JPH06254756A - Method and device for texturing magnetic disc board - Google Patents

Abstract

PURPOSE:To apply uniform texturing processing on the whole surface of a board by regulating press force in a state that a pressure member is inclined and regulated radially of the board when a wrapping tape is pressed against the surface of a magnetic disc board under rotation by means of a pressure member. CONSTITUTION:A magnetic disc board W is grasped by an unfolding type chuck 6 and rotated around an axis togetherwith the chuck 6. With this state, tape transfer mechanisms 7 and 8 are actuated to rewind a wrapping tape T wound around a solid winding reel 13 and a cleaning tape and wind it around a winding reel 12. Through operation of a pair of pressure members 36, the two surfaces of the board W are nipped between the tapes to apply finish polishing on the surfaces of the base sheet and form fine grooves in the surfaces. In this case, by regulation inclination of an inclining member 35 around a fulcrum axis 34, the pressure member 36 is inclined and regulated radially of the board W, and this constitution causes regulation of the press force, generated radially internally and externally of the board W, of the wrapping tape T.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of texturing a magnetic disk substrate such as a hard disk used in a storage device of a computer, and an apparatus therefor.

The texturing method is used to improve the magnetic head flying characteristics by smoothing the surface of a magnetic disk substrate made of aluminum or the like and forming fine grooves on the surface of the disk substrate. It is a processing method.

[0003]

2. Description of the Related Art Conventionally, as this type of texturing device, a lapping tape sent at a low speed is pressed against a rotating magnetic disk substrate as disclosed in, for example, Japanese Patent Application Laid-Open No. 62-236664. It is known that the surface of the disk substrate is rubbed to polish the surface and form fine grooves on the surface.

[0004]

However, in the case of the above-mentioned conventional structure, when the lapping tape is pressed against the rotating magnetic disk substrate, the surface velocities of the surface are inevitably on the inner side and the outer side in the radial direction of the magnetic disk substrate. Therefore, the relative friction speed between the lapping tape and the surface of the magnetic disk substrate is different, and it is difficult to finish the magnetic disk substrate surface uniformly over the entire surface due to the difference in the relative speed. It has the inconvenience of being there.

[0005]

SUMMARY OF THE INVENTION The present invention is intended to solve such inconvenience, and a method of texturing a magnetic disk substrate is such that the surface of a rotating magnetic disk substrate is When the wrapping tape transported in the tangential direction is pressed by the pressure member, the pressure member is tilted and adjusted in the radial direction of the magnetic disk substrate so that the wrapping tape is pressed inside and outside the magnetic disk substrate in the radial direction. It is characterized by adjusting power.

Further, the magnetic disk substrate texturing device includes a rotating mechanism capable of holding and rotating the magnetic disk substrate, and a tape transfer mechanism for transferring a wrapping tape in a tangential direction of the surface of the rotating magnetic disk substrate. A pressure member for pressing the wrapping tape against the surface of the magnetic disk substrate, and a tilt adjusting mechanism capable of adjusting the tilt of the pressure member in the radial direction of the magnetic disk substrate. It is a thing.

[0007]

When the lapping tape transferred in the tangential direction to the surface of the rotating magnetic disk substrate is pressed by the pressure member, the pressure member is tilted and adjusted in the radial direction of the magnetic disk substrate. The pressing force of the wrapping tape on the inner side and the outer side in the radial direction of the magnetic disk substrate is adjusted.

[0008]

1 to 7 show an embodiment of the present invention, in which 1 is a rotating mechanism, in which case a mounting cylinder 3 is mounted on a machine base 2 and a negative pressure suction hole 4 is mounted on the mounting cylinder 3. Positioning cylinder 5
Is provided so as to move back and forth, and the expansion type chuck 6 is attached to the positioning cylinder body 5.
And a motor (not shown) for rotating the expansion chuck 6 around the axis M as a center.

However, one magnetic disk substrate W is supplied to the front facing position of the positioning cylinder 5 by a supply member (not shown), and the positioning cylinder 5 moves forward to move the magnetic disk substrate W.
The magnetic disk substrate W is attracted to the front surface of the positioning cylindrical body 5 by the attraction action of the negative pressure attraction hole 4 in the state of abutting against.
In this adsorption state, the expansion chuck 6 advances and is inserted into the center hole W ₁ of the magnetic disk substrate W, and the expansion chuck 6 expands outward while being positioned by this insertion. By this expanding operation, the magnetic disk substrate W is held by the expanding chuck 6, and thereafter, the positioning cylinder 4 is retracted as shown in FIG. 6, and the expanding chuck 6 is held with the magnetic disk substrate W held. After the processing, the expanding chuck 6 is contracted to release the magnetic disk substrate W, and after the releasing, the expanding chuck 6 is retracted.

Reference numeral 7 is a tape transfer mechanism. In this case,
As shown in FIG. 3, in addition to the tape transfer mechanism 7 for transferring the wrapping tape T in the tangential direction of the surface of the rotating magnetic disk substrate W, the cleaning tape D is transferred in the tangential direction of the surface of the rotating magnetic disk substrate W. The tape transfer mechanism 8 is provided, and the tape transfer mechanism 7 and the tape transfer mechanism 8 are provided.
It has the same structure except that it is symmetrical with
In the radial direction of the magnetic disk substrate W, two shaking bases 10 that can be shaken by a guide unit 9 by a shaking mechanism (not shown).
11 is provided, the tape transfer mechanism 7 is provided on the shaking table 10, and the tape transfer mechanism 7 is provided on the shaking table 11.

In this case, the tape transfer mechanism 7 arranges the two take-up reels 12 and the two actual reels 13 on the shaking table 10 at the position where the magnetic disk substrate W is the boundary, and the shaking table 10 is provided. At the position where the magnetic disk substrate W is the boundary,
The movable bases 15 and 15 are arranged so that they can move toward and away from each other, and a bracket 17 is attached to one of the movable bases 15 by penetrating through an elongated hole 16 formed in the vibrating base 10. 18 is attached, a push rod 19 is attached to the rod of the opening / closing cylinder 18, a small diameter rod portion 20 is formed on the push rod 19, and the shaking base 10 is attached to the other moving base 15.
The bracket 21 is attached to the bracket 21 by penetrating through the elongated hole 16 formed in the bracket 21, and the small diameter rod portion 18 is loosely inserted into the bracket 21, and a cushion is provided between the nut 22 screwed to the small diameter rod portion 18 and the bracket 21. Each moving table 1 with a spring 23 for
The shaking table 10 is provided with stoppers 24, 24 for determining the opening operation limit of 5.15.

Further, an adjusting plate 26 is provided on each of the moving bases 15 and 15 so as to be movable in the radial direction of the magnetic disk substrate W by an adjusting bolt 25, and the advancing / retreating adjusting member 28 is provided on the adjusting plate 26 about a vertical axis 27. Attach a swivel adjustment plate 30 that is horizontally swivel adjustable by means of
A mounting member 33 is attached to the swivel adjusting plate 30 so that the magnetic disk W can be moved back and forth by a guide portion 31 in an approaching / retracting direction by a forward / backward adjusting member 32, and the fulcrum shaft 3 is attached to the mounting member 33.
4, a tilting member 35 is pivotally attached to a fulcrum shaft 34 so as to be horizontally tiltable, and in this case, a roller-like pressure member 36 is horizontally installed and guide rollers 37 and 38 are horizontally installed. The pressurizing member 36 is provided by a tilt adjusting mechanism 39 so that the tilt can be adjusted in the radial direction of the magnetic disk substrate W, and the wrapping tape T wound on the actual reel 13 is pulled out to provide rollers 40 and 41 provided on the shaking table 10. Via the guide roller 37, the pressure member 36, and the guide roller 38 via the feed roller 42, the guide roller 43, and the take-up reel 12 to wind the wrapping tape T in the tangential direction of the magnetic disk substrate W. It is configured to be transferred to.

In this tilt adjusting mechanism 39, two cylinder cylinders 44, 44 are attached to the swivel adjusting plate 30, plungers 45, 45 are internally provided in the cylinder cylinders 44, 44, and the respective plungers 45, 45 are provided. Is provided so as to be able to abut on the opposing position of the tilting member 35 with the fulcrum shaft 34 as a boundary, and is connected to an air pressure source through a pressure adjusting valve (not shown) in each cylinder tubular body 44, 44, and this pressure adjustment is performed. The supply air pressure can be changed by the valve,
Adjusting the protrusion amount of each plunger 45, the tilting member 3
4 and the pressing member 36 are provided so as to be tiltable in the radial direction of the magnetic disk substrate W, and by this adjustment, the radial inner side P ₂ of the magnetic disk substrate W and the outer pressing force P ₁ of the magnetic disk substrate W can be varied. Is configured.

The tape transfer mechanism 8 is, as described above,
Since it has a structure symmetrical with the tape transport mechanism,
Since the structure can be understood by changing 0 into the shaking table 11 and changing the wrapping tape T with the cleaning tape D, the explanation is omitted. Therefore, the cleaning tape T removes the falling abrasive grains and the like of the lapping tape T present on both surfaces of the magnetic disk substrate W.

Since this embodiment has the above-mentioned structure, the magnetic disk substrate W is supplied to the expanding chuck 6, starts rotating, and the tape transfer mechanism 7 and the tape transfer mechanism 8 are actuated to the actual reel 13. The wrapped wrapping tape T and cleaning tape D bypass the guide roller 37, the pressing member 36, and the guide roller 38 via the rollers 40 and 41, pass through the pair of feed rollers 42 and the guide roller 43, and then the take-up reel 12 Wrapped on the wrapping tape T
The cleaning tape D and the cleaning tape D are transported in the tangential direction of the magnetic disk substrate W at a low speed in the S direction. In this state, the opening / closing cylinder 18 operates and the movable bases 15 and 1 on both sides are moved.
5 move closer to each other, and both surfaces of the magnetic disk substrate W are sandwiched by the lapping tape T, and both surfaces of the other side of the magnetic disk substrate W are sandwiched by the cleaning tape D as shown in the figure. Further, in this case, the vibrating bases 10 and 11 vibrate in the O direction which is the radial direction of the magnetic disk substrate W, so that the wrapping tape T is pressed against both surfaces of the magnetic disk substrate W. , Rotation of the magnetic disk substrate W in the R direction, transfer of the lapping tape T in the S direction, which is the tangential direction of the magnetic disk substrate W, and shaking motion of the lapping tape T in the O direction, which is the radial direction of the magnetic disk substrate W. Of the magnetic disk substrate W is rubbed by the wrapping tape T, and the wrapping tape While polished the surface by rubbing the surface of the disc substrate W Gutepu T can form fine grooves on the surface thereof.

At this time, the tilt adjusting mechanism 39 can adjust the tilt of the tilting member 35 about the fulcrum shaft 34, whereby the pressing member 36 can be tilted in the radial direction of the magnetic disk substrate W. By this, it is possible to variably adjust the pressing force P ₁ on the radially inner side P ₂ and the outer side of the magnetic disk substrate W of the wrapping tape T. By variably adjusting the radially inner P ₂ and outer pressing force P ₁ of the magnetic disk substrate W according to the difference in friction relative speed, the surface of the magnetic disk substrate W is uniformly textured. It can be performed.

In this case, since the tape transfer mechanism operates in conjunction with the operation of the tape transfer mechanism 7, the magnetic disk substrate W with the cleaning tape D pressed against both surfaces of the magnetic disk substrate W. A combined action of rotation in the R direction, transfer of the cleaning tape in the S direction, which is the tangential direction of the magnetic disk substrate W, and shaking motion of the cleaning tape D in the O direction, which is the radial direction of the magnetic disk substrate W, is added. With this combined operation, both surfaces of the magnetic disk substrate W are rubbed by the cleaning tape D, and by rubbing the surface of the disk substrate with the cleaning tape D, the falling abrasive grains and the like existing on the surface can be quickly removed. Therefore, it is possible to prevent the occurrence of scratches.

The present invention is not limited to the above-described embodiment. For example, in the above-described embodiment, the dusting action by the cleaning tape is performed at the same time as the texturing process by the wrapping tape, but it may be performed separately. In addition, wet processing can be performed by supplying a liquid during the processing with the wrapping tape T, and of course, a dry method can be used if the liquid is not supplied.

As the lapping tape, the material, grain size, etc. of the tape substrate and the abrasive grains are appropriately selected like a polishing film, a cloth tape and the like, and similarly, the cleaning tape is also an appropriate one such as a fiber tape.

In some cases, the rotation of the magnetic disk substrate W may be opposite to the rotation direction in the figure.

[0021]

As described above, the method and apparatus for magnetic-texturing a magnetic disk substrate of the present invention tilts the pressing member for pressing the wrapping tape against the surface of the magnetic disk substrate by the tilt adjusting mechanism in the radial direction of the magnetic disk substrate. It is possible to adjust the tilting force to variably adjust the pressing force of the lapping tape between the inner side and the outer side of the magnetic disk substrate in the radial direction, and thus the friction of the surface that is inevitably generated between the inner side and the outer side of the magnetic disk substrate in the radial direction. By variably adjusting the pressing force on the inner and outer sides of the magnetic disk substrate in the radial direction in accordance with the difference in relative speed, it is possible to perform uniform texture processing over the entire surface of the magnetic disk substrate.

As described above, the intended purpose can be sufficiently achieved.

[Brief description of drawings]

FIG. 1 is a side view of a wrapping tape side according to an embodiment of the present invention.

2 is an overall plan view of the embodiment of the present invention shown in FIG.

FIG. 3 is a partial front view of the embodiment of the present invention shown in FIG.

FIG. 4 is a partially enlarged side sectional view of the embodiment of the present invention shown in FIG.

5 is a partially enlarged side view of the embodiment of the present invention shown in FIG.

6 is a partially enlarged plan view of the embodiment of the present invention shown in FIG.

FIG. 7 is an explanatory perspective view of the embodiment of the present invention shown in FIG.

[Explanation of symbols]

 W magnetic disk substrate T lapping tape 1 rotation mechanism 7 tape transfer mechanism 36 pressure member 39 tilt adjustment mechanism

Claims (2)

[Claims] 1. When the lapping tape transferred in the tangential direction of the surface of the rotating magnetic disk substrate is pressed by the pressing member, the pressing member is tilted and adjusted in the radial direction of the magnetic disk substrate. By so doing, the pressing force of the lapping tape on the inner side and the outer side in the radial direction of the magnetic disk substrate is adjusted, and the method of texturing a magnetic disk substrate. 2. A rotating mechanism capable of holding and rotating a magnetic disk substrate, a tape transfer mechanism for transferring a wrapping tape in a tangential direction to the surface of the rotating magnetic disk substrate, and the wrapping tape on the surface of the magnetic disk substrate. A magnetic disk substrate texturing device, comprising: a pressing member for pressing; and a tilt adjusting mechanism capable of tilting the pressing member in a radial direction of the magnetic disk substrate.