JPH06317476A - Temperature measuring apparatus - Google Patents

Abstract

PURPOSE:To provide a temperature measuring apparatus for measuring the temperature accurately at all times regardless of the surface conditions of an object by performing error correction of a noncontact thermometer instantaneously and automatically through the auxiliary use of a contact type thermometer. CONSTITUTION:A noncontact thermometer 4 is subjected to error correction by communicating the temperature data obtained from a contact type thermometer 3 which abuts on the surface of the object 2 to measure the temperature thereof, and the temperature data obtained from the noncontact thermometer 4 which measures the temperature of the object 2 while being spaced apart therefrom.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a temperature measuring device using a non-contact type thermometer, and more specifically, it is capable of correcting an error due to a difference in emissivity, reflectance and transmittance of an object to be measured. The present invention relates to a temperature measuring device that can be automatically performed.

[0002]

2. Description of the Related Art Thermal expansion sensors are used as temperature sensors.
There is a contact thermometer that measures the temperature of an object to be measured, such as a thermoelectric sensor (thermocouple), resistance sensor (metal resistance thermometer), or thermistor sensor. A temperature measuring device using a non-contact type thermometer such as a temperature sensor has come into use.

Since this is a non-contact detection, it can be used from a remote place and can be measured without giving any disturbance to the object to be detected. Further, since the object to be detected is an electromagnetic wave, it reaches the detection element. This is because there are various advantages such as no delay. By the way, even in a non-contact type thermometer having various advantages as described above, if the emissivity, reflectance, and transmittance of the surface of the object to be measured are not accurately determined, a large error will occur, and drift will occur. Calibration is required to correct or know the absolute value.

Therefore, in addition to the non-contact type thermometer, a contact type thermometer is also used, and error correction is manually performed based on the temperature of the object to be measured measured by the contact type thermometer. An accurate temperature can be measured with a thermometer.

[0005]

However, such manual error correction may cause human error, and the measured value of the contact thermometer may be instantaneously corrected for error of the non-contact thermometer. Therefore, there is a problem that the measured value of the contact type thermometer has already changed at the time of correction, and the correct correction has not been made after all.

In view of the above problems, the present invention uses a contact type thermometer as an auxiliary and instantaneously and automatically corrects an error of a non-contact type thermometer, thereby making it possible to measure an object to be measured. It is an object of the present invention to provide a temperature measuring device that can always perform accurate temperature measurement regardless of the state of the surface.

[0007]

A temperature measuring device according to the present invention for achieving the above object is obtained from a contact type thermometer which contacts the surface of an object to be measured and measures the temperature of the object. By communicating the obtained temperature data and the data obtained from the non-contact type thermometer which is provided apart from the measured object and measures the temperature of the measured object, the non-contact type thermometer The error is corrected.

[0008]

[Operation] The temperature measuring device of the present invention has the above configuration, and is provided separately from the measured object based on the temperature measured by contacting the surface of the measured object with a contact thermometer. Error correction of the non-contact type thermometer which was
Since the error correction can be selectively performed when the temperature change per unit time of the measured object is less than or equal to a predetermined value,
By performing correction when the temperature of the object to be measured is constant to some extent, the non-contact thermometer can always perform accurate temperature measurement.

[0009]

EXAMPLES Examples of the present invention will be described with reference to the drawings. FIG. 1 shows a temperature measuring device 1 according to a first embodiment of the present invention, in which a contact type thermometer 3 for contacting the surface of a measured object 2 to measure its temperature and a surface of the measured object 2 are used. Non-contact type thermometer (radiation thermometer) installed separately
4 is used in combination.

Further, the temperature measured by the contact type thermometer 3 is input to the control device 5 and the temperature change Δt of the object 2 to be measured per unit time is calculated. Here, the DUT 2
2 is compared with a predetermined value x which is a condition that the temperature is constant to some extent, and when Δt as shown in FIG. 2 is smaller than x, the radiation thermometer 4 is compared with the radiation thermometer 4 according to the flowchart of FIG. Then, the temperature of the DUT 2 measured by the contact type thermometer 3 is transmitted, and the error of the radiation thermometer 4 is corrected. Then, after the correction is performed as described above, the temperature of the DUT 2 is measured by the radiation thermometer 4.

Next, FIG. 4 shows a temperature measuring device 1 according to a second embodiment of the present invention. In the case of this embodiment, the device under test 2
When the shape of the object is thin or small, the contact type thermometer 3 is brought into contact with the object 2, so that the error can be corrected even when the object 2 to be measured may be damaged. The temperature can be measured by the thermometer 4.

First, a heater 7 is provided in the heat insulating case 6, and a temperature control sensor 9 is attached to a heat source block 8 heated by the heater 7. The temperature of the heat source block 8 measured by the temperature control sensor 9 is input to the controller 5, and the output signal from the controller 5 causes the temperature of the heat source block 8 to be stabilized at a preset temperature. Further, the heater 7 is feedback-controlled.

Further, the heat source block 8 has a male screw portion 8
a is formed on the male screw portion 8a, and the female screw portion 10a of the calibration block 10 to which the thin film-shaped object to be measured 2 is attached.
Are screwed together. A temperature measuring sensor 11 is attached to the calibration block 10 and
In order to make the temperature of 1 and the temperature of the object 2 to be measured equal, it is possible to compare with the detection value of the contact thermometer 3 abutting on the surface of the object 2.

The temperature of the object to be measured 2 detected by the contact thermometer 3 is input to the control device 5 and the error correction of the radiation thermometer 4 is controlled according to the flow chart shown in FIG. ing. Also in the case of the second embodiment, the error correction of the radiation thermometer 4 can be instantaneously and automatically performed similarly to the first embodiment. Therefore, regardless of the state of the surface of the DUT 2, Accurate temperature measurement is always possible.

[0015]

EFFECTS OF THE INVENTION The temperature measuring device according to the present invention is provided with a temperature data obtained from a contact type thermometer which contacts the surface of an object to be measured and measures the temperature of the object to be measured. Since the error of the non-contact type thermometer is corrected by communicating with the data obtained from the non-contact type thermometer which is provided separately and measures the temperature of the object to be measured, the following effects can be obtained. be able to.

Based on the temperature measured by bringing the contact type thermometer into contact with the surface of the object to be measured, it is possible to correct the error of the non-contact type thermometer provided apart from the object to be measured. Since the error correction can be selectively performed when the temperature change of the measured object per unit time is less than or equal to a predetermined value, by performing the correction when the temperature of the measured object is constant to some extent, The non-contact type thermometer can always make accurate temperature measurement.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a temperature measuring device according to a first embodiment of the present invention.

FIG. 2 is a characteristic diagram showing a temperature change of the object to be measured shown in FIG.

3 is a flowchart showing a control program of the control device shown in FIG.

FIG. 4 is a schematic diagram of a temperature measuring device according to a second embodiment of the present invention.

[Explanation of symbols]

1 Temperature measuring device 2 Object to be measured 3 Contact type thermometer 4 Non-contact type thermometer (radiation thermometer)

Claims (1)

[Claims] 1. Temperature data obtained from a contact type thermometer for contacting the surface of a measured object and measuring the temperature of the measured object, and the temperature data provided apart from the measured object. A temperature measuring device that corrects an error of the non-contact thermometer by communicating with data obtained from the non-contact thermometer for measuring the temperature of an object.