JPH06241734A - Burn-in board inspecting device - Google Patents

Abstract

PURPOSE:To automatically and quantitatively determine the positions of sockets of a burn-in board without containing artificial errors and judge the quality. CONSTITUTION:A burn-in board inspecting device is provided with an XY table 1 mounted with a burn-in board 3 arranged with multiple sockets 4 on a line and a laser displacement gauge 2 radiating a laser beam to the burn-in board 3 having a light receiving face receiving the reflected beams of a laser beam radiated to the burn-in board 3 at a prescribed inclination. The burn-in board 3 is relatively and two-dimensionally moved against the laser displacement gauge 2, the laser beam is scanned on the burn-in board 3, only the reflected beam from a socket 4 is received, intervals between a group of pulse outputs obtained from the reflected beam are counted to determine the shift quantity, positions of the sockets 4 are recognized, and they are compared with the reference values to judge the quality.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a burn-in board inspection device for inspecting the positions of a plurality of IC sockets (hereinafter simply referred to as sockets) attached to a burn-in board from a reference position.

[0002]

2. Description of the Related Art Conventionally, in order to inspect the position of the socket on the burn-in board, the position of the socket closest to the reference position is measured with a scale or the like, and an inspection jig is provided in the gap between the socket and the adjacent socket. (Gap gauge) It was inspected whether the gap was correct by inserting.

In another method, the burn-in board is placed on the stage of the tool microscope, the position of the IC socket is measured, and the quality is judged by the measured value.

[0004]

However, in the inspection by the inspection jig (gap gauge), the measurement result depends on the force applied to the inspection jig and the inserting direction of the inspection jig, and the reliability of the inspection result is low. .

In the measurement with the factory microscope, the burn-in board is often larger than the stage of the factory microscope, and it is not possible to measure all the positions of the IC sockets on one burn-in board at one time. Therefore, it is necessary to divide the measurement into several times, and it is necessary to collect the measured values of the several times. For this reason, there is a problem that not only the number of measurement steps increases but also the measurement error increases. Furthermore, it may include false measurement errors. In addition, a man-hour is required to judge whether the socket position on the burn-in board is good or bad by comparing the measured value with the reference value.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a burn-in board inspection apparatus which can automatically measure the position of a socket and can judge whether the position is good or bad without including false human error.

[0007]

A feature of the present invention is that a table on which a burn-in board having a plurality of sockets arranged side by side is placed, and a light-receiving surface for irradiating the burn-in board with laser light and receiving reflected light are predetermined. A laser displacement meter having a gradient of 2), the burn-in board and the laser displacement meter are relatively two-dimensionally moved to scan the laser light on the burn-in board, and only the reflected light from the socket is received. Then, the burn-in board inspection device for recognizing the position of the socket and comparing it with a reference value to judge pass / fail.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing an outline of a burn-in board inspection apparatus according to an embodiment of the present invention. As shown in FIG. 1, this burn-in board inspection apparatus has an XY table 1 on which a burn-in board having a plurality of sockets 4 mounted side by side is mounted and which moves in a two-dimensional direction, and a laser beam fixed to a pole to the burn-in board. A laser displacement meter 2 for recognizing the position of the socket 4 by irradiating and detecting the reflected light on the light receiving surface 2a is provided.

2A and 2B are views for explaining the operation of the laser displacement meter of FIG. Next, a laser displacement meter that recognizes the position of the socket will be described. The laser displacement meter 2 has a light emitting surface and a light receiving surface inclined with respect to the burn-in board 6, and as shown in FIG. When the laser light 5 is irradiated at an angle, the laser reflected light 6 of the laser light 5 is received by the light receiving surface 2a at an angle inclined by about 11 degrees. Therefore, the difference in height between the DUTs 7 and 8 can be measured as the difference in the light receiving points. Therefore, the present invention has obtained the prospect that the position of the socket can be recognized by applying this principle.

The laser displacement meter 2 capable of recognizing the position as described above
As shown in FIG. 2B, the burn-in board 3 placed on the XY table 1 having the above-described movement amount measuring function is irradiated with laser light by using the above-mentioned method, and as the XY table moves in the direction of the arrow. The light receiving surface 2a of the laser displacement meter 2 receives the reflected light from the socket 4, detects the position of the socket 4, and automatically detects the position of the socket 4 and the position of the socket 4 by counting the amount of movement from the reference position. Can be measured.

FIGS. 3A to 3E are diagrams showing the behavior of the output waveform of the laser displacement meter depending on the moving direction. Here, the direction and moving direction of the laser displacement meter will be described. if,
If the direction of movement of the burn-in board in the direction of inclination of the light-receiving surface 2a that receives the laser reflected light of the laser displacement meter is opposite, that is, as shown in FIG.
Cannot detect the edge of.

What is important is that when the laser beam passes near the end of the socket, the laser beam detects both the burn-in board and the socket, the measured values are averaged, and the output voltage level of the laser displacement meter is shown in FIG. As shown in (a), a curve is drawn. Further, when the gloss of the burn-in board changes, the voltage level differs depending on the degree of gloss, as shown in FIG. Further, when an object having a significantly different reflectance such as a trace of soldering on the burn-in board is scanned with a laser beam as compared with a socket, a steep waveform may be generated as shown in FIG. become. Further, the gloss of the burn-in board itself varies depending on the location, and in any case, only an unstable waveform as shown in FIG. 3D is obtained.

In order to solve this problem, when the moving direction and the light receiving surface 2a of the laser displacement meter 2 are set as shown in FIG. 2B, the laser reflected light 6 is blocked by the socket 4 and reflected from the burn-in board. No light is received. When laser light is applied to the socket 4 due to the movement, the laser displacement meter 2 generates a voltage level according to the height of the socket. Even if it moves further, only the light reflected from the upper surface of the socket 4 is received, and the reflected light from the burn-in board is not received. That is, the inclination of the light receiving surface 2a of this laser displacement meter is determined from the height of the socket.

Next, the operation of the burn-in board inspection device will be described. First, the laser displacement meter 2 is positioned at the reference point of the burn-in board 3, and the coordinates at that time are read. Next, the burn-in board 3 is moved by a predetermined distance at right angles to the moving direction of FIG. Next, the XY table 1 is moved in the direction of the arrow and the laser displacement meter 2 scans. At this time, the moving distance is obtained from the interval of the pulsed voltage waveform due to the reception of the laser reflected light reflected from the end of the socket 4. Then, it is judged whether the quality is good or bad by comparing with the previously stored reference movement distance. When inspecting the position in the direction perpendicular to the moving direction indicated by this arrow, set the laser displacement meter to 90
After changing the degree, inspect by the same operation.

In this embodiment, the laser displacement meter is fixed,
Although the burn-in board was moved two-dimensionally and the position of the socket was recognized by scanning the laser light, the burn-in board was fixed and the laser displacement meter was moved two-dimensionally to scan the laser light. However, this method has an advantage that the apparatus becomes smaller in size.

[0017]

As described above, according to the present invention, a table for installing a burn-in board in which a plurality of sockets are arranged side by side and a light-receiving surface for irradiating the burn-in board with laser light and receiving reflected light have a predetermined inclination. Equipped with a laser displacement meter, the burn-in board and the laser displacement meter are relatively two-dimensionally moved, the laser beam is scanned on the burn-in board, only the reflected light from the socket is received, and from this reflected light By calculating the socket position by counting the intervals of the obtained pulse output groups, there is an effect that the socket position can be automatically calculated quantitatively without any artificial error and the quality can be judged. .

[Brief description of drawings]

FIG. 1 is a diagram showing an outline of a burn-in board inspection device in an embodiment of the present invention.

FIG. 2 is a diagram for explaining the operation of the laser displacement meter of FIG.

FIG. 3 is a diagram showing a behavior of an output waveform of a laser displacement meter according to a moving direction.

[Explanation of symbols]

 1 XY table 2 Laser displacement meter 2a Light receiving surface 3 Burn-in board 4 Socket 5 Laser light 6 Laser reflected light 7,8 DUT

Claims (1)

[Claims] 1. A table on which a burn-in board having a plurality of sockets arranged side by side is placed, and a laser displacement meter whose light-receiving surface for irradiating the burn-in board with laser light and receiving reflected light has a predetermined inclination. , The burn-in board and the laser displacement meter are relatively two-dimensionally moved to scan the laser light on the burn-in board, and only the reflected light from the socket is received to recognize the position of the socket. A burn-in board inspecting device, which is characterized by comparing with a reference value to judge pass / fail.