JPH06238152A - Vacuum container - Google Patents

Abstract

PURPOSE:To improve durability of an electric conductive member by providing a first electrode on a heat generator, providing a second electrode being freely attachable and detachable to the first electrode and providing a contact electrode of a movable electrode at the other end of the second electrode, in a vacuum container provided integrally a thin film-shaped generator on the surface. CONSTITUTION:The thin film-shaped heat generator 4 is formed in one body over nearly the whole circumference of a cylinder part of the vacuum container main body 1, and a metallic thin film electrode layer 6 is connected to both side edges over the whole width, and a metal strip of a fixing electrode 7 is deposited to the lower side part of the electrode layer 6, and the first electrode 5 is constituted of the electrode layer 6 and the fixing electrode 7. The second electrode 8 is constituted of a metal strip provided with a point electrode on the one end, and it is fixed to the container main body in freely attachably and detachably via isolation strips 12, 13. Since the second electrode is brought into contact with the first electrode and the movable electrode is brought into contact with the contact electrode 11 of the movable electrode being in contact with the second electrode, any force does not work on the first electrode and the thin film-shaped heat generator 4, thus the durability of the first electrode and the thin film-shaped heat generator is enhanced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum container which is integrally provided with a thin film heating element on the surface used in a semiconductor manufacturing process.

[0002]

2. Description of the Related Art In such a vacuum container, as shown in FIGS. 2 and 3, a protective layer 23 is provided on the surface of a thin film heating element 22 integrally provided on the outer periphery of a container body 20 with an insulating layer 21 interposed therebetween. And a thin-film conductive layer 24 is provided, and the electrode 25 is directly brought into pressure contact with the conductive layer 24.

Alternatively, as shown in FIG. 4, the conductive layer 24
Attach the fixed electrode 26 to a part of the
The movable electrode 27 is brought into pressure contact with the fixed electrode 26.

[0004]

The above-described mode in which the electrode 25 is directly brought into pressure contact with the conductive layer 24 has a drawback that the strength of the thin film conductive layer 24 is insufficient.

In addition, the fixed electrode 26 of the latter is attached to the movable electrode 27.
There is a problem in that the strength of brazing the fixed electrode 26 to the conductive layer 24 is insufficient in the mode of pressing.

It is an object of the present invention to provide a vacuum container which improves the durability of a current-carrying member for a heating element.

[0007]

According to the present invention, in a vacuum container having a thin film heating element integrally provided on the surface thereof, a first electrode is provided on the heating element and is attached to or detached from the first electrode. A free second electrode is provided, and a contact electrode for the movable electrode is provided at the other end of the second electrode.

The first electrode is a metal thin film formed over the entire width of both end edges of a thin film heating element integrally provided over substantially the entire circumference of the container body, and is connected to one end of each of the metal thin films. It is preferably composed of a metal piece.

Further, it is preferable that the second electrode is composed of a metal piece having a point electrode provided at one end, and is detachably attached to the container body via an insulator.

[0010]

In the vacuum container constructed as described above,
Since the second electrode is brought into contact with the first electrode, and the movable electrode is brought into contact with the contact electrode of the movable electrode which is in contact with the second electrode, the first electrode and the thin film heating element are not connected to each other. , No force acts. Therefore, the durability of the first electrode and the heating element is improved.

[0011]

Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1, a thin-film heating element 4 is integrally provided on a cylindrical portion 2 of a container body 1 of a vacuum container over substantially the entire circumference. An electrode layer 6 made of a metal thin film is joined to both ends of the heating element 4 over the entire width by means not shown, and a fixed electrode 7 of a metal piece is welded to the lower side of the electrode layer 6. The electrode layer 6 and the fixed electrode 7 form the first electrode 5.

Second electrodes 8 are provided which are detachably contacted with the first electrodes 5 and 5. The second electrode 8 is formed of an L-shaped metal piece extending from the fixed electrode 7 side to the flange portion 3 side of the container body 1. A point electrode (not shown) for the fixed electrode 7 is provided at an end of the vertical piece 9 of the second electrode 8, and a contact electrode 11 of the movable electrode 27 (FIG. 4) is provided at an end of the horizontal piece 10. Is provided. Then, the second electrode 8 is made up of the two insulating pieces 1 by the horizontal piece 10.
It is sandwiched between 2 and 13 and attached to the flange portion 3.

Therefore, in the state shown in the figure, the movable electrode 27 is pressed against the contact electrode 11 of the second electrode 8 to conduct electricity,
No force acts on the electrode layer 6 of the first electrode and the heating element 4.

[0015]

Since the present invention is constructed as described above, it is possible to improve the durability of the current-carrying member for the heating element.

Further, it is convenient that the second electrode can be removed during cleaning or when the electrode is damaged.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a side sectional view showing an example of a conventional vacuum container.

FIG. 3 is a side sectional view around the heating element of FIG.

FIG. 4 is a side sectional view showing another mode of conventional energization.

[Explanation of symbols]

 1, 20 ... Container body 2 ... Cylindrical portion 3 ... Flange portion 4, 22 ... Heating element 5 ... First electrode 6 ... Electrode layer 7 ... Fixed electrode 8. ..Second electrode 9 ... longitudinal piece 10 ... horizontal piece 12,13 ... insulating piece 21 ... insulating layer 23 ... protective layer 24 ... conductive layer 25 ... electrode 26・ ・ ・ Fixed electrode 27 ・ ・ ・ Movable electrode

Claims (1)

[Claims] 1. A vacuum container in which a thin-film heating element is integrally provided on the surface thereof, wherein a first electrode is provided on the heating element, and a detachable second electrode is provided on the first electrode. A vacuum container comprising an electrode for contacting a movable electrode at the other end of the second electrode.