JPH06284750A - Laminated electrostatic actuator - Google Patents
Laminated electrostatic actuatorInfo
- Publication number
- JPH06284750A JPH06284750A JP7054593A JP7054593A JPH06284750A JP H06284750 A JPH06284750 A JP H06284750A JP 7054593 A JP7054593 A JP 7054593A JP 7054593 A JP7054593 A JP 7054593A JP H06284750 A JPH06284750 A JP H06284750A
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- JP
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- Prior art keywords
- laminated
- electrode
- electrodes
- thickness direction
- plate thickness
- Prior art date
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、積層静電アクチュエー
タに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated electrostatic actuator.
【０００２】[0002]
【従来の技術】発電所の熱交換用細管内、ジェット機の
エンジン内、化学プラントのような巨大プラントや、原
子炉のような放射線環境のもとでは、その狭所や細管の
損傷や異物の堆積等の異常事態を人が直接発見すること
はできない。そこで、近年、このような問題を解決すべ
く、狭所や細管内に入って行き、点検、修理を行うマイ
クロロボットの研究が進められている。従来のマイクロ
ロボットの１つとして電磁力を利用した電磁アクチュエ
ータがあるが、この電磁アクチュエータは変位量と発生
力が共に大きいという利点を持つものの、その性質上永
久磁石や電磁コイル、あるいは磁路を備えなければなら
ず、構造が複雑でしかも重量も重く、また消費電力が大
きいという不具合があった。これに対して比較的構造が
簡単で重量が軽く、しかも消費電力が小さいという利点
を活かしたものとして、静電力を利用した静電アクチュ
エータがある。この静電アクチュエータは、ステータ電
極とスライダ電極を櫛歯状に配置し両電極に電圧を印加
することで生じる静電引力で、ステータ電極に対しスラ
イダ電極を動かすものである。2. Description of the Related Art In a heat exchange thin tube in a power plant, in a jet engine, in a large plant such as a chemical plant, or in a radiation environment such as a nuclear reactor, damage to the narrow space or the thin tube or foreign matter is prevented. No one can directly detect an abnormal situation such as accumulation. Therefore, in recent years, in order to solve such a problem, research on a micro robot that goes into a narrow space or a narrow tube to inspect and repair has been advanced. As one of the conventional microrobots, there is an electromagnetic actuator that uses electromagnetic force. Although this electromagnetic actuator has the advantage that both displacement and generated force are large, it has the property of using a permanent magnet, an electromagnetic coil, or a magnetic path. It had to be provided, had a complicated structure, was heavy, and consumed a lot of power. On the other hand, an electrostatic actuator utilizing electrostatic force is one of the advantages of its relatively simple structure, light weight, and low power consumption. This electrostatic actuator moves a slider electrode with respect to a stator electrode by the electrostatic attraction generated by arranging a stator electrode and a slider electrode in a comb shape and applying a voltage to both electrodes.
【０００３】このような静電アクチュエータの従来例を
図１６ないし図１８に示す。静電アクチュエータ１００
は、ガラス基板１０１上に固定された櫛歯状のステータ
電極１０２と、このステータ電極１０２の隣合う歯に電
圧を順次印加することによってステップ的に変位する櫛
歯状のスライダ電極１０３とを備えている。このスライ
ダ電極１０３の前後端部には、折れ曲がった２つのばね
１０４が一体形成されており、２つのばね１０４の端部
は、ガラス基板１０１上に固定された固定台１０５に支
持されている。また、スライダ電極１０３の中央の上下
には、直線支持ビーム１０６が一体形成されており、直
線支持ビーム１０６の両端部はガラス基板１０１上に固
定された固定台１０７に支持されている。これにより、
スライダ電極１０３は、全体がガラス基板１０１上に吊
るされており、ガラス基板１０１に接触することなく運
動する。そして、スライダ電極１０３の前後中央部に形
成されたスリット１０８内には、滑り案内板１０９が設
けており、スライダ電極１０３が中心線上からそれて変
位することを防止している。A conventional example of such an electrostatic actuator is shown in FIGS. Electrostatic actuator 100
Includes a comb-teeth-shaped stator electrode 102 fixed on the glass substrate 101, and a comb-teeth-shaped slider electrode 103 that is displaced stepwise by sequentially applying a voltage to adjacent teeth of the stator electrode 102. ing. Two bent springs 104 are integrally formed at the front and rear ends of the slider electrode 103, and the ends of the two springs 104 are supported by a fixed base 105 fixed on the glass substrate 101. Further, linear support beams 106 are integrally formed above and below the center of the slider electrode 103, and both ends of the linear support beam 106 are supported by fixed bases 107 fixed on the glass substrate 101. This allows
The entire slider electrode 103 is suspended on the glass substrate 101, and moves without contacting the glass substrate 101. A slide guide plate 109 is provided in the slit 108 formed in the center of the slider electrode 103 in the front-rear direction to prevent the slider electrode 103 from being displaced from the center line.
【０００４】[0004]
【発明が解決しようとする課題】ところが、従来の静電
アクチュエータ１００においては、発生力がステータ電
極１０２の歯とスライダ電極１０３の歯との対向面積に
比例することから、その面積を大きくとることができ
ず、静電引力が小さいという問題点があった。本発明
は、隣設する電極の対向面積を大きくして、大きな静電
引力を得ることが可能な積層静電アクチュエータの提供
を目的とする。However, in the conventional electrostatic actuator 100, since the generated force is proportional to the facing area between the teeth of the stator electrode 102 and the teeth of the slider electrode 103, the area should be large. However, there is a problem that the electrostatic attraction is small. It is an object of the present invention to provide a laminated electrostatic actuator capable of obtaining a large electrostatic attractive force by increasing the facing area of adjacent electrodes.
【０００５】[0005]
【課題を解決するための手段】本発明は、絶縁層と電極
を設けた複数の積層板を板厚方向に積層してなる積層体
と、前記複数の積層板の各々に板厚方向の引張力を与え
て、前記複数の積層板の各々を所定の空隙を隔てて保持
する可撓性の保持部と、前記複数の積層板の板厚方向に
隣設する各電極間に電圧をそれぞれ印加する配線部とを
備えた技術手段を採用した。DISCLOSURE OF THE INVENTION The present invention is directed to a laminated body formed by laminating a plurality of laminated plates provided with an insulating layer and electrodes in the plate thickness direction, and a tensile force in the plate thickness direction applied to each of the plurality of laminated plates. A voltage is applied between a flexible holding portion that applies a force to hold each of the plurality of laminated plates with a predetermined gap therebetween and each electrode adjacent to each other in the plate thickness direction of the plurality of laminated plates. The technical means including a wiring section is adopted.
【０００６】[0006]
【作用】本発明によれば、複数の積層板の板厚方向に隣
設する各電極間に配線部より電圧がそれぞれ印加される
と、各電極にはそれぞれ静電引力が働くため縮み、積層
体の板厚方向の寸法が短縮される。このとき、複数の積
層板の板厚方向に隣設する各電極の対向面積は大きいた
め、従来例に比較して遙に大きな静電引力が得られる。
また、複数の積層板の各電極は板厚方向に積層されてい
ることで、変位の方向は同一であり、複数の積層板の各
電極の変位が加算されるので、大きな変位が得られる。According to the present invention, when a voltage is applied from the wiring portion between the electrodes adjacent to each other in the plate thickness direction of a plurality of laminated plates, electrostatic attraction acts on each electrode, so that the electrodes are contracted and laminated. The dimension of the body in the plate thickness direction is reduced. At this time, since the facing areas of the electrodes adjacent to each other in the plate thickness direction of the plurality of laminated plates are large, a much larger electrostatic attraction force can be obtained as compared with the conventional example.
Further, since the electrodes of the plurality of laminated plates are laminated in the plate thickness direction, the displacement directions are the same, and the displacements of the electrodes of the plurality of laminated plates are added, so that a large displacement can be obtained.
【０００７】[0007]
【実施例】次に、本発明の積層静電アクチュエータを図
１ないし図１５に示す複数の実施例に基づいて説明す
る。 〔第１実施例の構成〕図１ないし図７は本発明の第１実
施例を示したもので、図１ないし図３は積層静電アクチ
ュエータを示した図である。積層静電アクチュエータ１
は、ガラス基板２、積層体３、第１、第２立体配線部
４、５およびベローズ６等から構成されている。ガラス
基板２は、円盤状に形成されており、９０°間隔で、図
示しない電圧制御装置に電気的に接続する２個の第１基
板電極７と２個の第２基板電極８を配している。なお、
ガラス基板２の材料は半導体でも良い。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the laminated electrostatic actuator of the present invention will be explained based on a plurality of embodiments shown in FIGS. [Structure of First Embodiment] FIGS. 1 to 7 show a first embodiment of the present invention, and FIGS. 1 to 3 are views showing a laminated electrostatic actuator. Multilayer electrostatic actuator 1
Is composed of a glass substrate 2, a laminated body 3, first and second three-dimensional wiring portions 4, 5, a bellows 6, and the like. The glass substrate 2 is formed in a disk shape, and has two first substrate electrodes 7 and two second substrate electrodes 8 electrically connected to a voltage control device (not shown) at 90 ° intervals. There is. In addition,
The material of the glass substrate 2 may be a semiconductor.
【０００８】積層体３は、第１積層板９と第２積層板１
０を例えば５μｍ程度の空隙１１を持って交互に多数積
層されてなる。その第１積層板９は、例えばアルミニウ
ム製の第１電極１２と、例えば窒化シリコン（Ｓｉ3 Ｎ
4 ）製の第１絶縁層１３からなる。また、第２積層板１
０は、第１積層板９と同様にして、例えばアルミニウム
製の第２電極１４と、例えば窒化シリコン（Ｓｉ
3 Ｎ4 ）製の第２絶縁層１５からなる。The laminate 3 comprises a first laminate 9 and a second laminate 1
For example, a large number of 0s are alternately stacked with a gap 11 of about 5 μm. The first laminated plate 9 includes a first electrode 12 made of, for example, aluminum and silicon nitride (Si 3 N
4 ) The first insulating layer 13 made of. In addition, the second laminated plate 1
0 is the same as the first laminated plate 9 and the second electrode 14 made of, for example, aluminum and silicon nitride (Si
3 N 4 ) made of the second insulating layer 15.
【０００９】空隙１１は、第１積層板９の第１絶縁層１
３と第２積層板１０の第２電極１４との間、および第１
積層板９の第１電極１２と第２積層板１０の第２絶縁層
１５との間に形成されている。第１、第２電極１２、１
４は、円盤状に形成されており、第１、第２絶縁層１
３、１５の上面に蒸着またはスパッタ等により形成され
ている。また、第１、第２電極１２、１４は、第１、第
２積層板９、１０の板厚方向（図示上下方向）に等間隔
で対向して配置されている。The void 11 is formed in the first insulating layer 1 of the first laminated plate 9.
3 and the second electrode 14 of the second laminated plate 10, and the first
It is formed between the first electrode 12 of the laminated plate 9 and the second insulating layer 15 of the second laminated plate 10. First and second electrodes 12, 1
Numeral 4 is formed in a disk shape, and includes first and second insulating layers 1
It is formed on the upper surfaces of 3 and 15 by vapor deposition or sputtering. The first and second electrodes 12 and 14 are arranged so as to face each other at equal intervals in the plate thickness direction (the vertical direction in the drawing) of the first and second laminated plates 9 and 10.
【００１０】なお、最下層の第１積層板９の第１電極１
２は、ガラス基板２の表面に直接形成されている。ま
た、第１、第２電極１２、１４の材料は、アルミニウム
の他に、クロム、ニッケル、チタン、銀等の導電性金
属、またはＳｎＯ2 、ＩＴＯ、ＺｎＯ等の導電材料を用
いても良い。第１、第２絶縁層１３、１５は、円盤状に
形成されており、第１、第２積層板９、１０の板厚方向
（図示上下方向）に等間隔で配されている。また、第
１、第２絶縁層１３、１５の材料は、窒化シリコンの他
に、ＳｉＯ2 等の絶縁材料を用いても良い。The first electrode 1 of the lowermost first laminated plate 9
2 is directly formed on the surface of the glass substrate 2. In addition to aluminum, the first and second electrodes 12 and 14 may be made of a conductive metal such as chromium, nickel, titanium, or silver, or a conductive material such as SnO 2 , ITO, or ZnO. The first and second insulating layers 13 and 15 are formed in a disk shape, and are arranged at equal intervals in the plate thickness direction (the vertical direction in the drawing) of the first and second laminated plates 9 and 10. Further, as the material of the first and second insulating layers 13 and 15, in addition to silicon nitride, an insulating material such as SiO 2 may be used.
【００１１】第１、第２立体配線部４、５は、本発明の
配線部であって、積層された各第１、第２電極１２、１
４間を電気的にそれぞれ接続する。そして、第１、第２
立体配線部４、５は、タングステン等の導電材料製で各
第１、第２積層板９、１０をそれぞれ支持すると共に、
各第１、第２積層板９、１０が所定の空隙１１を保持で
きる程度の弾性力を有する厚さに設定されている。この
実施例では、図２に示したように、第１、第２立体配線
部４、５を互いに９０°の配置になるように各２個設け
て、それぞれ第１、第２基板電極７、８に電気的に接続
している。The first and second three-dimensional wiring portions 4 and 5 are wiring portions of the present invention, and each of the laminated first and second electrodes 12 and 1 is formed.
4 are electrically connected to each other. And the first and second
The three-dimensional wiring portions 4 and 5 are made of a conductive material such as tungsten and support the first and second laminated plates 9 and 10, respectively,
The thickness of each of the first and second laminated plates 9 and 10 is set so as to have an elastic force capable of holding a predetermined gap 11. In this embodiment, as shown in FIG. 2, two first and second three-dimensional wiring portions 4 and 5 are provided so as to be arranged at 90 ° to each other, and the first and second substrate electrodes 7 and 7, respectively. 8 is electrically connected.
【００１２】ベローズ６は、本発明の保持部であって、
可撓性の金属材料または弾性材料製で蛇腹状に形成され
ており、第１、第２積層板９、１０の板厚方向に積層さ
れた各第１、第２電極１２、１４に予め引張張力を与え
るものである。このベローズ６は、一端部が開口し、他
端部が閉塞されている。そして、ベローズ６の中間部に
は、伸縮自在の蛇腹状の筒部６ａが形成されている。そ
の筒部６ａは、内部に積層体３および第１、第２立体配
線部４、５を収容する。ベローズ６の一端部（図示下端
部）はガラス基板２の側面に固定され、他端部（図示上
端部）は積層された最後の第２絶縁層１５に固定され
る。The bellows 6 is the holding portion of the present invention,
It is made of a flexible metal material or an elastic material and is formed in a bellows shape, and is stretched in advance on each of the first and second electrodes 12 and 14 laminated in the plate thickness direction of the first and second laminated plates 9 and 10. It gives tension. The bellows 6 has one end open and the other end closed. A bellows-shaped tubular portion 6a is formed in the middle of the bellows 6 so as to be expandable and contractible. The tubular portion 6a houses the laminated body 3 and the first and second three-dimensional wiring portions 4 and 5 inside. One end (the lower end in the figure) of the bellows 6 is fixed to the side surface of the glass substrate 2, and the other end (the upper end in the figure) is fixed to the last laminated second insulating layer 15.
【００１３】次に、積層静電アクチュエータ１の製造方
法を図３ないし図７に基づいて簡単に説明する。まず、
図３に示したように、円盤状のガラス基板２上に互いに
９０°の配置になるように第１、第２基板電極７、８を
デポジション等により２個ずつ形成する。なお、基板が
半導体であれば、不純物拡散（イオン注入）による拡散
層でも良いし、あるいは金属材料をデポジションしても
良い。そして、ガラス基板２上に第１電極１２、第１絶
縁層１３および犠牲層１６を順次デポジションする。さ
らに、その犠牲層１６上に第２電極１４、第２絶縁層１
５および犠牲層１７を順次デポジションする。Next, a method of manufacturing the laminated electrostatic actuator 1 will be briefly described with reference to FIGS. First,
As shown in FIG. 3, two pieces of the first and second substrate electrodes 7 and 8 are formed by deposition or the like on the disk-shaped glass substrate 2 so as to be arranged at 90 ° to each other. If the substrate is a semiconductor, it may be a diffusion layer formed by impurity diffusion (ion implantation), or a metal material may be deposited. Then, the first electrode 12, the first insulating layer 13, and the sacrificial layer 16 are sequentially deposited on the glass substrate 2. Further, the second electrode 14 and the second insulating layer 1 are formed on the sacrificial layer 16.
5 and the sacrificial layer 17 are sequentially deposited.
【００１４】ここで、第１電極１２と第２電極１４の材
料、および第１絶縁層１３と第２絶縁層１５の材料は、
それぞれ同じであるのが望ましい。また、犠牲層１６、
１７とは一般的に、可動部を形成するために、最終的に
除去消失させることを目的として予め形成する薄膜層の
ことを言い、この実施例では材料として酸化珪素（Ｓｉ
Ｏ2 ）を用いている。以下、この工程を所定の積層数に
当たる分だけ、例えば１００層程度繰り返して、第１積
層板９と第２積層板１０が交互に配置される積層体３を
形成する。その後、フォトリソグラフィー工程等の手段
にて、積層体３を必要な形状にする。この実施例では円
柱形状にパターンニングされている。Here, the materials of the first electrode 12 and the second electrode 14 and the materials of the first insulating layer 13 and the second insulating layer 15 are:
It is desirable that they are the same. Also, the sacrificial layer 16,
In general, 17 refers to a thin film layer formed in advance for the purpose of finally removing and eliminating it in order to form a movable portion. In this embodiment, silicon oxide (Si) is used as a material.
O 2 ) is used. Hereinafter, this process is repeated by a number corresponding to a predetermined number of layers, for example, about 100 layers to form a layered body 3 in which the first layered plates 9 and the second layered plates 10 are alternately arranged. After that, the laminate 3 is formed into a required shape by means such as a photolithography process. In this embodiment, it is patterned into a cylindrical shape.
【００１５】次に、図４に示したように、第１、第２電
極１２、１４を金属製の第１、第２立体配線部４、５で
接続したときの絶縁膜１８、１９を、図示された形状で
円盤形状の第１、第２積層板９、１０の側面に局所的に
（９０°毎に）成膜する。この局所的な成膜は、レーザ
ビームやイオンビーム等を使用して、ビームが照射され
た領域のみがデポジションされる選択的ＣＶＤ等の手段
を用いると良い。ここで、絶縁膜１８、１９は、犠牲層
１６、１７と同一の材料が望ましい。Next, as shown in FIG. 4, the insulating films 18 and 19 when the first and second electrodes 12 and 14 are connected by the metal first and second three-dimensional wiring portions 4 and 5, A film is formed locally (every 90 °) on the side surfaces of the disk-shaped first and second laminated plates 9 and 10 having the illustrated shape. For this local film formation, it is preferable to use a laser beam, an ion beam, or the like, and a means such as selective CVD in which only the region irradiated with the beam is deposited. Here, the insulating films 18 and 19 are preferably made of the same material as the sacrificial layers 16 and 17.
【００１６】さらに、図５に示したように、絶縁膜１
８、１９の上に前述した手段と同じ手段で、今度は第
１、第２立体配線部４、５を局所的に成膜する。この工
程で、各第１電極１２と第１基板電極７が電気的に接続
され、各第２電極１４と第２基板電極８が電気的に接続
される。そして、図６に示したように、犠牲層１６、１
７と絶縁膜１８、１９をエッチングすることにより、各
第１、第２積層板９、１０間に空隙１１を形成する。最
後に、図７に示したように、ベローズ６の一端部（図示
下端部）をガラス基板２の側面に固定し、ベローズ６の
他端部（図示上端部）を最上層の第２積層板１０の第２
絶縁層１５の上面に固定する。Further, as shown in FIG. 5, the insulating film 1
The first and second three-dimensional wiring portions 4 and 5 are locally formed on the layers 8 and 19 by the same means as described above. In this step, each first electrode 12 and the first substrate electrode 7 are electrically connected, and each second electrode 14 and the second substrate electrode 8 are electrically connected. Then, as shown in FIG.
By etching 7 and the insulating films 18 and 19, a gap 11 is formed between the first and second laminated plates 9 and 10. Finally, as shown in FIG. 7, one end portion (lower end portion in the drawing) of the bellows 6 is fixed to the side surface of the glass substrate 2, and the other end portion (upper end portion in the drawing) of the bellows 6 is the uppermost second laminated plate. Second of ten
It is fixed on the upper surface of the insulating layer 15.
【００１７】〔第１実施例の作用〕次に、積層静電アク
チュエータ１の作用を図１および図２に基づいて簡単に
説明する。電圧制御装置より第１、第２立体配線部４、
５を介して各第１、第２電極１２、１４間に電圧が印加
されると、各第１、第２電極１２、１４間にはそれぞれ
静電引力が働くため、各第１、第２電極１２、１４が吸
引され、ベローズ６の弾性力に抗して各第１、第２積層
板９、１０が空隙１１内を移動して縮み、積層体３の板
厚方向の寸法が短縮される。逆に、各第１、第２電極１
２、１４間に電圧が印加されないと、ベローズ６の弾性
力により各第１、第２電極１２、１４間が伸ばされ、各
第１、第２積層板９、１０間に空隙１１が形成される。
また、各第１、第２電極１２、１４は板厚方向に積層さ
れているため、変位の方向は同一であり、各第１、第２
電極１２、１４の変位が加算されるので、第１、第２積
層板９、１０の板厚方向に大きな往復変位が得られる。[Operation of First Embodiment] Next, the operation of the laminated electrostatic actuator 1 will be briefly described with reference to FIGS. 1 and 2. From the voltage control device, the first and second three-dimensional wiring units 4,
When a voltage is applied between the first and second electrodes 12 and 14 via 5, electrostatic attraction acts between the first and second electrodes 12 and 14, respectively. The electrodes 12 and 14 are attracted, the first and second laminated plates 9 and 10 move in the gap 11 and contract against the elastic force of the bellows 6, and the dimension of the laminated body 3 in the plate thickness direction is shortened. It Conversely, each of the first and second electrodes 1
When a voltage is not applied between 2 and 14, the elastic force of the bellows 6 extends between the first and second electrodes 12 and 14, and a void 11 is formed between the first and second laminated plates 9 and 10. It
Further, since the first and second electrodes 12 and 14 are laminated in the plate thickness direction, the displacement directions are the same, and the first and second electrodes 12 and 14 are the same.
Since the displacements of the electrodes 12 and 14 are added, a large reciprocal displacement can be obtained in the plate thickness direction of the first and second laminated plates 9 and 10.
【００１８】〔第１実施例の効果〕以上のように、積層
静電アクチュエータ１は、複数の積層板３の板厚方向に
隣設する各第１、第２電極１２、１４の対向面積が従来
例に比較して遙に大きいため、大きな静電引力と大きな
変位を同時に実現することができる。[Effects of First Embodiment] As described above, in the laminated electrostatic actuator 1, the facing areas of the first and second electrodes 12, 14 adjacent to each other in the plate thickness direction of the plurality of laminated plates 3 are different. Since it is much larger than the conventional example, a large electrostatic attraction and a large displacement can be realized at the same time.
【００１９】〔第２実施例〕図８ないし図１２は本発明
の第２実施例を示したもので、図８および図９は積層静
電アクチュエータ１を示した図である。この実施例で
は、第１、第２電極１２、１４を、第１、第２絶縁層１
３、１５のＹ字状の凸部１３１、１５１により絶縁する
ことによって、３個ずつの第１、第２電極片１２ａ〜１
２ｃ、１４ａ〜１４ｃに分割して、各第１、第２電極片
１２ａ〜１２ｃ、１４ａ〜１４ｃが対向するようにした
ものである。したがって、３個の電極片１２ａ〜１２
ｃ、１４ａ〜１４ｃは、１２０°毎に３分割した状態で
形成されている。なお、分割された第１、第２電極片１
２ａ〜１２ｃ、１４ａ〜１４ｃは、最低１組の第１、第
２立体配線部４ａ〜４ｃ、５ａ〜５ｃによりそれぞれ接
続されている。その製作工程は、デポジションされた第
１、第２電極片１２ａ〜１２ｃ、１４ａ〜１４ｃをその
後直ちに３分割してパターン形成し、次に第１、第２電
極片１２ａ〜１２ｃ、１４ａ〜１４ｃ上に第１、第２絶
縁層１３、１５をデポジションすることによりなされ
る。[Second Embodiment] FIGS. 8 to 12 show a second embodiment of the present invention, and FIGS. 8 and 9 are views showing a laminated electrostatic actuator 1. In this embodiment, the first and second electrodes 12 and 14 are connected to the first and second insulating layers 1 and 2, respectively.
By insulating with the Y-shaped protrusions 131 and 151 of the electrodes 3 and 15, three pieces of the first and second electrode pieces 12a to 1 are provided.
It is divided into 2c and 14a to 14c so that the first and second electrode pieces 12a to 12c and 14a to 14c face each other. Therefore, the three electrode pieces 12a-12
c, 14a to 14c are formed in a state of being divided into three at intervals of 120 °. Incidentally, the divided first and second electrode pieces 1
2a to 12c and 14a to 14c are connected by at least one set of first and second three-dimensional wiring portions 4a to 4c and 5a to 5c, respectively. In the manufacturing process, the deposited first and second electrode pieces 12a to 12c and 14a to 14c are immediately divided into three to form a pattern, and then the first and second electrode pieces 12a to 12c and 14a to 14c. This is done by depositing the first and second insulating layers 13 and 15 on top.
【００２０】〔第２実施例の作用〕次に、積層静電アク
チュエータ１の作用を図８ないし図１２に基づいて簡単
に説明する。電圧制御装置より第１、第２立体配線部４
ａ〜４ｃ、５ａ〜５ｃを介して各第１、第２電極片１２
ａ〜１２ｃ、１４ａ〜１４ｃ間に均一に電圧が印加され
ると、図１０に示したように、各第１、第２電極片１２
ａ〜１２ｃ、１４ａ〜１４ｃにはそれぞれ静電引力が働
いて縮む。逆に、各第１、第２電極片１２ａ〜１２ｃ、
１４ａ〜１４ｃ間に電圧が印加されないと、図１１に示
したように、各第１、第２電極片１２ａ〜１２ｃ、１４
ａ〜１４ｃ間が伸びる。[Operation of Second Embodiment] Next, the operation of the laminated electrostatic actuator 1 will be briefly described with reference to FIGS. 8 to 12. From the voltage control device, the first and second three-dimensional wiring unit 4
Each of the first and second electrode pieces 12 through a to 4c and 5a to 5c
When a voltage is uniformly applied between a to 12c and 14a to 14c, as shown in FIG.
The a to 12c and 14a to 14c are respectively contracted by electrostatic attraction. On the contrary, each of the first and second electrode pieces 12a to 12c,
If no voltage is applied between 14a to 14c, as shown in FIG. 11, each of the first and second electrode pieces 12a to 12c, 14 is
The distance between a to 14c extends.
【００２１】また、電圧制御装置より第１、第２立体配
線部４ａ、５ａを介して電極片１２ａ、１４ａに独立に
電圧を印加することにより、図１２に示したように、積
層体３の先端は屈曲動作、言い替えれば３次元的に変位
する。すなわち、第１、第２立体配線部４ａ、５ａに電
圧を印加すると、第１、第２電極片１２ａ、１４ａが静
電引力で吸引され、図９において図示矢印Ａ方向に曲が
る。また、図９において図示矢印Ｂ方向に曲げるときは
第１、第２立体配線部４ａ、４ｂ、５ａ、５ｂの両方に
電圧を印加する。また、各第１、第２立体配線部４ａ〜
４ｃ、５ａ〜５ｃへの電圧印加に時間差をつけると、つ
まり位相差をつけると、積層体３の首振り運動も可能に
なる。Further, by independently applying a voltage from the voltage control device to the electrode pieces 12a and 14a via the first and second three-dimensional wiring portions 4a and 5a, as shown in FIG. The tip is bent, that is, displaced three-dimensionally. That is, when a voltage is applied to the first and second three-dimensional wiring portions 4a and 5a, the first and second electrode pieces 12a and 14a are attracted by electrostatic attraction and bend in the direction of arrow A shown in FIG. Further, when bending in the direction of arrow B in FIG. 9, a voltage is applied to both the first and second three-dimensional wiring portions 4a, 4b, 5a, 5b. In addition, each of the first and second three-dimensional wiring portions 4a to
If a time difference is applied to the voltage application to 4c and 5a to 5c, that is, a phase difference is applied, the swinging motion of the laminated body 3 is also possible.
【００２２】〔第２実施例の効果〕以上のように、積層
静電アクチュエータ１の各第１、第２電極１２、１４
は、絶縁された３個の第１、第２電極片１２ａ〜１２
ｃ、１４ａ〜１４ｃに分割されているため、個々の対向
した第１、第２電極片１２ａ〜１２ｃ、１４ａ〜１４ｃ
間に独立した電圧を印加することができる。このため、
各第１、第２電極片１２ａ〜１２ｃ、１４ａ〜１４ｃを
独立して電圧制御することにより、変位の方向が３次元
的、つまり屈曲動作が可能となるので、例えば長手方向
が直線的および曲線的な配管内を移動するマイクロロボ
ットに適用することができる。[Effects of Second Embodiment] As described above, the first and second electrodes 12 and 14 of the multilayer electrostatic actuator 1 are used.
Is three insulated first and second electrode pieces 12a-12
c, 14a to 14c, the first and second electrode pieces 12a to 12c and 14a to 14c are opposed to each other.
An independent voltage can be applied in between. For this reason,
By independently controlling the voltage of each of the first and second electrode pieces 12a to 12c and 14a to 14c, the displacement direction can be three-dimensionally, that is, the bending operation can be performed. For example, the longitudinal direction is linear and curved. The present invention can be applied to a microrobot that moves in a typical pipe.
【００２３】〔第３実施例〕図１３ないし図１５は本発
明の第３実施例を示したもので、図１３および図１４は
積層静電アクチュエータを示した図である。この実施例
の積層静電アクチュエータ１は、第１、第２電極１２、
１４間の空隙１１に弾性の絶縁膜２１を配している。絶
縁膜２１は、第１、第２電極１２、１４上に積層される
平板状の膜部２２、およびこの膜部２２より図示上方に
突出した多数の突起部２３等から構成されている。な
お、弾性体２１の材料としてはシリコンゲル等を使用し
ている。[Third Embodiment] FIGS. 13 to 15 show a third embodiment of the present invention, and FIGS. 13 and 14 are views showing a laminated electrostatic actuator. The multilayer electrostatic actuator 1 of this embodiment includes a first electrode 12, a second electrode 12,
An elastic insulating film 21 is arranged in the space 11 between the spaces 14. The insulating film 21 is composed of a flat plate-shaped film portion 22 laminated on the first and second electrodes 12 and 14, and a large number of projections 23 projecting upward from the film portion 22 in the drawing. Silicon gel or the like is used as the material of the elastic body 21.
【００２４】次に、積層静電アクチュエータ１の製造方
法を図１５に基づいて簡単に説明する。まず、図１５
（ａ）に示したように、第１電極１２上に硬化性のある
液状絶縁膜２１を塗布し、図１５（ｂ）に示したよう
に、これに工具２４の多数の針部２５の先端を接触さ
せ、絶縁膜２１との接触が保たれる限度まで図示上方に
引上げ、その後絶縁膜２１が突起部２３を保ったままの
状態で硬化させる。Next, a method of manufacturing the laminated electrostatic actuator 1 will be briefly described with reference to FIG. First, FIG.
As shown in FIG. 15A, a curable liquid insulating film 21 is applied on the first electrode 12, and as shown in FIG. Are contacted with each other and pulled up to the upper limit in the figure until the contact with the insulating film 21 is maintained, and thereafter, the insulating film 21 is hardened in a state where the protrusions 23 are maintained.
【００２５】絶縁膜２１が硬化した後、図１５（ｃ）に
示したように、工具２４を抜き取り、図１４に示したよ
うに、これを同様な工程により所定の数だけ積層するこ
とにより間に絶縁膜２１を配した第１、第２電極１２、
１４を交互に積層してなる積層体３を製作する。その
後、第１実施例と同様な工程により第１、第２電極１
２、１４を図示しない第１、第２立体配線部によって立
体的に接続すれば、積層静電アクチュエータ１が製作で
きる。なお、図１３および図１４に示した積層体３では
第１、第２絶縁層を省略して示した。また、この実施例
の第１、第２電極１２、１４は便宜的に四角形状として
示してあるが、円盤状でも良いことは言うまでもない。After the insulating film 21 is hardened, the tool 24 is removed as shown in FIG. 15 (c), and as shown in FIG. The first and second electrodes 12 with the insulating film 21 disposed on the
A laminated body 3 in which 14 are alternately laminated is manufactured. After that, the first and second electrodes 1 are formed by the same process as in the first embodiment.
The multilayer electrostatic actuator 1 can be manufactured by connecting two and three-dimensionally three-dimensionally by the first and second three-dimensional wiring portions (not shown). In addition, in the laminated body 3 shown in FIGS. 13 and 14, the first and second insulating layers are omitted. Further, although the first and second electrodes 12 and 14 of this embodiment are shown as square shapes for convenience, it goes without saying that they may be disk shapes.
【００２６】以上のように、この実施例では、第１、第
２電極１２、１４間に弾力性のある絶縁膜２１を挿入し
ているので、空隙１１のギャップ管理が容易であるた
め、製作作業性を向上することができる。また、空隙１
１そのものにばね性を持たせることで積層体３の板厚方
向に大きな変位と大きな静電引力を発生させることがで
きる。As described above, in this embodiment, since the insulating film 21 having elasticity is inserted between the first and second electrodes 12 and 14, it is easy to manage the gap 11 so that the gap 11 is manufactured. Workability can be improved. Also, the void 1
It is possible to generate a large displacement and a large electrostatic attraction force in the plate thickness direction of the laminated body 3 by giving the spring 1 itself a spring property.
【００２７】[0027]
【発明の効果】本発明は、複数の積層板の板厚方向に隣
設する各電極の対向面積が従来例に比較して遙に大きい
ため、大きな静電引力を得ることができる。また、複数
の積層板の板厚方向に各電極が積層されているので、１
個１個の電極の変位が加算されるため、大きな変位を得
ることができる。According to the present invention, since the facing area of each electrode adjacent to each other in the plate thickness direction of a plurality of laminated plates is much larger than that of the conventional example, a large electrostatic attraction can be obtained. In addition, since each electrode is laminated in the plate thickness direction of a plurality of laminated plates,
Since the displacement of each electrode is added, a large displacement can be obtained.
【図１】本発明の第１実施例を示した斜視図である。FIG. 1 is a perspective view showing a first embodiment of the present invention.
【図２】本発明の第１実施例を示した横断面図である。FIG. 2 is a cross-sectional view showing the first embodiment of the present invention.
【図３】本発明の第１実施例の製造工程を示す縦断面図
である。FIG. 3 is a vertical cross-sectional view showing the manufacturing process of the first embodiment of the present invention.
【図４】本発明の第１実施例の製造工程を示す縦断面図
である。FIG. 4 is a vertical cross-sectional view showing the manufacturing process of the first embodiment of the present invention.
【図５】本発明の第１実施例の製造工程を示す縦断面図
である。FIG. 5 is a vertical cross-sectional view showing the manufacturing process of the first embodiment of the present invention.
【図６】本発明の第１実施例の製造工程を示す縦断面図
である。FIG. 6 is a vertical cross-sectional view showing the manufacturing process of the first embodiment of the present invention.
【図７】本発明の第１実施例の製造工程を示す縦断面図
である。FIG. 7 is a vertical cross-sectional view showing the manufacturing process of the first embodiment of the present invention.
【図８】本発明の第２実施例を示した斜視図である。FIG. 8 is a perspective view showing a second embodiment of the present invention.
【図９】本発明の第２実施例を示した横断面図である。FIG. 9 is a transverse sectional view showing a second embodiment of the present invention.
【図１０】本発明の第２実施例の縮んだ状態を示した概
略図である。FIG. 10 is a schematic view showing a contracted state of the second embodiment of the present invention.
【図１１】本発明の第２実施例の伸びた状態を示した概
略図である。FIG. 11 is a schematic view showing a stretched state of the second embodiment of the present invention.
【図１２】本発明の第２実施例の屈曲状態を示した概略
図である。FIG. 12 is a schematic view showing a bent state of a second embodiment of the present invention.
【図１３】本発明の第３実施例を示した斜視図である。FIG. 13 is a perspective view showing a third embodiment of the present invention.
【図１４】本発明の第３実施例を示した縦断面図であ
る。FIG. 14 is a vertical cross-sectional view showing a third embodiment of the present invention.
【図１５】本発明の第３実施例の製造工程を示す縦断面
図である。FIG. 15 is a vertical cross-sectional view showing the manufacturing process of the third embodiment of the present invention.
【図１６】積層静電アクチュエータの従来例を示した平
面図である。FIG. 16 is a plan view showing a conventional example of a laminated electrostatic actuator.
【図１７】図１６のＡ−Ａ断面図である。17 is a cross-sectional view taken along the line AA of FIG.
【図１８】図１６のＢ−Ｂ断面図である。18 is a sectional view taken along line BB of FIG.
１ 積層静電アクチュエータ ２ ガラス基板 ３ 積層体 ４ 第１立体配線部 ５ 第２立体配線部 ６ ベローズ（保持部） ９ 第１積層板 １０ 第２積層板 １１ 空隙 １２ 第１電極 １３ 第１絶縁層 １４ 第２電極 １５ 第２絶縁層 DESCRIPTION OF SYMBOLS 1 Laminated electrostatic actuator 2 Glass substrate 3 Laminated body 4 First three-dimensional wiring portion 5 Second three-dimensional wiring portion 6 Bellows (holding portion) 9 First laminated board 10 Second laminated board 11 Void 12 First electrode 13 First insulating layer 14 second electrode 15 second insulating layer
───────────────────────────────────────────────────── フロントページの続き (72)発明者 柴田 宏三 愛知県刈谷市昭和町１丁目１番地 日本電 装株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kozo Shibata 1-1-1, Showa-cho, Kariya city, Aichi prefecture Nihon Denso Co., Ltd.
Claims (1)
板を板厚方向に積層してなる積層体と、 （ｂ）前記複数の積層板の各々に板厚方向の引張力を与
えて、前記複数の積層板の各々を所定の空隙を隔てて保
持する可撓性の保持部と、 （ｃ）前記複数の積層板の板厚方向に隣設する各電極間
に電圧をそれぞれ印加する配線部とを備えた積層静電ア
クチュエータ。1. A laminated body comprising: (a) a plurality of laminated plates having insulating layers and electrodes laminated in the plate thickness direction; and (b) a tensile force in the plate thickness direction applied to each of the plurality of laminated plates. A flexible holding portion for holding each of the plurality of laminated plates with a predetermined gap therebetween, and (c) a voltage between each of the electrodes adjacent to each other in the plate thickness direction of the plurality of laminated plates. A laminated electrostatic actuator having a wiring portion for applying a voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7054593A JPH06284750A (en) | 1993-03-29 | 1993-03-29 | Laminated electrostatic actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7054593A JPH06284750A (en) | 1993-03-29 | 1993-03-29 | Laminated electrostatic actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06284750A true JPH06284750A (en) | 1994-10-07 |
Family
ID=13434601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7054593A Pending JPH06284750A (en) | 1993-03-29 | 1993-03-29 | Laminated electrostatic actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06284750A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004026758A1 (en) * | 2002-09-20 | 2004-04-01 | Eamex Corporation | Driver and method of producing the same |
| JP2006280181A (en) * | 2005-03-30 | 2006-10-12 | Yamaguchi Univ | Electrostatic actuator |
| US20100044069A1 (en) * | 2008-08-22 | 2010-02-25 | Usa As Represented By The Administrator Of The National Aeronautics And Space Administration | Asymmetric Dielectric Elastomer Composite Material |
| JP2010057321A (en) * | 2008-08-29 | 2010-03-11 | Tokyo Institute Of Technology | Static actuator and manufacturing method therefor |
| WO2018172621A3 (en) * | 2017-07-14 | 2018-11-22 | Senseg Oy | Electrostatic actuator structure |
| WO2020241387A1 (en) * | 2019-05-31 | 2020-12-03 | ストローブ株式会社 | Electrostatic actuator having multilayer structure |
| US20220181994A1 (en) * | 2017-07-14 | 2022-06-09 | Pixart Imaging Inc. | Stackable actuating element with profiled insulated electrode structures |
| US11888412B2 (en) | 2017-07-14 | 2024-01-30 | Pixart Imaging Inc. | Stackable actuating element with profiled insulated electrode structures |
-
1993
- 1993-03-29 JP JP7054593A patent/JPH06284750A/en active Pending
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| WO2004026758A1 (en) * | 2002-09-20 | 2004-04-01 | Eamex Corporation | Driver and method of producing the same |
| JP2006280181A (en) * | 2005-03-30 | 2006-10-12 | Yamaguchi Univ | Electrostatic actuator |
| JP4625951B2 (en) * | 2005-03-30 | 2011-02-02 | 国立大学法人山口大学 | Electrostatic actuator |
| US20100044069A1 (en) * | 2008-08-22 | 2010-02-25 | Usa As Represented By The Administrator Of The National Aeronautics And Space Administration | Asymmetric Dielectric Elastomer Composite Material |
| US8704423B2 (en) * | 2008-08-22 | 2014-04-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Asymmetric dielectric elastomer composite material |
| JP2010057321A (en) * | 2008-08-29 | 2010-03-11 | Tokyo Institute Of Technology | Static actuator and manufacturing method therefor |
| WO2018172621A3 (en) * | 2017-07-14 | 2018-11-22 | Senseg Oy | Electrostatic actuator structure |
| WO2018172623A3 (en) * | 2017-07-14 | 2018-12-06 | Senseg Oy | A tactile feedback system |
| US11101745B2 (en) | 2017-07-14 | 2021-08-24 | Pix Art Imaging Inc. | Electrostatic actuator |
| US20220181994A1 (en) * | 2017-07-14 | 2022-06-09 | Pixart Imaging Inc. | Stackable actuating element with profiled insulated electrode structures |
| US11863087B2 (en) * | 2017-07-14 | 2024-01-02 | Pixart Imaging Inc. | Stackable actuating element with profiled insulated electrode structures |
| US11888412B2 (en) | 2017-07-14 | 2024-01-30 | Pixart Imaging Inc. | Stackable actuating element with profiled insulated electrode structures |
| WO2020241387A1 (en) * | 2019-05-31 | 2020-12-03 | ストローブ株式会社 | Electrostatic actuator having multilayer structure |
| JPWO2020241387A1 (en) * | 2019-05-31 | 2020-12-03 | ||
| CN113906665A (en) * | 2019-05-31 | 2022-01-07 | Ｓｔｒａｗｂ股份有限公司 | Electrostatic actuator having a multilayer structure |
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