JPH06244264A - Chucking mechanism - Google Patents

Abstract

PURPOSE:To obtain a general-purpose simplified mechanical chuck, which is low in cost and is easy to control, by a method wherein a the stroke of a shaft is changed according to the positions of the steps, on which a stopper strikes, of an opening amount variable block, the opening amount of chucking pawls is varied and the like. CONSTITUTION:A chucking mechanism has two chucking pawls 1 for holding a material to be treated, a shaft 3, which is moved in the axial direction and opens and shuts the pawls 1 via a link mechanism, and a spring 8 provided so as to shut the pawls 1 and push up the shaft 3 in the axial direction. Moreover, the chucking mechanism has a cylinder 2, which is used as a drive source to move the shaft 3 in such a way as to push down the shaft 3 in the axial direction, a stopper 6, which is coupled with the shaft 3, and an opening amount variable block 5 having a plurality of steps, on which the stopper 6 strikes. The stroke of the shaft 3 is changed according to the positions of the steps, on which the stopper 6 strikes, of the block 5 and the opening amount of the pawls 1 is varied. Fro example, a mechanism unit to make the pawls 1 open and shut is provided on the side of the front of a substrate 7 and a mechanism unit, which is variable the opening amount of the pawls 1, is provided on the side of the back of the substrate 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chuck mechanism, and more particularly to a general-purpose simple mechanical chuck mechanism which does not depend on the shape and size of the package in handling the package.

At the manufacturing stage of a semiconductor device, there are many steps in which a package is taken out from a jig such as a tray and then stored in a tray or another jig after the processing is completed. With the recent diversification of packages, the demand for general-purpose manufacturing equipment is increasing. For this reason, various mechanical chuck mechanisms are used, but problems such as expensive equipment due to excess mechanisms and complicated control methods occur, and a simple mechanical chuck mechanism that is inexpensive and easy to control is required. .

[0003]

2. Description of the Related Art Conventional package handling is generally performed by a method using vacuum suction or a mechanical chuck mechanism by controlling a pulse motor using a ball screw. However, due to the diversification and complexity of packages in recent years, many methods that cannot use the vacuum suction method are becoming available.
For this reason, a general-purpose mechanical chuck mechanism with pulse motor control has been developed, but this mechanism is expensive and the control method is complicated.

In a general mechanical chuck mechanism controlled by a pulse motor, a ball screw is generally used as a drive system for opening and closing the claw. At this time, a complicated guide method is used as a guide for smooth driving, the number of components increases and the cost becomes high, and the general-purpose control software becomes complicated, resulting in an increase in design man-hours and debug man-hours. It was

[0005]

The conventional general-purpose mechanical chuck mechanism uses expensive parts such as a ball screw and a pulse motor, resulting in a high price and complicated control software.

An object of the present invention is to provide a general-purpose simple mechanical chuck that is inexpensive and has a simple control method.

[0007]

Means for Solving the Problems To solve the above problems, two chuck claws 1 for holding an object to be processed and a shaft 3 for axially moving and opening and closing the two chuck claws via a link mechanism are provided. A spring 8 provided so as to close the chuck claw and push up the shaft in the axial direction, a cylinder 2 as a drive source for moving the shaft so as to push down the shaft, and a stopper 6 connected to the shaft. And a variable opening amount block 5 having a plurality of steps with which the stopper abuts, and a chuck mechanism that changes the opening amount of the claw by changing the stroke of the shaft depending on the position of the step with which the stopper abuts To be done.

[0008]

1 and 2 are explanatory views of the principle of the present invention. Figure 1
Is a side view of the back side of the substrate 7, and FIG. 2 is a side view of the front side of the substrate 7.

In the figure, 1 is a chuck claw for holding a package, and 2 is a cylinder, which is a drive source for opening and closing the chuck claw via a link mechanism. The closing amount of chuck claw 1 is such that the cylinder rod rises when cylinder 2 is OFF and the link mechanism is closed by the force of spring 8. The size of the package at this time determines the chuck claw closing amount.

The opening amount of the chuck claw 1 is determined by the shaft 3 of FIG.
2 and the block 4 in FIG. 2 are connected to each other through the hole formed in the substrate 7, and the shaft 3 moves downward in conjunction with the cylinder 2. At this time, a stopper is attached to the upper edge of the variable opening block 5.
6 hits and determines the opening amount of the chuck claw. The opening amount is determined by the position of the upper edge step of the variable opening amount block 5, and by providing several steps, the package can be generalized.

As described above, according to the present invention, the mechanism unit capable of varying the closing amount is provided on the front side of the substrate 7 and the mechanism unit capable of varying the closing amount is provided on the back side of the substrate, thereby coping with the generalization of the package.

[0012]

Embodiments of the present invention will be described with reference to FIGS. The closing amount of the chuck claw 1 is such that the cylinder rod moves up while the cylinder 2 is OFF, and the link mechanism is closed by being pulled by the spring 8 attached to the two cross roller guides 14, and the chuck claw 1 is closed. The closing amount at this time is determined by the size of the package outer shape.

The opening amount of the chuck jaws 1 is determined by the lowering of the cylinder rod while the cylinder 2 is in the ON state.
The block 4 connected to
The stopper 6 attached to the block 4 abuts on the upper edge of a predetermined step of, and determines the opening amount of the chuck claw.

Here, the shaft 3 slides in a guide (sleeve) 13 fixed to the substrate, and the upper end of the cylinder 2
The lower end is connected to the link mechanism that opens and closes the chuck claw 1 so that it hits against.

The variable opening block 5 has a pin 10 and a stopper.
11 are provided. In response to a product type change command from the processor, the pin 10 is applied to the fixed block in the hand, and the variable opening amount block 5 is moved in the direction of the arrow shown in the figure by the specified amount to determine the position of the step of the variable opening amount block 5. When the position of the step is reached, the cylinder 12 is turned on, the stopper 11 is inserted into the notch of the variable opening amount block 5, and the variable opening amount block 5 is fixed.

The chuck mechanism of the embodiment is mounted on the Z-axis of the robot, and the processing type is switched by remote control using a changeover switch or the like inside the device, and pin 10 is abutted on the block mounted in the device and designated. Move block 5 by the amount.

In the embodiment, the variable opening amount block 5 has four stages, but it can be increased or decreased according to the purpose.

[0018]

According to the present invention, it is possible to obtain a general-purpose simple mechanical chuck that is inexpensive and has a simple control method for general-purpose package handling. As a result, we were able to contribute to the improvement of handling in the assembly process and test process.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of the principle of the present invention (1)

FIG. 2 is an explanatory view of the principle of the present invention (2)

[Explanation of symbols]

 1 Chuck claw 2 Cylinder 3 Shaft 4 Block fixed to the shaft 5 Variable opening amount block 6 Block 4 stopper 7 Board 8 Spring for closing the chuck claw 9 Positioning spring for variable opening amount block 10 Positioning pin for variable opening amount block 11 Positioning stopper for variable opening block 12 Positioning cylinder for variable opening block 13 Shaft moving guide 14 Chuck claw guide

Claims (1)

[Claims] 1. Two chuck claws for gripping an object to be processed 1
A shaft 3 that moves in the axial direction and opens and closes the two chuck claws via a link mechanism; a spring 8 that closes the chuck claws and pushes the shaft up in the axial direction; A cylinder 2 serving as a drive source for moving the shaft downwardly, a stopper 6 connected to the shaft, and an opening amount variable block 5 having a plurality of steps with which the stopper abuts, and a step with which the stopper abuts. The chuck mechanism is characterized in that the stroke of the shaft is changed according to the position of to make the opening amount of the claw variable.