JPH06250090A - Objective lens for microscope - Google Patents

Objective lens for microscope

Info

Publication number
JPH06250090A
JPH06250090A JP5033802A JP3380293A JPH06250090A JP H06250090 A JPH06250090 A JP H06250090A JP 5033802 A JP5033802 A JP 5033802A JP 3380293 A JP3380293 A JP 3380293A JP H06250090 A JPH06250090 A JP H06250090A
Authority
JP
Japan
Prior art keywords
lens group
lens
transparent object
group
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5033802A
Other languages
Japanese (ja)
Other versions
JP3254786B2 (en
Inventor
Noboru Amamiya
昇 雨宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP03380293A priority Critical patent/JP3254786B2/en
Publication of JPH06250090A publication Critical patent/JPH06250090A/en
Application granted granted Critical
Publication of JP3254786B2 publication Critical patent/JP3254786B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements

Abstract

PURPOSE:To provide an objective lens for microscope capable of stably maintaining the excellent image forming performance even to the great change of the optical path length of a transparent object arranged on the surface of the object while having the long working distance. CONSTITUTION:This lens is an objective lens for microscope comprizing the first lens group G1 having a positive refractive power and the second lens group G2 having a negative refractive power, moving the second lens group G2 along the direction of optical axis in accordance with the change of the optical path length of a transparent object arranged between the first lens group G1 and the surface of the object, the condition for the range of the optimal focal lengths of respective lens groups, the condition for the optimal moving amount of the second lens group, etc., are selected.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上に利用分野】本発明は、物体側に配置されるカ
バーガラス（平行平面板）等の透明物体の厚さの変化に
対しても良好な結像性能を維持し得る対物レンズに関す
るものであり、特に、液晶基板等の検査に対して好適な
対物レンズに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an objective lens capable of maintaining good image forming performance even when the thickness of a transparent object such as a cover glass (parallel plane plate) arranged on the object side is changed. In particular, the present invention relates to an objective lens suitable for inspecting a liquid crystal substrate or the like.

【０００２】[0002]

【従来の技術】最近の液晶基板の分野での技術発展には
めざましいものがあり、この液晶基板を正確に検査する
ことが重要になってきている。この液晶基板は、液晶素
子上に平行平面板等の透明物体が貼り付けられており、
この基板の検査は、顕微鏡を用いて平行平面板よりも内
部の液晶素子の欠陥を観察していた。2. Description of the Related Art Recent technological developments in the field of liquid crystal substrates are remarkable, and it has become important to accurately inspect these liquid crystal substrates. In this liquid crystal substrate, a transparent object such as a plane-parallel plate is attached on a liquid crystal element,
In the inspection of this substrate, a defect of the liquid crystal element inside the parallel flat plate was observed using a microscope.

【０００３】ところが、顕微鏡を単に用いて液晶基板を
観察すると、平行平面板により球面収差が発生するた
め、液晶素子の見えが悪化し、正確な検査を行うことか
困難となる。このため、特開昭61-275812 号公報に開示
されている如く、試料上に載置されるカバーガラス等の
平行平面板の厚みの変化に伴う観察像の悪化を補正す
る、所謂、補正環付対物レンズを用いることにより、液
晶素子の正確な検査を行うことを可能とすることができ
る。However, when the liquid crystal substrate is observed simply by using a microscope, spherical aberration occurs due to the plane-parallel plate, which deteriorates the appearance of the liquid crystal element and makes it difficult to perform an accurate inspection. Therefore, as disclosed in Japanese Patent Laid-Open No. 61-275812, a so-called correction ring that corrects the deterioration of the observed image due to the change in the thickness of the plane-parallel plate such as the cover glass placed on the sample. By using the attached objective lens, it is possible to perform accurate inspection of the liquid crystal element.

【０００４】[0004]

【発明が解決しようとする課題】しかしながら、例え
ば、上記特開昭61-275812 号公報にて開示されている補
正環付対物レンズで液晶基板等の観察を行おうとする
と、作動距離（試料面と対物レンズとの間の距離）が極
端に短く、一般に、０．６mm〜１．２mm程度のカバーガ
ラス厚を持つ液晶基板の検査には十分に対応できない。However, for example, when observing a liquid crystal substrate or the like with the objective lens with a correction ring disclosed in the above-mentioned Japanese Patent Laid-Open No. 61-275812, the working distance (the sample surface and The distance from the objective lens) is extremely short, and in general, it cannot sufficiently support inspection of a liquid crystal substrate having a cover glass thickness of about 0.6 mm to 1.2 mm.

【０００５】しかも、液晶基板の検査では、０．６mm〜
１．２mm程度のカバーガラス厚に伴う観察像の悪化を補
正することが不可欠であるが、上記特開昭61-275812 号
公報では、０．１１mm〜０．２３mm程度のカバーガラス
厚しか対応できず不十分である。そこで、本発明は、上
記の課題に鑑みてなされたものであり、長い作動距離を
有しつつ、物体面上に配置されさる透明物体の光学的光
路長の大きな変化、即ちその透明物体の厚さ或いは屈折
率の大きな変化に対しても、安定して優れた結像性能を
維持し得る顕微鏡対物レンズを提供することを目的とし
ている。Moreover, in the inspection of the liquid crystal substrate,
It is indispensable to correct the deterioration of the observed image due to the cover glass thickness of about 1.2 mm, but in the above-mentioned JP-A-61-275812, only the cover glass thickness of about 0.11 mm to 0.23 mm can be handled. Not enough. Therefore, the present invention has been made in view of the above problems, while having a long working distance, a large change in the optical optical path length of the transparent object arranged on the object plane, that is, the thickness of the transparent object. In other words, it is an object of the present invention to provide a microscope objective lens that can stably maintain excellent imaging performance even when the refractive index changes greatly.

【０００６】[0006]

【課題を解決するための手段】本発明は上記の目的を達
成するために、例えば図１に示す如く、物体側から順
に、正の屈折力を持つ第１レンズ群Ｇ1 と負の屈折力を
持つ第２レンズ群Ｇ2 とを有し、前記第１レンズ群Ｇ1
と物体面との間に配置される透明物体の光学的光路長の
変化に応じて前記第２レンズ群Ｇ2 が光軸方向に沿って
移動可能に構成され、全系の焦点距離をｆとし、前記第
１レンズ群Ｇ1 の焦点距離をｆ1 、前記第２レンズ群Ｇ
2 の焦点距離をｆ2 、前記第１レンズ群Ｇ1 の最も物体
側の面の曲率半径をｒ1 、前記透明物体の光学的光路長
を０．１だけ変化させた時の前記第２レンズ群Ｇ2 の移
動量をΔｄとするとき、以下の諸条件を満足する構成と
したものである。 （１） １＜ｆ1 ／ｆ＜５ （２） −１０＜ｆ2 ／ｆ＜−１ （３） −１＜ｆ／ｒ1 ≦０ （４） ０．０６＜Δｄ／ｆ＜３ そして、上記の構成に基づいて、前記第２レンズ群Ｇ2
は、最も像側に配置されかつ像側に凹面を向けたレンズ
を少なくとも持つ前群ＧF と、最も物体側に配置されか
つ最も物体側に凹面を向けたレンズを少なくとも持つ後
群ＧR とを有し、前記前群ＧF と前記後群ＧR との間の
軸上での空気間隔Ｄとするとき、以下の条件を満足する
ことがより好ましい。 （５） ０．２＜Ｄ／ｆ＜０．７In order to achieve the above object, the present invention provides a first lens group G 1 having a positive refractive power and a negative refractive power in order from the object side as shown in FIG. and a second lens group G 2 having a first lens group G 1
And the object surface, the second lens group G 2 is configured to be movable along the optical axis according to the change in the optical optical path length of the transparent object, and the focal length of the entire system is f. , The focal length of the first lens group G 1 is f 1 , the second lens group G 1
The focal length of 2 to f 2, wherein r 1 and the radius of curvature of the most object side surface of the first lens group G 1, the second lens when the optical path length of the transparent object is changed by 0.1 When the moving amount of the group G 2 is Δd, the following conditions are satisfied. (1) 1 <f 1 / f <5 (2) −10 <f 2 / f <−1 (3) −1 <f / r 1 ≦ 0 (4) 0.06 <Δd / f <3 Then, Based on the above configuration, the second lens group G 2
Is a front group G F having at least a lens disposed closest to the image side and having a concave surface facing the image side, and a rear group G R having at least a lens disposed closest to the object side and having a concave surface facing the most object side. And has an axial air distance D between the front group G F and the rear group G R , it is more preferable to satisfy the following conditions. (5) 0.2 <D / f <0.7

【０００７】[0007]

【作 用】本発明の顕微鏡対物レンズは、物体面からの
光束を第１レンズ群Ｇ1 の収斂作用により負の球面収差
を発生させ、第２レンズ群Ｇ2 の発散作用により正の球
面収差を発生させて、全体として球面収差をバランス良
く補正している。そして、透明物体の厚さが増加した場
合並びに透明物体の屈折率が高くなった場合には、透明
物体にて正の球面収差が発生し、一方、透明物体の厚さ
が減少した場合並びに透明物体の屈折率が低くなった場
合には、透明物体にて負の球面収差が発生する。[Operation] In the microscope objective lens of the present invention, the light flux from the object surface is caused to have a negative spherical aberration by the converging action of the first lens group G 1 , and the positive spherical aberration is caused by the diverging action of the second lens group G 2. And spherical aberration is corrected in good balance as a whole. Then, when the thickness of the transparent object is increased and when the refractive index of the transparent object is increased, positive spherical aberration occurs in the transparent object, while when the thickness of the transparent object is decreased and when the transparent object is transparent. When the refractive index of the object becomes low, negative spherical aberration occurs in the transparent object.

【０００８】このため、透明物体の厚さが増加した場合
並びに透明物体の屈折率が高くなった場合には、第１レ
ンズ群Ｇ1 と第２レンズ群Ｇ2 との空気間隔が拡大する
ように第２レンズ群Ｇ2 を像側へ移動させて、第２レン
ズ群Ｇ2 に入射する光束の入射高を低くし、第２レンズ
群Ｇ2 にて発生する正の球面収差量を低下させている。
これにより、透明物体の光学的光路長の変化に応じて発
生する正の球面収差を良好に補正している。Therefore, when the thickness of the transparent object is increased and when the refractive index of the transparent object is increased, the air gap between the first lens group G 1 and the second lens group G 2 is enlarged. in the second lens group G 2 is moved toward the image side, to lower the incidence height of the light beam incident on the second lens group G 2, to reduce the positive spherical aberration generated in the second lens group G 2 ing.
As a result, positive spherical aberration generated according to the change in the optical optical path length of the transparent object is well corrected.

【０００９】また、透明物体の厚さが減少した場合並び
に透明物体の屈折率が低くなった場合には、第１レンズ
群Ｇ1 と第２レンズ群Ｇ2 との空気間隔が縮小するよう
に第２レンズ群Ｇ2 を物体側へ移動させて、第２レンズ
群Ｇ2 に入射する光束の入射高を高くし、第２レンズ群
Ｇ2 にて発生する正の球面収差量を増加させている。こ
れにより、透明物体の光学的光路長の変化に応じて発生
する負の球面収差を良好に補正している。Also, when the thickness of the transparent object is reduced and when the refractive index of the transparent object is decreased, the air gap between the first lens group G 1 and the second lens group G 2 is reduced. the second lens group G 2 is moved toward the object side, to increase the incidence height of the light beam incident on the second lens group G 2, increases the positive spherical aberration generated in the second lens group G 2 There is. As a result, the negative spherical aberration that occurs according to the change in the optical optical path length of the transparent object is well corrected.

【００１０】以上の基本構成に基づいて、さらに、上記
（１）〜（４）の条件を満足することが必要である。条
件（１）は、全系の焦点距離に対する第１レンズ群Ｇ1
の最適な焦点距離の範囲を規定するものである。条件
（１）の下限を越えると、第１レンズ群Ｇ1 の屈折力が
強くなって第１レンズ群Ｇ1 にて発生する負の球面収差
が大きくなり、第２レンズ群Ｇ2 にて発生する正の球面
収差とバランス良く相殺させることが困難となる。逆に
条件（１）の上限を越えると、第１レンズ群Ｇ1 による
収斂作用が弱くなり、第２レンズ群Ｇ2 を所定量だけ移
動させた時の入射高の変化が小さくなる。また、第１レ
ンズ群Ｇ1 の屈折力が弱くなることに伴い第２レンズ群
Ｇ2 の屈折力も弱くなるため、この第２レンズ群Ｇ2 自
体における正の球面収差量が小さくなる。この結果、第
１レンズ群Ｇ1 による収斂作用が弱くなる事と第２レン
ズ群Ｇ2 自体における正の球面収差量が小さくなる事と
の相乗作用により、透明物体の光学的光路長を所定量だ
け変化させるための第２レンズ群Ｇ2 の移動量が甚大と
なるため好ましくない。Based on the above basic structure, it is necessary to further satisfy the above conditions (1) to (4). The condition (1) is that the first lens group G 1 with respect to the focal length of the entire system.
Is to define the optimum range of the focal length. When the value goes below the lower limit of the condition (1), the refractive power of the first lens group G 1 becomes strong, and the negative spherical aberration generated in the first lens group G 1 becomes large, and the negative spherical aberration occurs in the second lens group G 2 . It becomes difficult to cancel the positive spherical aberration due to a good balance. On the other hand, when the value exceeds the upper limit of the condition (1), the converging action of the first lens group G 1 becomes weak, and the change in the incident height when the second lens group G 2 is moved by a predetermined amount becomes small. Further, as the refractive power of the first lens group G 1 becomes weaker, the refractive power of the second lens group G 2 also becomes weaker, so that the amount of positive spherical aberration in the second lens group G 2 itself becomes smaller. As a result, the converging action of the first lens group G 1 is weakened and the positive spherical aberration amount of the second lens group G 2 itself is reduced, so that the optical path length of the transparent object is reduced by a predetermined amount. It is not preferable because the moving amount of the second lens group G 2 for changing only the amount becomes extremely large.

【００１１】条件（２）は、全系の焦点距離に対する第
２レンズ群Ｇ2 の最適な焦点距離の範囲を規定するもの
である。条件（２）の下限を越えると、第２レンズ群Ｇ
2 の屈折力が弱くなって、透明物体の光学的光路長を所
定量だけ変化させるための第２レンズ群Ｇ2 の移動量が
大きくなる。また、第１レンズ群Ｇ1 と第２レンズ群Ｇ
2 とで基本的に望遠タイプとしているため、第２レンズ
群Ｇ2 の屈折力が弱くなり過ぎると、第１レンズ群Ｇ1
の前方に対物レンズ全体の主点を位置させることが困難
となる。このため、大きな作動距離を確保することが原
理的に困難となる。反対に条件（２）の上限を越える
と、第２レンズ群Ｇ2 の屈折力が強くなって透明物体の
光学的光路長を変化させるための第２レンズ群Ｇ2 の移
動量を小さくすることができるものの、第１レンズ群Ｇ
1 にて発生する負の球面収差を第２レンズ群Ｇ2 にて発
生する正の球面収差でバランス良く補正することが困難
となる。なお、十分なる収差補正を果たすには、条件
（２）の下限値を−４とし、条件（２）の上限値を−２
とすることがより望ましい。The condition (2) defines the optimum range of the focal length of the second lens group G 2 with respect to the focal length of the entire system. If the lower limit of condition (2) is exceeded, the second lens group G
The refracting power of 2 becomes weak, and the moving amount of the second lens group G 2 for changing the optical optical path length of the transparent object by a predetermined amount becomes large. In addition, the first lens group G 1 and the second lens group G
Since 2 is basically a telephoto type, if the refractive power of the second lens group G 2 becomes too weak, the first lens group G 1
It becomes difficult to position the principal point of the entire objective lens in front of the. Therefore, it is theoretically difficult to secure a large working distance. On the contrary, when the upper limit of the condition (2) is exceeded, the refracting power of the second lens group G 2 becomes strong and the moving amount of the second lens group G 2 for changing the optical optical path length of the transparent object is reduced. Although the first lens group G
It becomes difficult to correct the negative spherical aberration generated in 1 by the positive spherical aberration generated in the second lens group G 2 in a well-balanced manner. In order to achieve sufficient aberration correction, the lower limit of condition (2) should be -4, and the upper limit of condition (2) should be -2.
Is more desirable.

【００１２】条件（３）は、第１レンズ群Ｇ1 の最も物
体側のレンズ面の最適な曲率半径の範囲を規定するもの
である。条件（３）の下限を越えると、第１レンズ群Ｇ
1 の最も物体側のレンズ面の曲率が強くなり過ぎ、この
レンズ面にて発生する正の球面収差が大きくなる。この
ため、第１レンズ群Ｇ1 を構成するレンズでの負の球面
収差を過剰に発生させて第１レンズ群Ｇ1 全体としては
負の球面収差を発生させなければならない。この結果、
第１レンズ群Ｇ1 でのレンズ構成を複雑化及び大型化を
招くため好ましくない。逆に条件（３）の上限を越える
と、第１レンズ群Ｇ1 の最も物体側のレンズ面は物体側
に凸面を向ける事となり、正弦条件から外れるためコマ
収差が大きく発生するため好ましくない。The condition (3) defines the optimum range of the radius of curvature of the lens surface of the first lens group G 1 which is closest to the object side. When the lower limit of the condition (3) is exceeded, the first lens group G
The curvature of the lens surface closest to the object in 1 becomes too strong, and the positive spherical aberration generated at this lens surface becomes large. For this reason, it is necessary to excessively generate negative spherical aberration in the lenses forming the first lens group G 1 and to generate negative spherical aberration in the first lens group G 1 as a whole. As a result,
This is not preferable because it complicates and enlarges the lens configuration of the first lens group G 1 . On the other hand, when the value exceeds the upper limit of the condition (3), the lens surface of the first lens group G 1 that is closest to the object side has a convex surface directed toward the object side, which is out of the sine condition, resulting in large coma aberration, which is not preferable.

【００１３】条件（４）は、透明物体の光学的光路長を
所定量だけ変化させた時の第２レンズ群Ｇ2 の最適な移
動量に関するものである。但し、透明物体の光学的光路
長のの変化量ΔＬとは、変化前の透明物体の厚さをｔ
（但し、変化前に物体面上にて透明物体が無い場合には
ｔ＝０）、変化前の透明物体の屈折率をｎO （但し、変
化前に物体面上にて透明物体が無い場合にはｎO ＝
０）、透明物体の厚さの変化量をΔｔ、透明物体の屈折
率の変化量をΔｎO とするとき、次式にて定義されるも
のである。The condition (4) relates to the optimum amount of movement of the second lens group G 2 when the optical optical path length of the transparent object is changed by a predetermined amount. However, the variation amount ΔL of the optical optical path length of the transparent object is the thickness of the transparent object before the change t.
(However, t = 0 when there is no transparent object on the object surface before the change), the refractive index of the transparent object before the change is n O (However, when there is no transparent object on the object surface before the change) N o =
0), the change amount of the thickness of the transparent object is Δt, and the change amount of the refractive index of the transparent object is Δn O , it is defined by the following equation.

【００１４】 ΔＬ＝Δｔ（ｎO −１）＋ｔ・ΔｎO ＋Δｔ・ΔｎO 但し、透明物体の厚さが変化して増加する場合にはΔｔ
の符号は正とし、逆に透明物体の厚さが変化して減少す
る場合にはΔｔの符号は負とする。また、透明物体の屈
折率が変化して増加する場合にはΔｎO の符号は正と
し、逆に透明物体の屈折率が変化して減少する場合には
ΔｎO の符号は負とする。ΔL = Δt (n O −1) + t · Δn O + Δt · Δn O However, when the thickness of the transparent object changes and increases, Δt
The sign of is positive, and conversely, if the thickness of the transparent object changes and decreases, the sign of Δt is negative. The sign of Δn O is positive when the refractive index of the transparent object changes and increases, and the sign of Δn O is negative when the refractive index of the transparent object changes and decreases.

【００１５】条件（４）の下限を越えると、透明物体の
光学的光路長を０．１だけ変化させた時の第２レンズ群
Ｇ2 の移動量が小さくなるものの、第１及び第２レンズ
群の屈折力が強くなる過ぎるため、球面収差に関する第
１及び第２レンズ群での収差バランスが大きく崩れる。
条件（４）の上限を越えると、透明物体の光学的光路長
を０．１だけ変化させた時の第２レンズ群Ｇ2 の移動量
が大きくなり、顕微鏡対物レンズの大型化並びに透明物
体の光学的光路長を変化させる際の操作性が大幅に劣
る。なお、顕微鏡対物レンズを十分にコンパクトにしな
がら良好なる操作性を確保するには、条件（４）の上限
値を１．３とすることがより好ましい。If the lower limit of the condition (4) is exceeded, the amount of movement of the second lens group G 2 when the optical optical path length of the transparent object is changed by 0.1 becomes small, but the first and second lenses Since the refracting power of the group becomes too strong, the aberration balance of the first and second lens groups with respect to spherical aberration is largely lost.
When the upper limit of the condition (4) is exceeded, the moving amount of the second lens group G 2 becomes large when the optical optical path length of the transparent object is changed by 0.1, which makes the microscope objective lens large and the transparent object The operability when changing the optical path length is significantly inferior. In order to ensure good operability while making the microscope objective lens compact enough, it is more preferable to set the upper limit of condition (4) to 1.3.

【００１６】また、第２レンズ群Ｇ2 は、最も像側に配
置されかつ像側に凹面を向けたレンズを少なくとも持つ
前群ＧF と、最も物体側に配置されかつ最も物体側に凹
面を向けたレンズを少なくとも持つ後群ＧR とを有する
構成とし、前群ＧF と後群Ｇ R との間の軸上での空気間
隔Ｄとするとき、さらに以下の条件を満足することがよ
り望ましい。 （５） ０．２＜Ｄ／ｆ＜０．７ 条件（５）は第２レンズ群Ｇ2 を構成する前群ＧF と後
群ＧR との間での最適な軸上空気間隔を規定するもので
ある。The second lens group G2Is placed on the most image side
Has a lens that is placed and has a concave surface facing the image side
Front group GFIs located on the most object side and is concave on the most object side.
Rear group G with at least a lens facing the surfaceRHave
Structure, front group GFAnd rear group G RBetween air on the axis between
When the distance D is set, the following conditions must be satisfied.
More desirable. (5) 0.2 <D / f <0.7 Condition (5) is the second lens group G2Front group G that composesFAnd after
Group GRIt defines the optimum on-axis air space between
is there.

【００１７】条件（５）の下限を越えると、前群ＧF 中
の最も像側に配置されたレンズの像側の凹面と、後群Ｇ
R 中の最も物体側に配置されたレンズの物体側の凹面と
の双方の凹面の曲率が強くすることなしでは、第２レン
ズ群Ｇ2 での球面収差の補正ができない。従って、第２
レンズ群Ｇ2 での球面収差を良好に補正しようとする
と、双方の凹面が機械的に干渉するため本発明が目的と
する顕微鏡対物レンズの実現が困難となる。条件（５）
の上限を越えると、前群ＧF 中の最も像側に配置された
レンズの像側の凹面と、後群ＧR 中の最も物体側に配置
されたレンズの物体側の凹面との双方の凹面の曲率を弱
くすることなしでは、第２レンズ群Ｇ2 での球面収差の
補正ができない。このため、双方の凹面の曲率が弱くな
るに伴って顕微鏡対物レンズ全体としてのベッツバール
和が大きく正となり、像面湾曲の補正が困難となる。さ
らには、顕微鏡対物レンズの全長が大きくなるため好ま
しくない。When the lower limit of the condition (5) is exceeded, the image-side concave surface of the lens disposed closest to the image side in the front group G F and the rear group G F.
The spherical aberration in the second lens group G 2 cannot be corrected without increasing the curvatures of both the concave surface on the object side and the concave surface of the lens arranged closest to the object side in R. Therefore, the second
In order to satisfactorily correct the spherical aberration in the lens group G 2 , it becomes difficult to realize the microscope objective lens intended by the present invention because both concave surfaces mechanically interfere with each other. Condition (5)
If the upper limit of is exceeded, both of the image-side concave surface of the lens disposed closest to the image side in the front group G F and the object-side concave surface of the lens disposed closest to the object side in the rear group G R Without weakening the curvature of the concave surface, the spherical aberration cannot be corrected in the second lens group G 2 . Therefore, as the curvature of both concave surfaces becomes weaker, the Betzval sum of the microscope objective lens as a whole becomes large and positive, and it becomes difficult to correct the field curvature. Furthermore, the overall length of the microscope objective lens becomes large, which is not preferable.

【００１８】[0018]

【実施例】以下、本発明による各実施例について説明す
る。図１〜図３は本発明による第１〜第３実施例をそれ
ぞれ示しており、各実施例の顕微鏡対物レンズとも物体
Ｏからの光束を集光して平行光束に変換するものであ
る。各実施例の顕微鏡対物レンズは、物体側から順に、
正の屈折力を持つ第１レンズ群Ｇ1 と負の屈折力を持つ
第２レンズ群Ｇ2 とから成り、第１レンズ群Ｇ1 と物体
面との間に配置される透明物体Ｐの光学的光路長の変化
に応じて第２レンズ群Ｇ2 が光軸方向に沿って移動可能
に構成されている。EXAMPLES Each example according to the present invention will be described below. 1 to 3 show first to third embodiments of the present invention, respectively, and the microscope objective lenses of the respective embodiments condense the light flux from the object O and convert it into parallel light flux. The microscope objective lens of each example, in order from the object side,
The optics of the transparent object P, which includes the first lens group G 1 having a positive refractive power and the second lens group G 2 having a negative refractive power, and is arranged between the first lens group G 1 and the object plane. The second lens group G 2 is configured to be movable along the optical axis according to the change in the optical path length.

【００１９】まず、図１に示す第１実施例では、第１レ
ンズ群Ｇ1 は、物体側に平面を向けた平凸レンズＬ
1 と、物体側に凸面を向けたメニスカス形状の負レンズ
とこれに接合された両凸形状の正レンズとから成る接合
負レンズＬ2 と、物体側により強い曲率の面を向けた正
レンズＬ3 との４枚のレンズで構成される。そして、第
２レンズ群Ｇ2 は、負の屈折力を持つ前群ＧF と同じく
負の屈折力を持つ後群ＧRとからなり、前群ＧF は、物
体側に凸面を向けた正レンズとこれに接合されて像側に
凹面を向けた負レンズとから成り全体として物体側に凸
面を向けたメニスカス形状の接合負レンズＬ4 で構成さ
れ、後群ＧR は、物体側に凹面を向けた負レンズとこれ
に接合されて像側に凸面を向けた正レンズとから成り全
体として像側に凸面を向けたメニスカス形状の接合負レ
ンズＬ5 で構成されている。First, in the first embodiment shown in FIG. 1, the first lens group G 1 includes a plano-convex lens L having a plane surface facing the object side.
1 , a cemented negative lens L 2 including a meniscus negative lens having a convex surface facing the object side and a biconvex positive lens cemented to this, and a positive lens L having a surface having a stronger curvature facing the object side. It is composed of 3 lenses and 4 lenses. The second lens group G 2 includes a front lens group G F having a negative refractive power and a rear lens group G R having a negative refractive power, and the front lens group G F has a positive surface with a convex surface facing the object side. The rear lens group G R has a concave surface on the object side, and is composed of a meniscus-shaped cemented negative lens L 4 having a lens and a negative lens cemented to this surface with a concave surface facing the image side. And a positive lens having a convex surface directed toward the image side, which is cemented to the negative lens, and is a meniscus-shaped cemented negative lens L 5 having a convex surface directed toward the image side as a whole.

【００２０】なお、第１実施例では、接合レンズＬ2 が
負の屈折力を有し、後群ＧR を構成する接合レンズＬ5
が負の屈折力を有しているが、これらのレンズの内の少
なくとも１つを正の屈折力を有するように構成しても良
い。また、図２及び図３に示す第２，第３実施例では、
第１レンズ群Ｇ1 は、像側に凸面を向けたメニスカス形
状の正レンズＬ1 と、両凸形状の正レンズこれに接合さ
れて像側に凸面を向けたメニスカス形状の負レンズとか
ら成る接合正レンズＬ2 と、両凸形状の正レンズＬ3 と
の４枚のレンズで構成される。そして、第２レンズ群Ｇ
2 は、正の屈折力を持つ前群ＧF と負の屈折力を持つ後
群ＧR とからなり、前群ＧF は、物体側に凸面を向けた
メニスカス形状の負レンズとこれに接合された正レンズ
とから成る接合正レンズＬ4 と、両凸形状の正レンズと
これに接合されて像側に凹面を向けた負レンズとから成
り全体として物体側に凸面を向けたメニスカス形状の接
合負レンズＬ5 とで構成されている。また、後群Ｇ
R は、物体側に凹面を向けたメニスカス形状の正レンズ
とこれに接合された両凹形状の負レンズとから成り全体
として像側に凸面を向けたメニスカス形状の接合負レン
ズＬ6 で構成されている。In the first embodiment, the cemented lens L 2 has a negative refracting power, and the cemented lens L 5 which constitutes the rear group G R.
Has a negative refractive power, but at least one of these lenses may be configured to have a positive refractive power. Further, in the second and third embodiments shown in FIGS. 2 and 3,
The first lens group G 1 includes a meniscus-shaped positive lens L 1 having a convex surface facing the image side, and a biconvex positive lens, and a meniscus-shaped negative lens cemented to the positive lens L 1 and having a convex surface facing the image side. It is composed of four lenses, a cemented positive lens L 2 and a biconvex positive lens L 3 . Then, the second lens group G
2 is composed of a front lens group G F having a positive refractive power and a rear lens group G R having a negative refractive power. The front lens group G F is a meniscus negative lens having a convex surface facing the object side and is cemented to this. A cemented positive lens L 4 composed of a positive lens that is made up of: a biconvex positive lens; and a negative lens that is cemented to this positive lens and has a concave surface facing the image side. It is composed of a cemented negative lens L 5 . Also, the rear group G
R is composed of a meniscus positive lens having a concave surface facing the object side and a biconcave negative lens cemented to the positive lens, and is composed of a meniscus negative cemented lens L 6 having a convex surface facing the image side as a whole. ing.

【００２１】次に、上記各実施例の諸元を掲げる。但
し、各諸元表中において、ｆは全系の焦点距離、ＦNOは
Ｆナンバー、ＮＡは開口数であり、左端の数字は物体側
からの順序を表し、ｒは各レンズ面の曲率半径、ｄは各
レンズの中心厚及び空気間隔、ｎは各レンズのｄ（λ＝
587.6nm)に対する屈折率、νは各レンズのアッベ数を表
している。また、各実施例とも、液晶素子上に形成され
ている透明物体Ｐの材質としては光学ガラスのクラウン
ガラス（ショット社の光学ガラス表では屈折率が1.531
でアッベ数が62.15 のＢＫ６）を用いた液晶基板用の検
査用として設計されたものであり、透明物体Ｐの基準厚
を0.9 としている。そして、ｄ0 は実質的な作動距離に
対応する透明物体Ｐの対物レンズ側の面から対物レンズ
の最も透明物体側のレンズ面の頂点までの距離を示して
いる。Next, the specifications of each of the above embodiments will be listed. However, in each specification table, f is the focal length of the entire system, F NO is the F number, NA is the numerical aperture, the numbers at the left end represent the order from the object side, and r is the radius of curvature of each lens surface. , D is the center thickness of each lens and the air gap, and n is d (λ =
(587.6 nm), ν represents the Abbe number of each lens. In each of the examples, the material of the transparent object P formed on the liquid crystal element is a crown glass of optical glass (the refractive index is 1.531 in the optical glass table of Schott Co., Ltd.).
Is designed for inspection of a liquid crystal substrate using BK6) having an Abbe number of 62.15, and the reference thickness of the transparent object P is 0.9. Further, d 0 represents the distance from the surface of the transparent object P on the objective lens side corresponding to the substantial working distance to the vertex of the lens surface of the objective lens on the most transparent object side.

【００２２】なお、条件（４）に関する各実施例の対応
値は以下の式に基づいて求めたものを示している。 Δｄ／ｆ＝0.1(ａ−ｂ）／〔0.6 ×ｆ×（ｎP −１）〕 但し、 ａ：透明物体Ｐの厚さが0.6mm の時の第１レンズ群G1と
第２レンズ群G2との間の軸上で空気間隔、 ｂ：透明物体Ｐの厚さが1.2mm の時の第１レンズ群G1と
第２レンズ群G2との間の軸上で空気間隔、 ｆ：対物レンズの焦点距離、 ｎP ：透明物体Ｐの屈折率、 である。Incidentally, the corresponding values of the respective examples regarding the condition (4) are shown by the following formula. Δd / f = 0.1 (a−b) / [0.6 × f × (n P −1)] where a: the first lens group G 1 and the second lens group when the transparent object P has a thickness of 0.6 mm Air gap on the axis between G 2 and b: Air gap on the axis between the first lens group G 1 and the second lens group G 2 when the thickness of the transparent object P is 1.2 mm, f Is the focal length of the objective lens, n P is the refractive index of the transparent object P.

【００２３】[0023]

【第１実施例】 〔条件対応値〕 ｆ1 ／ｆ＝1.21，ｆ2 ／ｆ＝-2.53 ，ｆ／ｒ1 ＝0.0 Δｄ／ｆ＝0.085 ，Ｄ／ｆ＝0.28[First embodiment] [Conditions corresponding value] f 1 /f=1.21,f 2 /f=-2.53, f / r 1 = 0.0 Δd / f = 0.085, D / f = 0.28

【００２４】[0024]

【第２実施例】 〔条件対応値〕 ｆ1 ／ｆ＝2.86，ｆ2 ／ｆ＝-3.38 ，ｆ／ｒ1 ＝-0.22 Δｄ／ｆ＝0.51，Ｄ／ｆ＝0.55[Second embodiment] [Conditions corresponding value] f 1 /f=2.86,f 2 /f=-3.38, f / r 1 = -0.22 Δd / f = 0.51, D / f = 0.55

【００２５】[0025]

【第３実施例】 〔条件対応値〕 ｆ1 ／ｆ＝2.78，ｆ2 ／ｆ＝-3.68 ，ｆ／ｒ1 ＝-0.22 Δｄ／ｆ＝0.30，Ｄ／ｆ＝0.50 上記各実施例の収差図を図４〜図１２に示す。ここで、
図４，図７，図１０はそれぞれ順に第１〜第３実施例に
おける透明物体の厚さが基準値の０．９ｍｍの状態での
諸収差図を示しており、図５，図８，図１１はそれぞれ
順に第１〜第３実施例における透明物体の厚さが基準値
よりも小さい０．６ｍｍの状態での諸収差図を示してい
る。また、図６，図９，図１２はそれぞれ順に第１〜第
３実施例における透明物体の厚さが基準値よりも大きい
１．２ｍｍの状態での諸収差図を示している。これらの
各収差図には、基準波長としてのｄ線（λ＝587.6nm)に
ついての球面収差（Ｓ．Ａ．）、非点収差（ＡＳ
Ｔ．）、コマ収差（ＣＯＭＡ）及び歪曲収差（ＤＩ
Ｓ．）を示しており、球面収差図中には、併せて、ｃ線
（λ＝656.3nm)、Ｆ線（λ＝486.1nm)及びｇ線（λ＝43
5.8nm)についても示している。[Third embodiment] [Values Corresponding to Conditions] f 1 /f=2.78, f 2 /f=-3.68, f / r 1 = -0.22 Δd / f = 0.30, D / f = 0.50 FIG. 4 to FIG. 12 shows. here,
4, FIG. 7, and FIG. 10 are graphs showing various aberrations when the thickness of the transparent object in each of the first to third examples is 0.9 mm, which is the reference value, in order. Reference numeral 11 indicates various aberration diagrams in the state where the thickness of the transparent object in each of the first to third examples is 0.6 mm, which is smaller than the reference value. Further, FIG. 6, FIG. 9 and FIG. 12 respectively show aberration diagrams in the state where the thickness of the transparent object in the first to third examples is 1.2 mm, which is larger than the reference value. In each of these aberration diagrams, spherical aberration (SA) and astigmatism (AS) for the d line (λ = 587.6 nm) as the reference wavelength are shown.
T. ), Coma (COMA) and distortion (DI
S. ) Is shown, and in the spherical aberration diagram, c line (λ = 656.3 nm), F line (λ = 486.1 nm) and g line (λ = 43 nm) are also shown.
5.8 nm) is also shown.

【００２６】なお、各収差図は、第２レンズ群Ｇ2 の最
も像側のレンズから平行光線を入射させて光線追跡を行
った場合での収差を示している。各収差図から、いずれ
の実施例においても、９ｍｍ〜１１ｍｍ程度の大きな作
動距離を有しつつ、物体面と対物レンズとの間に配置さ
れる透明物体の厚さの大きな変化に対しても、常に安定
した優れた結像性能を有していることが明らかである。Each aberration diagram shows an aberration when ray tracing is performed by injecting parallel rays from the lens closest to the image in the second lens group G 2 . From each of the aberration diagrams, in any of the examples, even when a large working distance of about 9 mm to 11 mm is provided and a large change in the thickness of the transparent object arranged between the object plane and the objective lens, It is clear that it has stable and excellent imaging performance.

【００２７】また、本発明による各実施例の対物レンズ
は試料からの光束を集光して平行光束に変換する、所謂
無限遠系の対物レンズであり、例えば、この無限遠系対
物レンズを通過した光束を集光して試料の像を形成する
第２対物レンズを配置すれば、所望の倍率を得ることが
可能となる。この時の倍率は、無限遠系の対物レンズの
焦点距離をＦ1 とし、第２対物レンズ焦点距離をＦ2 と
するとき、Ｆ2 ／Ｆ1の関係が成立する。一例として、
実施例２の無限遠系の対物レンズの焦点距離が４．００
ｍｍであるので、例えば第２対物レンズ焦点距離が１８
０ｍｍであるものとすれば、対物レンズ全体としての倍
率は４５倍となる。The objective lens of each embodiment according to the present invention is a so-called infinite objective lens that collects the light beam from the sample and converts it into a parallel light beam. By disposing the second objective lens that collects the formed light flux to form an image of the sample, it becomes possible to obtain a desired magnification. The magnification at this time has a relationship of F 2 / F 1 when the focal length of the infinite objective lens is F 1 and the focal length of the second objective lens is F 2 . As an example,
The focal length of the infinity-type objective lens of Example 2 is 4.00.
mm, the second objective lens focal length is 18 mm, for example.
If it is 0 mm, the magnification of the whole objective lens is 45 times.

【００２８】[0028]

【発明の効果】以上の如く、本発明によれば、大きな作
動距離を確保できるため操作性に富み、しかも比較的簡
素な構成であるにもかかわらず、物体面と対物レンズと
の間に配置される透明物体の厚さの大きな変化、即ちそ
の透明物体の厚さ或いは屈折率の大きな変化に対して
も、常に安定した優れた結像性能を維持し得る高性能な
顕微鏡対物レンズが達成できる。しかも、本発明によれ
ば、例えば各実施例に示す如く、0.9mm ±0.3mm という
極めて広い範囲にわたって十分なる補正が実現できる。As described above, according to the present invention, since a large working distance can be secured, the operability is high and the structure is relatively simple, but it is arranged between the object plane and the objective lens. It is possible to achieve a high-performance microscope objective lens capable of always maintaining stable and excellent imaging performance even when the thickness of the transparent object is greatly changed, that is, the thickness or the refractive index of the transparent object is greatly changed. . Moreover, according to the present invention, sufficient correction can be realized over an extremely wide range of 0.9 mm ± 0.3 mm as shown in each of the embodiments.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明による第１実施例の対物レンズのレンズ
構成を示す図である。FIG. 1 is a diagram showing a lens configuration of an objective lens according to Example 1 of the present invention.

【図２】本発明による第２実施例の対物レンズのレンズ
構成を示す図である。FIG. 2 is a diagram showing a lens configuration of an objective lens according to Example 2 of the present invention.

【図３】本発明による第３実施例の対物レンズのレンズ
構成を示す図である。FIG. 3 is a diagram showing a lens configuration of an objective lens according to Example 3 of the present invention.

【図４】物体面と対物レンズとの間に配置される透明物
体の厚さが基準値の０．９ｍｍの状態の時の第１実施例
の諸収差図である。FIG. 4 is a diagram of various aberrations of the first example when the thickness of the transparent object arranged between the object plane and the objective lens is 0.9 mm which is the reference value.

【図５】物体面と対物レンズとの間に配置される透明物
体の厚さが基準値よりも小さい０．６ｍｍの状態の時の
第１実施例の諸収差図である。FIG. 5 is an aberration diagram of the first example when the thickness of the transparent object arranged between the object plane and the objective lens is 0.6 mm, which is smaller than the reference value.

【図６】物体面と対物レンズとの間に配置される透明物
体の厚さが基準値よりも大きい１．２ｍｍの状態の時の
第１実施例の諸収差図である。FIG. 6 is a diagram showing various aberrations of the first example when the thickness of the transparent object arranged between the object plane and the objective lens is 1.2 mm, which is larger than the reference value.

【図７】物体面と対物レンズとの間に配置される透明物
体の厚さが基準値の０．９ｍｍの状態の時の第２実施例
の諸収差図である。FIG. 7 is an aberration diagram of the second example when the thickness of the transparent object arranged between the object plane and the objective lens is 0.9 mm which is the reference value.

【図８】物体面と対物レンズとの間に配置される透明物
体の厚さが基準値よりも小さい０．６ｍｍの状態の時の
第２実施例の諸収差図である。FIG. 8 is an aberration diagram of the second example when the thickness of the transparent object arranged between the object plane and the objective lens is 0.6 mm, which is smaller than the reference value.

【図９】物体面と対物レンズとの間に配置される透明物
体の厚さが基準値よりも大きい１．２ｍｍの状態の時の
第２実施例の諸収差図である。FIG. 9 is an aberration diagram of the second example when the thickness of the transparent object arranged between the object plane and the objective lens is 1.2 mm, which is larger than the reference value.

【図１０】物体面と対物レンズとの間に配置される透明
物体の厚さが基準値の０．９ｍｍの状態の時の第３実施
例の諸収差図である。FIG. 10 is an aberration diagram of the third example when the thickness of the transparent object arranged between the object plane and the objective lens is 0.9 mm which is the reference value.

【図１１】物体面と対物レンズとの間に配置される透明
物体の厚さが基準値よりも小さい０．６ｍｍの状態の時
の第３実施例の諸収差図である。FIG. 11 is a diagram of various types of aberration in the third example when the thickness of the transparent object arranged between the object plane and the objective lens is 0.6 mm, which is smaller than the reference value.

【図１２】物体面と対物レンズとの間に配置される透明
物体の厚さが基準値よりも大きい１．２ｍｍの状態の時
の第３実施例の諸収差図である。FIG. 12 is an aberration diagram of the third example when the thickness of the transparent object arranged between the object plane and the objective lens is 1.2 mm, which is larger than the reference value.

【主要部分の符号の説明】[Explanation of symbols for main parts]

Ｇ1 ・・・・・ 第１レンズ群 Ｇ2 ・・・・・ 第２レンズ群 ＧF ・・・・・ 前群 ＧR ・・・・・ 後群G 1 · · · · · first lens group G 2 · · · · · second lens group G F · · · · · front group G R · · · · · rear group

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】物体側から順に、正の屈折力を持つ第１レ
ンズ群Ｇ1 と負の屈折力を持つ第２レンズ群Ｇ2 とを有
し、前記第１レンズ群Ｇ1 と物体面との間に配置される
透明物体の光学的光路長の変化に応じて前記第２レンズ
群Ｇ2 が光軸方向に沿って移動可能に構成され、 全系の焦点距離をｆとし、前記第１レンズ群Ｇ1 の焦点
距離をｆ1 、前記第２レンズ群Ｇ2 の焦点距離をｆ2 、
前記第１レンズ群Ｇ1 の最も物体側の面の曲率半径をｒ
1 、前記透明物体の光学的光路長を０．１だけ変化させ
た時の前記第２レンズ群Ｇ2 の移動量をΔｄとすると
き、以下の諸条件を満足することを特徴とする顕微鏡対
物レンズ。 （１） １＜ｆ1 ／ｆ＜５ （２） −１０＜ｆ2 ／ｆ＜−１ （３） −１＜ｆ／ｒ1 ≦０ （４） ０．０６＜Δｄ／ｆ＜３1. A first lens group G 1 having a positive refracting power and a second lens group G 2 having a negative refracting power, which are arranged in this order from the object side, and the first lens group G 1 and the object surface. The second lens group G 2 is configured to be movable along the optical axis according to the change of the optical optical path length of the transparent object arranged between the first and the second objects, and the focal length of the entire system is f, The focal length of the first lens group G 1 is f 1 , the focal length of the second lens group G 2 is f 2 ,
The radius of curvature of the most object-side surface of the first lens group G 1 is r
1. When the amount of movement of the second lens group G 2 when the optical optical path length of the transparent object is changed by 0.1 is Δd, the following objective conditions are satisfied: lens. (1) 1 <f 1 / f <5 (2) −10 <f 2 / f <−1 (3) −1 <f / r 1 ≦ 0 (4) 0.06 <Δd / f <3 【請求項２】前記第２レンズ群Ｇ2 は、最も像側に配置
されかつ像側に凹面を向けたレンズを少なくとも持つ前
群ＧF と、最も物体側に配置されかつ最も物体側に凹面
を向けたレンズを少なくとも持つ後群ＧR とを有し、 前記前群ＧF と前記後群ＧR との間の軸上での空気間隔
Ｄとするとき、以下の条件を満足することを特徴とする
請求項１記載の顕微鏡対物レンズ。 （５） ０．２＜Ｄ／ｆ＜０．７2. The second lens group G 2 includes a front lens group G F having at least a lens disposed closest to the image side and having a concave surface facing the image side, and a second lens group G 2 disposed closest to the object side and having a concave surface closest to the object side. A rear lens group G R having at least a lens directed to the front lens group, and an on-axis air space D between the front lens group G F and the rear lens group G R , the following condition is satisfied: The microscope objective lens according to claim 1, which is characterized in that. (5) 0.2 <D / f <0.7
JP03380293A 1993-02-24 1993-02-24 Microscope objective lens Expired - Lifetime JP3254786B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03380293A JP3254786B2 (en) 1993-02-24 1993-02-24 Microscope objective lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03380293A JP3254786B2 (en) 1993-02-24 1993-02-24 Microscope objective lens

Publications (2)

Publication Number Publication Date
JPH06250090A true JPH06250090A (en) 1994-09-09
JP3254786B2 JP3254786B2 (en) 2002-02-12

Family

ID=12396613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03380293A Expired - Lifetime JP3254786B2 (en) 1993-02-24 1993-02-24 Microscope objective lens

Country Status (1)

Country Link
JP (1) JP3254786B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USH1763H (en) * 1996-02-28 1998-12-01 Nikon Corporation Microscope objective lens
JP2007034295A (en) * 2005-07-22 2007-02-08 Carl Zeiss Microimaging Gmbh Microscope objective lens and observation method by microscope
JP2008145787A (en) * 2006-12-11 2008-06-26 Olympus Corp Long operation distance objective lens
WO2015107881A1 (en) * 2014-01-15 2015-07-23 株式会社ニコン Objective lens and microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USH1763H (en) * 1996-02-28 1998-12-01 Nikon Corporation Microscope objective lens
JP2007034295A (en) * 2005-07-22 2007-02-08 Carl Zeiss Microimaging Gmbh Microscope objective lens and observation method by microscope
JP2008145787A (en) * 2006-12-11 2008-06-26 Olympus Corp Long operation distance objective lens
WO2015107881A1 (en) * 2014-01-15 2015-07-23 株式会社ニコン Objective lens and microscope
JPWO2015107881A1 (en) * 2014-01-15 2017-03-23 株式会社ニコン Objective lens and microscope

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JP3254786B2 (en) 2002-02-12

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