JPH06293904A - Method for producing fine metallic ball and device therefor - Google Patents
Method for producing fine metallic ball and device thereforInfo
- Publication number
- JPH06293904A JPH06293904A JP5082255A JP8225593A JPH06293904A JP H06293904 A JPH06293904 A JP H06293904A JP 5082255 A JP5082255 A JP 5082255A JP 8225593 A JP8225593 A JP 8225593A JP H06293904 A JPH06293904 A JP H06293904A
- Authority
- JP
- Japan
- Prior art keywords
- metal wire
- metal
- wire piece
- core tube
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000002184 metal Substances 0.000 claims abstract description 84
- 229910052751 metal Inorganic materials 0.000 claims abstract description 84
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 31
- 239000011261 inert gas Substances 0.000 claims abstract description 17
- 230000006698 induction Effects 0.000 claims abstract description 9
- 229910001111 Fine metal Inorganic materials 0.000 claims description 47
- 239000007789 gas Substances 0.000 claims description 20
- 238000002844 melting Methods 0.000 claims description 16
- 230000008018 melting Effects 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000011084 recovery Methods 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 27
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 238000007747 plating Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＩＣチップの電極とＴ
ＡＢテープのリード等との間を接合する際に接合部材と
して利用される微細金属球を製造するための方法および
装置に関するものである。BACKGROUND OF THE INVENTION The present invention relates to an IC chip electrode and T
The present invention relates to a method and an apparatus for producing fine metal spheres used as a joining member when joining a lead or the like of an AB tape.
【０００２】[0002]
【従来の技術】ＩＣチップの電極と外部リードとの接続
には多様な方法が採用されている。配線用の微細ワイヤ
ー（ボンディングワイヤー）を用いて接続する方法もあ
るが、チップの電極とリードとの間にバンプと呼ばれる
金属突起を挟んで熱圧着する方法も広く行われるように
なっている。2. Description of the Related Art Various methods are used to connect electrodes of an IC chip and external leads. There is also a method of connecting using a fine wire (bonding wire) for wiring, but a method of sandwiching a metal projection called a bump between a chip electrode and a lead and performing thermocompression bonding is also widely used.
【０００３】ＴＡＢ（Ｔａｐｅ Ａｕｔｏｍａｔｅｄ
Ｂｏｎｄｉｎｇ）法は後者の代表として注目されている
技術である。この方法は、予めＩＣチップの電極部か、
もしくはＴＡＢテープ上のリード先端部のいずれかにバ
ンプを形成しておき、次にＩＣチップ電極部とリードを
有するＴＡＢテープとをバンプを介して重ね合わせて両
者を接合するものである。又ＴＡＢ法以外にフリップチ
ップ法においても、バンプが使用されている。TAB (Tape Automated)
The Bonding method is a technique that is drawing attention as a representative of the latter. In this method, the electrode part of the IC chip is
Alternatively, a bump is formed on one of the leading ends of the leads on the TAB tape, and then the IC chip electrode portion and the TAB tape having the leads are superposed on each other via the bumps to join them. In addition to the TAB method, bumps are also used in the flip chip method.
【０００４】このような用途に提供されるバンプのこれ
までの作り方は、メッキによる方法が主であった。すな
わち、ＩＣチップの電極部にバンプとなる金属（主に高
純度の金）を直接メッキして形成するか、又は一旦ガラ
ス基盤上等にメッキによって形成したバンプをＴＡＢテ
ープ側のリード先端部に転写する方法が主流となってい
る。しかしながら、メッキによる方法は設備が大きくな
る上に、バンプとして使用する金属の組成にも制約を受
けると言う欠点がある。又特にＩＣチップの電極部に直
接メッキしてバンプを形成する場合には、ＩＣチップそ
のものがメッキ工程を通過することになってＩＣチップ
の歩留りが悪化するという問題がある。The conventional method of making bumps provided for such uses has been plating. That is, a metal (mainly high-purity gold) to be a bump is directly plated on the electrode portion of the IC chip, or a bump that is once formed by plating on a glass substrate or the like is formed on the tip of the lead on the TAB tape side. The method of transfer is the mainstream. However, the plating method has a drawback in that the equipment is large and the composition of the metal used as the bump is also limited. Further, particularly when the bumps are formed by directly plating the electrode portions of the IC chip, there is a problem in that the IC chip itself passes through the plating process and the yield of the IC chips deteriorates.
【０００５】これらの欠点を解消する方法として、メッ
キによらないバンプ形成方法も考えられるようになって
きた。その一つに微細金属球をバンプに用いる方法があ
るが、その微細金属球を製造する方法としては、すでに
（１）遠心噴霧粉末製造法があり、特許出願されたもの
としては（２）バンプ用の素材となる金属を微細線に加
工し、この金属線を定尺切断した後、お互いの間隔を隔
てた状態で溶融・凝固させ、表面張力を利用して球形状
のバンプを得る方法（特開平４−０６６６０２号公報参
照）と（３）定尺切断された微細金属球を縦型炉内で自
由落下させ、落下中に、その金属の融点以上に加熱して
表面張力の作用で球形状とし、球形状のまま凝固させて
炉底部から取り出す方法（特開平４−０６６６０１号公
報参照）とがある。これらの方法で作られた球形状のバ
ンプは、リード先端部等に熱圧着して使用される（特開
平３−１７４７３７号公報参照）。As a method of solving these drawbacks, a bump forming method which does not use plating has come to be considered. One of them is a method of using fine metal balls for bumps. As a method of producing the fine metal balls, there is already (1) centrifugal spray powder manufacturing method, and as a patent application, (2) bump A method of processing a metal used as a material for fine wires into fine wires, cutting the metal wires to a fixed length, melting and solidifying the wires at a distance from each other, and using surface tension to obtain spherical bumps ( (See Japanese Patent Application Laid-Open No. 4-066602) and (3) A fine metal ball cut into a standard length is allowed to freely fall in a vertical furnace, and while falling, is heated to a temperature higher than the melting point of the metal and the surface tension acts on the ball. There is a method (see Japanese Patent Laid-Open No. 4-066601) in which the sphere is shaped and solidified as it is and taken out from the furnace bottom. The spherical bumps produced by these methods are used by thermocompression bonding to the lead tips and the like (see Japanese Patent Laid-Open No. 3-174737).
【０００６】任意の金属線片を溶融してバンプとする新
しい方法によれば、接合用部材としてふさわしい特性を
持った任意の金属をバンプとして使用する可能性が大き
く広がったことになる。すなわち、金の他に銅や銀、並
びにそれらをベースとする各種合金を容易にバンプとし
て形成することができるようになったわけである。According to the new method of melting an arbitrary metal wire piece into a bump, the possibility of using an arbitrary metal having suitable characteristics as a joining member for the bump is greatly expanded. That is, copper, silver, and various alloys based on them, in addition to gold, can be easily formed as bumps.
【０００７】[0007]
【発明が解決しようとする課題】従来の微細金属球の製
造方法の前記（１）では、真球のものや同じ粒径のもの
を得ることができないという問題があり、前記（２）で
は、所定長さに切断した金属線片を坩堝中に一定の間隔
をとって配置した後、溶融していた。これは、お互いの
金属線片が接触したまま、又は余りに近い位置に置かれ
たまま溶融工程に入ると、溶融時にこれらの金属線片が
合体してしまうおそれがあるからである。この方法にお
いては、金属線片がすべて一定の長さを有すれば、均一
なサイズの微細金属球を形成することができた。しかし
ながら、この金属線片は長くても２〜３mmという微小な
ものなので、金属線片の配列作業および微細金属球の回
収作業に手間がかかるという問題がある。In the above-mentioned (1) of the conventional method for producing fine metal spheres, there is a problem that it is not possible to obtain a true sphere or one having the same particle size, and in the above (2), After the metal wire pieces cut into a predetermined length were placed in the crucible at regular intervals, they were melted. This is because, if the metal wire pieces enter the melting step with the metal wire pieces being in contact with each other or placed at positions too close to each other, the metal wire pieces may be united during the melting. In this method, if all the metal wire pieces had a constant length, it was possible to form fine metal spheres of uniform size. However, since this metal wire piece is as small as 2 to 3 mm at the longest, there is a problem that the work of arranging the metal wire pieces and the work of collecting the fine metal balls take time.
【０００８】又、前記（３）では、金属線片を炉芯管上
部から自由落下させ、加熱・溶融して球状化させてい
る。しかしながら、この自由落下の方法では金属線片が
大きく重い場合には可能でも、実際に使用される金属線
片（径が２０〜３０μｍ、長さ０．１５〜０．４０mm）
では、金属の融点以上に加熱された炉芯管内部の対流の
ため金属線片が飛散してしまうか、お互いに接触して合
体してしまう恐れがある。又、炉芯管に石英ガラスを使
用していることから、仮に、一部の金属線片が落下した
としても、金属線片および形成された微細金属球は高温
に加熱された炉芯管（石英管）に付着してしまい炉芯管
下部より回収することができないという問題がある。Further, in the above (3), the metal wire piece is freely dropped from the upper part of the furnace core tube, heated and melted to be spherical. However, this free fall method is possible even if the metal wire piece is large and heavy, but the metal wire piece actually used (diameter 20 to 30 μm, length 0.15 to 0.40 mm)
Then, there is a possibility that the metal wire pieces may scatter or come into contact with each other to be united due to convection inside the furnace core tube heated above the melting point of the metal. Further, since quartz glass is used for the furnace core tube, even if some metal wire pieces fall, the metal wire piece and the formed fine metal balls are heated to a high temperature in the furnace core tube ( There is a problem that it cannot be collected from the lower part of the furnace core tube because it adheres to the quartz tube).
【０００９】本発明は上記事情に基づいてなされたもの
であり、簡易な装置により作業能率を、より向上させる
とともに、真球での粒の揃った微細金属球を安定して大
量に供給できる方法と装置を提供することを目的とする
ものである。The present invention has been made based on the above circumstances, and is a method capable of further improving the working efficiency with a simple device and stably supplying a large amount of fine metal spheres having a uniform spherical shape. And to provide a device.
【００１０】[0010]
【課題を解決するための手段】上記の目的を達成するた
めの本発明は、（１）縦に配置された炉芯管内を、金属
線片を炉芯管上部から炉芯管下部へ流れる気流又はガス
気流に乗せて落下させ、前記金属線片に用いている金属
の融点以上の温度に前記金属線片を加熱して溶融するこ
とにより、前記金属線片を球状化することを特徴とする
微細金属球の製造方法であり、（２）炉芯管上端に配置
された金属線片を落下させることに使用するガス（例え
ば不活性ガス）の導入口を備えた金属線片供給部と、前
記炉芯管内側に配置された炭素製筒とその炭素製筒を発
熱させてその炭素製筒内の上から下へ流れる気流又は前
記ガス気流に乗せて落下させる前記金属線片を加熱・溶
融させるための前記炉芯管外側に配置された高周波誘導
コイルを組み合わせた加熱部と、前記炉芯管下端に配置
された前記金属線片および形成された微細金属球を落下
させることに使用したガスを外へ出すガスの排気口を備
えた微細金属球回収部とから構成された微細金属球の製
造装置である。そして、前記炭素製筒の内側中心部に炭
素製柱を設けることが望ましい。Means for Solving the Problems The present invention for achieving the above-mentioned object is as follows: (1) In a vertically arranged furnace core tube, a metal wire piece flows from an upper part of the core tube to a lower part of the core tube. Alternatively, the metal wire piece is dropped into a gas stream, and the metal wire piece is heated to a temperature equal to or higher than the melting point of the metal used for the metal wire piece to melt the metal wire piece, thereby making the metal wire piece spherical. A method for manufacturing fine metal balls, comprising: (2) a metal wire piece supply unit having an inlet for a gas (for example, an inert gas) used for dropping the metal wire piece arranged at the upper end of the furnace core tube; Heating and melting of a carbon tube placed inside the furnace core tube and the metal wire piece that causes the carbon tube to generate heat and fall on the airflow or the gas stream flowing from the top to the bottom of the carbon tube A high frequency induction coil arranged outside the furnace core tube for A heating section, and a fine metal ball recovery section having a gas outlet for discharging the gas used for dropping the metal wire piece and the formed fine metal ball arranged at the lower end of the furnace core tube. It is an apparatus for manufacturing fine metal spheres. Further, it is desirable to provide a carbon column at the center of the inside of the carbon tube.
【００１１】[0011]
【作用】本発明は前記の構成によって、炉芯管上端から
導入した不活性ガスを炉芯管下端から吸引する方法で炉
芯管の上から下への気流又は不活性ガス気流を作り、そ
の不活性ガス気流に乗せて落下させた金属線片を、高周
波誘導コイルを用いて発熱させた炭素製筒内を通過させ
ることにより、その金属線片に用いている金属の融点以
上の温度に加熱して溶融する。溶融状態の金属は表面張
力が大きく、自ら球状化するので、金属線片は発熱した
炭素製筒内を落下中に球状に変形され、微細金属球にな
る。又、炭素製筒内側の中心部に炭素製柱を設けること
により、炭素製筒内部の横方向の温度分布を均一にでき
るので、落下した金属線片の、すべてに効率よく熱を伝
え球状化させることができる。なお、不活性ガスは金属
線片および形成された微細金属球を選ぶだけでなく、炭
素製筒および炭素製柱の酸化・損傷を防止することがで
きる。According to the present invention, by the above-mentioned structure, the inert gas introduced from the upper end of the furnace core tube is sucked from the lower end of the furnace core tube to create an air flow from the top to the bottom of the furnace core tube or an inert gas flow, By heating a metal wire piece dropped on an inert gas stream through a carbon cylinder heated by a high-frequency induction coil, the metal wire piece is heated to a temperature above the melting point of the metal used for the metal wire piece. And melt. Since the molten metal has a large surface tension and becomes spherical, the metal wire piece is deformed into a spherical shape while falling in a carbon cylinder that has generated heat and becomes a fine metal ball. Also, by providing a carbon column in the center of the inside of the carbon cylinder, the temperature distribution in the lateral direction inside the carbon cylinder can be made uniform, so that heat can be efficiently transmitted to all of the dropped metal wire pieces and made into a spherical shape. Can be made. The inert gas can not only select the metal wire pieces and the formed fine metal spheres, but also can prevent the carbon cylinder and the carbon pillar from being oxidized and damaged.
【００１２】[0012]
【実施例】以下に本発明の一実施例を図１を参照して説
明する。図１は本発明の一実施例である微細金属球の製
造方法において使用する装置の概略図である。本実施例
においては、線径２５μｍ、長さ０．３mmと線径１０μ
ｍ、長さ０．３mmの２種類の金片（金属線片）を使用
し、球径６５．５μｍと球径３５．５μｍの２種類の金
球（微細金属球）を製造する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a schematic view of an apparatus used in a method for producing fine metal spheres which is an embodiment of the present invention. In this embodiment, the wire diameter is 25 μm, the length is 0.3 mm, and the wire diameter is 10 μm.
Using 2 kinds of metal pieces (metal wire pieces) having a length of m and a length of 0.3 mm, two kinds of gold balls (fine metal balls) having a sphere diameter of 65.5 μm and a sphere diameter of 35.5 μm are manufactured.
【００１３】図１に示す装置は金属線片１を落下させる
ために用いる不活性ガスの導入口３を備えた金属線片供
給口２と、炉芯管４内側の炭素製筒５および炭素製柱６
を発熱させて、その間を落下する金属線片１を加熱・溶
融させるための炉芯管４外側の高周波誘導コイル７と、
金属線片１および形成された微細金属球８を落下させる
ために用いた不活性ガスを炉外へ出す吸引装置を取りつ
けるための不活性ガス排出口１０と、微細金属球回収部
の温度上昇を防止するための冷却管９を備えた微細金属
球回収容器１１とからなる。The apparatus shown in FIG. 1 has a metal wire piece supply port 2 having an inlet 3 for an inert gas used for dropping a metal wire piece 1, a carbon tube 5 inside a furnace core tube 4 and a carbon wire tube. Pillar 6
And a high-frequency induction coil 7 outside the furnace core tube 4 for heating and melting the metal wire piece 1 which is heated between
The inert gas discharge port 10 for attaching the suction device for discharging the inert gas used for dropping the metal wire piece 1 and the formed fine metal balls 8 to the outside of the furnace, and the temperature rise of the fine metal ball recovery part are set. It comprises a fine metal sphere collection container 11 provided with a cooling pipe 9 for preventing.
【００１４】炉芯管４には、内径１０５mm、長さ５５０
mmの石英ガラスを使用し、不活性ガスには、Ａｒガスを
使用した。Ａｒガス（不活性ガス）導入口３は、リング
状に鋼パイプで形成され、内側に孔空けた無数の小さな
穴から６ｌ／毎分噴出するＡｒガスでカーテンを作れる
ようにし、金属線片供給部２をシールできるようにし
た。又、高周波誘導コイル７を用いて発熱させる炭素製
筒５は内径４０mm、長さ３２０mmに、炭素製柱６は外径
２４mm、長さ３２０mmにし、下端近傍において最高温度
（１４１０℃）を有するような温度分布を持たせた。最
高温度を金の融点よりも、かなり高く設定しているの
は、自由落下の場合と比べて金属線片１が炭素製筒５と
炭素製柱６の間を落下する速度が早いためで、温度を高
めることによって金属線片１を確実に融点以上の温度に
加熱するためである。The furnace core tube 4 has an inner diameter of 105 mm and a length of 550.
mm quartz glass was used, and Ar gas was used as the inert gas. The Ar gas (inert gas) inlet 3 is formed of a steel pipe in a ring shape so that a curtain can be made with Ar gas ejected at a rate of 6 l / min from a myriad of small holes bored inward to supply a metal wire piece. The part 2 can be sealed. In addition, the carbon cylinder 5 that uses the high-frequency induction coil 7 to generate heat has an inner diameter of 40 mm and a length of 320 mm, and the carbon pillar 6 has an outer diameter of 24 mm and a length of 320 mm, and has a maximum temperature (1410 ° C.) near the lower end. It has a wide temperature distribution. The reason why the maximum temperature is set considerably higher than the melting point of gold is that the speed at which the metal wire piece 1 falls between the carbon-made cylinder 5 and the carbon-made pillar 6 is faster than in the case of free fall. This is because by raising the temperature, the metal wire piece 1 is surely heated to a temperature equal to or higher than the melting point.
【００１５】冷却管９は銅で形成され、冷却水を循環さ
せて微細金属球回収部の温度上昇を防止できるようにし
た。又、Ａｒガス（不活性ガス）排出口１０および微細
金属球回収容器１１は石英ガラスで形成され、Ａｒガス
排出口１０からは、炭素製筒５と炭素製柱６の間を上か
ら下へ流れるＡｒガス気流を作るためにロータリー・ポ
ンプで１０ｌ／毎分のＡｒガスを吸引している。又、微
細金属球回収容器１１には水等を張り、微細金属球８が
形成、落下した際の変形を防止するとともに、水等の温
度を調節することによって形成された微細金属球８の性
質（結晶粒度、硬度等）をコントロールできるようにし
てある。The cooling pipe 9 is made of copper, and the cooling water is circulated to prevent the temperature rise of the fine metal sphere collecting portion. Further, the Ar gas (inert gas) discharge port 10 and the fine metal sphere recovery container 11 are made of quartz glass, and from the Ar gas discharge port 10 between the carbon cylinder 5 and the carbon pillar 6 from top to bottom. A rotary pump draws 10 l / min of Ar gas to create a flowing Ar gas stream. Further, the fine metal sphere recovery container 11 is filled with water or the like to prevent deformation when the fine metal sphere 8 is formed and dropped, and the property of the fine metal sphere 8 formed by adjusting the temperature of the water or the like. (Crystal grain size, hardness, etc.) can be controlled.
【００１６】微細金属球の切断装置（図示せず）で切断
された金属線片１は炉芯管４上端の金属線片供給口２か
ら落下され、炉芯管４に入り、不活性ガス導入口３から
噴出されるＡｒガスのカーテン１２中央に落下し、Ａｒ
ガス気流に乗って炭素製筒５内（炭素製柱６との間）に
入る。金属線片１は炭素製筒５内を落下し、高周波誘導
コイル７のある位置まで落下すると温度が急激に上昇し
始める。そして、金属線片１は温度がその金属の融点よ
り高くなったときに溶融する。一般に溶融金属は表面張
力が大きいので溶融状態では自ら球形状に変化する。し
たがって、この溶融金属は炭素製筒５内を通過中に球形
状に変化するが、炭素製筒５を出ると温度が急に下が
り、この金属は凝固し始める。最後に金属球が回収容器
１１に落ち、固化した微細金属球８が得られる。The metal wire piece 1 cut by a cutting device (not shown) for fine metal balls is dropped from the metal wire piece supply port 2 at the upper end of the furnace core tube 4, enters the furnace core tube 4, and the inert gas is introduced. Ar gas ejected from the mouth 3 drops to the center of the curtain 12 of Ar gas,
It rides in the gas stream and enters the carbon cylinder 5 (between the carbon pillar 6). The metal wire piece 1 drops in the carbon cylinder 5, and when it drops to a position where the high frequency induction coil 7 exists, the temperature starts to rise rapidly. Then, the metal wire piece 1 melts when the temperature becomes higher than the melting point of the metal. In general, molten metal has a large surface tension, so that it changes into a spherical shape by itself in a molten state. Therefore, the molten metal changes into a spherical shape while passing through the carbon-made cylinder 5, but when the molten metal exits the carbon-made cylinder 5, the temperature suddenly drops and the metal begins to solidify. Finally, the metal spheres fall into the collection container 11, and the solidified fine metal spheres 8 are obtained.
【００１７】本発明者等が上記の装置および金属線片を
用いて実際に試験を行ったところ、真球で粒の揃った金
球（粒径６５．５μｍと粒径３５．５μｍの２種類）を
得ることができた。図２の写真は得られた金球の形状
（が真球であること）を示す。When the inventors of the present invention actually conducted a test using the above-mentioned device and metal wire piece, gold spheres having a perfect sphere (particle size: 65.5 μm and particle size: 35.5 μm) ) Was able to be obtained. The photograph of FIG. 2 shows the shape of the obtained gold sphere (is a true sphere).
【００１８】このように、本実施例の微細金属の製造方
法においては、金属線片を搬送するための装置を設ける
ことなく、金属線片を炉芯管に入れるだけで微細金属球
の回収工程まで一度に行うことができるので、作業能率
の向上と量産性の向上を図ることが可能になる。さら
に、本実施例の装置に、例えば、微細金属球を一定の間
隔で一本毎に切断する装置を本実施例の炉芯管上端に備
えることにより、微細金属球の切断工程、切断された金
属線片の球状化工程および微細金属球の回収工程を連続
して行うことができる。As described above, in the method for producing fine metal particles of the present embodiment, the step of collecting fine metal balls can be performed by simply inserting the metal wire pieces into the furnace core tube without providing an apparatus for conveying the metal wire pieces. It is possible to improve the work efficiency and the mass productivity because the processes can be performed all at once. Further, in the apparatus of the present embodiment, for example, by equipping the upper end of the furnace core tube of the present embodiment with an apparatus that cuts the fine metal balls one by one at regular intervals, the cutting process of the fine metal balls was performed. The step of spheroidizing the metal wire pieces and the step of recovering the fine metal spheres can be continuously performed.
【００１９】又、本実施例の微細金属の製造方法では、
従来採り上げられなかった金属や合金にも適用すること
ができるので、バンプとしての適切な組成の微細金属球
を製造することができる。尚、上記の実施例において
は、金属片を用いて金球を製造する場合について説明し
たが、本発明は、これに限定されるものではなく、バン
プに相応した他の金属を使用してもよく、その場合に
は、不活性ガスの流量と炉内の最高温度を変更する必要
がある。又、金属によっては、高温の加熱炉内（炭素製
筒５内）において化学反応が起こらないように装置全体
を不活性ガス雰囲気で覆う必要もある。又、上記実施例
では、炉芯管下端部に微細金属回収容器１１を設けた
が、本発明は、これに限定されるものではなく、例えば
回収容器を用いずに、炉芯管の下端部をテーパー状に加
工し、下端の開口孔より微細金属球を回収するようにし
てもよい。これにより、例えば、炉芯管の下方にベルト
コンベア等を配置し、微細金属球を連続的に回収するこ
とも可能になる。Further, in the method for producing fine metal according to this embodiment,
Since it can be applied to metals and alloys which have not been picked up in the past, it is possible to manufacture fine metal spheres having an appropriate composition as bumps. In addition, in the above embodiment, the case of manufacturing the gold ball by using the metal piece has been described, but the present invention is not limited to this, and another metal corresponding to the bump may be used. Well, in that case, it is necessary to change the flow rate of the inert gas and the maximum temperature in the furnace. In addition, depending on the metal, it is necessary to cover the entire apparatus with an inert gas atmosphere so that a chemical reaction does not occur in the high temperature heating furnace (in the carbon cylinder 5). Further, although the fine metal recovery container 11 is provided at the lower end of the furnace core tube in the above-described embodiment, the present invention is not limited to this, and for example, the lower end of the furnace core tube can be used without using the recovery container. May be processed into a tapered shape, and the fine metal spheres may be collected from the opening hole at the lower end. As a result, for example, a belt conveyor or the like can be arranged below the furnace core tube to continuously collect fine metal balls.
【００２０】[0020]
【発明の効果】以上説明したように本発明によれば、気
流又は、不活性ガス気流を用いて落下させた金属線片を
高周波誘導コイルを使用して発熱させた炉内（炭素製筒
内）を通過させることで加熱・溶融し、溶融金属の大き
な表面張力を利用することによって、容易に微細金属球
を製造することができるので、簡易な装置により作業能
率の向上を図り、量産性の向上を図ることができる微細
金属球の製造方法および装置を提供できる。As described above, according to the present invention, a metal wire piece dropped by an air flow or an inert gas flow is heated in a furnace (a carbon cylinder) by using a high frequency induction coil. ) To heat and melt, and by utilizing the large surface tension of the molten metal, it is possible to easily manufacture fine metal spheres, so work efficiency can be improved with a simple device, and mass productivity can be improved. It is possible to provide a method and an apparatus for manufacturing fine metal spheres that can be improved.
【図１】本発明の一実施例である微細金属球の製造方法
において使用する装置の概略図である。FIG. 1 is a schematic view of an apparatus used in a method for producing fine metal balls, which is an embodiment of the present invention.
【図２】本発明で得られた金属球粒子構造の一例を示す
ＳＥＭ写真である。FIG. 2 is an SEM photograph showing an example of a metal sphere particle structure obtained by the present invention.
１ 金属線片 ２ 金属線片供給口 ３ Ａｒガスの導入口 ４ 炉芯管 ５ 炭素製筒 ６ 炭素製柱 ７ 高周波誘導コイル ８ 微細金属球 ９ 冷却管 １０ Ａｒガスの排出口 １１ 微細金属球の回収容器 １２ ガスカーテン 1 Metal Wire Piece 2 Metal Wire Piece Supply Port 3 Ar Gas Inlet Port 4 Furnace Core Tube 5 Carbon Cylinder 6 Carbon Cylinder 7 High Frequency Induction Coil 8 Fine Metal Ball 9 Cooling Tube 10 Ar Gas Discharge Port 11 Fine Metal Ball Collection container 12 Gas curtain
───────────────────────────────────────────────────── フロントページの続き (72)発明者 大高 操 神奈川県川崎市中原区井田1618番地 新日 本製鐵株式会社先端技術研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Misao Otaka 1618 Ida, Nakahara-ku, Kawasaki-shi, Kanagawa Nippon Steel Corporation Advanced Technology Research Laboratories
Claims (3)
炉心管上部から炉心管下部へ流れる気流又はガス気流に
乗せて落下させ、前記金属線片に用いている金属の融点
以上の温度に前記金属線片を加熱して溶融することによ
り、前記金属線片を球状化することを特徴とする微細金
属球の製造方法。1. A vertically arranged furnace core tube is loaded with an air flow or a gas stream flowing from an upper part of the furnace core tube to a lower part of the furnace core tube to drop the metal wire piece, and the metal wire piece is melted at a temperature not lower than the melting point of the metal used for the metal wire piece. A method for producing fine metal spheres, characterized in that the metal wire piece is sphericalized by heating the metal wire piece to a temperature and melting it.
させることに使用するガスの導入口を備えた金属線片供
給部と、前記炉心管内側に配置された炭素製筒とその炭
素製筒を発熱させてその炭素製筒内の上から下へ流れる
気流又は不活性ガス気流に乗って落下する前記金属線片
を加熱・溶融させるための前記炉心管外側に配置された
高周波誘導コイルを組み合わせた加熱部と、前記炉心管
下端に配置された前記金属線片および形成された微細金
属球を落下させることに使用したガスを外へ出すガスの
排気口を備えた微細金属球回収部とから構成された微細
金属球の製造装置。2. A metal wire piece supply section having a gas inlet for use in dropping a metal wire piece arranged at the upper end of the core tube, a carbon cylinder arranged inside the core tube, and its carbon. A high-frequency induction coil arranged outside the core tube for heating and melting the metal wire piece that heats the cylinder and falls on the air flow or the inert gas flow flowing from the top to the bottom in the carbon cylinder. And a fine metal ball recovery unit having a gas exhaust port for discharging the gas used for dropping the metal wire piece and the fine metal ball formed at the lower end of the core tube An apparatus for producing fine metal spheres composed of and.
設けた請求項２記載の微細金属球の製造装置。3. The apparatus for producing fine metal spheres according to claim 2, wherein a carbon column is provided at the center of the inside of the carbon tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5082255A JP2779299B2 (en) | 1993-04-08 | 1993-04-08 | Method and apparatus for producing fine metal spheres |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5082255A JP2779299B2 (en) | 1993-04-08 | 1993-04-08 | Method and apparatus for producing fine metal spheres |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06293904A true JPH06293904A (en) | 1994-10-21 |
| JP2779299B2 JP2779299B2 (en) | 1998-07-23 |
Family
ID=13769343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5082255A Expired - Fee Related JP2779299B2 (en) | 1993-04-08 | 1993-04-08 | Method and apparatus for producing fine metal spheres |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2779299B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1366848A1 (en) * | 2002-05-30 | 2003-12-03 | Minebea Co., Ltd. | Manufacturing method for metal spheres |
| JP2005342559A (en) * | 2004-05-31 | 2005-12-15 | Hitachi Metals Ltd | Method of manufacturing quantitatively cut chip and method of manufacturing metal sphere using the chip-manufacturing method |
| JP2010111933A (en) * | 2008-11-10 | 2010-05-20 | Taiyo Nippon Sanso Corp | Method and apparatus for producing spherical metal particle |
| US9886309B2 (en) | 2002-06-28 | 2018-02-06 | Microsoft Technology Licensing, Llc | Identity-based distributed computing for device resources |
| CN114959203A (en) * | 2022-05-20 | 2022-08-30 | 浙江晋椿精密工业股份有限公司 | Spheroidizing furnace capable of recycling heat |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03180432A (en) * | 1989-12-07 | 1991-08-06 | Daido Steel Co Ltd | Melting method and melting device of metal |
| JPH03281705A (en) * | 1990-03-29 | 1991-12-12 | Tatsuta Electric Wire & Cable Co Ltd | Manufacture of fine copper balls |
| JPH03281707A (en) * | 1990-03-29 | 1991-12-12 | Tatsuta Electric Wire & Cable Co Ltd | Manufacture of fine lead balls |
| JPH0426701A (en) * | 1990-05-21 | 1992-01-29 | Tatsuta Electric Wire & Cable Co Ltd | Manufacture of fine gold ball |
-
1993
- 1993-04-08 JP JP5082255A patent/JP2779299B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03180432A (en) * | 1989-12-07 | 1991-08-06 | Daido Steel Co Ltd | Melting method and melting device of metal |
| JPH03281705A (en) * | 1990-03-29 | 1991-12-12 | Tatsuta Electric Wire & Cable Co Ltd | Manufacture of fine copper balls |
| JPH03281707A (en) * | 1990-03-29 | 1991-12-12 | Tatsuta Electric Wire & Cable Co Ltd | Manufacture of fine lead balls |
| JPH0426701A (en) * | 1990-05-21 | 1992-01-29 | Tatsuta Electric Wire & Cable Co Ltd | Manufacture of fine gold ball |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1366848A1 (en) * | 2002-05-30 | 2003-12-03 | Minebea Co., Ltd. | Manufacturing method for metal spheres |
| US9886309B2 (en) | 2002-06-28 | 2018-02-06 | Microsoft Technology Licensing, Llc | Identity-based distributed computing for device resources |
| JP2005342559A (en) * | 2004-05-31 | 2005-12-15 | Hitachi Metals Ltd | Method of manufacturing quantitatively cut chip and method of manufacturing metal sphere using the chip-manufacturing method |
| JP2010111933A (en) * | 2008-11-10 | 2010-05-20 | Taiyo Nippon Sanso Corp | Method and apparatus for producing spherical metal particle |
| CN114959203A (en) * | 2022-05-20 | 2022-08-30 | 浙江晋椿精密工业股份有限公司 | Spheroidizing furnace capable of recycling heat |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2779299B2 (en) | 1998-07-23 |
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