JPH06301002A - Production of liquid crystal display element - Google Patents

Abstract

PURPOSE:To decrease limitation in selection of the material of a substrate disposed with active matrix driving elements and to realize a high yield and low production costs by including a stage for laminating a plastic substrate with electrodes, from which an easily peelable base material is peeled, on the substrate with the elements. CONSTITUTION:The film of a ferroelectric high-polymer liquid crystal or ferroelectric high-polymer liquid crystal compsn. is formed by coating or stretching on the plastic substrate 13 with electrodes to form a liquid crystal layer. This process for production includes a stage for laminating the easily peelable base material and the plastic substrate 12 with the electrodes on the liquid crystal layer so as to hold, the liquid crystal layer between the plastic substrate 12 with the electrodes and the easily peelable base material. The process also includes a stage for orienting the ferroelectric high- polymer liquid crystal or the ferroelectric high-polymer liquid crystal compsn. by applying shearing force on the liquid crystal layer and a stage for peeling the easily peelable base material from the liquid crystal layer. The process consists of the stage for laminating the plastic substrate 12 with the electrodes, from which the easily peelable base material is peeled, on the substrate disposed with the active matrix elements.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an active matrix type liquid crystal display element used as a liquid crystal display device or a device for various kinds of electronics, and particularly to a ferroelectric polymer liquid crystal or a composition thereof as a liquid crystal material. The present invention relates to a method for manufacturing a liquid crystal display element used.

[0002]

2. Description of the Related Art In a liquid crystal display device or the like, electrodes forming a scan electrode group (common electrode group) or a signal electrode group (segment electrode group) as the density of dots (pixels) increases and the screen size increases. The number becomes enormous, and there is a problem that the display is disturbed due to the crosstalk in which the voltage is distributed to the pixel adjacent to the pixel to be driven and the response of the liquid crystal is impaired. Further, an active matrix type liquid crystal display for directly driving liquid crystal by arranging active driving elements composed of a thin film diode (TFD), a thin film transistor (TFT) or a metal insulated metal (MIM) in a matrix for each pixel. Development of the device is in progress. As such an active matrix type liquid crystal display element,
An active matrix type display device using a low molecular weight ferroelectric liquid crystal as a liquid crystal material and a thin film transistor as an active driving device is disclosed in JP-A-61-52681 and JP-A-62-62681.
No. 172326 and the like.

On the other hand, as a method for aligning a liquid crystal material,
The applicant of the present invention has previously proposed a method of manufacturing a liquid crystal optical element in which a ferroelectric liquid crystal is used as a liquid crystal material, and the ferroelectric liquid crystal is aligned by bending and deforming the treatment (JP-A-2-10322), and an electric field is applied to the liquid crystal material. Method for aligning liquid crystal material by applying shearing force while applying liquid crystal (Japanese Patent Application Laid-Open No. 3-572)
No. 7) is proposed.

[0004]

However, in the former active matrix type display element, there are problems that uniform alignment treatment is difficult, alignment disorder occurs due to thin film transistors, and alignment is easily broken by impact. Further, in the latter method of manufacturing a liquid crystal optical element and the method of aligning a liquid crystal material, it is necessary that both substrates sandwiching the liquid crystal material have flexibility, and an active element is usually provided. It cannot be applied to a display element using a glass substrate. When the active element is provided on the plastic substrate, this method is applicable (Japanese Patent Application No. 4-293895), but the performance of the active element is easily deteriorated due to the bending deformation of the substrate, and the quality of the display element, In terms of yield, it was not always completely satisfactory.

The present invention has been made in view of the above-mentioned problems, and there are few restrictions on the selection of the material of the substrate with active elements, and it is simple, the yield is high, and the manufacturing cost is low. The purpose is to provide.

[0006]

At least one of the substrates is transparent, and one of them is a plastic substrate with an electrode, and the other is a substrate on which an active drive element is arranged. In the method for producing a liquid crystal display device sandwiching a ferroelectric liquid crystal, 1) coating or stretching of a ferroelectric polymer liquid crystal or a ferroelectric polymer liquid crystal composition on a plastic substrate with an electrode. And a step of forming a liquid crystal layer, 2) a step of laminating an easily peelable base material on the liquid crystal layer such that the liquid crystal layer is sandwiched between the electrode-attached plastic substrate and the easily peelable base material, 3) a step of applying a shearing force to the liquid crystal layer to align the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition, 4) a step of peeling the easily peelable base material from the liquid crystal layer, 5) an easy peeling The plastic substrate with an electrode from which the flexible base material has been peeled off Method of manufacturing a liquid crystal display element characterized by active driving element includes a step of laminating on a substrate that is disposed is provided.

A liquid crystal display characterized in that the step of aligning the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition is to apply shearing force to the liquid crystal layer while gradually cooling from the heated state. A method of manufacturing a device is provided.

Further, the easily peelable substrate has an electrode, and the step of aligning the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition applies shearing force to the liquid crystal layer. Also provided is a method for manufacturing a liquid crystal display element, characterized in that an electric field is applied.

Further, the step of orienting the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition is to apply shearing force and electric field to the liquid crystal layer while gradually cooling from the heated state. A method for manufacturing a liquid crystal display device is provided.

The present invention will be specifically described below. 1. Step of Forming Ferroelectric Polymer Liquid Crystal Layer on Substrate with Electrodes Examples of the substrate used in the present invention include crystalline polymers such as uniaxially or biaxially oriented polyethylene terephthalate, polysulfone, polyether sulfone (PES).
A flexible plastic substrate made of a plastic material such as an amorphous polymer, a polyolefin such as polyethylene and polypropylene, a polycarbonate such as polycarbonate and nylon, and the like. By using such a flexible substrate, a large-area liquid crystal display element capable of curved surface display can be configured. A glass substrate can also be used as the substrate on which the active matrix driving element is arranged.

The electrodes formed on one of the substrates are:
A transparent or semitransparent electrode material usually used for liquid crystal display elements, such as a NESA film or an ITO film, can be used. In the case of a liquid crystal display element (TFT) using a thin film transistor as an active driving element, it is not necessary to form a pattern. In the case of a liquid crystal display element using metal insulated metal (MIM),
An electrode pattern is formed in a stripe shape for dot matrix display.

On the other substrate, active matrix drive elements (TFT elements, MIM elements, etc.) are formed as electrodes.

A ferroelectric polymer liquid crystal or a composition thereof is used as the liquid crystal material. By including the ferroelectric polymer liquid crystal, strength and durability against external force such as impact or bending can be improved. Further, the memory property of the ferroelectric liquid crystal can be utilized, and the power consumption can be reduced. Further, in the present invention, since a series of continuous manufacturing methods of coating film formation of liquid crystal on one substrate, laminating with a counter substrate, and bending alignment treatment are adopted, a polymer liquid crystal excellent in film forming property and alignment property. It is preferable to contain Examples of the ferroelectric polymer liquid crystal material include one or more kinds of ferroelectric polymer liquid crystals, one or more kinds of ferroelectric low-molecular liquid crystals and one or more kinds of ferroelectric polymer liquid crystals. A ferroelectric polymer liquid crystal composition composed of, a ferroelectric polymer liquid crystal composition composed of one or more kinds of ferroelectric low-molecular liquid crystal and one or more kinds of other polymer liquid crystal, etc. You can That is, as a ferroelectric polymer liquid crystal or a ferroelectric polymer liquid crystal composition, a ferroelectric polymer liquid crystal (homopolymer or copolymer or a mixture thereof) in which polymer molecules themselves exhibit ferroelectric liquid crystal characteristics, Mixture of dielectric polymer liquid crystal with other polymer liquid crystal and / or ordinary polymer, mixture of ferroelectric polymer liquid crystal and ferroelectric low molecular weight liquid crystal, ferroelectric polymer liquid crystal and ferroelectric low molecular weight liquid crystal It is possible to use all polymer liquid crystals exhibiting ferroelectricity, such as a mixture of liquid crystal and a polymer liquid crystal and / or a usual polymer, or a mixture of these and a usual low molecular liquid crystal. In this case, the mixing ratio of the ferroelectric high-molecular liquid crystal and the (ferroelectric) low-molecular liquid crystal is 9 in molar ratio.
The ratio is preferably 5: 5 to 20:80, and 80:
It is more preferable that the ratio is 20 to 40:60.

Among the above-mentioned ferroelectric polymer liquid crystals, for example, a side chain type ferroelectric polymer liquid crystal having a chiral smectic C phase can be preferably used. Further, the ferroelectric liquid crystal composition may contain an adhesive, a viscosity reducing agent, a non-liquid crystal chiral compound, a dye, etc., if necessary. For example,
In order to improve the mechanical strength of the device, a non-liquid crystalline polymer substance may be mixed. The thickness of the liquid crystal layer is not particularly limited, but it is preferably 1 to 10 μm after coating and drying, and more preferably 1.5 to 3 μm. As the ferroelectric liquid crystal polymer, for example, an acrylate main chain liquid crystal polymer represented by the following formula, a methacrylate main chain liquid crystal polymer, a chloroacrylate main chain liquid crystal polymer, an oxirane main chain liquid crystal polymer, a siloxane main chain liquid crystal polymer, Included are siloxane-olefin main chain liquid crystal polymers and ester main chain liquid crystal polymers.

[0015]

[Chemical 1]

[0016]

[Chemical 2]

[0017]

[Chemical 3]

[0018]

[Chemical 4]

In the repeating unit of the above-mentioned ferroelectric liquid crystal polymer, the side chain skeleton may be replaced by a biphenyl skeleton, a phenylbenzoate skeleton, a biphenylbenzoate skeleton, or a phenyl 4-phenylbenzoate skeleton. The benzene ring in the skeleton may be replaced with a pyrimidine ring, a pyridine ring, a pyridazine ring, a pyrazine ring, a tetrazine ring, a cyclohexane ring, a dioxane ring, a dioxaborinane ring, or a halogen group such as fluorine or chlorine or a cyano group. May be, 1-methylalkyl group, 2-fluoroalkyl group, 2-chloroalkyl group,
2-chloro-3-methylalkyl group, 2-trifluoromethylalkyl group, 1-alkoxycarbonylethyl group, 2-alkoxy-1-methylethyl group, 2-alkoxypropyl group, 2-chloro-1-methylalkyl group ,
It may be replaced with an optically active group such as a 2-alkoxycarbonyl-1-trifluoromethylpropyl group. Further, the length of the spacer may be changed within the range of 2 to 30 in methylene chain length. The number average molecular weight of the ferroelectric liquid crystal polymer is preferably 1,000 to 200,000.
Examples of the ferroelectric low-molecular liquid crystal compound include Schiff base type ferroelectric low-molecular liquid crystal compounds represented by the following formula, azo and azoxy type ferroelectric low-molecular liquid crystal compounds, biphenyl and aromatics ester type ferroelectric low-molecular liquid crystal compounds. Examples thereof include a molecular liquid crystal compound, a ferroelectric low molecular liquid crystal compound having a ring substituent such as a halogen or cyano group introduced therein, and a ferroelectric low molecular liquid crystal compound having a heterocycle.

[0020]

[Chemical 5]

[0021]

[Chemical 6]

[0022]

[Chemical 7]

[0023]

[Chemical 8]

Note that these compounds are typical of the ferroelectric low molecular weight liquid crystal compounds, and the ferroelectric low molecular weight liquid crystal compounds of the present invention are not limited to these structural formulas.

A ferroelectric polymer liquid crystal or a ferroelectric polymer liquid crystal composition is applied or stretched to form a liquid crystal layer on one of the substrates with electrodes by using the above-mentioned materials used. To do. In this case, examples of the stretched film formation include a cast stretching method, and examples of the coated film formation include a roll coating method such as a microgravure method and a direct gravure method, and an impregnation coating method. In any of the film forming methods, first, the ferroelectric liquid crystal material is preferably dissolved in a general organic solvent such as an aromatic, aliphatic, or alcoholic solvent in order to enhance its fluidity.
In addition, in any of the film forming methods, the film forming range of the liquid crystal solution on the substrate surface is set so as to substantially match the region of the display portion of the liquid crystal display element (liquid crystal panel), and the film is fed from the roll. Liquid crystal is intermittently applied on a long substrate.
When such intermittent coating is performed, the liquid crystal solution is not coated on the extraction electrode portion, so that a post-process for removing liquid crystal in an unnecessary portion can be omitted. After applying the liquid crystal solution, drying is performed to evaporate the solvent. In the case of pattern-printing a liquid crystal material using a gravure roll as shown in FIG. 8, for example, the linear velocity va of the gravure surface during rotation of the gravure roll is normally 1.5 to 1.5 with respect to the substrate moving velocity v1. It is set to 100 times, preferably 2 to 50 times. Further, by changing the rotation speed of the gravure roll, the film thickness of the pattern-printed liquid crystal material and / or the coating layer of the adhesive can be controlled. The roll B is an intermittent coating mechanism for performing pattern printing intermittently, and can be moved up and down by an air cylinder. The pattern printing is intermittently performed by bringing the gravure roll A into contact with or away from the substrate. It can be carried out. Roll C is a roll for pressing the substrate onto the gravure roll A.
By heating to about 0 ° C., the solvent used for coating can be evaporated. Further, when the impregnation coating method is used, the impregnation member impregnated with the liquid crystal solution is pressed against the surface of the electrode-attached substrate to move the coating (see JP-A-2-1).
No. 0322).

2. Step of Laminating Easy Releasable Substrate on Liquid Crystal Layer There is no particular limitation on the easily releasable substrate used in the present invention. For example, fluororesin such as Teflon, film such as polyethylene, and Teflon as a substrate, Teflon AF,
The thing which applied polyethylene etc. can be mentioned.
The thickness is preferably 50 to 200 μm. Such an easily peelable base material is laminated on the liquid crystal layer formed on one of the electrode-attached substrates. As a method for laminating the easily peelable base material on the liquid crystal layer, as long as bubbles are not formed between the liquid crystal layer and the easily peelable base material, and the liquid crystal layer has a uniform film thickness. There is no particular limitation, and for example, a method of using a pair of rolls, a method of further heating the base material or the like can be used. Hereinafter, a specific example will be described. The pair of laminating rolls A and B applies pressure to the one electrode-equipped plastic substrate on which the liquid crystal layer is formed and the easily peelable base material on which an adhesive is provided or nothing is applied, and an easily peelable substrate is formed. Laminate the materials while heating. Here, it is preferable that the laminating roll is composed of a rubber roll and a metal roll, and the metal roll has a structure capable of being heated.
When the plastic substrate with electrode is placed in contact with the rubber roll A and the easily peelable substrate is placed in contact with the metal roll B, the easily peelable substrate can be laminated while being heated. The rubber roll A and the metal roll B may have the same or different roll diameters. The preferable roll diameter of the rubber roll A is 50 to 500 mm. The heating method of the metal roll may be electric heating, hot water or hot liquid heating, or hot air heating. Alternatively, the metal roll may not be heated, but the substrate may be heated at the roll entrance by a method such as hot air heating. Particularly preferable is a method in which the metal roll is finely temperature-controlled by electric heating or salt water circulation heating. The orientation of the pair of rolls is arbitrary and may be horizontal or vertical. The roll may be driven directly by a motor or may be rotated by a plastic substrate with electrodes. However, a mechanism in which a pair of rolls rotates in conjunction is preferable.

3. Step of Aligning Liquid Crystal Material As a method of uniaxially horizontally aligning a ferroelectric polymer liquid crystal or a composition thereof by applying a shearing force to a liquid crystal layer, a method of aligning a plastic substrate with one electrode and an easily peelable base material is used. An example is one in which a shearing force due to bending deformation is applied to the sandwiched liquid crystal layer for orientation. In this alignment method, in the case of a ferroelectric liquid crystal having a small macroscopic elastic modulus in a multi-domain state such as a ferroelectric polymer liquid crystal, a sufficient alignment state can be realized by simply bending. Ferroelectric liquid crystals and the like have a larger elastic modulus than nematic liquid crystals, and therefore bending deformation tends to cause deformation due to mutual slip in domain units rather than uniform deformation. Therefore, the orientation direction is perpendicular to the shearing direction. The orientation by this bending deformation treatment can be more effectively performed by heating to an appropriate temperature depending on the type of liquid crystal.
In addition, the orientation due to this bending deformation treatment is usually at least a mixed phase of an isotropic phase and a smectic A phase, a mixed phase of an isotropic phase and a chiral smectic C phase, or a smectic phase. It is desirable to carry out at a temperature in a temperature range where a liquid crystal phase such as A phase, chiral smectic C phase and chiral nematic phase is obtained. Further, in order to make the entire liquid crystal display element have a uniform orientation, it is preferable to perform the bending deformation treatment while continuously moving the laminate of the substrate and the easily peelable base material.
The orientation by this bending deformation treatment can be performed using various devices and methods, but normally, at least one free rotating roller is used to move the laminate of the substrate and the easily peelable base material. However, a method of bending and deforming, preferably a method of bending and deforming while continuously moving between at least two free rotating rollers can be preferably used.

In such an orientation method, the degree of bending of the laminate of the substrate and the easily peelable base material in the bending deformation treatment is usually expressed by a radius of curvature and is usually 5 to 1,000 m.
m, preferably 10 to 500 mm. If this radius of curvature is too small, it may damage the substrate or break the electrode of a thin pattern, while if it is too large, sufficient shear stress is not applied to the liquid crystal part, resulting in a good alignment state. Sometimes I can't. In this orientation method, the orientation of the ferroelectric liquid crystal by the bending deformation treatment is performed more effectively and efficiently by performing the bending deformation treatment while moving the laminate of the substrate and the easily peelable base material. In particular, by performing a bending deformation treatment by continuously moving the laminate of the substrate and the easily peelable base material between at least two free-rotating rollers, it is possible to perform it more effectively and in high-speed mass production. it can.

The moving speed of the laminate of the substrate and the easily peelable base material in this bending deformation treatment depends on the radius of curvature of the bent portion, the temperature, the kind of the ferroelectric liquid crystal, etc., and therefore should be uniformly limited. However, usually, a speed matched to the line speed of the continuous manufacturing process adapted to the step of forming the liquid crystal layer on the electrode-attached substrate and the step of laminating the easily peelable base material on the liquid crystal layer is sufficient, Therefore, it is possible to set the line speed of each process including the alignment process by the bending deformation process to the same speed, which makes it possible to efficiently realize the continuous high-speed production process of the liquid crystal display element,
Mass productivity can be significantly improved.

In the continuous production process or the like, the specific moving speed of the laminate of the substrate and the easily peelable base material in the bending deformation treatment is, for example, usually 0.
It is preferable to set it in the range of about 1 to 50 m / min (0.16 to 83.9 cm / sec). The moving speed of the laminate of the substrate and the easily peelable base material in the above-described bending deformation treatment is mainly determined by the conditions for forming the liquid crystal layer. Therefore, the moving speed adapted only to the bending deformation process is not particularly limited and can be set to a wider range than the above range, but if the moving speed is too high, the bending speed may vary depending on the type of substrate. When it is deformed, it may be damaged such as cracks. On the other hand, if it is too small, the orientation can be sufficiently obtained, but the production time becomes long and the practicality becomes low.

In the orientation treatment by the bending deformation treatment, precise temperature setting is not necessarily required, but extremely good orientation is achieved even in a wide range, particularly a very large line speed (speed corresponding to the winding speed of the product). To obtain the temperature of the ferroelectric liquid crystal in the laminate of the substrate and the easily peelable base material, the ferroelectric liquid crystal has a smectic A phase, a chiral smectic C phase, an isotropic phase and a smectic A phase. (SmA
Phase) or a mixed phase of an isotropic phase and a chiral smectic C phase (SmC ^* phase) at a temperature within a temperature range in which a bending deformation treatment is preferably performed.
In particular, it is preferable to perform the bending deformation treatment while cooling (gradual cooling) from a temperature at which an isotropic phase is obtained to a temperature within a temperature range at which a liquid crystal phase such as a smectic A phase and a chiral smectic C phase is obtained.

As another alignment method, a method of applying a shearing force to the liquid crystal layer and applying an electric field can be mentioned. In the alignment method by applying the electric field and the shearing force, the positive voltage and the negative voltage to be applied may be alternating current or direct current, and are applied continuously or intermittently. The preferred electric field is 0.1 to 150 μV / m, particularly preferably 5 to 150.
μV / m. In this case, if the voltage is too low, the orientation becomes insufficient, and if the voltage is too high, dielectric breakdown of the liquid crystal element may occur. The method of applying an electric field and shearing is performed by using a roll for applying an electric field or a roll with a belt with an electrode in combination, or by directly connecting a power source to both the common electrode and the segment electrodes of the liquid crystal element and manually applying shearing. Do it. The temperature at which the electric field and the shearing force are applied may be a temperature at which the liquid crystal material exhibits any liquid crystal phase, and is usually lower than the temperature at which the liquid crystal material exhibits an isotropic phase or a mixed phase of an isotropic phase and a liquid crystal phase, Good at room temperature. The ferroelectric liquid crystal is preferably cooled (gradual cooling) from a temperature exhibiting an isotropic phase, but may not be gradually cooled. That is, extremely good orientation can be instantaneously obtained even at room temperature. It is considered that this is because the reorientation process of liquid crystal molecules due to shearing is extremely easily performed by applying an electric field.

4. Step of peeling easily peelable base material from liquid crystal layer After aligning liquid crystal molecules, the easily peelable base material is peeled from the liquid crystal layer. This step is not particularly limited, but for example, after inserting the substrate having the easily peelable base material laminated between two rolls, the easily peelable base material and the substrate are wound in 180 ° different directions. I can mention that. In this case, the alignment of the liquid crystal molecules is maintained as it is. When aligning the liquid crystal molecules in this way, an easily peelable base material is laminated on the liquid crystal layer, and peeled before laminating the other substrate, so that an easily peelable base material such as an opaque base material or birefringent It is possible to use a large base material. Since a voltage is effectively applied to the liquid crystal material in the liquid crystal element, it is possible to drive at a low voltage. No alignment film is required. Further, the display element can be manufactured without giving an extra external force to the active element due to the rubbing treatment of the alignment film. When the polymeric liquid crystal is sandwiched between the easily peelable base material and the plastic substrate and bending deformation is applied, sufficient shearing force can be applied to the liquid crystal, and the liquid crystal can be easily aligned.
It is possible to align the liquid crystal by coating the liquid crystal polymer on the plastic substrate and rubbing the surface in one direction, but the line speed is low and the productivity is low.

5. Step of Laminating Other Substrate Having Active Matrix Driving Element Arranged In the present invention, a procedure for arranging a TFT element to be an active matrix driving element on the other substrate will be described with reference to FIGS.
The case of a glass substrate and the case of a plastic substrate will be described with reference to FIG. First, the case of a glass substrate will be described based on FIGS. 2 (a) and 2 (b). Plasma CV
The gate electrode 3 and the scanning line 10 are formed by depositing a Cr, Ta, Al film or the like on the glass substrate 1 using the D method. Subsequently, the gate insulating film 5 is formed on the gate electrode 3 by the anodic oxidation method of the gate electrode and the plasma CVD method. For example, Ta of the gate electrode 3 is anodized at room temperature to form a Ta ₂ O ₅ film (anodized film) 5 ′, on which Ta,
The gate insulating film 5 of Si ₃ N ₄ is formed by the plasma CVD method. Next, amorphous Si is formed on the gate insulating film 5.
The channel semiconductor 6 is formed by the film 6a, the n ⁺ amorphous Si film 6b, the polycrystalline Si film, or the like by the plasma CVD method, the thermal C
It is formed by a VD method, a low pressure CVD method or the like. Then, the pixel electrode 4 is formed of an ITO film or the like. Further, the source electrode 7 and the drain electrode 8 are vapor-deposited to form Al, Mo, IT film and the like. Then, the TFT element 2 is formed by depositing the channel protective film 9 thereon.

Next, the case of a plastic substrate will be described with reference to FIG. The gate electrode 3 is patterned on the plastic substrate 1 such as a PES substrate using an ITO film. At this time, the pixel electrodes 4 for driving the liquid crystal are also patterned at the same time. Then, plasma polymerization method, LB
The gate insulating film 5 is formed on the gate electrode 3 using an organic or inorganic compound having an insulating property by a deposition method, an electrodeposition method (field polymerization method), or the like. For example, in the plasma polymerization method, i-
The gate insulating film 5 is formed as a carbon film, an arachidic acid film by the LB method, a polyparaphenylene film by the electrodeposition method, or the like.

Subsequently, the channel semiconductor 6 is formed on the gate insulating film 5 by using a conductive polymer such as polypyrrole, polythiophene, polyacetylene, polyphthalocyanine, polythienylenevinylene, polyphenylenevinylene. At this time, the precursor polymer is dissolved in an organic solvent and applied by a spin coater or the like and then dried, and the gate electrode 3 and the pixel electrode 4 are masked and irradiated with light.
The channel semiconductor 6 is formed by washing away the unirradiated portion with the solvent.

Then, a source electrode 7 and a drain electrode 8 are formed by depositing gold on the gate insulating film 5 and the channel semiconductor 6 by a lift-off method.

Subsequently, the TFT element 2 is formed by depositing a channel protective film 9 between the source electrode 7 and the drain electrode 8 on the channel semiconductor 6. Reference numeral 10 is a scanning line composed of a gate bus line, and 11 is a data line composed of a source bus line. When the active matrix element formed on the substrate 1 is an MIM element, the scanning line 10 is unnecessary.

After peeling the easily peelable substrate from the liquid crystal layer,
A plastic substrate with electrodes is laminated on the substrate on which the above-mentioned active matrix driving element is arranged so that the liquid crystal layer surfaces face each other. Even in this case, the liquid crystal layer is sandwiched so as to have a uniform film thickness. In order to make the film thickness uniform, it is preferable to heat from the electrode-attached substrate side.

After such a step, a desired liquid crystal display device is obtained by cutting a product in which an oriented liquid crystal layer is sandwiched between two electrode-attached substrates into a predetermined size by an ordinary method. It can be manufactured.

In the manufacturing process of such a series of liquid crystal display elements, reference holes may be provided in the two substrates in order to facilitate the work.

[0042]

EXAMPLES The present invention will be described in more detail below with reference to examples. Example 1 A 30 wt% dichloromethane solution of a liquid crystal composition represented by the following formula was applied to a PES substrate with ITO using a gravure coater.

[0043]

[Chemical 9] After the solvent was evaporated, it was laminated with a Teflon film having a thickness of 80 μm. PE with ITO using the device of Fig. 4
The liquid crystal was oriented by passing the laminate of the S substrate and the Teflon film between the rolls. At this time, the line speed is 2 m / min, the roll temperature is T1 = 90 ° C., T2 = 60 ° C.,
T3 = 30 ° C. The Teflon film was peeled from the laminate using the apparatus shown in FIG. 5, and the PES substrate with ITO coated with the liquid crystal composition was attached to a glass substrate with active elements and cut into a predetermined length. The line speed at this time was 2 m / min. The electrode was taken out using a heat seal connector, the periphery was sealed with an ultraviolet curable adhesive, and a polarizing plate was attached to form a panel. When this panel was driven with a DC voltage of 5 V, the contrast was 30.
A good display of was obtained. Also, 10g / c on the panel
A m ² weight was placed and left for one day, but the alignment was not disturbed.

Example 2 3 of the liquid crystal composition used in Example 1 was applied to the PES substrate with ITO.
A 0 wt% toluene solution was applied using a gravure coater. After the solvent was evaporated, it was laminated with a PES film with an aluminum electrode having a thickness of 100 μm. PES substrate with ITO and P with aluminum electrode using the device of FIG.
The liquid crystal was aligned by passing the laminate with the ES film between the conductive rolls. The voltage at this time is 40V (DC),
Line speed is 2m / min, roll temperature is T1 = 90 ℃, T
2 = 60 ° C. and T3 = 30 ° C. After peeling off the PES film with an aluminum electrode from this laminate, a panel was manufactured in the same manner as in Example 1. When this panel was driven, a good display of contrast 35 was obtained.
The stability of orientation was the same as in Example 1.

Example 3 A PES substrate with ITO was coated with a 33 wt% 2-butanone solution of a polymer liquid crystal represented by the following formula using a microgravure coater.

[0046]

[Chemical 10] After evaporating the solvent, it was laminated with a 100 μm thick PES film with an aluminum electrode coated with Teflon AF manufactured by DuPont. Using the device of FIG. 6, P with ITO
The liquid crystal was aligned by passing a laminate of the ES substrate and the PES film with an aluminum electrode between the conductive rolls.
At this time, the voltage is 50 V (AC 50 Hz), the line speed is 2 m / min, the roll temperature is T1 = 90 ° C., T2 = 50 ° C.,
T3 = 30 ° C. After peeling off the PES film with an aluminum electrode from this laminate, a panel was manufactured in the same manner as in Example 1. When this panel was driven, a good display of contrast 35 was obtained. The stability of orientation was the same as in Example 1.

Comparative Example 1 A panel was manufactured by using ZL14237-100 manufactured by Merck Ltd. as a liquid crystal material. In any of the methods of Examples 1 to 3, the liquid crystal orientation was disturbed when the film was peeled off to manufacture a panel. I couldn't do that.

Comparative Example 2 An element was manufactured by using an uncoated PES film (thickness 100 μm) instead of the easily peelable base material. When the PES film was peeled off, the liquid crystal material (same as in Example 1) showed P
It adhered also to the ES film side, the orientation of the liquid crystal was disturbed, and the device could not be manufactured.

Comparative Example 3 The liquid crystal material used in Example 1 was applied onto a PES substrate, and a PES film provided with TFT elements was laminated in an unoriented state. The liquid crystal was aligned by the bending alignment method described in JP-A No. 2-10322. The liquid crystal was well aligned, but partly TF
Display unevenness occurred due to deterioration of the T element.

[0050]

As described above, according to the present invention,
It is possible to provide a method for manufacturing a liquid crystal display element, which has few restrictions on the selection of the material of the substrate with active elements, is simple, has a high yield, and has a low manufacturing cost.

[Brief description of drawings]

FIG. 1 is a perspective view schematically showing a configuration of a liquid crystal display element according to the present invention.

FIG. 2 (a) is a cross-sectional view showing one pixel of an active matrix element which constitutes a liquid crystal display element by using a glass substrate, and FIG. 2 (b) schematically shows this active matrix element. It is a perspective view shown.

FIG. 3 is a cross-sectional view showing one pixel of an active matrix element that constitutes a liquid crystal display element using a plastic substrate.

FIG. 4 is an explanatory diagram of a step of laminating an easily peelable base material on a liquid crystal layer and a step of orienting a liquid crystal material.

FIG. 5 is an explanatory diagram showing a process of stacking two substrates and then cutting them into a predetermined size after peeling the easily peelable base material.

FIG. 6 (a) is an explanatory diagram showing a step of aligning a liquid crystal material by applying an electric field together. FIG.6 (b) is
FIG.

FIG. 7 is a cross-sectional view of essential parts of a manufactured liquid crystal display element.

FIG. 8 is an explanatory diagram showing a case where a liquid crystal material is pattern-printed using a gravure roll.

[Explanation of symbols]

 1 Glass or Plastic Substrate 2 TFT Element 3 Gate Electrode 4 Pixel Electrode 5 Gate Insulating Film 5'Anodic Oxide Film 6 Channel Semiconductor 7 Source Electrode 8 Drain Electrode 9 Channel Protective Film 10 Scan Line 11 Data Line 12 Plastic Substrate 13 Counter Electrode 14 Liquid Crystal Layer 15 Easily peelable base material 16, 17, 18 Orienting roll 19 Liquid crystal display element 20 Sealant

Claims (4)

[Claims] 1. A ferroelectric property between two substrates with electrodes, at least one of which is transparent, one of which is a plastic substrate with electrodes, and the other of which is a substrate on which an active drive element is disposed. In the method for producing a liquid crystal display device sandwiching liquid crystal, 1) a ferroelectric polymer liquid crystal or a ferroelectric polymer liquid crystal composition is applied or stretched on a plastic substrate with an electrode to form a liquid crystal layer. 2) A step of laminating the easily peelable base material on the liquid crystal layer such that the liquid crystal layer is sandwiched between the electrode-attached plastic substrate and the easily peelable base material, 3) Liquid crystal layer Applying a shearing force to the composition to orient the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition, 4) the step of peeling the easily peelable base material from the liquid crystal layer, 5) the easily peelable base material Remove the peeled plastic substrate with electrodes from the active drive element. Method of manufacturing a liquid crystal display device but which comprises a step of laminating the arranged has been on the substrate. 2. The step of orienting the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition is to apply shearing force to the liquid crystal layer while gradually cooling from a heated state. Item 2. A method for manufacturing a liquid crystal display element according to item 1. 3. The easily peelable substrate has an electrode, and the step of orienting the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition applies a shearing force to the liquid crystal layer. The method for manufacturing a liquid crystal display element according to claim 1, wherein an electric field is applied in addition to the addition. 4. The step of orienting the ferroelectric polymer liquid crystal or the ferroelectric polymer liquid crystal composition is to apply a shearing force and an electric field to the liquid crystal layer while gradually cooling from the heated state. 4. The method for manufacturing a liquid crystal display element according to claim 3, wherein.