JPH06295209A - Fluid control valve - Google Patents

Fluid control valve

Info

Publication number
JPH06295209A
JPH06295209A JP10605693A JP10605693A JPH06295209A JP H06295209 A JPH06295209 A JP H06295209A JP 10605693 A JP10605693 A JP 10605693A JP 10605693 A JP10605693 A JP 10605693A JP H06295209 A JPH06295209 A JP H06295209A
Authority
JP
Japan
Prior art keywords
valve
controlled fluid
diaphragm
valve body
rod portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10605693A
Other languages
Japanese (ja)
Other versions
JP2671183B2 (en
Inventor
Hironobu Matsuzawa
広宣 松沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advance Denki Kogyo KK
Original Assignee
Advance Denki Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advance Denki Kogyo KK filed Critical Advance Denki Kogyo KK
Priority to JP5106056A priority Critical patent/JP2671183B2/en
Publication of JPH06295209A publication Critical patent/JPH06295209A/en
Application granted granted Critical
Publication of JP2671183B2 publication Critical patent/JP2671183B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Fluid Pressure (AREA)
  • Flow Control (AREA)

Abstract

PURPOSE:To provide the control valve which reacts instantaneously even to a quick change in primary pressure and keeps a secondary side flow rate and secondary pressure constant. CONSTITUTION:A valve body 11 consists of a rod part 12 in which one end has a larger diameter than that of the other end and a flow rate control part is provided on the side face, and a diaphragm 22 provided in a large diameter side end part of the rod part. A valve main body 31 consists of a valve chest 53 for fixing a peripheral edge of the diaphragm 22 and containing the valve body 11, pressure chambers 34, 44 partitioned from the valve chest 53 by the end face of the diaphragm 22 or the rod part 12, a controlled fluid passage 56 which is formed between the outside periphery of the rod part 12 and the inside wall surface of the valve chest 53, and has a flow rate control passage part 58, a controlled fluid inflow port 59 for communicating with the controlled fluid passage 56 on a small diameter end part side of the rod part 12, a controlled fluid outflow port 60 for communicating with the controlled fluid passage 56 on a large diameter end part side of the rod part, and pressurized gas inflow lines 33, 43 leading to the pressure chambers 34, 44.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、液体あるいは気体か
らなる流体の流量及び2次圧力(流出側圧力)をコント
ロールするバルブに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a valve for controlling a flow rate and a secondary pressure (outflow side pressure) of a fluid composed of liquid or gas.

【0002】[0002]

【従来の技術】従来、1次圧力(流入側圧力)が変動す
る流体の流量及び2次圧力をコントロールするに際して
は、流路の一部に流量発信器あるいは圧力発信器を設け
るとともに、流量制御バルブにはバルブの開閉を行う電
動モータあるいはエアーモータを設けて、前記流量発信
器あるいは圧力発信器で感知した流量または圧力値に関
する信号を電動モータ等に送り、その信号により電動モ
ータまたはエアーモータをコントロールしバルブの開閉
を行っていた。
2. Description of the Related Art Conventionally, when controlling a flow rate of a fluid whose primary pressure (inflow side pressure) fluctuates and a secondary pressure, a flow rate transmitter or pressure transmitter is provided in a part of a flow path and the flow rate is controlled. The valve is equipped with an electric motor or air motor that opens and closes the valve, and sends a signal related to the flow rate or pressure value sensed by the flow rate transmitter or pressure transmitter to the electric motor, etc., and the signal is used to drive the electric motor or air motor. I was controlling and opening and closing the valve.

【0003】しかし、前記の方法にあっては1次圧力の
早い変化に対し、あるいは脈動のような変化に対しては
バルブの開閉が追従せず、流量あるいは2次圧を所望の
値にコントロールできなかった。また、発信器及びモー
タを使用するため装置が複雑、かつ大掛かりとなり、し
かも保守も容易ではない等の問題もあった。
However, in the above method, the opening and closing of the valve does not follow the rapid change in the primary pressure or the change such as pulsation, and the flow rate or the secondary pressure is controlled to a desired value. could not. Further, since the transmitter and the motor are used, the device is complicated and large-scaled, and the maintenance is not easy.

【0004】[0004]

【発明が解決しようとする課題】そこで、この発明は前
記の点に鑑み、1次圧力の早い変化あるいは脈動変化に
対しても瞬時に反応して2次側流量及び2次圧力を一定
に保つことができ、しかも電動モータおよび発信器等の
ような複雑かつ故障し易い装置を必要とせず簡単な構造
からなって、保守が容易で耐久性にも優れるコントロー
ルバルブを提供しようとするものである。
Therefore, in view of the above points, the present invention instantaneously reacts to a rapid change or pulsation change of the primary pressure to keep the secondary flow rate and the secondary pressure constant. It is an object of the present invention to provide a control valve which can be easily maintained and has excellent durability, which has a simple structure without requiring a complicated and easy-to-break device such as an electric motor and a transmitter. .

【0005】[0005]

【課題を解決するための手段】この発明は、弁体とバル
ブ本体とよりなって、前記弁体は、筒形状の一端が拡大
して他端より大径になって両端間の側面外周に突出した
流量制御部を有するロッド部と、前記ロッド部両端の少
なくとも大径側端部に該端部外周へ鍔状に突出して設け
られたダイヤフラムとからなり、前記バルブ本体は、前
記ダイヤフラムの外周縁を固定してロッド部を軸方向に
スライド可能に弁体を収容する弁室と、前記弁室の外側
にあってダイヤフラムまたはロッド部の小径側端面によ
り弁室と仕切られた加圧室と、前記ロッド部外周と弁室
内壁面との間に形成されて、前記ロッド部が大径端部側
へスライドするに従い前記流量制御部と弁室内壁面間が
狭くなる流量制御通路部を有する被制御流体通路と、前
記ロッド部の小径端部側で被制御流体通路に連通しバル
ブ本体外面で開口する被制御流体流入口と、前記ロッド
部の大径端部側で被制御流体通路に連通しバルブ本体外
面で開口する被制御流体流出口と、前記加圧室に通じバ
ルブ本体外面で開口する加圧気体流入路とからなること
を特徴とする流体コントロールバルブに係る。
SUMMARY OF THE INVENTION The present invention comprises a valve body and a valve body, wherein the valve body has a cylindrical shape whose one end is enlarged to have a larger diameter than the other end, and the outer circumference of the side face between the both ends is increased. The valve body includes a rod portion having a protruding flow rate control portion, and a diaphragm provided at least at both ends of the rod portion on the large diameter side so as to project in a flange shape toward the outer periphery of the end portion. A valve chamber having a fixed peripheral edge and accommodating a valve body such that the rod portion is slidable in the axial direction; and a pressurizing chamber that is outside the valve chamber and is partitioned from the valve chamber by the small-diameter side end surface of the diaphragm or the rod portion. A controlled flow path passage portion formed between the outer circumference of the rod portion and the wall surface of the valve chamber, the distance between the flow control portion and the wall surface of the valve chamber becoming narrower as the rod portion slides toward the large-diameter end. Fluid passage and small diameter of the rod part Controlled fluid inlet that communicates with the controlled fluid passage on the side of the valve and that opens on the outer surface of the valve body, and controlled fluid flow that communicates with the controlled fluid passage on the large diameter end side of the rod that opens on the outer surface of the valve body. The present invention relates to a fluid control valve comprising an outlet and a pressurized gas inflow path communicating with the pressurizing chamber and opening on the outer surface of the valve body.

【0006】なお、前記ダイヤフラムを、ロッド部の大
径側端部に設けられた第1ダイヤフラムと、前記第1ダ
イヤフラムより小径からなってロッド部の小径側端部に
設けられた第2ダイヤフラムとから構成し、両ダイヤフ
ラムにより加圧室を弁室と仕切ってもよい。
The diaphragm is composed of a first diaphragm provided at the large diameter end of the rod portion and a second diaphragm having a smaller diameter than the first diaphragm and provided at the small diameter end of the rod portion. The pressure chamber may be separated from the valve chamber by both diaphragms.

【0007】[0007]

【作用】加圧室には所定圧力の加圧気体が流入して弁体
を外面側から押す。一方、一次側の被制御流体流入口か
ら被制御流体通路に入った被制御流体は、流量制御通路
部を通り、その後ロッド部の大径側端部を外方へ押した
後2次側の被制御流体流出口からバルブ本体外へ流出す
る。
The pressurized gas having a predetermined pressure flows into the pressurizing chamber to push the valve body from the outer surface side. On the other hand, the controlled fluid that has entered the controlled fluid passage from the controlled fluid inlet on the primary side passes through the flow rate control passage portion and then pushes the large-diameter side end portion of the rod portion outward, and then the secondary side fluid. It flows out of the valve body from the controlled fluid outlet.

【0008】そして1次流量及び圧力が大になると、一
旦2次側流出量及び2次圧力が増大し、それと同時にロ
ッド部の大径側端部に内側から外方へ向けて加わる圧力
も増大する。そのため、ロッド部の大径側端部に内側か
ら加わる圧力が大径側端部外側にある加圧室の圧力に打
ち勝って、ロッド部が大径側端部方向に押される。そし
てダイヤフラムが変形してロッド部が大径側端部方向へ
スライドし、そのロッド部のスライドにより、流量制御
通路部が狭くなって被制御流体通路を流れる流量が減少
する。それにより2次側の被制御流体流出口から流出す
る流量が減少して2次圧力が低下し、1次側の流量及び
圧力が増大しても2次側ではその変動が抑えられる。
When the primary flow rate and the pressure increase, the secondary side outflow amount and the secondary pressure increase once, and at the same time, the pressure applied to the large diameter side end of the rod portion from the inside to the outside also increases. To do. Therefore, the pressure applied from the inside to the large-diameter side end portion of the rod portion overcomes the pressure in the pressurizing chamber located outside the large-diameter side end portion, and the rod portion is pushed toward the large-diameter side end portion. Then, the diaphragm is deformed and the rod portion slides toward the end portion on the large diameter side, and the slide of the rod portion narrows the flow rate control passage portion and reduces the flow rate flowing through the controlled fluid passage. As a result, the flow rate flowing out from the controlled fluid outlet on the secondary side decreases, the secondary pressure decreases, and even if the flow rate and pressure on the primary side increase, the fluctuation is suppressed on the secondary side.

【0009】逆に1次側の流量が減少して圧力が低下す
ると、被制御流体通路を流れる流体の流量減少及び圧力
低下を生じて、ロッド部の大径側端部に内側から加わる
圧力が大径側端部外側の加圧室内の圧力よりも小さくな
る。その結果、ロッド部が小径側端部方向へスライドし
て、流量制御通路部を広げ、被制御流体通路を流れる流
量を増大させる。それにより、2次側の被制御流体流出
口からの流出量が増大し、2次圧力が増大するため、1
次側の流量及び圧力が低下しても2次側ではその変動が
抑えられる。
On the contrary, when the flow rate on the primary side decreases and the pressure decreases, the flow rate of the fluid flowing through the controlled fluid passage and the pressure decrease occur, and the pressure applied from the inside to the large diameter side end portion of the rod portion is increased. It becomes smaller than the pressure in the pressurizing chamber outside the large diameter end. As a result, the rod portion slides toward the small-diameter side end portion, widens the flow rate control passage portion, and increases the flow rate of the controlled fluid passage. As a result, the outflow amount from the controlled fluid outlet on the secondary side increases and the secondary pressure increases, so
Even if the flow rate and the pressure on the secondary side decrease, the fluctuation is suppressed on the secondary side.

【0010】[0010]

【実施例】以下添付の図面に従ってこの発明を詳細に説
明する。図1はこの発明の一実施例に係るコントロール
バルブの縦断面図、図2はその実施例に用いる弁体の斜
視図、図3はその実施例の作動を説明する部分拡大断面
図、図4は他の実施例の縦断面図、図5はその実施例に
用いる弁体の斜視図、図6はその実施例の作動を説明す
る部分拡大断面図、図7はさらに他の実施例を示す要部
拡大断面図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the accompanying drawings. 1 is a longitudinal sectional view of a control valve according to an embodiment of the present invention, FIG. 2 is a perspective view of a valve element used in the embodiment, FIG. 3 is a partially enlarged sectional view for explaining the operation of the embodiment, and FIG. 5 is a longitudinal sectional view of another embodiment, FIG. 5 is a perspective view of a valve body used in that embodiment, FIG. 6 is a partially enlarged sectional view for explaining the operation of the embodiment, and FIG. 7 is a further embodiment. It is a principal part expanded sectional view.

【0011】図1ないし図3に示す実施例のコントロー
ルバルブ10は、弁体11と、その弁体が収容されるバ
ルブ本体31とからなる。弁体11は、図1及び図2に
示されるように、ロッド部12とダイヤフラム22から
なる。ロッド部12は、上端13側が下端14側よりも
大径となった縦断面形状がほぼ「T」字形からなる筒状
のもので、上下2つの半体15,16が螺合により一体
に組み合わされてなる。ロッド部12の下端14側に
は、流量制御部17(図2及び図3に示す)が環状突出
形状に形成されている。
The control valve 10 of the embodiment shown in FIGS. 1 to 3 comprises a valve body 11 and a valve body 31 in which the valve body is housed. As shown in FIGS. 1 and 2, the valve body 11 includes a rod portion 12 and a diaphragm 22. The rod portion 12 has a cylindrical shape in which the vertical cross-sectional shape is substantially "T" -shaped with the upper end 13 side having a larger diameter than the lower end 14 side, and the upper and lower two halves 15 and 16 are integrally combined by screwing. It will be done. On the lower end 14 side of the rod portion 12, a flow rate control portion 17 (shown in FIGS. 2 and 3) is formed in an annular protruding shape.

【0012】ダイヤフラム22は前記ロッド部12の上
端部にロッド部12と一体に形成されたものである。こ
のダイヤフラム22はロッド部12の上端部外周に鍔状
に突出して、その外周縁23が厚肉となっている。ダイ
ヤフラム22及びロッド部12は、各種のゴムあるいは
樹脂から構成されるが、なかでも耐薬品性、耐腐蝕性の
高いフッ素ゴムあるいはフッ素樹脂からなるものが好ま
しい。
The diaphragm 22 is formed integrally with the rod portion 12 on the upper end portion of the rod portion 12. The diaphragm 22 projects like a brim on the outer periphery of the upper end of the rod portion 12, and the outer peripheral edge 23 thereof has a thick wall. The diaphragm 22 and the rod portion 12 are made of various kinds of rubber or resin, and among them, those made of fluororubber or fluororesin having high chemical resistance and corrosion resistance are preferable.

【0013】バルブ本体31は、第1ブロック32と第
2ブロック42間に第3ブロック52を挟んだ3層構造
の円筒状からなり、フッ素樹脂等耐腐蝕性及び耐薬品性
の高い樹脂から構成される。第1ブロック32及び第2
ブロック42内には、加圧気体流入路33,43と加圧
室34,44が形成されている。加圧気体流入路33,
43は一端がバルブ本体外面で開口し、他端が加圧室3
4,44に通じている。一方加圧室34,44は、第3
ブロック52との合わせ面40,30で開口している。
第1ブロックの加圧室34は、ダイヤフラム22の外周
縁23を除いた部分とほぼ等しい径からなり、第2ブロ
ックの加圧室44は、前記ロッド部12下端14外径と
ほぼ等しい径からなる。また第2ブロックの加圧室44
の外周には第3ブロック52との合わせ面30にシール
用リング57が嵌着されている。
The valve body 31 has a cylindrical shape with a three-layer structure in which a third block 52 is sandwiched between a first block 32 and a second block 42 and is made of a resin such as a fluororesin having high corrosion resistance and chemical resistance. To be done. First block 32 and second
Pressurized gas inflow paths 33 and 43 and pressurizing chambers 34 and 44 are formed in the block 42. Pressurized gas inflow path 33,
43 has one end open at the outer surface of the valve body and the other end at the pressurizing chamber 3
It leads to 4,44. On the other hand, the pressurizing chambers 34 and 44 are
It is open at the mating surfaces 40 and 30 with the block 52.
The pressurizing chamber 34 of the first block has a diameter substantially equal to that of the diaphragm 22 excluding the outer peripheral edge 23, and the pressurizing chamber 44 of the second block has a diameter substantially equal to the outer diameter of the lower end 14 of the rod portion 12. Become. In addition, the pressurizing chamber 44 of the second block
A sealing ring 57 is fitted on the outer peripheral surface of the mating surface 30 with the third block 52.

【0014】第3ブロック52は、バルブ本体31の中
間部を構成するもので、中央には内部を貫通する弁室5
3が形成されている。弁室53は、中間部が細くなって
ほぼ「エ」字形の縦断面形状をした貫通穴からなるもの
で、ロッド部12の外径より大となっている。弁室53
両端の内径は、第1ブロック32の加圧室34内径とほ
ぼ等しくされ、また第1ブロック32との合わせ面には
弁室53外周に凹溝55が形成されている。
The third block 52 constitutes an intermediate portion of the valve body 31, and has a valve chamber 5 penetrating therethrough in the center thereof.
3 is formed. The valve chamber 53 is formed of a through hole having a substantially "A" -shaped vertical cross-section with a thin intermediate portion, and is larger than the outer diameter of the rod portion 12. Valve chamber 53
The inner diameters of both ends are substantially equal to the inner diameter of the pressurizing chamber 34 of the first block 32, and a groove 55 is formed on the outer periphery of the valve chamber 53 on the mating surface with the first block 32.

【0015】前記凹溝55にダイヤフラム22の外周縁
23が嵌着されて弁体11が弁室53内に収容され、そ
の後各ブロック32,42,52が組み合わされて一体
にされる。バルブ本体31内に収容された弁体11のロ
ッド部12外周面と、弁室53内壁面間には被制御流体
通路56が形成される。その被制御流体通路56におい
て、前記弁体ロッド部12の流量制御部17に対向する
弁室内壁面54(図3に示す)との間が流量制御通路部
58になる。また、被制御流体通路56は、ロッド部1
2の小径端部側において被制御流体流入口59に通じ、
他方ロッド部12の大径側端部において被制御流体流出
口60に通じている。
The outer peripheral edge 23 of the diaphragm 22 is fitted in the groove 55 so that the valve element 11 is housed in the valve chamber 53, and then the blocks 32, 42 and 52 are combined and integrated. A controlled fluid passage 56 is formed between the outer peripheral surface of the rod portion 12 of the valve body 11 housed in the valve body 31 and the inner wall surface of the valve chamber 53. In the controlled fluid passage 56, a flow control passage portion 58 is formed between the controlled fluid passage 56 and the wall surface 54 (shown in FIG. 3) of the valve chamber facing the flow control portion 17 of the valve body rod portion 12. Further, the controlled fluid passage 56 is formed by the rod portion 1.
2 to the controlled fluid inflow port 59 on the small diameter end side,
On the other hand, the large diameter side end of the rod portion 12 communicates with the controlled fluid outlet 60.

【0016】このようにしてなるコントロールバルブ1
0は、流量及び圧力を制御したい気体あるいは液体から
なる被制御流体の供給源に、パイプを介して被制御流体
流入口59が接続され、その被制御流体流入口59から
内部に被制御流体が送り込まれる。また、加圧気体流入
路33,43からは、一定圧力に加圧された気体、たと
えば圧縮空気が吹き込まれる。この加圧気体の圧力は、
被制御流体の2次側流量及び圧力等により定められる。
The control valve 1 thus constructed
The controlled fluid inflow port 0 is connected to the controlled fluid inflow port 59 via a pipe to the controlled fluid supply source consisting of gas or liquid whose flow rate and pressure are to be controlled. Sent in. Further, gas pressurized to a constant pressure, for example, compressed air is blown from the pressurized gas inflow passages 33 and 43. The pressure of this pressurized gas is
It is determined by the secondary flow rate and pressure of the controlled fluid.

【0017】前記加圧気体は、加圧室34,44内に到
りダイヤフラム22及びロッド部12の小径側端面を外
側から押す。また、被制御流体は、被制御流体通路56
内の流体制御通路部58を通り、ロッド部12の大径側
端部を外側へ押した後被制御流体流出口60からコント
ロールバルブ10外へ流出する。
The pressurized gas reaches the pressurizing chambers 34, 44 and pushes the diaphragm 22 and the end surface on the small diameter side of the rod portion 12 from the outside. Further, the controlled fluid is the controlled fluid passage 56.
After passing through the inner fluid control passage portion 58 and pushing the large diameter side end portion of the rod portion 12 to the outside, it flows out of the control valve 10 from the controlled fluid outlet 60.

【0018】そして、被制御流体の1次側流量あるいは
圧力が変動した場合には次のように作動する。まず流量
あるいは1次圧力が増大した場合について説明する。そ
の場合には、初めに被制御流体流出口60から流出する
流量および2次圧力が増大する。
When the primary flow rate or pressure of the controlled fluid fluctuates, it operates as follows. First, the case where the flow rate or the primary pressure is increased will be described. In that case, the flow rate and the secondary pressure flowing out from the controlled fluid outlet 60 first increase.

【0019】しかし、それと同時に前記ロッド部12端
部の大径側端部に内側から加わる圧力も増大するため、
その内圧がロッド部の大径側端部外側にある加圧室34
の圧力に打ち勝ってロッド部12が大径側端部方向に押
される。そして鎖線のようにダイヤフラム22が変形し
てロッド部12が大径側端部方向へスライドし、それに
より流量制御通路部58が狭くなって被制御流体通路5
6を流れる流量が減少する。その結果、2次側の被制御
流体流出口60から流出する流量が減少して2次圧力が
低下し、2次側の流量及び圧力変動が抑えられる。
However, at the same time, the pressure applied from the inside to the large diameter side end of the rod portion 12 also increases,
The pressure chamber 34 whose internal pressure is outside the large diameter side end of the rod portion
The rod portion 12 is pushed toward the end portion on the large diameter side by overcoming the pressure of. Then, the diaphragm 22 is deformed like a chain line and the rod portion 12 slides toward the end portion on the large diameter side, whereby the flow rate control passage portion 58 becomes narrow and the controlled fluid passage 5 is formed.
The flow rate through 6 decreases. As a result, the flow rate flowing out from the controlled fluid outlet 60 on the secondary side decreases, the secondary pressure decreases, and the flow rate and pressure fluctuation on the secondary side are suppressed.

【0020】一方、1次側流量及び圧力が減少した場合
には、被制御流体流出口60から流出する流量及び2次
圧力が一旦減少する。しかし、それと同時に前記ロッド
部12端部の大径側端部に内側から加わる圧力が低下し
て加圧室34の圧力よりも低下するため、ロッド部12
が小径側端部方向に押されてスライドする。それにより
流量制御通路部58が広くなって被制御流体通路56を
流れる流量が増大する。その結果、2次側の被制御流体
流出口60から流出する流量が増大して2次圧力が増大
し、2次側の流量及び圧力変動が抑えられる。
On the other hand, when the primary flow rate and pressure decrease, the flow rate and secondary pressure flowing out from the controlled fluid outlet 60 decrease once. However, at the same time, the pressure applied from the inside to the large-diameter side end portion of the end portion of the rod portion 12 decreases and becomes lower than the pressure of the pressurizing chamber 34.
Is pushed toward the end on the small diameter side and slides. As a result, the flow rate control passage portion 58 becomes wider and the flow rate of the controlled fluid passage 56 increases. As a result, the flow rate flowing out from the controlled fluid outlet 60 on the secondary side increases, the secondary pressure increases, and the flow rate and pressure fluctuation on the secondary side are suppressed.

【0021】図4ないし図6に他の実施例を示す。この
実施例のコントロールバルブ70は、弁体71がロッド
部72の大径側端部に第1のダイヤフラム74、小径側
端部に第2のダイヤフラム76を有するものである。図
中78はバルブ本体、79,80は加圧室、81は弁
室、82は流量制御部、83は流量制御通路部、84は
被制御流体通路、85,86は加圧気体流入路、87は
被制御流体流入口、88は被制御流体流出口である。こ
の実施例においては、弁室81と加圧室79,80と
は、第1ダイヤフラム74,第2ダイヤフラム76によ
り仕切られている。
4 to 6 show another embodiment. In the control valve 70 of this embodiment, the valve body 71 has a first diaphragm 74 at the large diameter side end of the rod portion 72 and a second diaphragm 76 at the small diameter side end. In the figure, 78 is a valve body, 79 and 80 are pressurization chambers, 81 is a valve chamber, 82 is a flow rate control unit, 83 is a flow rate control passage unit, 84 is a controlled fluid passage, 85 and 86 are pressurized gas inflow passages, Reference numeral 87 is a controlled fluid inlet, and 88 is a controlled fluid outlet. In this embodiment, the valve chamber 81 and the pressurizing chambers 79 and 80 are partitioned by the first diaphragm 74 and the second diaphragm 76.

【0022】前記各実施例において、ロッド部の小径端
部側加圧室44,80に通じる加圧気体流入路43,8
6を開放状態にして、加圧室44,80の圧力を大気圧
と等しくして用いてもよい。しかし、前記のように弁体
両外側の加圧室34,79,44,80を加圧気体で加
圧するようにすれば、より効率良く被制御流体をコント
ロールすることができ、より好ましい。
In each of the above-described embodiments, the pressurized gas inflow passages 43, 8 leading to the small diameter end side pressurizing chambers 44, 80 of the rod portion.
6 may be opened and the pressure in the pressurizing chambers 44 and 80 may be made equal to the atmospheric pressure. However, it is more preferable to pressurize the pressurizing chambers 34, 79, 44, 80 on both outer sides of the valve body with the pressurized gas as described above, because the controlled fluid can be controlled more efficiently.

【0023】また、図7にはさらに他の実施例の要部を
示す。この実施例は、弁体89両外側の2つの加圧室9
2,93を、弁体89のロッド部90を貫通させた連通
孔91で連結して、1個の加圧気体流入路94から2個
の加圧室92,93に加圧気体が流入するようにしたも
ので,他の部分は前記図4ないし図6に示した実施例の
コントロールバルブ70と同様である。
Further, FIG. 7 shows a main part of still another embodiment. In this embodiment, two pressurizing chambers 9 on both outer sides of the valve body 89 are provided.
2, 93 are connected by a communication hole 91 penetrating the rod portion 90 of the valve body 89, and pressurized gas flows from one pressurized gas inflow path 94 into the two pressurized chambers 92, 93. The other parts are similar to those of the control valve 70 of the embodiment shown in FIGS. 4 to 6.

【0024】なお、前記各実施例において、ロッド部の
小径端部側加圧室44,80,93にスプリング(図示
せず)を配置して、弁体11,71,89をロッド部の
大径端部側へ付勢するようにしてもよい。そのスプリン
グにより、微小圧の変動に対してもより確実にコントロ
ールできるようになる。
In each of the above embodiments, a spring (not shown) is arranged in the small diameter end side pressurizing chamber 44, 80, 93 of the rod portion so that the valve bodies 11, 71, 89 are connected to the large rod portion. You may make it urge to the radial end side. The spring makes it possible to more reliably control even a slight change in pressure.

【0025】[0025]

【発明の効果】以上図示し説明したように、この発明に
よれば、きわめて簡単な構造により流体の2次側流量及
び2次圧力をコントロールすることができ、耐久性及び
保守性に優れる。しかも、耐腐蝕性あるいは耐薬品性の
高い材質からコントロールバルブを構成することもでき
るため、極めて有用である。さらに、コントロールバル
ブに作動用の加圧気体を供給するだけで作動し、また供
給する加圧気体の圧力をコントロールすることにより、
2次側の流量及び圧力を容易にコントロールできる。そ
のため、コントロールバルブとパイプで連結されてコン
トロールバルブから離れた位置にある加圧気体供給源の
位置で、あるいはコントロールバルブと加圧気体供給源
間の所望位置で加圧気体の圧力をコントロールするだけ
で2次側の流量及び圧力をコントロールでき、遠隔操作
も極めて容易である。
As shown and described above, according to the present invention, the secondary flow rate and the secondary pressure of the fluid can be controlled with an extremely simple structure, and the durability and maintainability are excellent. Moreover, the control valve can be made of a material having high corrosion resistance or chemical resistance, which is extremely useful. Furthermore, it operates by simply supplying pressurized gas for operation to the control valve, and by controlling the pressure of the pressurized gas supplied,
The flow rate and pressure on the secondary side can be easily controlled. Therefore, simply control the pressure of the pressurized gas at the position of the pressurized gas supply source that is connected to the control valve by a pipe and away from the control valve, or at the desired position between the control valve and the pressurized gas supply source. The flow rate and pressure on the secondary side can be controlled with and remote control is extremely easy.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例に係るコントロールバルブ
の縦断面図である。
FIG. 1 is a vertical cross-sectional view of a control valve according to an embodiment of the present invention.

【図2】その実施例に用いる弁体の斜視図である。FIG. 2 is a perspective view of a valve body used in the embodiment.

【図3】その実施例の作動を説明する部分拡大断面図で
ある。
FIG. 3 is a partially enlarged cross-sectional view illustrating the operation of the embodiment.

【図4】他の実施例の縦断面図である。FIG. 4 is a vertical cross-sectional view of another embodiment.

【図5】その実施例に用いる弁体の斜視図である。FIG. 5 is a perspective view of a valve body used in the embodiment.

【図6】その実施例の作動を説明する部分拡大断面図で
ある。
FIG. 6 is a partial enlarged cross-sectional view illustrating the operation of the embodiment.

【図7】さらに他の実施例を示す要部拡大断面図であ
る。
FIG. 7 is an enlarged sectional view of an essential part showing still another embodiment.

【符号の説明】[Explanation of symbols]

11 弁体 12 ロッド部 17 流量制御部 22 ダイヤフラム 31 バルブ本体 33,34 加圧気体流入路 34,44 加圧室 53 弁室 56 被制御流体通路 58 流量制御通路部 59 被制御流体流入口 60 被制御流体流出口 11 valve body 12 rod part 17 flow control part 22 diaphragm 31 valve body 33, 34 pressurized gas inflow path 34, 44 pressurization chamber 53 valve chamber 56 controlled fluid passage 58 flow control passage portion 59 controlled fluid inlet 60 controlled Control fluid outlet

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 弁体とバルブ本体とよりなって、 前記弁体は、筒形状の一端が拡大して他端より大径にな
って両端間の側面外周に突出した流量制御部を有するロ
ッド部と、前記ロッド部両端の少なくとも大径側端部に
該端部外周へ鍔状に突出して設けられたダイヤフラムと
からなり、 前記バルブ本体は、前記ダイヤフラムの外周縁を固定し
てロッド部を軸方向にスライド可能に弁体を収容する弁
室と、前記弁室の外側にあってダイヤフラムまたはロッ
ド部の小径側端面により弁室と仕切られた加圧室と、前
記ロッド部外周と弁室内壁面との間に形成されて、前記
ロッド部が大径端部側へスライドするに従い前記流量制
御部と弁室内壁面間が狭くなる流量制御通路部を有する
被制御流体通路と、前記ロッド部の小径端部側で被制御
流体通路に連通しバルブ本体外面で開口する被制御流体
流入口と、前記ロッド部の大径端部側で被制御流体通路
に連通しバルブ本体外面で開口する被制御流体流出口
と、前記加圧室に通じバルブ本体外面で開口する加圧気
体流入路とからなることを特徴とする流体コントロール
バルブ。
1. A rod comprising a valve body and a valve body, wherein the valve body has a flow rate control portion protruding from one end of a cylindrical shape to have a diameter larger than that of the other end and projecting to a side surface outer periphery between both ends. And a diaphragm provided at least on the large-diameter side end portions of both ends of the rod portion so as to project in a flange shape to the outer periphery of the end portion, and the valve body fixes the outer peripheral edge of the diaphragm to the rod portion. A valve chamber accommodating a valve body slidably in the axial direction, a pressurizing chamber outside the valve chamber and partitioned from the valve chamber by a small diameter side end surface of a diaphragm or a rod portion, an outer periphery of the rod portion and a valve chamber. A controlled fluid passage formed between the flow control portion and a wall surface of the valve chamber, which is formed between the flow control portion and the wall surface of the valve chamber and narrows as the rod portion slides toward the large diameter end side; Connected to the controlled fluid passage on the small diameter end side The controlled fluid inlet opening on the outer surface of the valve body, the controlled fluid outlet opening on the outer surface of the valve body in communication with the controlled fluid passage on the large diameter end side of the rod portion, and communicating with the pressurizing chamber. A fluid control valve comprising a pressurized gas inflow passage opening on the outer surface of the valve body.
【請求項2】 請求項1において、ダイヤフラムがロッ
ド部の大径側端部に設けられた第1ダイヤフラムと、前
記第1ダイヤフラムより小径からなってロッド部の小径
側端部に設けられた第2ダイヤフラムとからなり、加圧
室が両ダイヤフラムにより弁室と仕切られたことを特徴
とする流体コントロールバルブ。
2. The first diaphragm according to claim 1, wherein the diaphragm is provided at an end portion on the large diameter side of the rod portion, and the first diaphragm provided at an end portion on the small diameter side of the rod portion, the diameter being smaller than that of the first diaphragm. A fluid control valve consisting of two diaphragms, wherein the pressurizing chamber is separated from the valve chamber by both diaphragms.
JP5106056A 1993-04-07 1993-04-07 Fluid control valve Expired - Lifetime JP2671183B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5106056A JP2671183B2 (en) 1993-04-07 1993-04-07 Fluid control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5106056A JP2671183B2 (en) 1993-04-07 1993-04-07 Fluid control valve

Publications (2)

Publication Number Publication Date
JPH06295209A true JPH06295209A (en) 1994-10-21
JP2671183B2 JP2671183B2 (en) 1997-10-29

Family

ID=14423966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5106056A Expired - Lifetime JP2671183B2 (en) 1993-04-07 1993-04-07 Fluid control valve

Country Status (1)

Country Link
JP (1) JP2671183B2 (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000061283A1 (en) * 1999-04-09 2000-10-19 Mitsubishi Heavy Industries, Ltd. Device for decomposing organic halogen compound and fluid heating device
WO2003009076A1 (en) * 2001-07-18 2003-01-30 Asahi Organic Chemicals Industry Co., Ltd. Constant pressure regulator
JP2003084841A (en) * 2001-09-10 2003-03-19 Advance Denki Kogyo Kk Fluid control valve
JP2003097747A (en) * 2001-09-26 2003-04-03 Asahi Organic Chem Ind Co Ltd Back pressure valve
JP2004019756A (en) * 2002-06-14 2004-01-22 Smc Corp Flow control device
JP2004301181A (en) * 2003-03-28 2004-10-28 Tonii Seiki Seisakusho:Kk Gas leak preventing mechanism in gas pressure regulator
US6889706B2 (en) 2001-12-04 2005-05-10 Smc Kabushiki Kaisha Flow rate control apparatus
KR100580809B1 (en) * 1998-12-25 2006-05-16 아드반스 덴키 고교 가부시키가이샤 Flow rate control valve
US7108241B2 (en) 2002-07-03 2006-09-19 Asahi Organic Chemicals Industry Co., Ltd. Flow control valve
JP2007107606A (en) * 2005-10-13 2007-04-26 Ckd Corp Fluid control valve
JP2008121705A (en) * 2006-11-08 2008-05-29 Asahi Organic Chem Ind Co Ltd Constant flow-rate valve
JPWO2007097243A1 (en) * 2006-02-24 2009-07-09 セイコーインスツル株式会社 Pressure regulating valve, fuel cell system using the same, and hydrogen generation facility
JP2013080488A (en) * 2006-01-06 2013-05-02 Soc Bic Pressure adjusting valve
KR20210096087A (en) 2018-11-30 2021-08-04 아사히 유키자이 가부시키가이샤 diaphragm valve

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007024071A (en) * 2005-07-12 2007-02-01 Advance Denki Kogyo Kk Pressure control valve
JP4625730B2 (en) * 2005-07-12 2011-02-02 アドバンス電気工業株式会社 Pressure control valve
US7644725B2 (en) 2005-12-16 2010-01-12 Advance Electric Japan Kabushiki Kaisha Mixing valve and mixing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173319A (en) * 1985-01-26 1986-08-05 Shoketsu Kinzoku Kogyo Co Ltd Regulator for fluid

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173319A (en) * 1985-01-26 1986-08-05 Shoketsu Kinzoku Kogyo Co Ltd Regulator for fluid

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100580809B1 (en) * 1998-12-25 2006-05-16 아드반스 덴키 고교 가부시키가이샤 Flow rate control valve
WO2000061283A1 (en) * 1999-04-09 2000-10-19 Mitsubishi Heavy Industries, Ltd. Device for decomposing organic halogen compound and fluid heating device
WO2003009076A1 (en) * 2001-07-18 2003-01-30 Asahi Organic Chemicals Industry Co., Ltd. Constant pressure regulator
US6959725B2 (en) 2001-07-18 2005-11-01 Asahi Organic Chemicals Industry Co., Ltd. Constant pressure regulator
JP2003084841A (en) * 2001-09-10 2003-03-19 Advance Denki Kogyo Kk Fluid control valve
JP4590139B2 (en) * 2001-09-10 2010-12-01 アドバンス電気工業株式会社 Fluid control valve
JP2003097747A (en) * 2001-09-26 2003-04-03 Asahi Organic Chem Ind Co Ltd Back pressure valve
US6889706B2 (en) 2001-12-04 2005-05-10 Smc Kabushiki Kaisha Flow rate control apparatus
JP2004019756A (en) * 2002-06-14 2004-01-22 Smc Corp Flow control device
US7108241B2 (en) 2002-07-03 2006-09-19 Asahi Organic Chemicals Industry Co., Ltd. Flow control valve
JP2004301181A (en) * 2003-03-28 2004-10-28 Tonii Seiki Seisakusho:Kk Gas leak preventing mechanism in gas pressure regulator
JP2007107606A (en) * 2005-10-13 2007-04-26 Ckd Corp Fluid control valve
JP2013080488A (en) * 2006-01-06 2013-05-02 Soc Bic Pressure adjusting valve
JPWO2007097243A1 (en) * 2006-02-24 2009-07-09 セイコーインスツル株式会社 Pressure regulating valve, fuel cell system using the same, and hydrogen generation facility
JP4706982B2 (en) * 2006-02-24 2011-06-22 セイコーインスツル株式会社 Pressure regulating valve, fuel cell system using the same, and hydrogen generation facility
US8153320B2 (en) 2006-02-24 2012-04-10 Seiko Instruments Inc. Pressure regulating valve, fuel cell system using same, and hydrogen generating facility
JP2008121705A (en) * 2006-11-08 2008-05-29 Asahi Organic Chem Ind Co Ltd Constant flow-rate valve
KR20210096087A (en) 2018-11-30 2021-08-04 아사히 유키자이 가부시키가이샤 diaphragm valve
US11473682B2 (en) 2018-11-30 2022-10-18 Asahi Yukizai Corporation Diaphragm valve

Also Published As

Publication number Publication date
JP2671183B2 (en) 1997-10-29

Similar Documents

Publication Publication Date Title
JPH06295209A (en) Fluid control valve
US4730635A (en) Valve and method
EP1553473B1 (en) Fluid control valve
US6929028B2 (en) Gas control assembly
US7487792B2 (en) Constant flow valve
US20030197141A1 (en) Vacuum regulating valve
DE69612535T2 (en) Pilot operated fluid valve
US8689832B2 (en) Volume booster with reduced noise trim
US7278441B2 (en) Fluid controller
CN111720580A (en) Fluid control valve
KR20020022014A (en) Vacuum exhaust valve
US4295489A (en) Pilot-operated back pressure regulator
KR100835749B1 (en) Expansion valve
EP1519091A3 (en) Tubing pinch valve
US6408879B1 (en) Fluid control device
EP0534462B1 (en) Contamination resistant bleed valve
JPH08210523A (en) Fluid control valve
JPH0211984A (en) Fluid operation type valve actuator and valve
US10563783B2 (en) Pressure regulating device
JP2003097747A (en) Back pressure valve
AU2005204273B2 (en) A pressure regulator
JPS6115316B2 (en)
TWM242588U (en) Air pump with sound warning function
JPH08291872A (en) Tank valve
JP2002132353A (en) Diaphragm type pressure reducing valve

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090711

Year of fee payment: 12

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120711

Year of fee payment: 15

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 16

Free format text: PAYMENT UNTIL: 20130711