JPH06265837A - Magnetic superfine particle film function element and its production - Google Patents

Abstract

PURPOSE:To provide the magnetic superfine particle film function element formed with a magnetic superfine particle film on a substrate and the process for production of the magnetic superfine particle film function element for production thereof. CONSTITUTION:Superfine particles of 5Fe(OH)33Y(OH)3 or superfine particles of [5Fe(OH)3] [(3-x-y)Y(OH)3] [xM(OH)3] [yN(OH)3] are formed by using an alkoxide method and are stably dispersed into an org. solvent. After the colloidal soln. prepd. in such a manner is applied on the substrate 100, the substrate 100 is calcined, by which the film 200 of the crystalline YIG superfine particles (crystalline YIG compd. superfine particles) is formed on the substrate 100. The magnetic superfine particle film function element operating as a magnetic thin film function element or magnetic thick film function element is realized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic ultrafine particle film functional element for forming a magnetic ultrafine particle film on a substrate, and a method for producing the magnetic ultrafine particle film functional element for producing the same.

There is a magnetic thin film functional element in which a magnetic thin film is formed on a substrate. This magnetic thin film functional element is widely used in optical isolators, magnetic sensors and the like. From this, the need for manufacturing this magnetic thin film functional element by a simple method is being emphasized.

[0003]

2. Description of the Related Art YIG (Fe
There is an iron garnet compound called ₅ Y ₃ O ₁₂ ).

Conventionally, when forming this YIG magnetic thin film on a substrate, a method has been adopted in which a YIG crystal is sliced into a thin film and attached to the substrate. That is, yttrium raw material and iron raw material are mixed so that the molar ratio of yttrium and iron is 3: 5 and melted at a high temperature of 1500 ° C. or higher, and a YIG seed crystal is put in this and slowly cooled. Thus, the YIG crystal is grown and obtained. And
By thinly cutting this YIG crystal into a thin film and adhering it to a substrate, a magnetic thin film functional element was produced.

As another conventional technique, a YIG constituent element (iron ion / yttrium ion) is deposited on a gadolinium gallium garnet substrate by sputtering using a sputtering apparatus to grow a YIG thin film crystal. Sometimes the method is adopted.

[0006]

2. Description of the Related Art However, according to the former conventional technique, there is a problem that it takes time and labor because a method of once producing a YIG crystal and slicing the YIG crystal is adopted, and the thickness of the thin film is reduced. There is a problem that it cannot be made too thin.

Further, according to the latter prior art, there is a problem that an expensive sputtering apparatus is required and the kind of substrate is limited.

The present invention has been made in view of the above circumstances, and a new magnetic ultrafine particle film functional element forming a magnetic thin film functional element by forming a magnetic ultrafine particle film on a substrate, and the magnetic ultrafine particle thereof. An object of the present invention is to provide a method for manufacturing a film functional element.

[0009]

[Means for Solving the Problems] In order to realize a magnetic ultrafine particle film functional element for forming a magnetic ultrafine particle film on a substrate,
In the method for producing a magnetic ultrafine particle film functional device of the present invention,
In manufacturing the YIG (Fe ₅ Y ₃ O ₁₂ ) magnetic ultrafine particle film functional element in the treatment process of No. ₃ , the ferric alkoxide Fe (OR) ₃ solution and the yttrium alkoxide Y are used.
The (OR ') ₃ solution is stoichiometrically mixed so that the molar ratio of Fe and Y is 5: 3. On the other hand, Bi, Gd, In
YIG compound (Fe ₅ Y _3-x M
_x O ₁₂ , Fe ₅ Y _3-xy M _x N _y O _12, etc., provided that M, N
When manufacturing a magnetic ultrafine particle film functional element of additive, in addition to this, an alkoxide solution of the additive is stoichiometrically mixed. Here, R and R'represent an alkyl group such as an ethyl group and a butyl group.

Next, in the second treatment step, water is added to the mixed solution produced in the first treatment step to hydrolyze the mixture, thereby mixing iron hydroxide and yttrium hydroxide in an amorphous state. Ultrafine secondary particles (as shown in Fig. 2, a plurality of original primary particles aggregated by intermolecular force), or iron hydroxide and yttrium hydroxide in an amorphous state and additives Secondary particles of ultrafine particles mixed with hydroxide are generated.

That is, when manufacturing a YIG magnetic ultrafine particle film functional element, 5Fe (OR) ₃ + 3Y (OR ^' ) ₃ + 24H ₂ O → 5Fe (OH) ₃ 3Y (OH) ₃ (ultrafine particle) + 15ROH
+ 9R′OH On the other hand, for example, when manufacturing a magnetic ultrafine particle film functional element of Fe ₅ Y _3−xy M _x N _y O ₁₂ , 5Fe (OR) ₃ + (3-x−y) Y (OR ′) ₃ + xM
(OR ″) ₃ + yN (OR ′ ″) ₃ + 24H ₂ O → [5Fe (OH) ₃ ] [(3-xy) Y (OH) ₃ ] [xM
(OH) ₃ ] [yN (OH) ₃ ] (ultrafine particles) +15 ROH + 3 (3-x-
y) R′OH + 3xR ″ OH + 3yR ′ ″ OH However, R ″ and R ′ ″ are alkyl groups, so that water is added to the mixed solution generated in the first treatment process to cause hydrolysis. The secondary particles of mixed ultrafine particles of hydroxide in an amorphous state are produced.

In the second processing step, rather than simply adding water to carry out the hydrolysis, the mixed solution produced in the first processing step is heated to a boiling state and vigorously stirred while water vapor is injected. It was confirmed by the present inventor that mixed ultrafine particles having primary particles having a smaller particle size can be obtained by performing treatment so as to hydrolyze.

Subsequently, in the third treatment step, the hydrolyzate produced in the second treatment step is extracted by centrifugation or the like to obtain secondary particles of mixed ultrafine particles produced in the second treatment step. Extract.

Then, in the fourth treatment step, the secondary particles of the mixed ultrafine particles extracted in the third treatment step are mixed with the organic solvent /
A colloidal solution is produced by pouring the mixture into a mixed solution of a surfactant and pulverizing it into primary particles using a ball mill, a sand mill or the like. The surfactant molecules are attached to the surfaces of the primary particles thus produced, whereby they are stably dispersed in the organic solvent. At this time, it is preferable that the surfactant molecules are completely adhered to the surface of the primary particles by using a known method of Carafala.

Then, in the fifth treatment step, the colloidal solution produced in the fourth treatment step is applied to the substrate. This coating method can be applied by various methods such as coating with a brush or coating with a spinner.

Subsequently, in the sixth treatment step, the substrate coated with the colloidal solution in the fifth treatment step is calcined,
A magnetic ultrafine particle film functional device of YIG / YIG compound exhibiting ferromagnetism is manufactured. That is, when manufacturing a magnetic ultrafine particle film functional element of YIG, YIG exhibiting ferromagnetism is obtained by calcining 5Fe (OH) ₃ 3Y (OH) ₃ on the substrate coated in the fifth treatment step. When the ultrafine particle film is formed on the substrate while the magnetic ultrafine particle film functional element of, for example, Fe ₅ Y _3-xy M _x N _y O ₁₂ is manufactured, the ultrafine particle film is formed on the substrate applied in the fifth treatment step. [5Fe (OH) ₃ ] [(3
-X-y) Y (OH) ₃ ] [xM (OH) ₃ ] [yN (OH) ₃ ]
By calcining, the YIG compound ultrafine particle film exhibiting ferromagnetism is formed on the substrate.

Ordinary bulk iron oxide and yttrium oxide are stoichiometrically in a molar ratio of 5: 3 for iron and yttrium.
Even if it mixes so that it becomes powdered in a mortar and calcined 1000
YIG is not generated unless the temperature is C or higher. However, when the colloidal solution applied on the substrate is calcined in the fifth treatment step, the particle size of the particles to be calcined is very small, so calcining at a lower temperature is also sufficient. Is supposed to be. In fact, according to a study conducted by the present inventors, it has been found that a YIG ultrafine particle film exhibiting ferromagnetism is formed even by calcination at a temperature between 690 ° C and 800 ° C.

[0018]

The transparent or opaque substrate 1 as shown in FIG. 1 is manufactured by the method for manufacturing a magnetic ultrafine particle film functional device according to the present invention.
00, a magnetic ultrafine particle film 200 composed of a film of YIG or a YIG compound is formed.

As described above, according to the present invention, a magnetic thin film functional element or a magnetic thick film functional device can be obtained by a simple method without using an expensive device and without limiting the kind of the substrate 100. It is possible to realize a magnetic ultrafine particle film functional device that operates as a device.

[0020]

EXAMPLES The present invention will be described in detail below with reference to examples. As described above, in the present invention, 5Fe (OH) ₃ 3 in an amorphous state is obtained by hydrolyzing the mixed solution of the iron alkoxide solution and the yttrium alkoxide solution.
A colloidal solution containing Y (OH) ₃ (hereinafter sometimes referred to as amorphous hydroxide) as colloidal particles is produced,
By coating it on a substrate and calcining it, a magnetic ultrafine particle film functional element which becomes a new magnetic thin film functional element / magnetic thick film functional element is realized.

Next, according to an embodiment using an iron ethoxide solution Fe (OEt) ₃ as an iron alkoxide solution and a yttrium butoxide solution Y (OBu) ₃ as an yttrium alkoxide solution, a method for producing a magnetic ultrafine particle film functional device according to the present invention Will be described in detail in the order of their manufacturing processes (-). Here, Et represents “CH ₃ CH ₂ —”, and B
u is - represents _{"CH 3 CH 2 CH 2 CH} 2".

[Production of Iron Ethoxide Solution Fe (OEt) ₃ ] FeCl ₃ is dissolved in ethanol and reacted with metallic sodium to produce Fe (OEt) ₃ . Figure 3
FIG. 1 illustrates the apparatus configuration of the reaction vessel used for the Fe (OEt) ₃ production process. The chemical formula is as follows.

FeCl ₃ + 3EtOH → Fe (OEt) ₃ + 3HCl 3HCl + 3Na → NaCl + (3/2) H ₂ This Fe (OEt) ₃ production process is carried out by first measuring FeCl ₃ by 18.99 gr. Place in a sterilized tube and vacuum dry. The temperature is about 40 degrees C. On the other hand, a reaction vessel consisting of the four-necked flask 1 as shown in FIG. 3 is assembled, and the inside of the reaction vessel is dried by warming it with the mantle heater 5 while flowing 500 cc / min of nitrogen gas.

Next, dried FeCl ₃ was added to 16.8661 gr (0.
103983 mol) and weigh into a weighing bottle. Subsequently, 400 cc of dehydrated ethanol is placed in a 500 cc graduated cylinder, the dehydrated ethanol and weighed FeCl ₃ are mixed with a 300 cc beaker, then placed in a reaction vessel, and the solution is heated by a mantle heater 5 while being stirred by a propeller 4. Then, while refluxing when the temperature rises to 76 ° C. and reaches a boiling state, metallic sodium is gradually charged into the reaction vessel through the hole into which the thermometer 6 was inserted. here,
To make Fe (OEt) ₃ by reacting 16.8661 gr of FeCl ₃ with dehydrated ethanol, 7.17173 gr (0.31195mo)
It suffices to add l) metallic sodium, but in practice it is better to add a little more, so for example 7.6964 gr metallic sodium is added.

Thereafter, this state is continued for about 1 hour, and after 1 hour, heating is stopped and stirring is continued until the solution returns to room temperature. Then, when the temperature reaches room temperature, the solution is taken out, put into a centrifuge tube with a lid, and centrifuged at a rotation speed of 9000 rpm for 10 minutes to take out a supernatant. This is an ethanol solution of Fe (OEt) ₃ . This Fe (OEt) ₃ concentration will be calculated by the chelate titration method.

[Yttrium butoxide solution Y (OB
Production of u) ₃ ] Y (OBu) ₃ can be produced by the same procedure as the production treatment of Fe (OEt) ₃ from YCl ₃ . However, Fe
The (OEt) ₃ ethanol solution is an unstable compound that spontaneously decomposes within a week after being prepared, whereas the Y (OBu) ₃ xylene solution is stable even after one month. Since it remains a compound, the inventor
A xylene solution of (OBu) ₃ was used. This Y (OB
u) The ₃ concentration will be calculated by the gravimetric method.

[Yttrium butoxide solution Y (OB
u) Measurement of Molar Concentration of ₃ ] In this molar concentration measuring process, first, four alumina crucibles (No. 1, 2, 3, 4) are washed and baked in a furnace at 600 ° C. for 3 hours. Next, add 5cc quantitative pipettes to each crucible for 5cc
By injecting a solution of Y (OBu) ₃ in xylene, followed by putting dehydrated xylene into each crucible with each pipette,
Put all the Y (OBu) ₃ solution on the inner wall of the pipette into the crucible. After that, 15 cc of water was poured into each crucible to hydrolyze, and the crucible containing this sample was dried in a dryer for drying the sample. After drying, the crucible was placed in an oven at 800 ° C and calcined for 3 hours. Then, the average weight of the sample is measured. In this way, the concentration of the xylene solution of Y (OBu) ₃ is measured by oxidizing the sample into the form of Y ₂ O ₃ and measuring the weight.

[Hydrolysis] 5Fe (OH) ₃ 3Y is obtained by mixing and hydrolyzing Fe (OEt) ₃ produced in the production process of Y and O (OBu) ₃ obtained in the production process of Secondary particles of mixed ultrafine particles of (OH) ₃ are produced. FIG. 4 illustrates a device configuration of a reaction container used for this mixing / hydrolysis treatment. The chemical formula is as follows.

5Fe (OEt) ₃ + 3Y (OBu) ₃ + 24H ₂ O → 5Fe (OH) ₃ 3Y (OH) ₃ (ultrafine particles) + 15EtO
H + 9BuOH This mixing / hydrolysis treatment is, first of all,
The molar ratio of Fe and Y should be 5: 3 so that Fe (OE
t) ₃ and Y (OBu) ₃ are mixed. For example, Fe (OE
t) ₃ solution has a concentration of 0.306 mol / lit and Y (OBu) ₃ solution has a concentration of 0.4386 mol / lit, the molar ratio of Fe to Y should be 5: 3 so that 340 cc of Fe (OEt) _{3 is obtained.} And 142.4c
It is mixed with the Y (OBu) ₃ solution of c.

Next, this mixed solution is placed in a reaction vessel composed of a four-necked flask 1 as shown in FIG. 4, and is heated by a mantle heater 5 while flowing nitrogen gas and refluxed at a boiling point. Then, in this state, the doglegged glass tube 1
The water for hydrolysis stored in 2 is heated with hot air from the heat gun 11 to generate water vapor, which is then blown into the mixed solution to perform hydrolysis. By this hydrolysis, 5Fe (OH) ₃ 3 in an amorphous state
Secondary particles of Y (OH) ₃ (amorphous hydroxide) will be generated.

Here, in the hydrolysis in which water is simply added,
The particle size of the primary particles of amorphous hydroxide that will be produced becomes large, whereas hydrolysis by adding water vapor will result in a fairly small particle size of around 300 Å, as will be described later. confirmed. From this, it becomes possible to manufacture a magnetic ultrafine particle film functional element having an ultrafine particle film having a smaller particle size by hydrolysis using water vapor.

[5 Fe (OH) ₃ 3Y (OH) ₃ Separation of Secondary Particles] 5 contained in the hydrolyzate produced in the production process
Secondary particles of Fe (OH) ₃ 3Y (OH) ₃ are separated. In this separation process, the produced hydrolyzate is rotated at a rotation speed of 9000 rpm.
Perform by centrifuging for 10 minutes. The reason why the ultrafine particles precipitate by this degree of centrifugation is that they are actually produced as secondary particles.

5Fe (OH) ₃ 3Y (OH) ₃ produced in the manufacturing process of [pulverization into primary particles]
The secondary particles of are pulverized into primary particles. This crushing process
First of all, the surface treatment is performed by dissolving the secondary particles of the amorphous hydroxide ultrafine particles generated in the manufacturing process in a NaOH aqueous solution having a pH of 11 and mixing them well (so that the oleic acid molecule to be used in the subsequent step is Can be easily attached)
Then, inject 5 gr of this surface-treated powder into 100 cc of kerosene solvent, add 0.7 cc of oleic acid as a surfactant, and put it in a high-speed ball mill or sand mill to crush it. To do.

By this treatment, the secondary particles of the amorphous hydroxide are crushed to become the original primary particles. On the other hand, the particle size of amorphous hydroxide ultrafine particles is widely distributed, and particles of 1000 Å or more are also mixed, but since this treatment causes precipitation of large particles,
This colloidal solution is a solution containing only ultrafine amorphous hydroxide particles having a particle size of 300 Å or less.

[Dispersion in Kerosene] The amorphous hydroxide ultrafine particles produced in the manufacturing process of [1] are dispersed in kerosene which is a solvent for magnetic fluid. In this dispersion treatment, as shown in FIG. 5, first, the mixed liquid produced in the manufacturing process is put in an Erlenmeyer flask 13 and vigorously stirred by a homogenizer 14 while being heated by a heat bath 16 to be in this stirring and heating state. At a certain time, 2 cc of 28% ammonia water is appropriately diluted with water and injected. This causes oleic acid in the mixture to react with ammonia and dissolve in the form of ammonium oleate.
When heated to the above temperature, ammonium oleate is decomposed and ammonia gas is released, so that the released oleic acid molecules are adsorbed on the surface of the amorphous hydroxide ultrafine particles.

After that, when left standing, it is divided into a lower water layer and a layer in which amorphous hydroxide ultrafine particles are dispersed in the upper kerosene, so the lower water layer should be taken with a pipette.
Extract only the kerosene layer by decantation and divide the two layers. Then, the solvent kerosene is evaporated and concentrated by an evaporator to produce a colloidal solution of kerosene solvent / amorphous hydroxide ultrafine particles.

[Coating on Substrate] The colloidal solution produced in the manufacturing process of [3] is coated on the surface of a quartz glass plate serving as a substrate using a brush or the like. Next, this sample is heated on a hot plate to evaporate the solvent kerosene and the surfactant. Then the temperature of this sample
By heating in a furnace of about 300 ° C., components not evaporated by heating with a hot plate are evaporated / decomposed and removed from the sample.

Subsequently, the sample was taken out of the furnace, the colloidal solution produced in the manufacturing process was applied again, this was heated on a hot plate, and then heated in a furnace at about 300 ° C. By doing so, a thin film of amorphous hydroxide ultrafine particles having a desired film thickness is formed on the quartz glass substrate.

Here, the substrate is not limited to a transparent substrate such as a quartz glass plate, but an opaque substrate may be used. As a method of applying the amorphous hydroxide ultrafine particles onto the substrate, as shown in FIG. 6A, the substrate is placed on the rotating body 17, and the rotating body 17
It is also possible to adopt a method in which a uniform film of amorphous hydroxide ultrafine particles is formed on the substrate by dropping a colloidal solution of amorphous hydroxide ultrafine particles from above while rotating. Further, as shown in FIG. 6B, a cylinder 19 is arranged on the substrate by using an adhesive 18 that loses its adhesive force at high temperature, and a colloidal solution of amorphous hydroxide ultrafine particles is flown into the cylinder 19. It is also possible to adopt a method of forming a relatively thick film of amorphous hydroxide ultrafine particles on the substrate by removing the cylinder 19 by heating it after incorporating, drying, and then heating.

By calcining the substrate on which the amorphous hydroxide ultrafine particle film is formed at a high temperature in the manufacturing process of [calcination], the hydroxide particles in the amorphous state are YIG (Fe ₅
Y ₃ O ₁₂ ) converted to particles. This calcination process is 690 degrees C
Run at a temperature between 1 and 800 degrees Celsius.

In this way, the magnetic ultrafine particle film functional device according to the present invention is manufactured by carrying out the manufacturing process (1) or (2). Ordinary bulk iron oxide and yttrium oxide should be mixed at a stoichiometric molar ratio of iron and yttrium of 5: 3, powdered in a mortar and calcined at 1000 ° C or higher. YIG is not generated. However, since the 5Fe (OH) ₃ 3Y (OH) ₃ colloidal particles produced on the substrate by the above manufacturing method have a considerably small particle size, calcination at a lower temperature is sufficient. Is supposed to be.

The present inventor determined this calcination temperature by utilizing the differential thermal analysis method. In this differential thermal analysis method, the test sample and the standard sample are heated in the same atmosphere, and by measuring the temperature difference between the two samples, it is possible to determine whether the test sample is exothermic / endothermic at any temperature. This is an analysis method in which the physical properties of the inspection sample are inspected by inspecting whether or not it is. The present inventor conducted this differential thermal analysis method using 5Fe (OH) ₃ 3Y (OH) ₃ produced in the manufacturing process as an inspection sample and using alumina powder as a standard sample.

FIG. 7 shows this analysis result data.
In the figure, the horizontal axis represents the heating temperature in absolute temperature, and the vertical axis represents the thermoelectromotive force difference value of the thermocouple (copper constantan) indicating the temperature difference between the two samples. Here, the upward convex peak means the exothermic phenomenon of the test sample, and the downward convex peak means the endothermic phenomenon of the test sample. From this analysis result data, 5Fe (OH) ₃ 3Y (OH) ₃ produced in the manufacturing process of
It indicates that heat is generated in the temperature range of 0 ° C to 800 ° C. This is a 5Fe (O
H) ₃ 3Y (OH) ₃ is YI which exhibits ferromagnetism in this temperature range.
This means that the particles are converted into G particles.

From this, the inventor decided to carry out the calcination process performed in the manufacturing process at a temperature between 690 ° C. and 800 ° C. That is, Y which exhibits ferromagnetism even at a calcination temperature as low as 200 to 300 degrees C compared to bulk Y
Conversion to IG can be realized. Note that it is also possible to perform calcination at a higher temperature than this.

Further, the present inventor conducted an X-ray analysis in order to investigate the average particle size of the YIG particles obtained by this baking treatment. FIG. 8 illustrates this analysis result data. In the figure,
The horizontal axis represents the diffraction angle, and the vertical axis represents the diffraction X-ray intensity. This X-ray analysis was carried out at a calcining temperature of 800 ° C. using YIG particles obtained by calcining for 0.1 hour as a sample. The peak at 32.22 degrees (0.2824rad) indicated by this analysis result data is Y
It corresponds to the index of the IG crystal (4,2,0), and the half-width value of the peak at this time was 0.25 degree (4.36 × 10 ^-3 rad).

Between the average crystal grain size D in the X-ray analysis, the peak angle θ, and the peak half width value β (rad),

[0047]

[Equation 1]

There is a relationship of Where K is a constant and is 0.
9 represents the wavelength of X-rays, and λ represents 1.542 Å. In this [Equation 1], the value of the angle θ of the peak is 32.2.
Substituting 2 degrees, as the value of the peak half width value β
Substituting 4.36 × 10 ^-3 rad, the average particle size of YIG particles D
A value of 330 Å was obtained. As described above, the YIG particles of the magnetic ultrafine particle film functional element to be manufactured according to the present invention are ultrafine particles having a particle size of about 330 Å. When the primary particles of amorphous hydroxide before calcination were analyzed by an electron micrograph, the presence of primary particles of amorphous hydroxide of about 90 Å could be confirmed.

Next, the fields of application of the magnetic ultrafine particle film functional device thus manufactured will be described. The magnetic ultrafine particle film functional device manufactured by the present invention can be used in the same fields as conventional magneto-optical devices.

For example, there is an application as an optical isolator by utilizing a large Faraday effect and good transmittance. FIG. 9 illustrates a configuration example when used as this optical isolator. Reference numeral 20 in the figure is a magnetic ultrafine particle film functional element of the present invention having a transparent substrate. The magnetic ultrafine particle film functional element 20 is transmitted light linearly polarized by a polarizer 22 according to a magnetic field applied by a magnet 21. The plane of polarization of
The optical disc 23 is rotated by 45 ° and irradiated, and the plane of polarization of the reflected light from the optical disc 23 is further rotated by 45 °. Thereby, an optical isolator capable of blocking the light returning to the laser light source 24 with the polarizer 22 can be realized.

Although a transmission type optical isolator is shown in FIG. 9, the magnetic ultrafine particle film functional element of the present invention can be applied to a reflection type optical isolator. At this time, a magnetic ultrafine particle film functional element having an opaque substrate is used. FIG. 10 illustrates this reflection type optical isolator. The symbols in the figure are the same as those in FIG. In the case of this reflection type optical isolator, it is 22.5 ° when it first passes through the YIG thin film, 22.5 ° when it is reflected by the substrate and passes through the YIG thin film, and returns from the optical disc 23 to the YIG.
22.5 ° when passing through a thin film
Since the light blocking is realized by rotating the polarization plane of 90 ° in total, which is 22.5 ° when passing through the thin film, the rotation angle of the polarization plane in the YIG thin film is 22.5 °.

As described above, the substrate used in the magnetic ultrafine particle film functional device of the present invention may be transparent or opaque, but the calcination temperature is about 700 ° C. Therefore, the material must be able to withstand this.

Although the illustrated embodiment has been described, the present invention is not limited to this. For example, in the example,
Although the present invention has been disclosed by uniformly forming the magnetic ultrafine particle film on the substrate, the present invention is not limited to this, and the magnetic ultrafine particle film having various patterns may be formed. . Further, in the examples, the present invention is disclosed by forming a magnetic ultrafine particle film pulverized into primary particles on a substrate, but the present invention is not limited to this, and the magnetic particles in the state of secondary particles are not limited thereto. The fine particle film may be formed on the substrate.

[0054]

As described above, according to the present invention,
Using the alkoxide method, 5Fe (OH) ₃ 3Y (OH) ₃
Ultrafine particles and [5Fe (OH) ₃ ] [(3-xy) Y
Ultra fine particles of (OH) ₃ ] [xM (OH) ₃ ] [yN (OH) ₃ ] are generated, stably dispersed in an organic solvent, and the colloidal solution is applied to the substrate, and then the substrate is temporarily removed. By baking,
By forming a film of crystalline YIG ultrafine particles (crystalline YIG compound ultrafine particles) exhibiting ferromagnetism on a substrate, a magnetic ultrafine particle film functional element that operates as a magnetic thin film functional element or a magnetic thick film functional element is realized. .

From this, a magnetic thin film functional element or a magnetic thick film functional element can be provided by a simple method without using an expensive device and without being restricted by the substrate.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a magnetic ultrafine particle film functional device of the present invention.

FIG. 2 is an explanatory diagram of secondary particles.

FIG. 3 is a device configuration diagram of a reaction container.

FIG. 4 is a device configuration diagram of a reaction container.

FIG. 5 is a device configuration diagram of a reaction container.

FIG. 6 is an explanatory diagram of a coating method on a substrate.

FIG. 7 is an explanatory diagram of experimental data.

FIG. 8 is an explanatory diagram of experimental data.

FIG. 9 is an application example of the magnetic ultrafine particle film functional device of the present invention.

FIG. 10 is an application example of the magnetic ultrafine particle film functional device of the present invention.

[Explanation of symbols]

 100 substrate 200 magnetic ultrafine particle film

Claims (5)

[Claims] 1. A magnetic ultrafine particle film functional device comprising an ultrafine particle film exhibiting ferromagnetism formed on a transparent or opaque substrate. 2. A YIG (F) is formed on a transparent or opaque substrate.
e ₅ Y ₃ O ₁₂ ) ultrafine particle film or YIG with Bi
A magnetic ultrafine particle film functional device characterized in that an ultrafine particle film of a YIG compound is formed by adding one or more of Gd, In, and a rare earth element. 3. A method for producing a magnetic ultrafine particle film functional element for producing the magnetic ultrafine particle film functional element according to claim 2, wherein the magnetic ultrafine particle film functional element of YIG is produced,
When the iron alkoxide and the yttrium alkoxide are stoichiometrically mixed, while the magnetic ultrafine particle film functional device of the YIG compound is manufactured, the iron alkoxide, the yttrium alkoxide and the additive alkoxide are stoichiometrically mixed. When the magnetic ultrafine particle film functional device of YIG is manufactured by hydrolyzing the first treatment step of performing the above and the mixed solution generated in the first treatment step, iron hydroxide and yttrium hydroxide are used. In the case of producing a magnetic ultrafine particle film functional element of a YIG compound, on the other hand, in the case of manufacturing a magnetic ultrafine particle film functional element of YIG compound, 2 of mixed ultrafine particles of iron hydroxide, yttrium hydroxide and additive hydroxide are used. A second processing step for generating secondary particles, a third processing step for extracting secondary particles generated in the second processing step, and an interface between the secondary particles extracted in the third processing step and a solvent. The colloidal solution in which the primary particles of the mixed ultrafine particles are dispersed in the solvent by pulverizing while being dispersed in a mixed solution with a sexual agent is formed in the fourth processing step and the fourth processing step. Of the magnetic ultrafine particle film functional device, comprising: a fifth treatment step of applying the colloidal solution to the substrate, and a sixth treatment step of calcining the substrate treated in the fifth treatment step. Production method. 4. The method for producing a magnetic ultrafine particle film functional element according to claim 3, wherein in the second treatment step, the mixed solution is heated and steam is added to carry out hydrolysis. , A method of manufacturing a magnetic ultrafine particle film functional element characterized by the above. 5. The method for manufacturing a magnetic ultrafine particle film functional element according to claim 3 or 4, wherein calcination is performed at a temperature between 690 ° C and 800 ° C in the sixth treatment step. A method of manufacturing a magnetic ultrafine particle film functional device, which is characterized by performing a treatment.