JPH0629919Y2 - Discharge electrode cleaner for static eliminator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a purifier for cleaning a discharge electrode of a static eliminator in indoor air used in a clean room of a semiconductor manufacturing factory.

<Prior Art> This type of static eliminator is disclosed in, for example, JP-A-60-197.
As described in Japanese Patent No. 254, a large number of indoor air ionization discharge electrode needles ranging from several tens to several hundreds are attached to a ceiling of a clean room at intervals of about 2 m, and air ions are ionized by discharge from the electrodes. This is to neutralize the static electricity of a charged object, and a tungsten needle is often used for its electrode. However, with this electrode needle, as time passes, fine dust floating in the air adheres to its surface, or as a result, the oxidation reaction of the surface proceeds,
If it is left as it is, the discharge effect is reduced, and therefore the amount of air ions generated is significantly reduced. If the amount of air ions generated from the discharge electrode decreases or if there is an imbalance in the amount of positive and negative air ions generated, static electricity cannot be removed from the charged object (static elimination), or one of the polarities It will be charged and will not work properly as a static eliminator.

Therefore, it is necessary to regularly clean the discharge needles one by one to prevent the adhesion of fine dust.In the conventional cleaning work, for example, a worker has to take a cotton swab dipped in alcohol etc. I rode on the table and wiped the discharge needles one by one.

However, the work is extremely heavy work because of the large number of discharge needles, the work efficiency is low, and the air pollution is caused by the fall of the attached dust.

<Problems to be Solved by the Invention> Therefore, an object of the present invention is to provide a discharge electrode cleaner in which the cleaning work of the discharge needle is easy and there is no risk of air pollution in the clean room.

<Means for Solving the Problems> In order to achieve the above object, the discharge electrode cleaner of the static eliminator according to the present invention is a static eliminator having a discharge electrode needle attached to a mounting portion such as a ceiling. In a discharge electrode cleaner for cleaning a discharge electrode needle, a suction portion provided with a dust suction port having a passage having an inner diameter larger than the diameter of the discharge electrode needle so that the discharge electrode needle can be inserted, and the suction portion is provided at one end. A hollow rod connected to a flexible hose at the other end and communicating with the passage of the suction section; and a portable vacuum pump that has a filter in the exhaust system and the hose is connected to the suction side. The suction portion and the hollow rod or any one of them is formed of an insulator, and a narrow portion is provided in the passage of the dust suction port of the suction portion.

<Function> When the dust suction port is brought close to the electrode needle to be cleaned and suction is performed by the vacuum pump, the dust attached to the electrode needle is sucked from the dust suction port and passes through the hollow rod and the flexible hose to the exhaust system of the vacuum pump. Captured by the filter provided in.

Further, since either or both of the suction portion and the hollow rod are made of an insulator, the cleaning worker is protected from electric shock.

<Embodiment> A preferred embodiment of the present invention will be described with reference to the drawings. In FIGS. 1 and 2, (1) is a suction part of a discharge electrode cleaner according to the present invention, which is a rubber tube. A dust suction port (2) having a passage having an inner diameter larger than the diameter of the discharge electrode needle (8) so that the discharge electrode needle (8) can be inserted into the discharge electrode needle (8).
Is equipped with. A narrow passage portion is formed in the passage of the dust suction port (2) of the suction portion (1), that is, a narrow portion (2a) having an inner diameter smaller than the others is formed in the middle portion of the passage. In FIG. 2, the tip of the needle reaches the central hollow part of the suction part (1) beyond the narrow passage part below the dust suction port (2), but when the needle is short, the dust suction port (2 ) Is sufficient to capture this.

Next, (3) is a hollow rod made of rigid plastic,
The operator grips this portion and positions the dust suction port (2). The suction part (1) and the hollow rod (3) are fixed by an adhesive agent, and it is necessary that either or both of them be an insulator in order to protect an operator from an electric shock.

The hollow rod (3) is connected to a flexible hose (4) made of urethane with a one-touch connector, and the hose (4) is further detachably attached to the suction port of the portable vacuum pump (5). It is sufficient for the vacuum pump (5) to have, for example, a suction force of 5 per minute at 50 Hz, and a shoulder strap is attached to the top of the housing to make it portable, and a vacuum pump (5) of 0.1 Attach the micron filter (6) freely.

The worker carries the vacuum pump (5) with a shoulder strap on his shoulder, holds the hollow rod (3), and sucks the dust at the tip of the suction part (1).
When (2) is brought close to the discharge electrode needle (8) and the switch (not shown) of the vacuum pump (5) is turned on, fine dust (not shown) attached to the needle is discharged from the dust suction port (2). It is sucked into the suction part (1) without leaking, the hollow rod (3), the flexible hose
After passing through (4), etc., it is finally captured by the filter (6). That is,
Insert the dust inlet (2) of the suction part (1) into the discharge electrode needle (8),
The discharge electrode needle (8) is surrounded by the passage of the dust suction port (2) and separated from the outside. When suction is performed in this state, the discharge electrode needle (8) is exposed to the circulating air, and the dust adhering to this needle is detached and sucked. In this case, the discharge electrode needle
Since (8) is surrounded by the passage, the separated dust is blocked, so that it is prevented from being scattered around.

In addition, since the narrow portion (2a) is formed in the passage, the flow velocity of the air suddenly increases in this portion, so that the dust attached to the needle is easily removed and suction is strongly performed. Therefore, the dust removal efficiency is improved.

<Effect of device> Since the device of the present invention is configured as described above, by using it, cleaning work of the discharge electrode needle can be performed quickly and easily, and the discharge electrode needle can absorb dust from the suction part. Since it is surrounded by the passage of the mouth, it can block the dust that has separated from the discharge electrode needle and prevent it from scattering around, so it is possible to perform cleaning work without worrying about air pollution in the clean room. It has excellent technical effects. In addition, since it has an insulator, it is possible to prevent a situation in which an electric shock or the like is affected even if it contacts the discharge electrode needle. Further, since the flow velocity of the air can be suddenly increased by the narrow portion of the passage, the dust adhering to the discharge electrode needle can be easily detached, and the suction force can be increased, thereby improving the dust removal efficiency. The effect is that you can.

[Brief description of drawings]

FIG. 1 is an overall perspective view showing an embodiment of a discharge electrode cleaner according to the present invention, and FIG. 2 is a cross-sectional view of essential parts of the device showing a state in which a discharge electrode needle is being cleaned. 1 ... Suction part, 2 ... Dust suction port, 3 ... Hollow rod, 5 ... Portable vacuum pump, 6 ... Filter

Claims (1)

[Scope of utility model registration request] 1. A discharge electrode cleaner for cleaning the discharge electrode needle of a static eliminator having a discharge electrode needle attached to a mounting portion such as a ceiling, wherein the discharge electrode needle is inserted so that the discharge electrode needle can be inserted into the discharge electrode needle. The suction part (1) provided with a dust suction port (2) having a passage having an inner diameter larger than the diameter, the suction part (1) is connected to one end and the flexible hose (4) is connected to the other end, and Suction part
The hollow rod (3) communicating with the passage (1) and the exhaust system filter
(6), which comprises a portable vacuum pump (5) to which the hose is connected on the suction side, the suction section (1) and the hollow rod.
(3) or any one of these is formed of an insulator, and the discharge electrode of the static eliminator is characterized in that a narrow portion (2a) is provided in the passage of the dust suction port (2) of the suction portion (1). Purifier.