JPH0627675B2 - Two-dimensional pressure sensor - Google Patents
Two-dimensional pressure sensorInfo
- Publication number
- JPH0627675B2 JPH0627675B2 JP2275784A JP2275784A JPH0627675B2 JP H0627675 B2 JPH0627675 B2 JP H0627675B2 JP 2275784 A JP2275784 A JP 2275784A JP 2275784 A JP2275784 A JP 2275784A JP H0627675 B2 JPH0627675 B2 JP H0627675B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- pressure
- light source
- flexible portion
- receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 20
- 238000006073 displacement reaction Methods 0.000 description 7
- 229920002379 silicone rubber Polymers 0.000 description 5
- 239000004945 silicone rubber Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004073 vulcanization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/247—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet using distributed sensing elements, e.g. microcapsules
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
- G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
- G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Description
【発明の詳細な説明】 （技術分野） この発明は面状に加えられた圧力分布を精度よく検出で
きる二次元感圧センサに関する。Description: TECHNICAL FIELD The present invention relates to a two-dimensional pressure-sensitive sensor capable of accurately detecting a pressure distribution applied to a surface.
（背景技術） 従来の二次元感圧センサとして、シリコーンゴム中に金
属粒子等を混入した加圧導電ゴムを用いたものが代表的
である。しかし、加圧導電ゴムは加圧力と抵抗値変化の
関係が急激に変化するスイッチ特性を示し、圧力のアナ
ログ検出に適さないばかりでなく、金属粒子等をゴムに
混入するため、弾性力の履歴現象や弾性力の劣化が起き
やすい等の欠点があった。(Background Art) As a conventional two-dimensional pressure-sensitive sensor, one using a pressure conductive rubber in which metal particles and the like are mixed in silicone rubber is typical. However, the pressure conductive rubber exhibits a switch characteristic in which the relationship between the applied pressure and the change in resistance value changes rapidly and is not suitable for analog pressure detection. There were drawbacks such as the phenomenon and deterioration of elastic force.
また上記欠点を除去するものとして、「特願昭58-02705
6」（特開昭59-153139号）に示すように、複数個の発光
素子からの光をそれぞれ受光素子の光透過窓および透明
な柔軟部を透過させて、光反射面からの反射光を各発光
素子に対応する受光素子で受光し、柔軟部の受圧面に加
わる圧力の変化に基づく発光素子と受光素子間の距離の
変化から受光々量の変化に対応した圧力の変化に相当す
る電気信号を得るようにした構成のものが提案されてい
る。Further, as a means for eliminating the above-mentioned drawbacks, Japanese Patent Application No. 58-02705
6 ”(Japanese Patent Laid-Open No. 59-153139), light from a plurality of light emitting elements is transmitted through a light transmitting window of a light receiving element and a transparent flexible portion, respectively, and reflected light from a light reflecting surface is reflected. Light is received by the light-receiving element corresponding to each light-emitting element, and the electrical equivalent to the change in pressure corresponding to the change in the amount of light received from the change in the distance between the light-emitting element and the light-receiving element based on the change in pressure applied to the pressure receiving surface of the flexible part There has been proposed a structure for obtaining a signal.
しかし、この技術は受圧感度が低いという欠点がある。However, this technique has the drawback of low pressure sensitivity.
（発明の課題） 本発明は上記欠点を改善するもので、上記構成部品の
内、柔軟部を改良することにより、受圧感度を大幅に改
良した高精度二次元感圧センサを提供するもので、その
要点は、柔軟部として凹凸形状を設けた弾性体を使用
し、好ましくは、光反射膜として白色の弾性薄板を使用
することにある。(Problems of the invention) The present invention is intended to improve the above-mentioned drawbacks, and to provide a high-precision two-dimensional pressure-sensitive sensor in which the pressure receiving sensitivity is significantly improved by improving the flexible part among the above-mentioned components. The point is that an elastic body provided with an uneven shape is used as the flexible portion, and preferably a white elastic thin plate is used as the light reflecting film.
（発明の構成および作用） 第１図は本発明による二次元感圧センサの一実施例の構
成を示す略図的分解斜視図、第２図(a) 及び(b) は本発
明の断面図であり、第２図(a) は物体接触による外圧が
無い場合、第２図(b) は物体による圧力を受けた場合の
ものである。(Structure and Action of the Invention) FIG. 1 is a schematic exploded perspective view showing the structure of an embodiment of a two-dimensional pressure-sensitive sensor according to the present invention, and FIGS. 2 (a) and 2 (b) are sectional views of the present invention. Yes, FIG. 2 (a) shows the case where there is no external pressure due to the contact with the object, and FIG. 2 (b) shows the case where the pressure from the object is received.
これら図において、１は光源基板であって、多数の光源
２を例えばマトリクス状または他の所望のパターンに従
って、この基板１上に配列するかまたは基板１中に埋設
して配列する。３はこの光源基板１に対向配設されるセ
ンサ基板で、光源２から放射される光に対して透明であ
っても不透明であっても良い。４はこのセンサ基板３の
上にまたはこの基板３の中に埋設して光源２と等ピッチ
で設けた受光素子であって、これら受光素子４は、この
基板３が透明である場合には光の通過（この場合には透
過）領域の周囲に、また不透明の場合には各光源に夫夫
対向するようにしてセンサ基板３に設けた光通過用の孔
５の周囲に、夫々設ける。この場合、受光素子を任意の
形状の受光素子とし各光源に対し複数のこれら素子を設
け得るが、単一のリング状半導体受光素子とするのが好
適である。In these figures, 1 is a light source substrate, and a large number of light sources 2 are arranged on the substrate 1 or embedded in the substrate 1 according to, for example, a matrix or another desired pattern. Reference numeral 3 denotes a sensor substrate which is arranged opposite to the light source substrate 1 and may be transparent or opaque to the light emitted from the light source 2. Reference numeral 4 denotes a light receiving element provided on the sensor substrate 3 or embedded in the substrate 3 at the same pitch as the light source 2, and these light receiving elements 4 emit light when the substrate 3 is transparent. Is provided around the passage (transmission in this case) region, and in the case of opacity, around the light passage hole 5 provided in the sensor substrate 3 so as to face each light source. In this case, the light receiving element may be a light receiving element having an arbitrary shape and a plurality of these elements may be provided for each light source, but it is preferable to use a single ring-shaped semiconductor light receiving element.
６は柔軟部であり、透明シリコーンゴムなどが使用でき
る。該柔軟部にはマトリクス状に一体形成された突起部
７を有している。Reference numeral 6 is a flexible portion, and transparent silicone rubber or the like can be used. The flexible portion has protrusions 7 integrally formed in a matrix.
８は光反射膜であり、受圧部弾性特性上、板厚方向に対
しては変形しにくく、板面に沿う方向に対しては伸縮性
が大きいものが望ましく、例えば比較的硬度が高く厚さ
の薄い白色のシリコーンゴム等が適している。該光反射
膜８は突起部７と加硫により一体化されるか、またはシ
リコーンゴム系接着剤にて接着されている。このように
形成した各板１，３，６，８を第２図に示すようにこの
順序で組合せ配置して一体となす。この場合、光源基板
１とセンサ基板３とを密着させてもよいし或いは適当な
スペーサ（図示せず）を用いて離間配設させてもよい。Reference numeral 8 denotes a light reflection film, which is preferably not easily deformed in the plate thickness direction and has high elasticity in the plate thickness direction due to the elasticity of the pressure receiving portion. For example, the hardness is relatively high and the thickness is high. Suitable is thin white silicone rubber. The light reflecting film 8 is integrated with the protrusion 7 by vulcanization, or is adhered by a silicone rubber adhesive. The plates 1, 3, 6 and 8 thus formed are combined and arranged in this order as shown in FIG. In this case, the light source substrate 1 and the sensor substrate 3 may be brought into close contact with each other, or may be spaced apart by using an appropriate spacer (not shown).
次に本発明による二次元感圧センサの動作について説明
する。Next, the operation of the two-dimensional pressure sensitive sensor according to the present invention will be described.
光源２から出た放射光９はセンサ基板３の光通過領域５
および柔軟部６を通り光反射膜８で反射されて受光素子
４に入射し、ここで光電変換された電気信号となる。The radiated light 9 emitted from the light source 2 is the light passage area 5 of the sensor substrate 3.
Then, the light passes through the flexible portion 6, is reflected by the light reflection film 8 and is incident on the light receiving element 4, where it becomes an electric signal photoelectrically converted.
今、物体１０により矢印Ａで示す方向から圧力が加わる
と、その範囲における突起部７が圧縮され変形する。第
３図に加圧力に対する光反射膜８の圧力方向（矢印Ａ方
向）への変位量の測定結果の一例を示す。Now, when pressure is applied by the object 10 in the direction indicated by the arrow A, the protrusion 7 in that range is compressed and deformed. FIG. 3 shows an example of measurement results of the amount of displacement of the light reflecting film 8 in the pressure direction (direction of arrow A) with respect to the applied pressure.
また光反射面と受光素子４との距離に対する受光素子４
の出力信号特性は第４図に示す通りである。ここで距離
Ａは圧力が加わらず反射膜の変位がない場合の位置を示
し、距離Ｂは物体による圧力によって反射膜が受光素子
に近づいた場合の位置を示している。この図からわかる
ように、一定圧力に対する反射膜の変位量が大きい程、
受光素子の出力変化が大きく、センサの圧力感度を高め
ることができる。In addition, the light receiving element 4 with respect to the distance between the light reflecting surface and the light receiving element 4
The output signal characteristics of are as shown in FIG. Here, the distance A indicates the position when the pressure is not applied and the reflection film is not displaced, and the distance B indicates the position when the reflection film approaches the light receiving element due to the pressure of the object. As can be seen from this figure, the greater the displacement of the reflective film for a given pressure,
The output change of the light receiving element is large, and the pressure sensitivity of the sensor can be increased.
本発明によるセンサは柔軟部に突起部を設け、この突起
部で外圧を受けるため、実効受圧面積が物体の加圧面積
より小さくなっている。そのため、平板状の柔軟部に比
べて一定圧力に対する反射膜の変位量を大きくすること
ができるものである。尚、第５図に、実効受圧面積比率
に対する反射膜変位量の測定結果例を示す。ここで実効
受圧面積比率 100％は平板状の場合であって、突起部面
積を減少するに従い、反射膜の変位量が増大していくこ
とがわかる。Since the sensor according to the present invention is provided with the protrusion on the flexible portion and receives the external pressure by the protrusion, the effective pressure receiving area is smaller than the pressing area of the object. Therefore, the amount of displacement of the reflective film with respect to a constant pressure can be made larger than that of the flat flexible portion. It should be noted that FIG. 5 shows an example of measurement results of the amount of displacement of the reflective film with respect to the effective pressure receiving area ratio. Here, it can be seen that the effective pressure receiving area ratio of 100% is in the case of a flat plate shape, and the displacement amount of the reflective film increases as the area of the protrusion decreases.
また、本発明では柔軟部の突起部７と受光素子７との相
対位置関係は第６図に示すように重なって配置すること
ができる。この場合、光源からの光は柔軟部中だけを通
過するため余分な反射、屈折は起きないが、突起部と反
射膜との接触面を平坦に保つ必要がある。他の発明の実
施例として柔軟部を第７図(a) に示すように一枚の弾性
体にマトリクス状に多数の穴があいた構造にすることも
できる。第７図(b) の構成断面図で明らかなように柔軟
部の穴の部分を光が通過するため、光の減衰が生じな
い。また柔軟部を透明にする必要がなく弾性性能の設計
自由度が向上する効果がある。Further, in the present invention, the relative positional relationship between the projecting portion 7 of the flexible portion and the light receiving element 7 can be arranged so as to overlap each other as shown in FIG. In this case, since the light from the light source passes only through the flexible portion, unnecessary reflection and refraction do not occur, but it is necessary to keep the contact surface between the protrusion and the reflective film flat. As another embodiment of the invention, as shown in FIG. 7 (a), the flexible portion may have a structure in which a single elastic body is provided with a large number of holes in a matrix. As is clear from the cross-sectional view of FIG. 7 (b), the light passes through the hole of the flexible portion, so that the light is not attenuated. Further, it is not necessary to make the flexible portion transparent, which has the effect of improving the degree of freedom in designing elastic performance.
また、さらに他の発明の実施例として柔軟部および反射
膜の部分を第８図(a) に示すように白色シリコーンゴム
の薄板下面に突起部を一体的に形成してもよい。第８図
(b) の構成断面図でわかるように光の減衰が生じない効
果ばかりでなく、更に部品点数が減り、第１の実施例に
おける柔軟部７と反射膜８との接着工程が必要無くなり
コストを低減できる効果がある。Further, as still another embodiment of the present invention, as shown in FIG. 8 (a), the flexible portion and the reflection film portion may be integrally formed with a projection portion on the lower surface of a thin plate of white silicone rubber. Fig. 8
As can be seen from the sectional view of the configuration of (b), not only the effect that light attenuation does not occur, but the number of parts is further reduced, and the bonding step between the flexible portion 7 and the reflective film 8 in the first embodiment is not necessary, and the cost is reduced. There is an effect that can be reduced.
（発明の効果） 上述したところから明らかのように、本発明の構成によ
れば、光源と受光素子とを対となしこれらを二次元的に
配列させ、しかも、光源からの光を反射膜で反射させて
受光素子に入射させるようにした構成で、特に受圧部に
凹凸形状を有する柔軟部を用いることにより、第５図に
示した通り、圧力に対する受圧部変形量を増大したもの
で圧力−電気信号変換効率を向上した二次元感圧センサ
を得ることができる。(Effects of the Invention) As is apparent from the above, according to the configuration of the present invention, the light source and the light receiving element are paired and these are two-dimensionally arranged, and furthermore, the light from the light source is reflected by the reflection film. As shown in FIG. 5, the pressure-receiving portion has a structure in which the light-receiving element is reflected and the light-receiving element is deformed. A two-dimensional pressure-sensitive sensor with improved electric signal conversion efficiency can be obtained.
尚、受光素子から得られた信号はアナログ信号であるか
ら、この信号をA/D 変換器を経て中央処理装置に供給し
そこで所望の処理を行えば接触する物体の形状や位置を
判断出来るので、本発明をロボットのハンドの感圧セン
サ等に利用することができる。Since the signal obtained from the light receiving element is an analog signal, it is possible to determine the shape and position of the contacting object by supplying this signal to the central processing unit via the A / D converter and performing the desired processing there. The present invention can be used for a pressure sensor of a robot hand or the like.
第１図は本発明の一実施例を示す分解斜視図、第２図
(a) 及び(b) は本発明による感圧センサの組立てた状態
の断面図、第３図は圧力と反射膜変位量の関係を示す
図、第４図は反射面と受光素子間距離に対する受光素子
出力の関係を示す曲線図、第５図は実効受圧面積比率と
反射膜変位量との関係を示す図、第６図は本発明の別の
実施例の断面図、第７図(a)，(b)及び第８図(a),(b) は
他の発明の実施例を示す図である。 １……光源基板、２……光源、 ３……センサ基板、４……受光素子、 ５……光透過用孔、６……柔軟部、 ７……突起部、８……光反射膜。FIG. 1 is an exploded perspective view showing an embodiment of the present invention, and FIG.
(a) and (b) are sectional views of the pressure-sensitive sensor according to the present invention in an assembled state, FIG. 3 is a diagram showing the relationship between pressure and displacement of the reflective film, and FIG. 4 is a graph showing the distance between the reflective surface and the light receiving element. FIG. 5 is a curve diagram showing the relationship between the output of the light receiving element, FIG. 5 is a view showing the relationship between the effective pressure receiving area ratio and the amount of displacement of the reflective film, FIG. 6 is a sectional view of another embodiment of the present invention, and FIG. ), (B) and FIGS. 8 (a), (b) are diagrams showing another embodiment of the invention. 1 ... Light source substrate, 2 ... Light source, 3 ... Sensor substrate, 4 ... Light receiving element, 5 ... Light transmitting hole, 6 ... Flexible portion, 7 ... Projection portion, 8 ... Light reflecting film.
フロントページの続き (72)発明者 安孫子 一松 東京都港区虎ノ門１丁目７番12号 沖電気 工業株式会社内 (56)参考文献 特開 昭59−135333（ＪＰ，Ａ)Front page continuation (72) Inventor Abiko Ichimatsu 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd. (56) Reference JP-A-59-135333 (JP, A)
Claims (3)
光源の光を通過させると共に該光の通過領域の周囲に夫
々配列した受光素子を有するセンサ基板と、柔軟部によ
る受圧部と、光反射膜とを積層し、前記光源からの光が
前記光反射膜で反射して受圧部の変形に従って前記受光
素子に入射する二次元感圧センサにおいて、柔軟部が前
記受光素子の配列と等間隔で形成される突起部を有する
透明弾性体により構成され、該突起部が受光素子の間に
位置するように構成されることを特徴とする二次元感圧
センサ。1. A light source substrate having an array of a plurality of light sources, a sensor substrate having light-receiving elements that allow light of the light source to pass therethrough and are arrayed around the light passage region, and a pressure-receiving portion formed by a flexible portion. In a two-dimensional pressure-sensitive sensor in which a light-reflecting film is laminated and light from the light source is reflected by the light-reflecting film and is incident on the light-receiving element in accordance with the deformation of the pressure-receiving portion, the flexible portion has an arrangement of the light-receiving elements, etc. A two-dimensional pressure-sensitive sensor, comprising a transparent elastic body having protrusions formed at intervals, the protrusions being positioned between the light receiving elements.
光源の光を通過させると共に該光の通過領域の周囲に夫
々配列した受光素子を有するセンサ基板と、柔軟部によ
る受圧部と、光反射膜とを積層し、前記光源からの光が
前記光反射膜で反射して受圧部の変形に従って前記受光
素子に入射する二次元感圧センサにおいて、柔軟部が前
記受光素子の配列と同一位置に形成される突起部を有す
る透明弾性体により構成されることを特徴とする二次元
感圧センサ。2. A light source substrate having an array of a plurality of light sources, a sensor substrate having light-receiving elements for transmitting the light of the light source and arranged around the light passage region, and a pressure-receiving portion by a flexible portion. In a two-dimensional pressure-sensitive sensor in which a light reflection film is laminated, and light from the light source is reflected by the light reflection film and enters the light receiving element according to the deformation of the pressure receiving portion, the flexible portion is the same as the arrangement of the light receiving elements. A two-dimensional pressure-sensitive sensor comprising a transparent elastic body having a protrusion formed at a position.
光源の光を通過させると共に該光の通過領域の周囲に夫
々配列した受光素子を有するセンサ基板と、柔軟部によ
る受圧部と、光反射膜とを積層し、前記光源からの光が
前記光反射膜で反射して受圧部の変形に従って前記受光
素子に入射する二次元感圧センサにおいて、前記柔軟部
が前記受光素子の配列と同一位置に形成される穴を有す
る弾性体により構成され、該穴が発光素子の光を通過さ
せることを特徴とする二次元感圧センサ。3. A light source substrate having an array of a plurality of light sources, a sensor substrate having light receiving elements which pass the light of the light source and are arrayed around the light passage region, and a pressure-receiving portion by a flexible portion. In a two-dimensional pressure-sensitive sensor in which a light-reflecting film is laminated, and light from the light source is reflected by the light-reflecting film and is incident on the light-receiving element according to the deformation of the pressure-receiving portion, the flexible portion is an array of the light-receiving elements. A two-dimensional pressure-sensitive sensor, comprising an elastic body having holes formed at the same position, and the holes allow light of a light emitting element to pass therethrough.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2275784A JPH0627675B2 (en) | 1984-02-13 | 1984-02-13 | Two-dimensional pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2275784A JPH0627675B2 (en) | 1984-02-13 | 1984-02-13 | Two-dimensional pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60168028A JPS60168028A (en) | 1985-08-31 |
| JPH0627675B2 true JPH0627675B2 (en) | 1994-04-13 |
Family
ID=12091553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2275784A Expired - Lifetime JPH0627675B2 (en) | 1984-02-13 | 1984-02-13 | Two-dimensional pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627675B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5209126A (en) * | 1991-01-04 | 1993-05-11 | Bonneville Scientific | Force sensor |
| EP2034287A1 (en) | 2007-09-10 | 2009-03-11 | Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO | Optical sensor for measuring a force distribution |
| WO2023002866A1 (en) * | 2021-07-21 | 2023-01-26 | 株式会社村田製作所 | Sensor device |
-
1984
- 1984-02-13 JP JP2275784A patent/JPH0627675B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60168028A (en) | 1985-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |