以上説明したように本発明によれば、セ
ンサによって得られた画素毎の被検査物の輝度情報を縦
横複数の画素行列からなる格子に切り分け、その各格子
内の各画素の輝度情報を加算して格子毎の輝度加算値を
求めることにより斑を強調し、各格子間での輝度加算値
の変化量を水平方向および垂直方向のそれぞれについて
求めてさらに斑を強調してこの水平方向の変化量と垂直
方向の変化量が所定より多い場合、斑と検出するように
しているので、被検査物の検出方向に依存性がなく、か
つ、高精度に斑を検出することが可能となる。
As described above, according to the present invention, the brightness information of the object to be inspected for each pixel obtained by the sensor is divided into a grid consisting of a plurality of vertical and horizontal pixel matrices, and each pixel in each grid is divided. The unevenness is emphasized by adding the brightness information to obtain the added brightness value for each grid, and the variation amount of the added brightness value between the grids is obtained for each of the horizontal direction and the vertical direction to further emphasize the unevenness. When the amount of change in the horizontal direction and the amount of change in the vertical direction are larger than a predetermined amount, the spots are detected, so that the detection direction does not depend on the detection direction of the inspection object, and the spots can be detected with high accuracy. It will be possible.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の斑検出装置1の一実施例を示すブロッ
ク図である。
FIG. 1 is a block diagram showing an embodiment of a spot detection device 1 of the present invention.

【図2】画素毎の輝度情報を縦横複数の画素行列からな
る格子に切り分けた例を示す説明図である。
FIG. 2 is an explanatory diagram showing an example in which the luminance information for each pixel is divided into a grid composed of a plurality of vertical and horizontal pixel matrices.

【図3】図1に示した実施例の作用を示すフローチャー
トである。
FIG. 3 is a flowchart showing the operation of the embodiment shown in FIG.

【図4】中央部に斑のある光度情報を示す図である。FIG. 4 is a diagram showing luminous intensity information with spots in the central portion.

【図5】図4に示された線上の輝度情報を表示させた図
である。
FIG. 5 is a diagram in which luminance information on the line shown in FIG. 4 is displayed.

【図6】図4に示された線上の格子の輝度加算値を求め
られた輝度加算値の最大値で正規化して表示させた図で
ある。
FIG. 6 is a diagram in which the luminance added value of the grid on the line shown in FIG. 4 is normalized by the maximum value of the obtained luminance added values and displayed.

【図7】任意の格子の輝度加算値の水平方向の変化量と
垂直方向の変化量を求める場合の説明図である。
FIG. 7 is an explanatory diagram for obtaining a horizontal variation amount and a vertical variation amount of a luminance added value of an arbitrary grid.

【図8】水平方向のSobelフィルターを示す説明図
である。
FIG. 8 is an explanatory diagram showing a Sobel filter in the horizontal direction.

【図9】垂直方向のSobelフィルターを示す説明図
である。
FIG. 9 is an explanatory diagram showing a Sobel filter in the vertical direction.

【図10】格子毎の変化量を正規化して表示させた図で
ある。
FIG. 10 is a diagram in which the amount of change for each grid is normalized and displayed.

【図11】図4に示された線上の格子の正規化された変
化量を表示させた図である。
FIG. 11 is a diagram showing a normalized variation amount of the grid on the line shown in FIG. 4;

【図12】従来の斑検出装置1のラインセンサによって
得られた輝度情報示すとともに、各画素の斑情報値の算
出例を示す説明図である。
FIG. 12 is an explanatory diagram showing the luminance information obtained by the line sensor of the conventional spot detection apparatus 1 and showing an example of calculating the spot information value of each pixel.

【図13】ラインセンサによって得られた輝度情報と、
各画素の斑情報値を示す図である。
FIG. 13 shows luminance information obtained by the line sensor,
It is a figure which shows the spot information value of each pixel.

【図14】被検査物がラインセンサの検出ラインと水平
になっていない場合を示す説明図である。
FIG. 14 is an explanatory diagram showing a case where the inspection object is not horizontal to the detection line of the line sensor.

【図15】ラインセンサの検出ラインと垂直な斑を示す
説明図である。
FIG. 15 is an explanatory diagram showing spots perpendicular to a detection line of a line sensor.

【図16】ラインセンサの検出ラインと水平方向全体に
渡る斑を示す説明図である。
FIG. 16 is an explanatory diagram showing a detection line of a line sensor and spots over the entire horizontal direction.

【図17】所定周期の斑を示す説明図である。FIG. 17 is an explanatory diagram showing spots of a predetermined cycle.

【符号の説明】[Explanation of symbols]

1 斑検出装置 3 エリアセンサ 5 輝度情報加算部 7 変化量算出部 9 検出部 11 表示部 DESCRIPTION OF SYMBOLS 1 Spot detection device 3 Area sensor 5 Luminance information addition part 7 Change amount calculation part 9 Detection part 11 Display part

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 被検査物の一部分が周囲と比較して境界
が不鮮明でかつ輝度差が微少な斑を検出する斑検出方法
において、 前記被検査物を撮像して二次元に整列配置された複数の
画素毎の輝度情報をセンサで得る工程と、 前記センサによって得られた画素毎の輝度情報を縦横そ
れぞれ所定数の画素行列からなる格子に切り分け、その
各格子内の各画素の輝度情報を加算して各格子毎の輝度
加算値を求める輝度情報加算工程と、 各格子間での輝度加算値の変化量を水平方向および垂直
方向のそれぞれについて求める変化量算出工程と、 前記水平方向の変化量と垂直方向の変化量が所定より多
い場合、斑と検出する検出工程と、 から成ることを特徴とする斑検出方法。
1. A spot detection method for detecting spots in which a part of an object to be inspected has a blurry boundary and a slight difference in brightness as compared with the surroundings, and the object to be inspected is imaged and arranged two-dimensionally. The step of obtaining the luminance information for each of a plurality of pixels with a sensor, and dividing the luminance information for each pixel obtained by the sensor into a grid composed of a predetermined number of pixel matrixes in each of the vertical and horizontal directions, and the luminance information of each pixel in each grid is obtained. A luminance information adding step for obtaining the added luminance value for each grid, a change amount calculating step for obtaining a change amount of the added luminance value between the grids in each of the horizontal direction and the vertical direction, and the change in the horizontal direction. And a variation amount in the vertical direction that is greater than a predetermined amount, a detection step of detecting a spot, and a spot detection method.
【請求項2】 前記センサが、ラインセンサ若しくはエ
リアセンサであることを特徴とする請求項1記載の斑検
出方法。
2. The spot detection method according to claim 1, wherein the sensor is a line sensor or an area sensor.
【請求項3】 前記変化量算出工程は、任意の格子の輝
度加算値を中心とした周囲のm行n列のN個(m×n
個)の輝度加算値を基に、予め設定される水平方向の第
1の係数テーブルと垂直方向の第2の係数テーブルを用
いて、水平方向の変化量と垂直方向の変化量を求める変
化量算出工程であることを特徴とする請求項1乃至2記
載の斑検出方法。
3. The change amount calculating step comprises N (m × n) pixels of m rows and n columns around the luminance added value of an arbitrary grid.
Change amount for obtaining the change amount in the horizontal direction and the change amount in the vertical direction by using a preset first horizontal coefficient table and vertical second coefficient table based on the luminance added value 3. The spot detection method according to claim 1, which is a calculation step.
【請求項4】 被検査物の一部分が周囲と比較して境界
が不鮮明でかつ輝度差が微少な斑を検出する斑検出装置
であって、 前記被検査物を撮像して二次元に整列配置された複数の
画素毎の輝度情報を得るセンサと、 前記センサによって得られた画素毎の輝度情報を縦横そ
れぞれ所定数の画素行列からなる格子に切り分け、その
各格子内の各画素の輝度情報を加算して各格子毎の輝度
加算値を求める輝度情報加算部と、 各格子間での輝度加算値の変化量を水平方向および垂直
方向のそれぞれについて求める変化量算出部と、 前記水平方向の変化量と垂直方向の変化量が所定より多
い場合、斑と検出する検出部と、 を具備することを特徴とする斑検出装置。
4. A spot detection device for detecting a spot in which a part of an inspection object has a blurry boundary and a small brightness difference compared with the surroundings, and the inspection object is imaged and arranged in two dimensions. And a sensor for obtaining the luminance information for each of the plurality of pixels, and the luminance information for each pixel obtained by the sensor is divided into a grid composed of a predetermined number of pixel matrixes in the vertical and horizontal directions, and the luminance information of each pixel in each grid is A brightness information addition unit that adds the brightness addition value for each grid, a change amount calculation unit that calculates the change amount of the brightness addition value between the grids in each of the horizontal direction and the vertical direction, and the change in the horizontal direction. A spot detection device comprising: a detector that detects spots when the amount and the amount of change in the vertical direction are larger than a predetermined amount.
【請求項5】 前記センサが、ラインセンサ若しくはエ
リアセンサであることを特徴とする請求項4記載の斑検
出装置。
5. The spot detection device according to claim 4, wherein the sensor is a line sensor or an area sensor.
【請求項6】 前記変化量算出部は、任意の格子の輝度
加算値を中心とした周囲のm行n列のN個(m×n個)
の輝度加算値を基に、予め設定される水平方向の第1の
係数テーブルと垂直方向の第2の係数テーブルを用い
て、水平方向の変化量と垂直方向の変化量を求める変化
量算出部であることを特徴とする請求項4乃至5記載の
斑検出装置。
6. The change amount calculating unit is N (m × n) in m rows and n columns around the brightness added value of an arbitrary grid.
A change amount calculation unit that obtains a change amount in the horizontal direction and a change amount in the vertical direction using a preset first horizontal coefficient table and vertical second coefficient table based on the luminance added value The spot detection device according to claim 4 or 5, wherein
JP10928093A 1993-05-11 1993-05-11 Spot detection method and apparatus Expired - Lifetime JPH0799355B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10928093A JPH0799355B2 (en) 1993-05-11 1993-05-11 Spot detection method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10928093A JPH0799355B2 (en) 1993-05-11 1993-05-11 Spot detection method and apparatus

Publications (2)

Publication Number Publication Date
JPH06323954A true JPH06323954A (en) 1994-11-25
JPH0799355B2 JPH0799355B2 (en) 1995-10-25

Family

ID=14506170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10928093A Expired - Lifetime JPH0799355B2 (en) 1993-05-11 1993-05-11 Spot detection method and apparatus

Country Status (1)

Country Link
JP (1) JPH0799355B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08178795A (en) * 1994-12-20 1996-07-12 Nec Corp Lcd panel detect inspection instrument
JP2001281166A (en) * 2000-03-30 2001-10-10 Dainippon Screen Mfg Co Ltd Method and device for inspecting defect in cyclic pattern
JP2005017716A (en) * 2003-06-26 2005-01-20 Fujifilm Arch Co Ltd Colored resin coating film for color filter, evaluation method of colored resin coating film for color filter, and color filter

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4108829B2 (en) * 1998-07-02 2008-06-25 東芝ソリューション株式会社 Thickness defect inspection apparatus and inspection method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08178795A (en) * 1994-12-20 1996-07-12 Nec Corp Lcd panel detect inspection instrument
JP2001281166A (en) * 2000-03-30 2001-10-10 Dainippon Screen Mfg Co Ltd Method and device for inspecting defect in cyclic pattern
JP2005017716A (en) * 2003-06-26 2005-01-20 Fujifilm Arch Co Ltd Colored resin coating film for color filter, evaluation method of colored resin coating film for color filter, and color filter

Also Published As

Publication number Publication date
JPH0799355B2 (en) 1995-10-25

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