JPH062830A - Treating method of refuse incineration ash and device therefor - Google Patents
Treating method of refuse incineration ash and device thereforInfo
- Publication number
- JPH062830A JPH062830A JP15775092A JP15775092A JPH062830A JP H062830 A JPH062830 A JP H062830A JP 15775092 A JP15775092 A JP 15775092A JP 15775092 A JP15775092 A JP 15775092A JP H062830 A JPH062830 A JP H062830A
- Authority
- JP
- Japan
- Prior art keywords
- melting furnace
- ash
- melting
- electrodes
- incineration ash
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、廃棄物等の焼却灰を溶
融処理する焼却灰の処理方法及び装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for treating incinerated ash for melting waste incinerated ash.
【0002】[0002]
【従来の技術】従来、焼却炉のゴミ焼却灰は、多くの場
合埋立処分されていた。しかしながら、埋立地の確保が
年々困難になっているため、埋立てる焼却灰の容積を小
さくする方法、すなわち減容化処理が要望されている。2. Description of the Related Art Conventionally, waste incineration ash in an incinerator is often landfilled. However, since it is becoming more difficult to secure landfill sites year after year, there is a demand for a method of reducing the volume of landfill incineration ash, that is, volume reduction treatment.
【0003】ゴミ焼却場で排出される焼却灰を投入して
電極間のアーク放電により加熱溶融し、冷却して固形化
させる電気溶融炉設備において、焼却灰は常温では導電
性がないため、溶融炉の立ち上げ時にはスクラップなど
の導電体を炉内に投入し、アーク放電によりそれを溶解
してベースメタルを形成する。焼却灰はベースメタルの
形成後に投入され、加熱溶融される。焼却灰が溶融して
形成されたスラグは導電性があるため、その後は溶融ス
ラグに導電することにより熱を発生させ、焼却灰の溶融
を継続する。In an electric melting furnace facility in which incinerated ash discharged from a refuse incinerator is charged, heated and melted by arc discharge between electrodes, and cooled to solidify, the incinerated ash is not conductive at room temperature, and thus melts. At the time of starting the furnace, a conductor such as scrap is put into the furnace and melted by arc discharge to form a base metal. The incineration ash is put in after forming the base metal and is heated and melted. Since the slag formed by melting the incinerated ash is electrically conductive, the molten slag is then electrically conductive to generate heat, and the incinerated ash is continuously melted.
【0004】そして、このようにして生成された溶融ス
ラグは、例えば特公昭62−24694号公報に示すよ
うに、排出口から排出樋を経て排出固化し、あるいは特
公平3−17770号公報に示すように、排出口から水
槽に連続して排出し、固化して廃棄される。The molten slag produced in this way is discharged and solidified through a discharge trough from a discharge port as shown in, for example, Japanese Patent Publication No. Sho 62-24694, or is disclosed in Japanese Patent Publication No. 3-17770. Thus, it is continuously discharged from the discharge port to the water tank, solidified and discarded.
【0005】[0005]
【発明が解決しようとする課題】上記のような従来の電
気溶融炉においては、操業を停止し、炉内のスラグ温度
が低下して導電性を失ったのち再び操業を開始する場合
は、炉内の焼却灰やスラグを除去したのち、電極の近傍
にスクラップを投入しなければならないので、操業開始
までに多くの時間を要するばかりでなく、極めて面倒で
ある。In the conventional electric melting furnace as described above, when the operation is stopped and the slag temperature in the furnace is lowered to lose the conductivity, the operation is restarted. After removing the incinerated ash and slag inside, scrap must be put in the vicinity of the electrode, which not only takes a lot of time until the start of operation, but is also extremely troublesome.
【0006】また、従来の設備においては、排出樋を経
て固化したスラグ、あるいは水槽で冷却固化したスラグ
を、搬送設備等により運搬車等に積載し、埋立地まで移
送して埋立処分しているが、これらの設備が大規模にな
り多額の設備費を要するなど、種々問題があった。In the conventional equipment, the slag solidified through the discharge gutter or the slag cooled and solidified in the water tank is loaded on a transport vehicle or the like by a transport facility and transferred to a landfill site for landfill disposal. However, there have been various problems such as the large scale of these facilities and large amount of facility cost.
【0007】本発明は、上記の課題を解決すべくなされ
たもので、操業が容易であり、また溶融したスラグも簡
単に処理することのできるゴミ焼却灰の処理方法及びそ
の装置を得ることを目的としたものである。The present invention has been made to solve the above problems, and it is an object of the present invention to obtain a method and an apparatus for treating refuse incinerated ash that is easy to operate and that can treat molten slag easily. It is intended.
【0008】[0008]
【課題を解決するための手段】本発明に係るゴミ焼却灰
の処理方法は、廃棄物等の焼却灰を溶融して処理する設
備に焼却灰が入れられた溶融炉を搬入し、先端部相互の
間隔を他端部相互の間隔より狭くした複数本の電極の先
端部を溶融炉内の焼却灰に挿入して焼却灰の電気溶融を
行ない、焼却灰の全部又は大部分が溶融したときは溶融
炉を搬出するようにしたものである。A method for treating refuse incinerated ash according to the present invention is to carry in a melting furnace containing the incinerated ash into a facility for melting and treating the incinerated ash such as wastes, and to carry out the mutual tip treatment. Insert the tip of multiple electrodes with the interval between the other ends narrower than the interval between the other ends into the incineration ash in the melting furnace to perform electric melting of the incineration ash, and when all or most of the incineration ash is melted The melting furnace is carried out.
【0009】また、ゴミ焼却灰の処理装置は、先端部相
互の間隔が他端部相互の間隔より狭くなるように保持さ
れた複数本の電極と、これら電極を保持すると共にその
相互間の間隔と上下方向の位置を調整する保持・調整手
段と、焼却灰が入れられる溶融炉と、この溶融炉を電極
の下方に搬入し又はそこから搬出する溶融炉搬送手段と
を備えたものである。Further, in the apparatus for treating refuse incinerated ash, a plurality of electrodes are held so that the distance between the tips is smaller than the distance between the ends, and the electrodes are held and the distance between them is large. And a holding / adjusting means for adjusting the vertical position, a melting furnace in which the incineration ash is put, and a melting furnace conveying means for carrying the melting furnace below the electrode or carrying it out therefrom.
【0010】[0010]
【作用】先ず、あらかじめ溶融炉が搬入されたときの状
態で電極相互間の間隔及び高さ位置を調整する。次に、
溶融炉搬送手段により焼却灰が入れられた溶融炉を電極
の下まで搬入し、電極を下降させて焼却灰内に挿入し、
両電極間に電圧を印加して焼却灰をアーク加熱で溶融
し、その後スラグ抵抗加熱で溶融する。焼却灰の全部又
は大部分が溶融したときは電極を上昇させて溶融炉を搬
出し、運搬車等に積載して埋設地まで輸送して埋設し、
あるいは所定の場所に積重ねて処分する。また、場合に
よっては固化した焼却灰のみを廃棄し、溶融炉を再使用
する。First, the distance between the electrodes and the height position thereof are adjusted in a state where the melting furnace is loaded in advance. next,
The melting furnace in which the incineration ash was put in by the melting furnace transfer means was carried in below the electrode, and the electrode was lowered and inserted into the incineration ash,
A voltage is applied between both electrodes to melt the incineration ash by arc heating and then slag resistance heating. When all or most of the incineration ash is melted, raise the electrode, carry out the melting furnace, load it on a carrier, etc., transport it to the burial site, and bury it.
Alternatively, it is piled up at a predetermined place and disposed of. In some cases, only solidified incineration ash is discarded and the melting furnace is reused.
【0011】[0011]
【実施例】図1は本発明実施例の構成を示す模式図であ
る。図において、1は焼却灰溶融設備で、2は床上に立
設された第1の支柱、3は第1の支柱2に上下に移動可
能に装着された電極保持ブロック、4は電極保持ブロッ
ク4を駆動するモータである。5は電極保持ブロック3
に左右方向に移動可能に装着されたバーで、先端部に設
けたホルダ6には第1の電極7がほぼ垂直に保持されて
いる。8はバー5を駆動するモータである。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic diagram showing the structure of an embodiment of the present invention. In the figure, 1 is an incineration ash melting facility, 2 is a first support pillar standing on the floor, 3 is an electrode holding block mounted on the first support pillar 2 so as to be movable up and down, 4 is an electrode holding block 4 Is a motor for driving. 5 is an electrode holding block 3
A first electrode 7 is held almost vertically by a holder 6 provided at the tip end of the bar, which is mounted on the holder so as to be movable in the left-right direction. A motor 8 drives the bar 5.
【0012】10は第1の支柱2と所定の間隔を隔てて
床上に立設された第2の支柱で、11はこの支柱10に
取付けられ、第2の電極12をその先端部が第1の電極
7に近接し、他端が第1の電極7から離れるように傾斜
して摺動可能に保持する保持部材である。13は第2の
電極12の頂部に装着されたホルダで、チェーン、ワイ
ヤ等14の一端が連結されており、このチェーン等14
は支柱10に設けたスプロケット15,16に掛けら
れ、他端にはカウンタウェイト18が取付けられてい
る。17はスプロケッ15を駆動するモータである。Numeral 10 is a second pillar which is erected on the floor at a predetermined distance from the first pillar 2, and numeral 11 is attached to this pillar 10 and the tip of the second electrode 12 is the first. Is a holding member which is slidably held so as to be close to the electrode 7 and the other end thereof is separated from the first electrode 7. Reference numeral 13 is a holder attached to the top of the second electrode 12, to which one end of a chain, wire or the like 14 is connected.
Is hung on sprockets 15 and 16 provided on the column 10, and a counterweight 18 is attached to the other end. A motor 17 drives the sprocket 15.
【0013】上記のように構成した焼却灰溶融設備1に
おいては、モータ4を駆動することにより第1の電極7
を上下方向に移動させ、また、モータ8を駆動すること
により第1の電極7を左右方向に移動させることができ
る。また、モータ17を駆動することにより、第2の電
極12を保持部材11に沿って斜め上下方向に摺動させ
ることができる。In the incineration ash melting facility 1 configured as described above, the first electrode 7 is driven by driving the motor 4.
Can be moved in the vertical direction and by driving the motor 8, the first electrode 7 can be moved in the horizontal direction. In addition, by driving the motor 17, the second electrode 12 can be slid along the holding member 11 in an obliquely vertical direction.
【0014】20は上部に開口部21を有し、両支柱
2,10の間において電極7,12の下方に搬入された
例えば鉄板からなるカートリッジ式の溶融炉で、例えば
床上に敷設されたレール(図示せず)上に、移動可能に
搭載されている。A reference numeral 20 designates a cartridge-type melting furnace made of, for example, an iron plate, which has an opening 21 in the upper portion and is carried between the columns 2 and 10 below the electrodes 7 and 12, for example, a rail laid on the floor. It is movably mounted on (not shown).
【0015】次に、図1、図2を参照して本発明の作用
を説明する。先ず、あらかじめ両支柱2,10間に空の
溶融炉20を搬入し、モータ17を駆動して第2の電極
12の先端部が溶融炉20の炉底からyの高さ位置にあ
るように調整する。ついで、モータ4,8を駆動して第
1の電極7の先端部が溶融炉20の炉底からyの高さ位
置にあるように調整すると共に、第2の電極12の先端
部との間隔をなくすように調整する。Next, the operation of the present invention will be described with reference to FIGS. First, an empty melting furnace 20 is loaded in advance between the columns 2 and 10, and the motor 17 is driven so that the tip of the second electrode 12 is located at a height y from the bottom of the melting furnace 20. adjust. Then, the motors 4 and 8 are driven to adjust the tip of the first electrode 7 so that it is located at the height y from the bottom of the melting furnace 20, and the distance from the tip of the second electrode 12 is adjusted. Adjust to eliminate.
【0016】調整が終ったときは、その位置を例えば制
御装置(図示せず)に記憶させておき、溶融炉20に焼
却灰25を入れる。なお、他の場所に多数の空の溶融炉
20を準備しておき、順次使用できるようにしておく。When the adjustment is completed, the position is stored in, for example, a control device (not shown), and the incineration ash 25 is put in the melting furnace 20. A large number of empty melting furnaces 20 are prepared in other places so that they can be used one after another.
【0017】この状態で両電極7,12間に電圧を印加
し、必要に応じて両電極7,12の先端部間の間隔xを
調整して両者の間にアークを発生させ、焼却灰25を加
熱して溶融させる。In this state, a voltage is applied between the two electrodes 7 and 12, and if necessary, the distance x between the tips of the two electrodes 7 and 12 is adjusted to generate an arc between the two. To heat and melt.
【0018】焼却灰25が溶融して両電極7,12の先
端部近傍に溶融スラグ26が溜ると両電極7,12間が
導通し、電流が流れて抵抗加熱に移行するので、両電極
7,12の間隔xを離して電圧を高くし、間隔x及び印
加電圧を最も効率のよい状態に保持して焼却灰の溶融を
継続する。なお、溶融スラグ26と溶融炉20との間に
は断熱効果を有する焼却灰25が介在しているので、溶
融炉20が溶融することはない。なお、焼却灰25は溶
融固化すると、その容積が3分の1程度に減容するの
で、溶融炉20内の焼却灰25のレベルが低下したとき
は、焼却灰25を補充するようにしてもよい。When the incinerated ash 25 is melted and the molten slag 26 is accumulated in the vicinity of the tips of the electrodes 7 and 12, the electrodes 7 and 12 are electrically connected to each other, and a current flows to shift to resistance heating. , 12 to increase the voltage by separating the interval x, and maintaining the interval x and the applied voltage in the most efficient state to continue the melting of the incineration ash. In addition, since the incineration ash 25 having a heat insulating effect is interposed between the molten slag 26 and the melting furnace 20, the melting furnace 20 does not melt. The volume of the incinerated ash 25 is reduced to about one third when it is melted and solidified. Therefore, when the level of the incinerated ash 25 in the melting furnace 20 decreases, the incinerated ash 25 may be replenished. Good.
【0019】溶融炉20内の焼却灰25の全部又は大部
分が溶融したときは、電極7,12への通電を停止し、
両電極7,12を溶融炉20が干渉しない位置まで引上
げ、溶融炉20を搬出する。このとき、図3に示すよう
に炉内の大部分は固化スラグで満され、上方に僅かに焼
却灰25が残存している。When all or most of the incineration ash 25 in the melting furnace 20 is melted, the power supply to the electrodes 7 and 12 is stopped,
Both electrodes 7 and 12 are pulled up to a position where the melting furnace 20 does not interfere, and the melting furnace 20 is carried out. At this time, as shown in FIG. 3, most of the inside of the furnace is filled with the solidified slag, and the incinerated ash 25 slightly remains above.
【0020】焼却灰25が溶融した溶融炉20が搬出さ
れたときは、次の溶融炉20aを搬入し、再び前述の要
領で焼却灰25を溶融固化する。一方、搬出された溶融
炉20はそのままの状態で運搬車等に積載され、埋設地
まで輸送して埋設し、あるいは所定の場所に積重ねて処
分される。また、場合によっては固化した焼却灰のみを
廃棄し、溶融炉25を再使用してもよい。When the melting furnace 20 in which the incinerated ash 25 is melted is carried out, the next melting furnace 20a is carried in, and the incinerated ash 25 is melted and solidified again in the same manner as described above. On the other hand, the carried-out melting furnace 20 is loaded as it is on a transportation vehicle or the like, transported to an burying place and buried, or stacked at a predetermined place for disposal. In some cases, only the solidified incineration ash may be discarded and the melting furnace 25 may be reused.
【0021】上記の説明では、第1の電極7を垂直に配
設し、第2の電極12を傾斜して配設した例を示した
が、それぞれの電極を傾斜して配設してもよく、また、
3本以上の電極を設けてもよい。さらに、電極7,12
を保持しその位置を調整する電極保持・調整装置も上記
実施例に限定するものではなく適宜変更することができ
る。また、床上に敷設したレールにより溶融炉を搬入搬
出する例を示したが、他の手段を用いてもよい。In the above description, the first electrode 7 is arranged vertically and the second electrode 12 is arranged so as to be inclined, but the respective electrodes may be arranged so as to be inclined. Well again
You may provide three or more electrodes. Furthermore, the electrodes 7, 12
The electrode holding / adjusting device for holding and adjusting the position of the electrode is not limited to the above embodiment, but can be changed as appropriate. Further, although an example in which the melting furnace is carried in and out by a rail laid on the floor is shown, other means may be used.
【0022】[0022]
【発明の効果】以上詳述したように、本発明は位置調整
可能な複数本の電極の一部又は全部を傾斜して配設する
と共に、溶融炉を搬入、搬出可能に構成したので、次の
ような顕著な効果を得ることができる。 (1)焼却灰の溶融に際してはスクラップなどを投入す
る必要がなく、焼却灰内に挿入した電極に通電するだけ
でよいので操作がきわめて容易になる。 (2)溶融スラグの排出口や冷却設備が不要になるの
で、溶融炉及び設備が簡単になる。As described above in detail, according to the present invention, a part or all of a plurality of electrodes whose positions can be adjusted are inclined, and the melting furnace can be loaded and unloaded. Such a remarkable effect can be obtained. (1) When melting the incineration ash, it is not necessary to throw in scraps and the like, and it suffices to energize the electrodes inserted in the incineration ash, so that the operation becomes extremely easy. (2) Since the molten slag discharge port and cooling equipment are not required, the melting furnace and equipment are simplified.
【0023】(3)焼却灰は溶融設備以外の場所で溶融
炉に投入され、また、溶融したスラグは溶融炉内におい
て固化され、溶融炉と共に輸送し処分するので、溶融設
備が清潔に保たれると共に、積込、輸送、埋設などの際
に粉塵等が舞上るおそれがなく、衛生上も好ましい結果
が得られる。 (4)処分にあたっては、スラグは溶融炉に入れたまま
埋設し、又は所定の場所に積重ねられるので、スラグに
含まれる有害物が地中にしみ込んだり流出したりするお
それがない。(3) The incinerated ash is put into the melting furnace at a place other than the melting equipment, and the molten slag is solidified in the melting furnace and transported and disposed together with the melting furnace, so that the melting equipment is kept clean. At the same time, there is no risk of dust or the like flying up during loading, transportation, burial, etc., and a favorable result in hygiene can be obtained. (4) At the time of disposal, since the slag is buried in the melting furnace or stacked in a predetermined place, there is no risk that harmful substances contained in the slag will soak into the ground or flow out.
【図1】本発明実施例の構成を示す模式図である。FIG. 1 is a schematic diagram showing a configuration of an embodiment of the present invention.
【図2】本発明実施例の作用説明図である。FIG. 2 is an explanatory view of the operation of the embodiment of the present invention.
【図3】本発明実施例の作用説明図である。FIG. 3 is an explanatory view of the operation of the embodiment of the present invention.
1 焼却灰溶融設備 2,10 支柱 7 第1の電極 12 第2の電極 20 溶融炉 25 焼却灰 26 溶融スラグ 27 固化スラグ 1 Incinerator ash melting equipment 2,10 Support 7 First electrode 12 Second electrode 20 Melting furnace 25 Incinerator ash 26 Molten slag 27 Solidified slag
───────────────────────────────────────────────────── フロントページの続き (72)発明者 明石 哲夫 東京都千代田区丸の内一丁目1番2号 日 本鋼管株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tetsuo Akashi 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Nihon Steel Pipe Co., Ltd.
Claims (2)
備において、 該設備に焼却灰が入れられた溶融炉を搬入し、先端部相
互の間隔を他端部相互の間隔より狭くした複数本の電極
の先端部を前記溶融炉内の焼却灰に挿入して該焼却灰の
電気溶融を行ない、前記溶融炉内の焼却灰の全部又は大
部分が溶融したときは該溶融炉を搬出することを特徴と
するゴミ焼却灰の処理方法。1. In a facility for melting and treating incinerated ash such as waste, a melting furnace in which the incinerated ash is placed is carried into the facility, and the interval between the tip ends is made narrower than the interval between the other ends. Inserting the tips of a plurality of electrodes into the incineration ash in the melting furnace to perform electric melting of the incineration ash, and when all or most of the incineration ash in the melting furnace is melted, carry out the melting furnace. A method for treating waste incineration ash, which comprises:
備において、 先端部相互の間隔が他端部相互の間隔より狭くなるよう
に保持された複数本の電極と、 該電極を保持すると共に該電極の相互間の間隔及び上下
方向の位置を調整する保持・調整手段と、 前記焼却灰が入れられる溶融炉と、 該溶融炉を前記電極の下方に搬入し又はそこから搬出す
る溶融炉搬送手段とを備えたことを特徴とするゴミ焼却
灰の処理装置。2. A facility for melting and treating incinerated ash such as waste, wherein a plurality of electrodes are held so that the distance between the tip portions is narrower than the distance between the other end portions, and the electrodes are held. In addition, holding and adjusting means for adjusting the distance between the electrodes and the vertical position, a melting furnace in which the incinerated ash is put, and a melting means for carrying the melting furnace into or out of the electrode. An apparatus for treating refuse incinerated ash, comprising: a furnace transfer means.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4157750A JP2770658B2 (en) | 1992-06-17 | 1992-06-17 | Waste incineration ash treatment method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4157750A JP2770658B2 (en) | 1992-06-17 | 1992-06-17 | Waste incineration ash treatment method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH062830A true JPH062830A (en) | 1994-01-11 |
JP2770658B2 JP2770658B2 (en) | 1998-07-02 |
Family
ID=15656533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP4157750A Expired - Fee Related JP2770658B2 (en) | 1992-06-17 | 1992-06-17 | Waste incineration ash treatment method and apparatus |
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JP (1) | JP2770658B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007530262A (en) * | 2004-03-25 | 2007-11-01 | ジオセーフ コーポレーション | Method and apparatus for dissolving treatment substance |
KR20190015230A (en) | 2016-05-31 | 2019-02-13 | 가스가 덴끼 가부시끼가이샤 | Surface modifying device |
KR20200039693A (en) | 2017-08-07 | 2020-04-16 | 가스가 덴끼 가부시끼가이샤 | Surface modifier |
US11318439B2 (en) | 2017-08-09 | 2022-05-03 | Kasuga Denki, Inc. | Surface modification device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60152813A (en) * | 1984-01-20 | 1985-08-12 | Tokyo Cokes Kk | Method for processing burnt ash of waste material |
JPH0161530U (en) * | 1987-10-15 | 1989-04-19 |
-
1992
- 1992-06-17 JP JP4157750A patent/JP2770658B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60152813A (en) * | 1984-01-20 | 1985-08-12 | Tokyo Cokes Kk | Method for processing burnt ash of waste material |
JPH0161530U (en) * | 1987-10-15 | 1989-04-19 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007530262A (en) * | 2004-03-25 | 2007-11-01 | ジオセーフ コーポレーション | Method and apparatus for dissolving treatment substance |
KR20190015230A (en) | 2016-05-31 | 2019-02-13 | 가스가 덴끼 가부시끼가이샤 | Surface modifying device |
US10916412B2 (en) | 2016-05-31 | 2021-02-09 | Kasuga Denki, Inc. | Surface modifying device |
KR20200039693A (en) | 2017-08-07 | 2020-04-16 | 가스가 덴끼 가부시끼가이샤 | Surface modifier |
US11673108B2 (en) | 2017-08-07 | 2023-06-13 | Kasuga Denki, Inc. | Surface modifying device |
US11318439B2 (en) | 2017-08-09 | 2022-05-03 | Kasuga Denki, Inc. | Surface modification device |
Also Published As
Publication number | Publication date |
---|---|
JP2770658B2 (en) | 1998-07-02 |
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