JPH06241329A - Fluid controller - Google Patents

Abstract

PURPOSE:To smoothly rotate a stem with a small force by making the orbit surface of an orbit disc abut against a tapered surface of a conical roller with the use of a resilient member so as to form a cam mechanism for converting a degree of rotation of the stem into a lift so as to move a diaphragm or the like up and down. CONSTITUTION:A fluid control mechanism incorporates at least a cam mechanism 8 for converting a degree of rotation of a stem into a lift so as to move a diaphragm (or disc) 2 up and down. In the cam mechanism 8, a conical roller 16 is rotatably supported to a horizontal shaft 15 orthogonal to the stem 7, and is formed thereon with a tapered surface 16a. Further, an orbit disc 17 having an orbit surface 17 is supported to a body 1 shaft so as to be elevatable but unrotatable in order to depress the diaphragm 2. Further, the orbit disc 17 is vertically urged and held by a resilient member 18 so as to make the orbit surface 17c of the disc 17 into contact with the tapered surface 16a. Further, the orbit surface 17c is inclined inward so as to make contact with the tapered surface 16a, and is successively displaced inward from the outer peripheral surface of the orbit disc 17.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid controller mainly used in a fluid pipeline of a semiconductor manufacturing plant, a nuclear power plant, etc., and more particularly to a fluid controller by rotating a stem forward and backward by a constant angle. The present invention relates to a fluid controller configured to open and close a passage.

[0002]

2. Description of the Related Art Conventionally, as a fluid controller in which a fluid passage is closed and opened by rotating a stem forward and backward by a constant angle, for example, 90 degrees, for example, one having a structure shown in FIG. 8 is known. That is, the fluid controller includes the fluid inlet 2
0a, a fluid outlet 20b, a fluid passage 20c, a valve chamber 20d, a valve seat 20e, and the like, a lower diaphragm 21 disposed at a lower position of the valve chamber 20d, and seated on and off the valve seat 20e, and a valve chamber. Lower bonnet 22 screwed to the lower portion of 20d, and lower diaphragm edge retainer 23 interposed between lower diaphragm 21 and lower bonnet 22.
A pusher 24 slidably inserted in the lower bonnet 22 in a vertically slidable manner, an upper diaphragm 25 disposed at an upper position of the valve chamber 20d, an upper bonnet 26 screwed to the body 20, and an upper portion. An upper diaphragm edge retainer 27 provided between the diaphragm 25 and the upper bonnet 26, a diaphragm retainer 28 vertically movable on the upper surface side of the upper diaphragm 25, and rotatable and axially movable in the bonnet 26. An unsupported stem 29, a disk-shaped retainer 30 screwed onto the upper end of the bonnet 26 to prevent the stem 29 from coming off, and a thrust washer 31 interposed between the stem 29 and the retainer 30. , Is provided between the diaphragm retainer 28 and the stem 29, and converts the rotation amount of the stem 29 into a vertical movement amount, and Cam mechanism to lower the arm retainer 28 3
2 and.

The cam mechanism 32 is disposed between the stem 29 and the upper diaphragm edge retainer 27 so as to be movable up and down and non-rotatably, and has two hemispherical recesses 33a located on the same circumference on the upper surface. The formed thrust disk 33, the ball 34 rotatably fitted in each recess 33a of the thrust disk 33, and the lower surface of the stem 29 are formed on the lower surface of the stem 29 and face each recess 33a, and the upper half of the ball 34 is The guide groove 29a is formed by two arc-shaped (1/4 circle) guide grooves 29a, etc., and the depth of each guide groove 29a is gradually deeper (or shallower) from one end to the other end of the groove. ) Is formed.

Incidentally, in FIG. 8, numeral 35 is planted on the lower surface of the thrust disk, and is slidably inserted into the upper diaphragm edge retainer 27 to support the thrust disk 33 so that it can move up and down and cannot rotate. Guide pin, 33b is an arc-shaped (1/4 circle) rotation limiting groove formed on the upper surface of the thrust disk 33, and 36 is planted on the lower surface of the stem 29 and slidably moves in the rotation limiting groove 33b. A rotation limiting pin for controlling the rotation angle (90 degrees in this example) of the stem 29, 37 is a buffer disc spring interposed between the diaphragm retainer 28 and the thrust disc 33, and 38 is a thrust circle. A retaining bolt for the diaphragm retainer 28 slidably supported on the plate 33 in the vertical direction, 20f is a detection hole for detecting fluid leakage, 39 is a tube stub, and 40 is a tube adapter.

In the fluid controller, when a handle (not shown) attached to the upper end of the stem 29 is operated to rotate the stem 29 forward and backward by 90 degrees, the ball 34 is recessed.
While rotating while being held by a, it relatively moves along the guide groove 29a and comes into contact with the guide groove 29a from a deep portion to a shallow portion or from a shallow portion to a deep portion. When the ball 34 comes into contact with the shallow portion of the guide groove 29a, the ball 34 is displaced downward, the thrust disk 33 is pushed down by the ball 34, and the diaphragm retainer 28 also moves. It is pushed downward via the spring 37 and descends. As a result, the diaphragm retainer 28
By the central part of the upper diaphragm 25, the pusher 2
4 and the central portion of the lower diaphragm 21 are sequentially pushed downward to descend, and the central portion of the lower diaphragm 21 is moved to the valve seat 20.
The fluid passage 20c is closed against the e. Further, when the ball 34 comes into contact with the deep portion of the guide groove 29a, the thrust disc 33 can be lifted, so that the lower diaphragm 2 is caused by the fluid pressure and the elastic force of each diaphragm 21, 25.
1, the pusher 24, the upper diaphragm 25, the diaphragm retainer 28, the thrust disc 33, etc. are pushed upward and rise. As a result, the lower diaphragm 21 is closed by the valve seat 20.
The fluid passage 20c is opened by separating from e. The above fluid controller has a diaphragm 21 at the upper and lower positions of the valve chamber 20d.
Since 25 is provided for each of them, it has an excellent practical effect such that the leakage of the fluid from the valve chamber 20d can be surely prevented.

[0006]

However, in the above fluid controller, since the ball 34 is fitted and held in the hemispherical recess 33a formed in the thrust disk 33, the ball 34 is retained in the recess 33a. It is difficult to rotate, and the ball 34 does not rotate in the recess 33a when the stem 29 rotates.
It may slide along the groove in the guide groove 29a formed in the above. Naturally, the stem 29 rotates while being pressed by the thrust washer 31 by fluid pressure or the like and in surface contact with the thrust washer 31. As a result, the stem 29
The drive of the stem 29 is extremely heavy during rotation of the
There is a problem in that it cannot rotate smoothly and smoothly.
Further, since the guide groove 29a formed on the lower surface of the stem 29 is formed in an arc shape around the axis of the stem 29, and the guide groove 29a is inclined in the circumferential direction, the thrust disk is rotated when the stem 29 is rotated. A circumferential force acts on 33, and the thrust disc 33 tries to rotate. However, since the thrust disc 33 is prevented from rotating by the guide pin 35, the thrust disc 33 is pressed against the guide pin 35, which makes it difficult to slide in the vertical direction smoothly and smoothly. As a result, the drive of the stem 29 becomes even heavier. In particular, when the balls 34 do not rotate in the recess 33a, the circumferential force acting on the thrust disc 33 becomes large, and the thrust disc 33 becomes more difficult to slide in the vertical direction, which is a serious problem.

The present invention was devised in order to solve the above problems, and an object thereof is to provide a fluid controller capable of smoothly and smoothly rotating a stem with a small force.

[0008]

In order to achieve the above object, a fluid controller of the present invention converts a rotation amount of a stem into an ascending / descending amount between a diaphragm or a disk and a stem, and installs the diaphragm or the disk. A conical roller having a cam mechanism for moving up and down, the cam mechanism being rotatably supported by a horizontal shaft provided orthogonal to the stem, and having a tapered surface whose diameter is gradually reduced as the distance from the stem increases, and a body. Side has a substantially circular arc-shaped starting surface on which the conical roller rolls with the rotation of the stem and is supported on the upper side so as to be able to move up and down and non-rotatably, and the orbit circle that presses the diaphragm or disk downward on the lower side. And an elastic body for holding the raceway disc urged upward to bring the raceway surface into contact with the tapered surface of the conical roller, and the substantially arcuate raceway surface at the same height and In order to contact the tapered surface of the cone roller with tilting inwardly, it is obtained by successively displaced toward the outer periphery of the orbital disc inward.

[0009]

[Operation] When the handle is operated to rotate the stem forward and backward by a certain angle, the conical roller rotates and the conical roller moves on the raceway surface from one end to the other end or from the other end to the one end. Move to the side. When the conical roller moves on the raceway surface, the large-diameter portion or the small-diameter portion of the cone roller comes into contact with the raceway surface in combination with the inward displacement of the raceway surface. When the large-diameter portion of the conical roller comes into contact with the raceway surface, the conical roller pushes the raceway disk downward against the urging force of the elastic body and descends. As a result, the orbital disc pushes the diaphragm or disc downward, and the diaphragm or disc rests on the valve seat to close the fluid passage. When the small diameter portion of the conical roller contacts the raceway surface, the raceway disc is pushed upward by the urging force of the elastic body. As a result, the diaphragm or disc is pushed upward by fluid pressure or the like and rises, the diaphragm or disc is separated from the valve seat, and the fluid passage is opened. In this fluid controller, since the conical roller rolls on the raceway surface when the stem rotates, the stem can be smoothly and smoothly rotated with an extremely small force.

[0010]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a partial vertical cross-sectional view showing a valve opening state of a diaphragm type fluid controller according to an embodiment of the present invention. The diaphragms are arranged at the respective positions, and the lower diaphragms are directly seated on and off the valve seat to open and close the fluid passage. 1 is a body, 2 is an upper diaphragm, and 3 is an upper diaphragm edge retainer. Four
Is a hood, 5 is a cap, 6 is a diaphragm holder,
Reference numeral 7 is a stem, and 8 is a cam mechanism.

The body 1 is made of a metal material such as stainless steel and has the same structure as a conventionally known one. Inside, a fluid inlet, a fluid outlet, a fluid passage, a valve seat (all not shown) and a valve chamber are provided. 1a are formed respectively. Also, the valve chamber 1a
An annular step 1b is formed on the upper portion of the inner peripheral surface of the.

The upper diaphragm 2 is formed of a thin plate made of a metal such as stainless steel, Inconel (trademark), shape memory alloy, etc., and has a central portion bulged upward to form a dish.
The peripheral portion of the valve chamber 1a is placed on the stepped portion 1b of the valve chamber 1a.
Upper diaphragm edge retainer 3 and body 1 inserted inside
By the bonnet 4 screwed to the hood 4, the bonnet 4 is pressed toward the step portion 1b side, and is sandwiched and fixed in an airtight state. The upper diaphragm 2 holds the airtightness of the valve chamber 1a, and the central portion of the upper diaphragm 2 moves up and down to vertically move a pusher 9 and a lower diaphragm (not shown) arranged downward.

The upper diaphragm edge retainer 3 is formed in an annular shape by a metal material such as stainless steel, and the valve chamber 1
It is inserted in a, presses the outer peripheral edge of the upper diaphragm 2, and supports the lower end of a diaphragm retainer 6 described later so as to be slidable in the vertical direction. Further, three guide pins 10 are planted at equal intervals on the upper surface of the outer peripheral edge of the upper diaphragm edge retainer 3.

The bonnet 4 is made of a metal material such as stainless steel and has a substantially cylindrical shape. The bonnet 4 is inserted and screwed into an upper portion inside the valve chamber 1a of the body 1, and the outer peripheral edge portion of the upper diaphragm 2 and the upper diaphragm edge retainer 3 are provided. Is pressed and fixed to the body 1 side.

The cap 5 is formed of a metal material such as stainless steel in a cap nut shape, is screwed to the upper end of the bonnet 4, and rotatably supports the upper end of the stem 7.

The diaphragm retainer 6 is made of a metal material such as stainless steel, and the lower end side is vertically slidably inserted into the upper diaphragm edge retainer 3 and the upper end side of the cam mechanism 8 described later. An orbital disc 17 is slidably inserted and supported in the vertical direction. In addition, 11 is a retaining bolt screwed to the diaphragm retainer 6,
Reference numeral 2 denotes a buffer disc spring interposed between the diaphragm retainer 6 and the raceway disc 17.

The stem 7 is made of a metal material such as stainless steel, and is rotatably inserted and supported on the upper end of the cap 5 via a thrust bearing 13.
a and the upper shaft 7a, the thrust bearing 13
And a plate-shaped support portion 7c that is provided continuously with the flange portion 7b and through which a horizontal shaft 15 of a cam mechanism 8 described later is inserted and supported, and a cam mechanism that is provided continuously with the support portion 7c and described later. And a lower shaft 7d that is rotatably inserted in and supported by an orbital disk 17 of 8. Further, on the lower surface of the support portion 7c, a rotation limiting pin 14 for limiting the rotation angle of the stem 7 (90 degrees in this embodiment).
Has been planted. Further, a handle (not shown) for operating the stem 7 is attached to the upper end of the stem 7.

The cam mechanism 8 is provided between the diaphragm retainer 6 and the stem 7, and converts the rotation amount of the stem 7 into a vertical movement amount so that the upper diaphragm 2 and the like can be moved up and down. The horizontal shaft 15, the conical roller 16, the orbital disc 17, and the elastic body 18 are provided. Specifically, the horizontal shaft 15 is formed of a metal material such as stainless steel in a stepped manner, and is supported by the supporting portion 7c of the stem 7 in a horizontal posture so as to be immovable in the axial direction. The conical roller 16 is made of a metal material such as stainless steel, and is rotatably supported on both ends of the horizontal shaft 15 via a thrust bearing 13 and a plurality of radial bearings 19. Further, the outer peripheral surface of the conical roller 16 is a tapered surface 16a whose diameter gradually decreases as the distance from the stem 7 increases. In this embodiment, the tapered surface 16a
The inclination angle α of is set to 17 degrees. Orbital disc 1
7 is made of a metal material such as stainless steel,
The bonnet 4 is inserted and supported in the bonnet 4 so that it cannot rotate and can slide in the vertical direction. That is, the raceway disc 17 has guide pins 10 planted in the upper diaphragm edge retainer 3 in three guide holes 17a formed at equal intervals on the lower surface of the outer peripheral edge portion thereof.
Are slidably inserted into the bonnet 4 so as to be slidable in the vertical direction and non-rotatably supported. or,
On the upper surface of the orbital disc 17, as shown in FIG.
7, a pair of substantially arc-shaped (approximately 1/4 circle) protrusions 17b that are sequentially displaced from the outer peripheral edge of the stem 7 toward the center are integrally and oppositely formed. Along with this, each conical roller 16 becomes a raceway surface 17c on which it rolls. As shown in FIG. 4, the raceway surface 17c is inwardly inclined so that the tapered surface 16a is always in contact with the conical roller 16 when the conical roller 16 rolls. It is set to be the same as the inclination angle α of the tapered surface 16a. Further, an arc-shaped (1/4 circle) rotation limiting groove 17d, which is concentric with the raceway disk 17 and into which the rotation limiting pin 14 is slidably inserted, is formed on the upper surface of the raceway disk 17. . A through hole 17e is formed at the center of the raceway disk 17 into which the diaphragm retainer 6 and the lower shaft 7d of the stem 7 are slidably inserted. The elastic bodies 18 are respectively provided between the upper diaphragm edge retainer 3 and the three holding holes 17f formed on the lower surface of the raceway disc 17 at equal intervals, and hold the raceway disc 17 upward by force. The raceway surface 17c is always in contact with the tapered surface 16a of the conical roller 16 and the conical roller 16 and the stem 7 are held at the same height. In this embodiment, the elastic body 18
The coil spring is used for.

Next, the operation of the fluid controller will be described. The fluid controller includes a tapered surface 1 of the conical roller 16.
When the small diameter portion of 6a is in contact with the raceway surface 17c of the raceway disc 17, the valve is open (see FIG. 1), and
The large diameter portion of the tapered surface 16a of the conical roller 16 is the raceway disc 1.
When it is in contact with the track surface 17c of No. 7, the valve is in the closed state (see FIG. 6). Thus, when the fluid controller is changed from the valve open state to the valve close state, the handle is operated so that the large diameter side of the conical roller 16 contacts the raceway surface 17c, and the stem 7 is moved in a predetermined direction (this embodiment). In the example, it is rotated 90 degrees in the clockwise direction in FIG. Then, the conical roller 16
While rolling on the raceway surface 17c, sequentially moves from the position shown in FIG. 2 to the position shown in FIG. At this time, the conical roller 1
6, the large diameter portion side of the raceway surface 17c comes into contact with the raceway surface 17c in sequence in combination with the inward displacement of the raceway surface 17c.
When the large diameter portion side of the conical roller 16 comes into contact with the raceway surface 17c, the conical roller 16 moves the raceway disk 17 to the elastic body 18 in combination with the fact that the raceway surfaces 17c are formed at the same height.
It gradually pushes downward against the urging force of. Along with this, the diaphragm retainer 6 is pushed down via the disc spring, and the central portion of the upper diaphragm 2 and the pusher 9 are pushed.
And the central part of the lower diaphragm are pushed down in sequence. When the conical roller 16 moves to the position shown in FIG. 6, the rotation amount of the stem 7 is restricted by the rotation limiting pin 14 and the rotation limiting groove 17d, and the thickest part of the conical roller 16 contacts the raceway surface 17c. Contact, orbital disk 1
7 and the diaphragm retainer 6 are lowered to the lowest position. As a result, the central portion of the lower diaphragm rests on the valve seat and the fluid passage is closed. On the other hand, when the fluid controller is changed from the valve closed state to the valve opened state, the handle is operated so that the small diameter portion side of the conical roller 16 contacts the raceway surface 17c, and the stem 7 is moved in the opposite direction (see FIG. 6). Rotate 90 degrees counterclockwise). Then, the conical roller 16 rolls on the raceway surface 17c and sequentially moves from the position shown in FIG. 6 to the position shown in FIG. At this time, the small diameter portion side of the conical roller 16 comes into contact with the raceway surface 17c one by one in cooperation with the displacement of the raceway surface 17c. When the small diameter portion side of the conical roller 16 contacts the raceway surface 17c, the raceway disc 17 is pushed upward by the urging force of the elastic body 18. Along with this, the lower diaphragm, pusher 9, upper diaphragm 2, etc. are also pushed upward by fluid pressure or the like. And the conical roller 16
2 moves to the position shown in FIG. 2, the rotation amount of the stem 7 is restricted by the rotation limiting pin 14 and the rotation limiting groove 17d, and the narrow diameter portion of the conical roller 16 contacts the raceway surface 17c, and the raceway disc 17 Also, the diaphragm retainer 6 and the like are raised to the uppermost position. As a result, the lower diaphragm is completely separated from the valve seat and the fluid passage is opened.

In this fluid controller, since the conical roller 16 rolls on the raceway surface 17c when the stem 7 rotates, the stem 7
Can be smoothly and smoothly rotated with extremely small force.
Of course, since the conical roller 16 is rotatably supported by the horizontal shaft 15 via the radial bearing 19 and the upper end of the stem 7 is also supported by the cap 5 via the thrust bearing 13, the conical roller 16 and the conical roller are supported. The rotation of the roller 16 can be performed more smoothly and smoothly. Further, each raceway surface 17c of the raceway disc 17 is inclined inward so that each raceway surface 17c
Since c is pressed by the conical roller 16 arranged oppositely, when the stem 7 rotates, the conical roller 16 causes the orbit disc 17 to rotate.
Even if is pressed, the circumferential force for rotating the orbital disc 17 does not act on the orbital disc 17. As a result, the raceway disc 17 is not pressed against the guide pin 10, slides smoothly in the vertical direction and smoothly, and does not make the drive of the stem 7 heavy.

In the above embodiment, two raceway surfaces 17c are formed on the raceway disc 17 and the stem 7 is provided with the conical roller 16c.
Although two are attached, the number of them is not limited to the above embodiment. For example, in other embodiments, the number of raceway surfaces 17c and the number of conical rollers 16 may be three or more, respectively.

In the above-described embodiment, the horizontal shaft 15 is formed as a separate body and is attached to the stem 7. In other embodiments, the horizontal shaft 15 is integrated with the stem 7. It may be formed in.

In the above embodiment, the guide pin 10 embedded in the upper diaphragm edge retainer 3 is attached to the raceway disc 17.
The guide ring 17 is inserted into the guide hole 17a of the guide rail 17a so as to support the raceway disc 17 slidably in the vertical direction and non-rotatably. However, in another embodiment, the guide pin 10 is provided on the lower surface of the raceway disc 17.
May be planted and slidably inserted into the guide hole 17a formed in the upper diaphragm edge retainer 3, or the guide pin 10 and the guide hole 17a may be omitted and the inner peripheral surface of the bonnet 4 may be omitted. In addition to forming a vertical guide groove, a protrusion that is slidably inserted in the guide groove is formed on the outer peripheral surface of the raceway disc 17, and the raceway disc 17 is slidable in the vertical direction by the guide groove and the protrusion. It may be supported so that it cannot rotate.

In the above embodiment, the inclination angles α of the tapered surface 16a of the conical roller 16 and the raceway surface 17c of the raceway disk 17 are set to 17 degrees, respectively.
Is not limited to the above embodiment.

In the above embodiment, when the stem 7 is rotated 90 degrees forward and backward, the fluid passage is opened and closed.
In another embodiment, the length of the raceway surface 17c may be changed to open / close at another rotation angle.

In the above embodiment, the upper and lower diaphragms are arranged in the valve chamber 1a, respectively, and the lower diaphragm is seated on and off the valve seat. However, in other embodiments, It is also possible to dispose only one diaphragm in the valve box and move it to and from the valve seat.

In the above embodiment, the diaphragm is directly seated against the valve seat, but in another embodiment, the disk is arranged below the diaphragm and the disk is lowered by descending the diaphragm. The disc may be pushed to and released from the valve seat, or the diaphragm may be omitted and the disc may be arranged in the valve chamber 1a to be pushed to and released from the valve seat. .

[0028]

As described above, in the fluid controller of the present invention, the cam mechanism capable of vertically moving the diaphragm or the disc as the stem rotates is provided between the stem and the diaphragm or the disc that opens and closes the fluid passage. And a conical roller that rotatably supports the cam mechanism on the stem,
From a track disk that is supported on the body side so that it can move up and down and cannot rotate, and that has an activation surface on the top surface on which the conical roller rolls as the stem rotates, and an elastic body that biases and holds the track disk upward. Because of the structure, when the stem is rotated, the conical roller moves on the raceway surface while rotating.
As a result, the rotation of the stem can be smoothly and smoothly performed with an extremely small force as compared with the conventional fluid controller using the ball, the hemispherical concave portion and the arc-shaped guide groove.

[Brief description of drawings]

FIG. 1 is a partially omitted vertical sectional view showing a valve open state of a diaphragm type fluid controller according to an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view taken along the line AA of FIG.

FIG. 3 is an enlarged plan view of a track disc of a cam mechanism.

4 is a sectional view taken along line BB of FIG.

5 is a cross-sectional view taken along the line CC of FIG.

FIG. 6 is a partially omitted vertical cross-sectional view showing a valve closed state of the fluid controller.

FIG. 7 is an enlarged cross-sectional view taken along the line DD of FIG.

FIG. 8 is a vertical cross-sectional view showing a valve open state of a conventional fluid controller.

[Explanation of symbols]

1 is a body, 1a is a valve chamber, 7 is a stem, 8 is a cam mechanism,
15 is a horizontal axis, 16 is a conical roller, 16a is a tapered surface,
Reference numeral 17 is an orbital disc, 17c is an orbital surface, and 18 is an elastic body.

Claims (1)

[Claims] 1. A body having a fluid passage, a valve chamber, a valve seat, and the like, a diaphragm or disc disposed in the body so as to be movable up and down, and which opens and closes the fluid passage by contacting with the valve seat. It is installed above the disc and is installed between the stem and the stem that is rotatably and immovably in the axial direction on the body side and the diaphragm or the disc and the stem. In a fluid controller comprising a cam mechanism for moving a diaphragm or a disc up and down, the cam mechanism is rotatably supported by a horizontal shaft provided orthogonally to the stem, and the cam mechanism is sequentially moved away from the stem. A conical roller having a tapering surface that contracts and a substantially arcuate shape that is supported on the body side so that it can move up and down and cannot rotate, and that the conical roller rolls on the upper surface side as the stem rotates. A raceway disc that has a circular starting surface and that presses the diaphragm or disk downwards on the lower surface side, and an elastic body that holds the raceway disc upward and holds the raceway surface against the tapered surface of the conical roller. And consists of
Further, the substantially arcuate raceway surface is inclined inward so as to abut the tapered surface of the conical roller at the same height, and is sequentially displaced inward from the outer peripheral edge portion of the raceway disc. A fluid controller characterized by the above.