JPH0624508A - Storage shed for clean room - Google Patents

Abstract

PURPOSE:To simplify the warehousing control of goods to a storage shed for a clean room. CONSTITUTION:Conveyors 300 convey magazines M fed from openings 11,12 to the positions just under a transferring machine 200, or convey maganizes M transferred from a rotary table 100 by the transferring machine 200, to the openings 11, 12. The transferring machine 200 receives and delivers the magazines M between the conveyors 200 and the rotary table. The magazines M are placed in the sheft number positions defined by dividing the rotary table 100 into twelve parts around its rotational center. The rotary table 100 is rotated and positioned so that each magazine M may be fed to the prescribed sheft number position, by the transferring machine 200 and the magazine M in the prescribed sheft number positions is taken out by the transferring machine 200.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage room for a clean room which stores a large number of magazines storing circuit boards such as lead frames.

[0002]

2. Description of the Related Art Conventionally, in a production line for electronic parts and the like, in order to prevent dusts and the like in the air from adhering to a circuit board such as a lead frame, the inside of the factory is shut off from the outside air and cleaned. In such a manufacturing line, lead frames are stacked in multiple layers and stored in a magazine, and the magazine is stored in a predetermined storage chamber of a storage. A large number of storage chambers are formed in the vertical and horizontal directions of the storage chambers, and magazines are loaded and unloaded from these storage chambers by a transfer machine controlled by a computer.

[0003]

As described above, the conventional storage has a large number of storage chambers arranged in the vertical and horizontal directions, and the necessary magazines are taken out of the storage chambers or the magazines are stored in the predetermined storage chambers. In order to put it in the room, the transfer machine needs to move to a different storage room each time the loading / unloading operation is performed,
There was a problem that the control was complicated.

The present invention has been made for the purpose of simplifying control of loading and unloading of a load into and from a clean room storage.

A storage room for a clean room according to the present invention is
Between the main body, a rotary table rotatably provided in the main body and having a plurality of load carrying portions formed around the center of rotation, and a loading / unloading port formed in the main body and a predetermined position on the rotary table. And a means for conveying a load.

The present invention will be described below with reference to illustrated embodiments.
1 to 3 show the overall configuration of the apparatus of this embodiment. The storage case of the present embodiment is provided as a clean room in which the amount of dust and the like floating in the air is controlled below a specified level. The main body 10 of the storage has a box shape, and a large number of magazines M in which lead frames are stacked and stored are stored in the main body 10.

A drive device (not shown) is provided in the lower half of the main body 10 of the storage case, and a mechanical operating portion, which is an essential part of this embodiment, is provided in the upper half. The upper half of the main body 10 is entirely covered with a transparent acrylic plate for preventing static electricity, except for openings 11 and 12 for loading and unloading luggage which will be described later. In addition, in the central portion of the upper portion of the main body 10, the main body 1
A clean fan unit 13 is attached to suck dust and the like inside the No. 0.

[0008] The mechanical operating unit is basically a rotary table 100 for storing a large number of magazines M each containing a plurality of lead frames, a transfer machine 200 arranged above the rotary table 100, and a main body. 10. An overhead traveling vehicle (not shown) or an operator and a transfer machine 200 provided outside the vehicle 10.
And a transport device 300 that delivers the magazine M between the two. Next, the configuration will be described in the order of the devices involved in storing the magazine M in the main storage, that is, the transport device 300, the transfer device 200, and the rotary table 100 in this order.

The transport device 300 is disposed inside the main body 10 at the front side and one at the rear side. The former is a device that is activated when a worker manually loads and unloads the magazine M from the front side through the opening 11, and the latter is operated by an overhead traveling vehicle (not shown) from the upper side through the opening 12. It is a device that operates when loading and unloading the magazine M. Since these transporting devices 300 have the same configuration in this embodiment, only the configuration of one transporting device 300 will be described.

Referring to FIGS. 4-6, the transport device 300.
Is a carriage unit 310 for mounting the magazine M and a driving unit 330 for moving the carriage unit 310 in the horizontal direction.
Have and.

The drive unit 330 has a drive pulley 331 and a driven pulley 332, and the drive pulley 331 is connected to the output shaft of the traveling motor 333 as shown in FIG. A timing belt 334 for traveling is hung on the drive pulley 331 and the driven pulley 332. The carriage unit 310 is connected to the timing belt 334. That is, the timing belt 3 is rotated by the rotation of the traveling motor 333.
34 rotates, and the carriage unit 310 travels in the left-right direction in FIGS. 4 and 5.

The carriage portion 310 is a guide member 313 that moves along a track 312 fixed to the base surface 311.
And the support block 3 fixed on the guide member 313.
14 and. The support block 314 is supported by a spline shaft 323 pivotally supported by fixing plates 321 and 322 located at the left and right ends of FIG.
Move along 23. The guide member 313 and the support block 314 move in accordance with the rotation of the traveling motor 333, and the positions corresponding to the openings 11 and the intermediate positions thereof are set to three.
It can be stopped in one position. In order to stop the support block 314 at these positions, as shown in FIG. 7, a dog plate 315 is provided on the side surface of the support block 314, and mounting plates 316 are provided at three corresponding predetermined positions on the base surface 311 side. The optical sensor 317 is attached via each.

The carriage unit 310 has a mechanism for moving the magazine M up and down in order to transfer the magazine M to and from the overhead traveling vehicle via the opening 12 and to a transfer machine 200 described later. That is, the carriage unit 310 includes an elevating plate 318 for mounting the magazine M and the elevating plate 3
18 has a detent shaft 319 and a rack 320 extending downward. The shaft 319 is slidably supported by a support block 314, and the rack 320 meshes with a pinion 324 rotatably provided on the support block 314. A spline groove is formed in the pinion 324 so as to penetrate the center thereof, and the spline groove is meshed with the spline shaft 323. As shown in FIG. 6, a link mechanism 325 is connected to one end of the spline shaft 323, and the link mechanism 325 is connected to a motor 326 with a reducer. Therefore, the rotation of the motor 326 causes the spline shaft 323 and the pinion 324 to rotate, which causes the rack 320 and the lift plate 318 to move up and down.

The elevating table 318 is moved to the raised position (the transfer machine 2
00), and the spline shaft 3 for stopping at the descending position).
As shown in FIG. 7, a dog plate 327 is attached to the other end of 23, and an optical sensor 329 is attached to the fixed plate 322 via an attachment plate 328.

Next, with reference to FIGS. 8 to 11, the transfer machine 20
The configuration of 0 will be described. The transfer device 200 is a device that receives the magazine M from the transport device 300 and transfers it to the rotary table 100, or conversely, receives the magazine M from the rotary table 100 and transfers it to the transport device 300.

The transfer machine 200 includes a chuck portion 210 for gripping the T-shaped collar portion N formed on the upper portion of the magazine M from both sides, and the chuck portion 210 for the upper frame 21.
1 and a traveling drive unit 230 that linearly moves.

The traveling drive unit 230 has a drive pulley 231 and a driven pulley 232, and the drive pulley 231 is connected to the output shaft of the traveling motor 233 as shown in FIGS. 8 and 9. A timing belt 234 for traveling is hung on the drive pulley 231 and the driven pulley 232. The chuck portion 210 is connected to the timing belt 234. That is, the timing belt 234 is rotated by the rotation of the traveling motor 233, and the chuck portion 210 travels in the left-right direction in FIGS. 8 and 9.

The chuck portion 210 has a guide member 213 that moves along a track 212 that extends in the horizontal direction, and a support block 214 fixed on the guide member 213. The support block 214 is supported by a spline shaft 223 pivotally supported by fixed plates 221, 222 located at the left and right ends of FIGS. 8 and 9.
Move along 3. Guide member 213 and support block 2
14 moves according to the rotation of the traveling motor 233 and can be stopped at the positions of the transport device 300 and the rotary table 100.

The chuck portion 210 has pawls 215 and 216 which can be engaged with the collar portion N of the magazine M. These nails 21
5, 216 are respectively connected to racks 217 and 218 provided on the support block 214 so as to be displaceable in the horizontal direction, and these racks 217 and 218 are connected to the support block 2 respectively.
It meshes with a pinion 219 that is rotatably provided on the shaft 14. A spline groove is formed in the pinion 219 so as to pass through the center thereof, and the spline groove is meshed with the spline shaft 223. A toothed pulley 224 is provided at one end of the spline shaft 223 as shown in FIGS. 9 and 10, and the toothed pulley 224 is connected to the output shaft of the motor 227 with a reducer via a timing belt 225. It is connected to the fixed toothed pulley 226. Therefore, the rotation of the motor 227 causes the spline shaft 223 and the pinion 219 to rotate, which causes the racks 217, 21 to rotate.
8 is displaced and the claws 215 and 216 are opened and closed.

As shown in FIG. 10, the spline shaft 223
Is located at the center of the opening 241 of the upper frame 211 and projects from the upper frame 211, but the lower part thereof is covered with a cover 242 having a U-shaped cross section over the entire length. Therefore, the spline shaft 223 and the rack 21
Dust and the like generated from the mechanically sliding portions of 7, 218 are received by the cover 242 and do not fall on the rotary table 100 provided below the cover 242. The claws 215 and 216 protrude from between the upper frame 211 and the cover 242, and are curved and extend right below the cover 242.

By the way, in order to send a signal for controlling the opening / closing operation of the claws 215, 216 to a computer provided outside, a so-called curl cord or a cable conveyor has been conventionally used. Since the structure has many sliding parts and contact parts, dust may be generated, which is not preferable. Therefore, in the present embodiment, as described below, this signal is extracted to the outside in a non-contact manner.

On the lower surface of the cover 242, the carrying device 300 is provided.
Further, when the magazine M is received from the rotary table 100, an optical sensor 243 for detecting the presence of the magazine M under the claws 215 and 216 is attached.
That is, the optical sensor 243 has two positions for delivering the magazine M to and from the transport device 300, and two positions for delivering the magazine M to and from the turntable 100.
And the center of the rotary table 100.

At the tips of the claws 215 and 216, the claw 215,
Limit switches 244 and 245 are provided for detecting that the leading end of 216 is engaged with the collar portion N of the magazine M.
When the limit switches 244 and 245 are closed and engaged with the collar portion N, they output a signal indicating the closed state. In addition, the limit switch 2 is provided above the support block 214.
44, 245 based on the output signals of the nails 215, 216
A transmitter 246 is provided which outputs a signal indicating the open / closed state. In addition, the transmitter 246 is provided at the five positions described above.
Each of the receivers 247 is provided to receive the output signal of These transmitter 246 and receiver 247 are optical sensors.

With such a structure, the claws 215, 216
It is not possible to constantly monitor the opening and closing of the claws 215, 2
The open / closed state is detected and output to the computer only at a position where 16 may open / close.

Next, the structure of the rotary table 100 will be described with reference to FIGS. The turntable 100 is
A circular table 110 whose center is rotatably supported
And a drive unit 130 for rotating the drive unit. The drive unit 130 has a DC servo motor and a harmonic drive speed reducer 131 (not shown).

The circular table 110 includes a rack number 1, a rack number 2,
... It is equally divided into 12 such as shelf number 12. The stop dog plate 111 and the speed reduction dog 1 are provided on the outer peripheral portion of the back surface of the circular table 110 corresponding to each division (stop) position.
Twelve are provided. The stop dog plate 111 is the deceleration dog 1
It is located on the outer peripheral side of 12. U-shaped stop optical sensors 114 and deceleration optical sensors 115 corresponding to these are arranged at predetermined positions of the support frame 113, and the circular table 1
10 can perform a smooth stop operation at each split stop position.

The dog plate 11 on the back surface of the circular table 110
Hexagonal bolts 121 are appropriately attached to the inner peripheral side of 1, 112 with regularity described later. The transfer machine 20
At the position where the magazine M is delivered to 0, the support frame 113 is operated by the bolt 121.
A proximity sensor 122 for detecting one shelf number is provided.

The bin number is represented by 4 bits in a binary system, and the bits "1" and "0" are represented by the presence or absence of the bolt 121. That is, four bolts 121 are provided at the position of each storage bin.
Are arranged side by side in the radial direction of the circular table 110. For example, if x is bolt and ○ is no bolt, shelf number 1
Is from the outside to the inside of the circular table 110.
X, shelf number 2 is represented as XXXXX, and shelf number 3 is represented as XXXXX .... The proximity sensor 122 provided at the delivery position of the magazine M has four detectors that are turned on / off depending on the presence or absence of the bolt 121, and thereby detects the rack number of the circular table 110.

With such a configuration, it is possible to detect the shelf number with the necessary minimum number of the sensors 122 and the bolts 121, and the structure is simple and the manufacturing cost of the device can be suppressed. Since the signal indicating the shelf number is 4 bits,
It can show 16 different storage bins, and has a circular table 110.
It is possible to provide 16 storage bins.

The circular table 110 stops when a predetermined shelf number arrives at a position where the magazine M is transferred to and from the transfer machine 200. This transfer position, that is, the position where the chuck portion 210 of the transfer machine 200 stops is the circular table 110.
Of the opening 1
It is provided at two places, one side and the opening 12 side. At these transfer positions, the lifter device 140 is provided to transfer the magazine M between the transfer machine 200 and the rotary table 100.
Is provided.

The lifter device 140 has an elevating part 141 capable of supporting the magazine M, and an elevating motor 142 for elevating the elevating part 141. The elevating part 141 includes two detent shafts 144 slidably supported by a supporting plate 143 and extending downward, and two supporting parts 1 projecting upward.
45 and. A link mechanism 146 is connected between the tip of the output shaft of the lifting motor 142 and the lifting unit 141, and the rotational movement of the lifting motor 142 is converted into a linear motion in the vertical direction by the link mechanism 146. 141 is transmitted. Instead of such a link mechanism 146, a rack and pinion such as the lifting mechanism for the carriage unit 310 of the transport apparatus 200 described above may be used.

The circular table 110 is provided with two openings 151 so that the support portion 142 of the lifter device 140 can penetrate from bottom to top at each stop position.

The supporting portion 145 of the elevating portion 141 projects from the opening 151 of the circular table 110 when the lifter device 140 is operating. As a result, the support portion 145 comes into contact with the lower surface of the magazine M held by the chuck portion 210 of the transfer machine 200 that stops at the predetermined height position. At this time, the magazine M is transferred to the support portion 145 by the opening operation of the claws 215 and 216 of the chuck portion 210. Then, when the elevating part 141 descends, the magazine M is moved to the circular table 1
Transfer to 10. The operation of delivering the magazine M from the circular table 110 to the chuck portion 210 of the transfer machine 200 is performed in the reverse order of the above operation.

As described above, the storage of the present embodiment is configured to store the magazine M in the predetermined rack number position of the rotary table 110, and the loading / unloading operation of the transport device 300 moves linearly. And the transfer machine 200. Therefore, the operations of the transfer device 300 and the transfer device 200 are simple and do not require complicated control. Further, a large number of magazines M can be loaded / unloaded to / from the turntable 110 efficiently and quickly, and this loading / unloading operation is performed in a short time.

[0035]

As described above, according to the present invention, the effect of simplifying the control of loading and unloading of a load into and from the clean room storage is obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing a storage room for a clean room according to an embodiment of the present invention.

FIG. 2 is a plan view showing a storage room for a clean room.

FIG. 3 is a side view showing a storage room for a clean room.

FIG. 4 is a cross-sectional view showing a schematic configuration of a transfer machine and a transfer device.

FIG. 5 is a cross-sectional view showing a transfer device.

FIG. 6 is a side view showing a mechanism for moving up and down a lifting plate.

FIG. 7 is a side view showing a configuration for stopping a carriage unit of a carrying device.

FIG. 8 is a side view showing a transfer device, a transfer device, and a rotary table.

FIG. 9 is a side view showing a transfer machine.

FIG. 10 is a cross-sectional view showing a chuck section of a transfer machine.

FIG. 11 is a plan view showing a limit switch for detecting the presence / absence of a magazine.

FIG. 12 is a plan view showing a rotary table.

FIG. 13 is a side view showing a sensor for controlling the stop position of the rotary table.

FIG. 14 is a side view showing a lifter device for a rotary table.

[Explanation of symbols]

 10 main body 100 rotary table 200 transfer machine 300 carrier device

Claims (1)

[Claims] 1. A main body, a rotary table rotatably provided in the main body and having a plurality of load carrying portions formed around a center of rotation, a loading / unloading port formed on the main body, and the rotary table top. And a means for transporting a load to and from a predetermined position of the clean room storage.