JPH06280066A - Cleaning agent for nickel-plated surface and cleaning method - Google Patents

Cleaning agent for nickel-plated surface and cleaning method

Info

Publication number
JPH06280066A
JPH06280066A JP9184393A JP9184393A JPH06280066A JP H06280066 A JPH06280066 A JP H06280066A JP 9184393 A JP9184393 A JP 9184393A JP 9184393 A JP9184393 A JP 9184393A JP H06280066 A JPH06280066 A JP H06280066A
Authority
JP
Japan
Prior art keywords
nickel
acid
component
cleaning agent
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9184393A
Other languages
Japanese (ja)
Other versions
JP2722367B2 (en
Inventor
Hiromasa Tanno
広正 丹野
Hideo Ohira
秀夫 大平
Hirofumi Nakanishi
宏文 中西
Naoko Togo
直子 藤後
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hakuto Co Ltd
Kureha Corp
Original Assignee
Hakuto Co Ltd
Kureha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hakuto Co Ltd, Kureha Corp filed Critical Hakuto Co Ltd
Priority to JP5091843A priority Critical patent/JP2722367B2/en
Publication of JPH06280066A publication Critical patent/JPH06280066A/en
Application granted granted Critical
Publication of JP2722367B2 publication Critical patent/JP2722367B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/02Cleaning or pickling metallic material with solutions or molten salts with acid solutions
    • C23G1/10Other heavy metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

PURPOSE:To obtain a cleaning agent capable of removing scale without dissolving nickel by incorporating formic acid or hydroxycarboxlic acid and araboascorbic acid, ascorbic acid or boron hydride compound. CONSTITUTION:This cleaning agent is a water base cleaning agent for nickel- plated surface containing one or more kind of (a) formic acid, hydroxycarboxylic acid or these mixture and (b) araboascorbic acid, ascorbic acid and boron hydride compound and the scale is removed without dissolving a protective nickel layer by dipping the nickel surface into a solution containing the cleaning agent. In the cleaning agent, the component (b) is preferably incorporated by 5-20wt.% of the component (a). And, if necessary, a metallic chloride such as ferric chloride is incorporated by 1-5% of the component (a). The cleaning solution contains 1-20% the component (a) and is preferably used at ordinary temp. to 90 deg.C for 1-6 hours in dipping time.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この出願発明は、ニッケルメッキ
表面の水性洗浄剤および洗浄方法に関する。とくに、化
学装置におけるニッケルメッキ表面の洗浄剤および洗浄
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aqueous cleaning agent and a cleaning method for nickel-plated surfaces. In particular, it relates to a cleaning agent and a cleaning method for a nickel plating surface in a chemical device.

【0002】[0002]

【従来の技術】従来から化学装置の材質としては、鉄あ
るいはステンレススチールが多く使用されているが、最
近、化学装置、とくに、熱交換器、反応器ジャケットに
はニッケルメッキした材質が用いられるようになってき
ている。熱交換デバイスにおいては、熱伝達係数、冷却
または加熱媒体による腐食性、温度や圧力などに対する
耐性などを考慮した経済性から材質の選択が行われ、主
に鉄が使用されてきた。しかし、熱交換デバイスの、冷
却媒体または加熱媒体として使用される水と接触する面
には、用いる水に溶解している塩類、添加される防食剤
による塩類などがスケールとして沈澱するして、その総
括伝熱係数は徐々に低下する。そのため、スケールの付
着した面を元に戻すため、酸洗いあるいは高圧ジェッタ
ーなどにより付着物が除去されている。しかし、鉄は酸
化され易い材質であり、一旦、酸化されると鉄錆が析出
して総括伝熱係数を極端に低下させるので、従来の付着
物の除去方法では十分でない。そこで、鉄の表面での錆
(酸化鉄)の析出を防止し、かつ、熱伝達係数を低下さ
せず、さらに、複雑な形状面でも施工可能なニッケルメ
ッキが鉄の表面に施されている。
2. Description of the Related Art Conventionally, iron or stainless steel has been often used as a material for chemical equipment, but recently, nickel-plated material has been used for chemical equipment, particularly for heat exchangers and reactor jackets. Is becoming. In the heat exchange device, the material is selected from the viewpoint of economy in consideration of heat transfer coefficient, corrosiveness due to cooling or heating medium, resistance to temperature and pressure, etc., and iron has been mainly used. However, on the surface of the heat exchange device that comes into contact with water used as a cooling medium or a heating medium, salts dissolved in water to be used, salts due to an added anticorrosive agent, etc. are precipitated as scales, The overall heat transfer coefficient gradually decreases. Therefore, in order to return the surface to which the scale is attached to the original state, the attached matter is removed by pickling or high pressure jetter. However, iron is a material that is easily oxidized, and once it is oxidized, iron rust is deposited and the overall heat transfer coefficient is extremely lowered, so that the conventional method for removing deposits is not sufficient. Therefore, nickel plating is applied to the surface of iron to prevent rust (iron oxide) from being deposited on the surface of the iron, to reduce the heat transfer coefficient, and to be applied even with a complicated shape.

【0003】[0003]

【発明が解決しようとする課題】しかし、ニッケルメッ
キした熱交換デバイスであっても、冷却媒体または加熱
媒体として使用される水には、水源にによって大きく異
なるが、その水質、溶解している塩類、添加される防食
剤に由来する塩類などにより、長期間の使用の間に、こ
れらの塩類が熱交換している伝熱面上に、スケールとし
て沈積するために総括伝熱係数の低下が避けられない。
スケール付着面の構造が単純であれば、高圧ジェッター
などにより付着物を除去することができるが、スケール
付着面が複雑な構造のばあいには、高圧ジェッターなど
では除去することが困難である。一方、塩酸などを用い
る酸洗ではメッキされたニッケルの溶出量が多いので、
やがて鉄の表面が露出し、保護の意味がなくなる。この
ような現状から、保護ニッケル層を溶解することなく、
スケールが除去できる洗浄剤および洗浄方法が望まれて
いる。
However, even in a nickel-plated heat exchange device, the water used as a cooling medium or a heating medium has water quality and dissolved salts which vary greatly depending on the water source. Due to the salts derived from the added anticorrosives, etc., during the long-term use, these salts are deposited as a scale on the heat transfer surface where they are exchanging heat, so that the overall heat transfer coefficient does not decrease. I can't.
If the structure of the scale adhering surface is simple, the adhering matter can be removed by a high pressure jetter or the like, but if the scale adhering surface has a complicated structure, it is difficult to remove it by a high pressure jetter or the like. On the other hand, pickling with hydrochloric acid etc. causes a large elution amount of plated nickel,
Eventually the surface of the iron is exposed and the meaning of protection disappears. From such a situation, without melting the protective nickel layer,
A cleaning agent and a cleaning method capable of removing scale are desired.

【0004】[0004]

【課題を解決するための手段】この出願発明者等は、ニ
ッケルメッキ表面に固着するスケール、スライムなどを
除去し、かつ、保護膜のニッケルを極力溶出しない洗浄
剤もしくは洗浄方法について鋭意研究した結果、特定の
有機酸と特定の還元性物質を含む洗浄剤が有効であるこ
とを見いだし、この出願発明を完成したものである。こ
の出願発明の構成上の特徴は、(a)ギ酸、ヒドロキシ
カルボン酸またはこれらの混合物および(b)アラボア
スコルビン酸、アスコルビン酸および水素化ホウ素化合
物から選ばれる1種以上を有効成分とするニッケルメッ
キ表面の水性洗浄剤およびこの洗浄剤を用いるニッケル
メッキ表面の洗浄方法である。以下に、この出願発明を
詳しく説明する。
Means for Solving the Problems The inventors of the present application have earnestly studied a cleaning agent or a cleaning method that removes scale, slime, etc. that adhere to a nickel-plated surface and does not elute nickel in a protective film as much as possible. The inventors have found that a cleaning agent containing a specific organic acid and a specific reducing substance is effective, and completed the invention of this application. The structural feature of the invention of this application is that nickel containing at least one selected from (a) formic acid, hydroxycarboxylic acid or a mixture thereof and (b) araboascorbic acid, ascorbic acid and a borohydride compound as an active ingredient. An aqueous cleaning agent for a plating surface and a method for cleaning a nickel plating surface using this cleaning agent. The invention of this application will be described in detail below.

【0005】この出願発明の洗浄剤は、主成分のギ酸、
ヒドロキシカルボン酸またはその混合物(以下、(a)
成分という)と少量の還元性成分(以下、(b)成分と
いう)を有効成分とするものである。この出願発明の洗
浄剤の(a)成分のヒドロキシカルボン酸は、リンゴ
酸、乳酸、クエン酸、グリコール酸などの脂肪族ヒドロ
キシカルボン酸であり、ヒドロキシカルボン酸は1種ま
たは2種以上の混合物であってもよい。さらに、1種ま
たは2種以上のヒドロキシカルボン酸とギ酸の混合物で
あってもよい。(b)成分のアラボアスコルビン酸、ア
スコルビン酸および水素化ホウ素化合物は、(a)成分
のカルボン酸の合計量の5〜20重量%の割合で混合使
用される。なお、この出願発明において(b)成分のア
スコルビン酸は、その酸化型アスコルビン酸を含み、ま
た、アラボアスコルビン酸は、その酸化型を含むもので
ある。また、水素化ホウ素化合物とは、水素化ホウ素ナ
トリウム、水素化ホウ素カリウム、水素化ホウ素リチウ
ム、水素化ホウ素カルシウム、水素化ホウ素アルミニウ
ム、水素化ホウ素アミンなどであり、好ましくは、水素
化ホウ素ナトリウムが用いられる。(a)成分単独で
は、洗浄効果か認められるが、ニッケルの溶出量が大き
く、実用に適さない。これに少量成分として、前記の還
元性物質を共存させることにより、洗浄効果を低下させ
ることなく、ニッケルの溶出量を著しく抑制することが
できる。これら(a)、(b)成分にさらに、(c)成
分として金属塩化物、例えば、塩化第二鉄などを存在さ
せると、ニッケルの溶出量がさらに抑制される。
The cleaning agent of the invention of this application comprises formic acid, which is the main component,
Hydroxycarboxylic acid or a mixture thereof (hereinafter referred to as (a)
The component) and a small amount of reducing component (hereinafter referred to as the component (b)) are the active components. The hydroxycarboxylic acid as the component (a) of the detergent of the present invention is an aliphatic hydroxycarboxylic acid such as malic acid, lactic acid, citric acid and glycolic acid, and the hydroxycarboxylic acid may be one kind or a mixture of two or more kinds. It may be. Further, it may be a mixture of one or more hydroxycarboxylic acids and formic acid. The component (b), araboascorbic acid, ascorbic acid and a borohydride compound, are mixed and used in a proportion of 5 to 20% by weight based on the total amount of the carboxylic acid as the component (a). In the invention of this application, the ascorbic acid as the component (b) contains its oxidized form ascorbic acid, and the arabo ascorbic acid contains its oxidized form. Further, the borohydride compound is sodium borohydride, potassium borohydride, lithium borohydride, calcium borohydride, aluminum borohydride, borohydride amine, etc., preferably sodium borohydride Used. When the component (a) alone is used, a cleaning effect is recognized, but the amount of nickel eluted is large, which is not suitable for practical use. By coexisting the above-mentioned reducing substance as a minor component in this, the elution amount of nickel can be remarkably suppressed without reducing the cleaning effect. When a metal chloride such as ferric chloride is added as the component (c) to the components (a) and (b), the amount of nickel eluted is further suppressed.

【0006】また、ニッケルメッキ表面の洗浄にあたっ
ては、洗浄液中に(a)成分が、好ましくは、1〜20
重量%、より好ましくは、2〜15重量%溶解している
ことが必要であり、また、(b)成分も、0.01重量
%以上、好ましくは、0.1〜3重量%溶存させること
が好ましい。これらの成分の他に、金属塩化物、例え
ば、塩化第二鉄を洗浄液中に、好ましくは、0.1〜1
重量%、より好ましくは、0.05〜0.5重量%させ
ることも、ニッケルの溶出を抑制する上で効果的であ
る。なお、これらの洗浄剤成分は、使用の都度、上記使
用濃度になるように水に溶解させて調製してもよいが、
予め、高濃度に調製しておき、使用に際して希釈して使
用するのが簡便である。
In cleaning the nickel-plated surface, the component (a) in the cleaning liquid is preferably 1 to 20.
%, More preferably 2 to 15% by weight, and the component (b) should be dissolved in an amount of 0.01% by weight or more, preferably 0.1 to 3% by weight. Is preferred. In addition to these components, a metal chloride, such as ferric chloride, is preferably added to the cleaning liquid in an amount of 0.1 to 1
Weight%, more preferably 0.05 to 0.5% by weight is also effective in suppressing the elution of nickel. In addition, each of these detergent components may be prepared by dissolving it in water so as to have the above-mentioned use concentration each time it is used.
It is convenient to prepare a high concentration in advance and dilute it before use.

【0007】この出願発明の洗浄時の温度は、常温ない
し90℃、好ましくは、40〜80℃で、0.5〜10
時間、好ましくは、1〜6時間浸漬処理する。このと
き、洗浄液は、静置状態であってもよいが、好ましく
は、循環ポンプなどを用いて流動状態にする。洗浄液を
加温することにより、さらには、流動させることによ
り、洗浄効果を高めることができ、洗浄時間の短縮をは
かることができる。
The washing temperature of the present invention is from room temperature to 90 ° C., preferably 40 to 80 ° C., and 0.5 to 10 ° C.
Immersion treatment is carried out for a time, preferably 1 to 6 hours. At this time, the cleaning liquid may be in a static state, but preferably, it is brought into a flowing state by using a circulation pump or the like. By heating the cleaning liquid and further flowing it, the cleaning effect can be enhanced and the cleaning time can be shortened.

【0008】化学装置の熱交換器における付着物の成分
は、加熱媒体または冷却媒体として用いられる用水に溶
存している、鉄、カルシウム、珪素化合物の酸化物並び
に塩類や防食剤による、亜鉛、リン酸の塩類および水媒
体中で発生するスライム等である。これらの付着物の組
成は、用水の水源や、防食剤の種類により同じではない
が、前記のようにして洗浄することにより、付着物を十
分に溶解除去することができる。付着物を十分に溶解除
去できるように長時間浸漬しても、洗浄液中へのニッケ
ルの溶出量は、実施例に示すようにきわめて僅かであ
る。なお、ニッケルメッキの施工法は、電解メッキ、無
電解メッキの何れでもよい。また、ニッケルメッキの膜
厚は、10〜50μmあればこの出願発明によるスケー
ル除去法では実質的に消失するおそれはない。以下、実
施例、比較例によってこの出願発明を具体的に説明す
る。
The components of the deposits in the heat exchanger of the chemical device are zinc, phosphorus, which are dissolved in water used as a heating medium or a cooling medium, which are oxides of iron, calcium, silicon compounds and salts and anticorrosive agents. Examples include acid salts and slime generated in an aqueous medium. The composition of these deposits is not the same depending on the water source of the water used and the type of the anticorrosive agent, but the deposits can be sufficiently dissolved and removed by washing as described above. Even when immersed for a long time so that the deposits can be sufficiently dissolved and removed, the elution amount of nickel into the cleaning liquid is extremely small as shown in the examples. The nickel plating method may be either electrolytic plating or electroless plating. Further, if the nickel plating has a film thickness of 10 to 50 μm, the scale removal method according to the invention of the present application will not substantially lose the film. Hereinafter, the present invention will be specifically described with reference to Examples and Comparative Examples.

【0009】[0009]

【実施例】【Example】

実施例1 炭素鋼(25×50×1mm)表面に、無電解ニッケル
メッキ法により厚さ30〜40μmのニッケルメッキを
した試験片を用意した。表1および表2に示す組成の洗
浄液を300ml入れたビーカーに、各試験片を吊り下
げて浸漬し、60℃に維持しながらマグネッチクスタラ
ーで攪拌した。3時間後に、試験片を取り出し、洗浄液
中のニッケル濃度を原子吸光計で測定し、ニッケル溶出
量を測定した。なお、表1には、この出願発明の洗浄液
による実施例の結果を、表2には、他の洗浄剤による結
果を比較例として示した。
Example 1 A carbon steel (25 × 50 × 1 mm) surface was plated with nickel to a thickness of 30 to 40 μm by an electroless nickel plating method to prepare a test piece. Each test piece was suspended and immersed in a beaker containing 300 ml of the cleaning liquid having the composition shown in Table 1 and Table 2, and the mixture was stirred with a Magnetus Kustler while maintaining the temperature at 60 ° C. After 3 hours, the test piece was taken out, the nickel concentration in the cleaning liquid was measured by an atomic absorption spectrometer, and the nickel elution amount was measured. Table 1 shows the results of the examples using the cleaning solution of the present invention, and Table 2 shows the results of other cleaning agents as comparative examples.

【0010】[0010]

【表1】 [Table 1]

【0011】[0011]

【表2】 [Table 2]

【0012】実施例2 スケールの溶解力を測定するため、300mlのビーカ
ーに表3に示す組成の洗浄剤100mlを入れ、これ
に、リン酸カルシウムを主成分とするスケール2gを添
加し、40℃に維持しながらマクネッチクスタラーで攪
拌した。1時間後の洗浄液中のカルシウム溶解量を原子
吸光計で測定した。結果を表3に示した。
Example 2 To measure the dissolving power of a scale, 100 ml of a detergent having the composition shown in Table 3 was placed in a 300 ml beaker, and 2 g of a scale containing calcium phosphate as a main component was added to the beaker and maintained at 40 ° C. While stirring, it was stirred with McNetch Kusterer. The amount of calcium dissolved in the washing solution after 1 hour was measured by an atomic absorption spectrometer. The results are shown in Table 3.

【0013】[0013]

【表3】 [Table 3]

【0014】[0014]

【発明の効果】この出願発明の洗浄剤は、ギ酸または特
定のヒドロキシカルボン酸を主成分とし、少量の特定の
還元性成分を共存させたものであり、ニッケルメッキ表
面に付着したスケールを、ニッケルの溶出を極度に抑制
しながら効果的に洗浄除去することができる。
EFFECT OF THE INVENTION The cleaning agent of the present invention comprises formic acid or a specific hydroxycarboxylic acid as a main component and a small amount of a specific reducing component coexistent. Can be effectively removed by washing while suppressing the elution of

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中西 宏文 千葉県市原市椎津1082番地3号 伯東株式 会社千葉営業所内 (72)発明者 藤後 直子 三重県四日市市別名六丁目6番9号 伯東 株式会社四日市研究所内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Hirofumi Nakanishi Hirofumi Nakanishi 1082 Shiizu, Ichihara-shi, Chiba Inside Chiba Sales Office, Hakuto Co., Ltd. Yokkaichi Institute

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 (a)ギ酸、ヒドロキシカルボン酸また
はこれらの混合物および(b)アラボアスコルビン酸、
アスコルビン酸および水素化ホウ素化合物から選ばれる
1種以上を含有することを特徴とするニッケルメッキ表
面の水性洗浄剤。
1. (a) Formic acid, hydroxycarboxylic acid or a mixture thereof and (b) Araboascorbic acid,
An aqueous cleaning agent for a nickel-plated surface, which comprises at least one selected from ascorbic acid and a borohydride compound.
【請求項2】 (b)成分を(a)成分の5〜20重量
%含有することを特徴とする請求項1に記載のニッケル
メッキ表面の水性洗浄剤。
2. The aqueous detergent for a nickel-plated surface according to claim 1, wherein the component (b) is contained in an amount of 5 to 20% by weight of the component (a).
【請求項3】 (c)金属塩化物をさらに含有すること
を特徴とする請求項1に記載のニッケルメッキ表面の水
性洗浄剤。
3. The aqueous cleaning agent for a nickel-plated surface according to claim 1, further comprising (c) a metal chloride.
【請求項4】 (b)成分を(a)成分の5〜20重量
%および(c)成分を(a)成分の1〜5重量%含有す
ることを特徴とする請求項3に記載のニッケルメッキ表
面の水性洗浄剤。
4. The nickel according to claim 3, wherein the component (b) contains 5 to 20% by weight of the component (a) and the component (c) contains 1 to 5% by weight of the component (a). Aqueous cleaning agent for plating surface.
【請求項5】 請求項1に記載の水性洗浄剤を含む溶液
に、ニッケルメッキ表面を浸漬することを特徴とするニ
ッケルメッキ表面の洗浄方法。
5. A method for cleaning a nickel-plated surface, which comprises immersing the nickel-plated surface in a solution containing the aqueous cleaning agent according to claim 1.
JP5091843A 1993-03-29 1993-03-29 Cleaning agent and cleaning method for nickel plated surface Expired - Lifetime JP2722367B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5091843A JP2722367B2 (en) 1993-03-29 1993-03-29 Cleaning agent and cleaning method for nickel plated surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5091843A JP2722367B2 (en) 1993-03-29 1993-03-29 Cleaning agent and cleaning method for nickel plated surface

Publications (2)

Publication Number Publication Date
JPH06280066A true JPH06280066A (en) 1994-10-04
JP2722367B2 JP2722367B2 (en) 1998-03-04

Family

ID=14037870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5091843A Expired - Lifetime JP2722367B2 (en) 1993-03-29 1993-03-29 Cleaning agent and cleaning method for nickel plated surface

Country Status (1)

Country Link
JP (1) JP2722367B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013075973A (en) * 2011-09-30 2013-04-25 Toshiba Corp Cleaning agent for hardly soluble fouling, centrifugal thin-film dryer, and method of cleaning the centrifugal thin-film dryer
US8444868B2 (en) 2010-01-28 2013-05-21 International Business Machines Corporation Method for removing copper oxide layer

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221456A (en) * 1975-08-11 1977-02-18 Hiroko Miyoshi Knitting machine
JPS53731A (en) * 1976-06-24 1978-01-06 Yutaka Nakamura Bat for baseball
JPS5322546A (en) * 1976-08-13 1978-03-02 Nippon Giken Kk Method of washing resin in apparatus for refining electrodeposition paint
JPS544327A (en) * 1977-06-11 1979-01-13 Furukawa Electric Co Ltd Grating base plate for cell electrode
JPS63241191A (en) * 1987-03-27 1988-10-06 Noriyuki Sugawara Method for cleaning existing wafer supply pipe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221456A (en) * 1975-08-11 1977-02-18 Hiroko Miyoshi Knitting machine
JPS53731A (en) * 1976-06-24 1978-01-06 Yutaka Nakamura Bat for baseball
JPS5322546A (en) * 1976-08-13 1978-03-02 Nippon Giken Kk Method of washing resin in apparatus for refining electrodeposition paint
JPS544327A (en) * 1977-06-11 1979-01-13 Furukawa Electric Co Ltd Grating base plate for cell electrode
JPS63241191A (en) * 1987-03-27 1988-10-06 Noriyuki Sugawara Method for cleaning existing wafer supply pipe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8444868B2 (en) 2010-01-28 2013-05-21 International Business Machines Corporation Method for removing copper oxide layer
JP2013075973A (en) * 2011-09-30 2013-04-25 Toshiba Corp Cleaning agent for hardly soluble fouling, centrifugal thin-film dryer, and method of cleaning the centrifugal thin-film dryer

Also Published As

Publication number Publication date
JP2722367B2 (en) 1998-03-04

Similar Documents

Publication Publication Date Title
US4666528A (en) Method of removing iron and copper-containing scale from a metal surface
EP0086245B1 (en) Aqueous acid metal cleaning composition and method of use
US3308065A (en) Scale removal, ferrous metal passivation and compositions therefor
JPH04231484A (en) Phenyl mercaptotetrazole/tolyl triazole corrosion inhibitory composition
US3686123A (en) Cleaning composition
JPH0570975A (en) New alkylbenzotriazole composition and its use as corrosion preventive for copper and copper alloy
CA1137396A (en) Composition and process for chemically stripping metallic deposits
JP2002514683A (en) Alkaline zincate composition having low etching degree and aluminum zincation process
US4586961A (en) Methods and compositions for removing copper and copper oxides from surfaces
JPH06280066A (en) Cleaning agent for nickel-plated surface and cleaning method
US4943480A (en) Method and medium for the coating of metals with tin
CA1204372A (en) Methods and compositions for simultaneously removing iron and copper scales from ferrous metal surfaces
JPH02305982A (en) Higher-alkylbenzotriazole as novel corrosion inhibitor of copper and copper alloy
JPS62250189A (en) Chemical cleaning agent
JPH0142357B2 (en)
STREICHER Synergistic inhibition of ferric ion corrosion during chemical cleaning of metal surfaces
US3015630A (en) Aqueous solution for stripping nickel
JPS6345474B2 (en)
JPH02159383A (en) Electroless gold plating
JP2866481B2 (en) Latent heat storage agent composition
Caplan et al. Accelerating Effect of Decreasing Temperature On Corrosion by Glycol Solutions
JP2756521B2 (en) Absorption liquid for absorption refrigerator
JPH036226B2 (en)
JPH0781195B2 (en) Additive for pickling acid solution
JP2004068087A (en) Electroless nickel plating solution for magnesium alloy