JPH06265927A - Liquid crystal spatial light modulator - Google Patents

Liquid crystal spatial light modulator

Info

Publication number
JPH06265927A
JPH06265927A JP5052565A JP5256593A JPH06265927A JP H06265927 A JPH06265927 A JP H06265927A JP 5052565 A JP5052565 A JP 5052565A JP 5256593 A JP5256593 A JP 5256593A JP H06265927 A JPH06265927 A JP H06265927A
Authority
JP
Japan
Prior art keywords
cells
ecb
liquid crystal
orientation
light modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5052565A
Other languages
Japanese (ja)
Inventor
Hirotsuna Miura
弘綱 三浦
Atsushi Amako
淳 尼子
Tomio Sonehara
富雄 曽根原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP5052565A priority Critical patent/JPH06265927A/en
Publication of JPH06265927A publication Critical patent/JPH06265927A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

PURPOSE:To improve the productivity by providing an area of twisted orientation and an area of parallel orientation and providing a means which optically connects these areas to eliminate a need of a special optical system for alignment. CONSTITUTION:A one-dimensional prism array 107 is arranged behind a liquid crystal panel 100, and a polarizing plate 101 is arranged on the opposite side. Arrays of ECB(electric field controlled birefringence) cells and TN(twisted nematic) cells of homogeneous orientation are alternately arranged, and every two of respective cells are paired and are connected optically like a prism. They are orientated in one direction on the TFT element substrate side but have the orientation direction changed every array on the counter substrate side. That is, an orientating film 105 is applied on the counter substrate to perform the orientation treatment for ECB cells, and an orientating film 110 is applied throughout over the film 105 to perform the orientation treatment for TN cells, and parts of ECB cells are etched, and applied orientating films are removed from behind to form areas of TN and ECB.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光の振幅と位相を独立に
変調できる液晶空間光変調器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal spatial light modulator capable of independently modulating the amplitude and phase of light.

【0002】[0002]

【従来の技術】従来の液晶空間光変調器は、図3に示す
ように、TNパネル303とECBパネル302を直列
に配置するものであった('92秋季応用物理学会学術講
演会講演予稿集, 17p-N-2参照)。
2. Description of the Related Art A conventional liquid crystal spatial light modulator has a TN panel 303 and an ECB panel 302 arranged in series, as shown in FIG. 3 ('92 Autumn Meeting of the Applied Physics Academic Conference, Proceedings). , 17p-N-2).

【0003】[0003]

【発明が解決しようとする課題】しかし、従来の液晶空
間光変調器では、以下のような問題があった。位置合わ
せマークを顕微鏡で見ながら、2つの液晶パネルの位置
を合わせようとすると、間にあるガラス基板(厚さ1m
mから2mm)の為に両方のマークに焦点を合わせるこ
とができず、正確な位置合わせができない。このため、
平行光を垂直入射してモアレが消えるように位置を合わ
せた後、パターンを表示して画素の対応を調べるなどの
方法が取られており、特別な光学系が必要で、大量生産
にも適さないという問題があった。本発明は、このよう
な問題点を解決するものであって、その目的は、簡便な
手段により高性能な液晶空間光変調器を提供するところ
にある。
However, the conventional liquid crystal spatial light modulator has the following problems. While trying to align the positions of the two liquid crystal panels while looking at the alignment mark with a microscope, the glass substrate (thickness 1m
Since it is 2 mm from m), it is impossible to focus on both marks, and accurate alignment cannot be performed. For this reason,
After aligning the parallel light vertically so that the moire disappears, the pattern is displayed to check the correspondence of the pixels.A special optical system is required, which is suitable for mass production. There was a problem of not having. The present invention solves such a problem, and an object thereof is to provide a high-performance liquid crystal spatial light modulator by a simple means.

【0004】[0004]

【課題を解決するための手段】本発明の第1の液晶空間
光変調器は、ねじれ配向の領域と平行配向の領域を備
え、これらの領域を光学的に接続する手段を備えたこと
を特徴とする。
A first liquid crystal spatial light modulator according to the present invention is provided with regions of twist alignment and regions of parallel alignment, and means for optically connecting these regions. And

【0005】本発明の第2の液晶空間光変調器は、前記
第1の液晶空間光変調器において、前記接続する手段が
プリズムアレーであることを特徴とする。
A second liquid crystal spatial light modulator of the present invention is characterized in that, in the first liquid crystal spatial light modulator, the connecting means is a prism array.

【0006】[0006]

【実施例】以下、実施例により本発明の詳細を示す。The details of the present invention will be described below with reference to Examples.

【0007】(実施例1)図1に本発明の液晶空間光変
調器の構成を示す。液晶パネル100の後方に1次元の
プリズムアレー107を、その反対側には偏光板101
をそれぞれ配置した。この液晶パネルの画素の配置を図
2に示す。ホモジニアス配向のECB(電界制御複屈
折)セル202とTN(ツイステッドネマティック)セ
ル201が1列ずつ交互にならんでいる。これらは2つ
ずつが組になっておりプリズムで光学的に結ばれてい
る。本実施例では液晶パネルの画素を縦長にし、ECB
とTNの組がほぼ正方形になるようにした。
(Embodiment 1) FIG. 1 shows the configuration of a liquid crystal spatial light modulator of the present invention. A one-dimensional prism array 107 is provided behind the liquid crystal panel 100, and a polarizing plate 101 is provided on the opposite side.
Were arranged respectively. The arrangement of pixels of this liquid crystal panel is shown in FIG. ECB (electric field control birefringence) cells 202 and TN (twisted nematic) cells 201 having a homogeneous orientation are alternately arranged in columns. These are paired two by two and are optically connected by a prism. In this embodiment, the pixels of the liquid crystal panel are vertically long, and the ECB
The set of TN and TN is almost square.

【0008】偏光板101を通過したコヒーレント光1
12,113は直線偏光となってECBまたはTNセル
に入射する。ECBセルは光の偏光状態を変化させるこ
となく、液晶ダイレクタの方向に偏光した光の位相を変
化させる。TNセルは光の偏光状態を変化させるので、
もう一度光が偏光板を通過するとその振幅が変化する。
ECBセルから入射した光112は、まずECBセルに
よって位相を変調され、プリズム107で折り返されて
TNセルに入射する。この光はTNセルを通過する間に
楕円偏光となり、再び偏光板101を通過すると振幅が
変わる。これで振幅と位相が変調できた。一方TNセル
から入射した光113はまずTNセルによって楕円偏光
になる。そしてプリズム107で折り返されてECBセ
ルに入射する。ECBセルはダイレクタに平行な偏光成
分だけを位相変調し、偏光状態は変化させない。この光
が再び偏光板101を通過すると振幅が変わる。これで
ECBから入射した光と同様に振幅と位相が変調でき
た。なお、TNセルも位相を変化させるのでこれはEC
Bセルに入力するデータによって補正した。
Coherent light 1 that has passed through the polarizing plate 101
12, 113 become linearly polarized light and enter the ECB or TN cell. The ECB cell changes the phase of the light polarized in the direction of the liquid crystal director without changing the polarization state of the light. Since the TN cell changes the polarization state of light,
When the light passes through the polarizing plate again, its amplitude changes.
The light 112 incident from the ECB cell is first phase-modulated by the ECB cell, folded back by the prism 107, and incident on the TN cell. This light becomes elliptically polarized light while passing through the TN cell, and the amplitude changes again when passing through the polarizing plate 101. With this, the amplitude and phase could be modulated. On the other hand, the light 113 incident from the TN cell is first elliptically polarized by the TN cell. Then, it is folded back by the prism 107 and enters the ECB cell. The ECB cell phase-modulates only the polarization component parallel to the director and does not change the polarization state. When this light passes through the polarizing plate 101 again, the amplitude changes. With this, the amplitude and phase could be modulated similarly to the light incident from the ECB. Since the TN cell also changes the phase, this is EC
It was corrected by the data input to the B cell.

【0009】画素による回折の影響を少なくするため d<a(2x−a)/4nλ とした。ここでdは対向基板106の厚さ、aは開口の
大きさ(縦横異なる場合は小さい方)、xは画素ピッチ
(aと同じ方向)、nは光路の屈折率、λは光の波長で
ある(図2参照)。これは矩形開口の回折像(sinc
関数)の最初の零点が隣の画素に入らない条件である。
本実施例では横方向の画素ピッチが40μm、開口の大
きさが30μmで、対向基板の厚さは約0.4mmであ
る。
In order to reduce the influence of diffraction by the pixel, d <a (2x-a) / 4nλ. Here, d is the thickness of the counter substrate 106, a is the size of the opening (smaller when the length and width are different), x is the pixel pitch (the same direction as a), n is the refractive index of the optical path, and λ is the wavelength of light. Yes (see Figure 2). This is a diffraction image (sinc) of a rectangular aperture.
This is a condition that the first zero of (function) does not enter the adjacent pixel.
In this embodiment, the horizontal pixel pitch is 40 μm, the opening size is 30 μm, and the thickness of the counter substrate is about 0.4 mm.

【0010】本実施例に用いた液晶パネルはTFT駆動
方式で、TFT素子基板102は光の入射側にある。T
FT素子109の誤動作を防ぐため、TFT素子の下側
(光の入射側)に遮光マスク108を配置した。
The liquid crystal panel used in this embodiment is of the TFT driving type, and the TFT element substrate 102 is on the light incident side. T
In order to prevent malfunction of the FT element 109, a light shielding mask 108 is arranged below the TFT element (light incident side).

【0011】TFT素子基板側は一方向に配向し、対向
基板側は一列ごとに配向方向を変えてある。すなわち、
対向基板上に配向膜105を塗布し、まずECBセルの
ための配向処理をする(TFT素子基板と平行にラビン
グする)。次にその上から一面に配向膜110を塗布
し、TNセルのための配向処理をする(TFT素子基板
のラビング方向と直角にラビングする)。この後、EC
Bセルの部分をエッチングして、後から塗布した配向膜
を取り除く。このようにしてTNとECBの領域を形成
した。
The TFT element substrate side is oriented in one direction, and the counter substrate side is changed in orientation for each row. That is,
An alignment film 105 is applied on the counter substrate, and an alignment process for an ECB cell is performed first (rubbing parallel to the TFT element substrate). Next, an alignment film 110 is applied to the entire surface from above and alignment treatment for the TN cell is performed (rubbing is performed at right angles to the rubbing direction of the TFT element substrate). After this, EC
The B cell portion is etched to remove the alignment film applied later. Thus, the TN and ECB regions were formed.

【0012】本発明の液晶空間光変調器はプリズムアレ
ーの位置合わせのみおこなえばよく、従来のように画素
の対応を調べる必要がない。このため位置合わせのため
の特別な光学系も必要なく、生産性も向上した。
In the liquid crystal spatial light modulator of the present invention, only the alignment of the prism array needs to be performed, and it is not necessary to check the correspondence of pixels as in the conventional case. For this reason, no special optical system for alignment is required, and productivity is improved.

【0013】対向基板に直接プリズムアレーを形成する
ことも可能である。この場合は更に組立が容易になる。
It is also possible to form the prism array directly on the counter substrate. In this case, the assembly becomes easier.

【0014】[0014]

【発明の効果】本発明によれば、液晶空間光変調器の製
造時に、プリズムアレーの位置合わせのみおこなえばよ
く、従来のように画素の対応を調べる必要がない。この
ため位置合わせのための特別な光学系も必要なく、生産
性も向上するという効果が得られる。また液晶空間光変
調器の対向基板に直接プリズムアレーを形成すれば更に
製造が容易になる。
According to the present invention, when the liquid crystal spatial light modulator is manufactured, only the alignment of the prism array need be performed, and it is not necessary to check the correspondence of the pixels as in the conventional case. Therefore, no special optical system for alignment is required, and the effect of improving productivity can be obtained. Further, if the prism array is directly formed on the counter substrate of the liquid crystal spatial light modulator, the manufacturing becomes easier.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の液晶空間光変調器の構成を示す側面
図である。
FIG. 1 is a side view showing a configuration of a liquid crystal spatial light modulator of the present invention.

【図2】 本発明の液晶空間光変調器の画素の配置を示
す上面図である。
FIG. 2 is a top view showing an arrangement of pixels of the liquid crystal spatial light modulator of the present invention.

【図3】 従来の液晶空間光変調器の構成を示す側面図
である。
FIG. 3 is a side view showing a configuration of a conventional liquid crystal spatial light modulator.

【符号の説明】[Explanation of symbols]

100 液晶パネル 101 偏光板 102 TFT素子基板 103 配向膜 104 液晶 105 配向膜 106 対向基板 107 プリズムアレー 108 遮光マスク 109 TFT素子 110 配向膜 111 遮光マスク 112 コヒーレント光 113 コヒーレント光 201 TNセル 202 ECBセル 301 偏光板 302 ECBパネル 303 TNパネル 304 偏光板 100 liquid crystal panel 101 polarizing plate 102 TFT element substrate 103 alignment film 104 liquid crystal 105 alignment film 106 counter substrate 107 prism array 108 light-shielding mask 109 TFT element 110 alignment film 111 light-shielding mask 112 coherent light 113 coherent light 201 TN cell 202 ECB cell 301 polarization Plate 302 ECB panel 303 TN panel 304 Polarizing plate

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 液晶空間光変調器において、ねじれ配向
の領域と平行配向の領域を備え、これらの領域を光学的
に接続する手段を備えたことを特徴とする液晶空間光変
調器。
1. A liquid crystal spatial light modulator comprising a twisted alignment region and a parallel alignment region, and means for optically connecting these regions.
【請求項2】 前記接続する手段はプリズムアレーであ
ることを特徴とする請求項1記載の液晶空間光変調器。
2. The liquid crystal spatial light modulator according to claim 1, wherein the connecting means is a prism array.
JP5052565A 1993-03-12 1993-03-12 Liquid crystal spatial light modulator Pending JPH06265927A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5052565A JPH06265927A (en) 1993-03-12 1993-03-12 Liquid crystal spatial light modulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5052565A JPH06265927A (en) 1993-03-12 1993-03-12 Liquid crystal spatial light modulator

Publications (1)

Publication Number Publication Date
JPH06265927A true JPH06265927A (en) 1994-09-22

Family

ID=12918329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5052565A Pending JPH06265927A (en) 1993-03-12 1993-03-12 Liquid crystal spatial light modulator

Country Status (1)

Country Link
JP (1) JPH06265927A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980040604A (en) * 1996-11-29 1998-08-17 손욱 Liquid Crystal Alignment Treatment Method
JP2011507047A (en) * 2007-12-20 2011-03-03 シーリアル テクノロジーズ ソシエテ アノニム Controllable light modulator
EP2762956A1 (en) * 2013-01-30 2014-08-06 Samsung Electronics Co., Ltd Complex spatial light modulator and 3d image display including the same
CN113534556A (en) * 2021-06-16 2021-10-22 西安中科微星光电科技有限公司 Amplitude and phase independent controllable liquid crystal light valve

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980040604A (en) * 1996-11-29 1998-08-17 손욱 Liquid Crystal Alignment Treatment Method
JP2011507047A (en) * 2007-12-20 2011-03-03 シーリアル テクノロジーズ ソシエテ アノニム Controllable light modulator
EP2762956A1 (en) * 2013-01-30 2014-08-06 Samsung Electronics Co., Ltd Complex spatial light modulator and 3d image display including the same
US9740168B2 (en) 2013-01-30 2017-08-22 Samsung Electronics Co., Ltd. Complex spatial light modulator and 3D image display including the same
CN113534556A (en) * 2021-06-16 2021-10-22 西安中科微星光电科技有限公司 Amplitude and phase independent controllable liquid crystal light valve

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