JPH06226023A - Chemical supply method for precoating type bag filter device - Google Patents

Chemical supply method for precoating type bag filter device

Info

Publication number
JPH06226023A
JPH06226023A JP5016491A JP1649193A JPH06226023A JP H06226023 A JPH06226023 A JP H06226023A JP 5016491 A JP5016491 A JP 5016491A JP 1649193 A JP1649193 A JP 1649193A JP H06226023 A JPH06226023 A JP H06226023A
Authority
JP
Japan
Prior art keywords
drug
chamber
bag filter
precoat
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5016491A
Other languages
Japanese (ja)
Other versions
JP2558048B2 (en
Inventor
Yukihiro Sotani
幸広 曽谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plantec Inc
Original Assignee
Plantec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plantec Inc filed Critical Plantec Inc
Priority to JP5016491A priority Critical patent/JP2558048B2/en
Priority to KR1019930015036A priority patent/KR970010162B1/en
Priority to TW82106267A priority patent/TW224946B/en
Publication of JPH06226023A publication Critical patent/JPH06226023A/en
Application granted granted Critical
Publication of JP2558048B2 publication Critical patent/JP2558048B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2273/00Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/12Influencing the filter cake during filtration using filter aids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

PURPOSE:To provide the chemical supply method for a precoating type bag filter device which prevents a clogging accident in a chemical transportation route, continues high filtration performance in a stable state, efficiently utilizes the chemicals to be used and can decrease the amts. of the unreacted chemicals. CONSTITUTION:This chemical supply method is for the precoating type bag filter device which is constituted of unit dust collection mechanisms each consisting of plural filter chambers 51, a hopper chamber 52 and a clean gas chamber 4 and forms precoating layers on the surfaces of plural filter cloths 2 installed in the filter chambers 51 before the conduction of a filtration operation. The precoating layers are rapidly formed by supplying the necessary and sufficient amts. of the chemicals 9 to each of the unit dust collection mechanisms from a chemical supply device only in the block where a dislodging operation is completed. The precoating layers are uniformalized by decreasing the amts. of the chemicals to be supplied by the chemical supply device in the stage before the end of such formation and thereafter, chemical pipings 95 and chemical supply branch pipes 97, etc., are cleaned.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、気体流からダスト及び
浮遊物質等を分離し、除去または回収するバグフィルタ
装置に関し、特に濾過作業を行う前に濾布の表面にプレ
コート層を形成するプレコート式バグフィルタ装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bag filter device for separating dusts and suspended solids from a gas stream and removing or recovering the dusts. Type bag filter device.

【0002】[0002]

【従来の技術】現在実用に供されているバグフィルタ装
置の形式のうち、最も多く採用されているものは、薬剤
を排ガスに同体させて濾布上に付着せしめ、運転の継続
とともに濾布上に堆積した粉じん層を、パルスジェット
方式で払い落とす形式である。
2. Description of the Related Art Among the types of bag filter devices currently in practical use, the most widely used one is to make the chemicals contained in the exhaust gas adhere to the filter cloth and to keep it on the filter cloth as the operation continues. The dust layer deposited on the surface is removed by the pulse jet method.

【0003】また、濾過室の分割上からは、単一室構造
と多室構造の両方があるが、本願では多室構造形排ガス
同伴方式を従来技術の代表例として説明する。
Although there are both a single-chamber structure and a multi-chamber structure from the viewpoint of dividing the filtration chamber, the multi-chamber structure type exhaust gas entrainment system will be described as a representative example of the prior art in the present application.

【0004】図5乃至図7は従来のパルスジェット式多
室構造形排ガス同伴方式バグフィルタ装置の概略構成を
示す。
5 to 7 show a schematic structure of a conventional pulse jet type multi-chamber structure type exhaust gas entrainment type bag filter device.

【0005】図5乃至図7において、aはバグフィルタ
装置を構成する単位集じん機構を収納し、相互を区分す
るケーシングであり、それぞれの単位集じん機構は、複
数の濾布bを懸架する仕切板cによって、下部の濾過室
dと上部の清浄ガス室eとに2分割されている。
In FIGS. 5 to 7, reference numeral a is a casing for accommodating a unit dust collecting mechanism constituting a bag filter device and for partitioning the unit dust collecting mechanism from each other. Each unit dust collecting mechanism suspends a plurality of filter cloths b. The partition plate c divides the filter chamber d in the lower part and the clean gas chamber e in the upper part into two parts.

【0006】清浄ガス室eには、図示しない空気圧縮源
に連接される開閉弁を通じて、各濾布b内に圧縮空気を
ジェットパルス状に噴射させるための複数のノズルf1
を備えた空気吹込管fが配設されている。
In the clean gas chamber e, a plurality of nozzles f1 for injecting compressed air in a jet pulse shape into each filter cloth b through an opening / closing valve connected to an air compression source (not shown).
An air blow-in pipe f provided with is provided.

【0007】濾過室dの下方は、粉じん収集用のホッパ
室hを構成し、その底部には粉じんを排出するための排
出機構jが連接されている。
A hopper chamber h for collecting dust is formed below the filtration chamber d, and a discharge mechanism j for discharging dust is connected to the bottom of the hopper chamber h.

【0008】ホッパ室hの外側面には、図示しない焼却
炉又は燃焼炉等で発生したばいじんや酸性有害ガス等を
含む燃焼ガスを導入する主煙道kが配設され、主煙道k
の途中には、図示しない有害ガス除去装置から輸送され
る中和用の薬剤mが連続的に供給されており、薬剤mは
燃焼ガスと混合して排ガスgとなる。
On the outer side surface of the hopper chamber h, there is provided a main flue k for introducing combustion gas containing soot and dust, acid harmful gas, etc. generated in an incinerator or a combustion furnace (not shown).
In the middle of, the chemical m for neutralization transported from a harmful gas removing device (not shown) is continuously supplied, and the chemical m is mixed with the combustion gas to form the exhaust gas g.

【0009】排ガスgは、主煙道kから各単位集じん機
構ごとに分岐された分岐導入ダクトpを介して、各ホッ
パ室hに流入し、その間に含有する酸性有害ガスと薬剤
mとが中和反応を起こしながら濾過室d内に懸架された
複数の濾布bの表面に到達する。
Exhaust gas g flows into each hopper chamber h from a main flue k through a branch introduction duct p branched for each unit dust collecting mechanism, and acidic harmful gas and chemical m contained therein are separated. While reaching the neutralization reaction, it reaches the surfaces of the plurality of filter cloths b suspended in the filtration chamber d.

【0010】後述の払い落し作業終了後の単位集じん機
構は、通気抵抗が低いために連続操業中の他区画よりも
大量の排ガスgが流入し、濾布bを通過する際に、その
濾過能力により、反応済及び未反応の薬剤mが濾過され
て表面に付着し、濾過・中和作業の主体となる一部反応
済の薬剤mによる薬剤層b1(図6参照)が形成され
る。
The unit dust-collecting mechanism after the completion of the scrubbing work, which will be described later, has a low ventilation resistance, so that a larger amount of the exhaust gas g flows into the unit than the other sections in continuous operation, and when it passes through the filter cloth b, it is filtered. Due to the ability, the reacted and unreacted drug m is filtered and adheres to the surface, and the drug layer b1 (see FIG. 6) is formed by the partially reacted drug m, which is the main component of the filtration / neutralization operation.

【0011】そして、この後の通ガス中においては、排
ガスg中に残存する酸性有害ガスは薬剤層b1内の未反
応薬剤mと中和反応を起すとともに、排ガスgと共に飛
来するばいじん及び反応済と未反応の薬剤mは薬剤層b
1表面に順次堆積して粉じん層b2(図6参照)を形成
する。
Then, in the subsequent passing of the gas, the acidic harmful gas remaining in the exhaust gas g causes a neutralization reaction with the unreacted drug m in the drug layer b1, and also the soot and dust and the reacted particles flying with the exhaust gas g. And unreacted drug m is drug layer b
One surface is sequentially deposited to form a dust layer b2 (see FIG. 6).

【0012】従って、排ガスgが粉じん層b2及び薬剤
層b1を通過する際に、保有するばいじんが捕捉される
とともに、残存する酸性有害ガスが未反応の薬剤mと接
触することにより、効率良く中和反応して清浄ガスnと
なり、清浄ガス室eに排出される。
[0012] Therefore, when the exhaust gas g passes through the dust layer b2 and the drug layer b1, the retained dust is captured, and the residual acidic harmful gas comes into contact with the unreacted drug m, so that the medium is efficiently treated. The clean reaction is performed as a clean gas n and is discharged into the clean gas chamber e.

【0013】清浄ガスnは、清浄ガス室eの外側面に配
設された分岐排出ダクトqに挿入された清浄ガス開閉弁
rを通り、排出主ダクトsを経て、図示しない誘引通風
機に吸引されて、図示しない煙突から大気中に放出され
る。
The clean gas n passes through a clean gas on-off valve r inserted in a branch discharge duct q arranged on the outer surface of the clean gas chamber e, passes through a discharge main duct s, and is sucked into an unillustrated draft fan. Then, it is released into the atmosphere from a chimney (not shown).

【0014】この状態で運転を継続すると、飛来し続け
る燃焼ガス中のばいじん及び反応済と未反応の薬剤mに
より、粉じん層b2が次第に成長して通気抵抗が増加す
る。そこで、該当する単位集じん機構の清浄ガス開閉弁
rを閉鎖して排ガスgの流入を停止せしめた後、空気吹
込管fから圧縮空気をジェット噴射させることにより、
濾布bの表面に付着した薬剤層b1と堆積した粉じん層
b2を剥離・落下させる。この後、清浄ガス開閉弁rを
再び開放することで排ガスgの流入を再開させる。
When the operation is continued in this state, the dust layer b2 gradually grows due to the dust and the reacted and unreacted chemicals m in the combustion gas that continues to fly, and the ventilation resistance increases. Therefore, by closing the clean gas on-off valve r of the corresponding unit dust collecting mechanism to stop the inflow of the exhaust gas g, and then jetting the compressed air from the air blowing pipe f,
The drug layer b1 attached to the surface of the filter cloth b and the accumulated dust layer b2 are peeled off and dropped. After that, the clean gas on-off valve r is opened again to restart the inflow of the exhaust gas g.

【0015】この払い落し操作を各単位集じん機構ごと
に順次行うことにより、単位集じん機構の各濾布bに付
着・堆積したばいじん及び反応済と未反応の薬剤m等か
らなる捕集灰を除去することができる。なお、ホッパ室
hに落下した捕集灰は、排出機構jにより、外部に排出
するようになされている。
By sequentially performing this cleaning operation for each of the unit dust collecting mechanisms, the collected ash consisting of the soot and dust adhering to and depositing on each filter cloth b of the unit dust collecting mechanism and the reacted and unreacted chemicals m and the like. Can be removed. Note that the collected ash that has fallen into the hopper chamber h is discharged to the outside by the discharging mechanism j.

【0016】[0016]

【発明が解決しようとする課題】従来の多室構造形排ガ
ス同伴方式バグフィルタ装置の場合は、薬剤層b1を形
成する薬剤mは主煙道kまたは図示しない前置反応塔に
一括して供給されている。
In the case of the conventional multi-chamber structure type exhaust gas entrainment type bag filter device, the drug m forming the drug layer b1 is supplied all at once to the main flue k or a pre-reaction tower (not shown). Has been done.

【0017】そこで、通気抵抗が増加した単位集じん機
構の払い落しを行えば、その区画の通気抵抗が一挙に低
下するために、排ガスgがその区画に集中的に流入し、
大量の薬剤mが同伴されるが、薬剤層b1の成長ととも
にその区画への排ガス流量が次第に低下して薬剤供給量
も自動的に低下する。
Therefore, if the unit dust collecting mechanism with increased ventilation resistance is removed, the ventilation resistance of the section is reduced all at once, so that the exhaust gas g intensively flows into the section.
A large amount of the drug m is entrained, but as the drug layer b1 grows, the flow rate of exhaust gas to that section gradually decreases, and the drug supply amount also automatically decreases.

【0018】然し、払い落し直後の最も濾過・中和能力
の低い区画に排ガスgが大量に流入するために、薬剤層
b1及び粉じん層b2が成長する迄は、ばいじん及び未
反応の酸性有害ガスが排出されることになり、他の運転
継続中の単位集じん機構を含めた装置全体のばいじん捕
捉率及び有害ガス除去率は一時的に低下する結果とな
る。
However, since a large amount of exhaust gas g flows into the section having the lowest filtration / neutralization capacity immediately after being blown off, soot and unreacted acidic harmful gas are kept until the drug layer b1 and the dust layer b2 grow. As a result, the dust trapping rate and the harmful gas removal rate of the entire apparatus including the unit dust collecting mechanism during other operation are temporarily reduced.

【0019】一方、薬剤mが連続的に供給されているた
めに、薬剤mは払い落し直後はその一部が他の区画に、
定常運転時には全部が各区画に供給されるために、薬剤
層b1が形成された以後に供給し続けられる未反応薬剤
mは過剰分であり、粉じん層b2の増大を助長すること
になる。
On the other hand, since the medicine m is continuously supplied, a part of the medicine m is immediately discharged to the other section.
Since all is supplied to each section during steady operation, the unreacted drug m that is continuously supplied after the drug layer b1 is formed is an excess amount, which promotes the increase of the dust layer b2.

【0020】従って、通気抵抗の上昇が早くなるために
払い落し間隔が短くなり、未反応薬剤を多量に排出する
結果、薬剤費が嵩むだけでなく、重金属やダイオキシン
類の有害物質を含むために「特別管理廃棄物」に指定さ
れている捕集灰(排出灰)の量を増加させることにな
り、後処理費用の増大を招くことになる。
[0020] Therefore, since the ventilation resistance rises quickly, the interval for removing the particles is shortened, and a large amount of unreacted drug is discharged. As a result, not only the drug cost is increased, but also harmful substances such as heavy metals and dioxins are contained. This will increase the amount of collected ash (exhaust ash) designated as “specially controlled waste”, which will increase post-treatment costs.

【0021】即ち、従来の多室構造は、払い落し時の剥
離粉じんを他室に拡散させないための区画に過ぎず、薬
剤mの適量供給及び濾過性能の安定には効力を発揮して
いなかった。
That is, the conventional multi-chamber structure is merely a section for preventing the release dusts from diffusing into other chambers at the time of brushing off, and has not been effective in supplying an appropriate amount of the drug m and stabilizing the filtration performance. .

【0022】一方、これらの問題を解決するために、単
位集じん機構ごとに個別に薬剤供給手段を備えてなるプ
レコート式バグフィルタ装置が提案されているが、薬剤
供給休止期間中の残存薬剤による輸送経路の閉塞や、温
度差に起因する結露による薬剤供給口先端部の閉塞など
が危惧されるとともに、高速かつ短時間でのプレコート
層形成時に発生しがちなプレコート層厚の不均一による
濾過性能の低下も考えられる。
On the other hand, in order to solve these problems, there has been proposed a precoat type bag filter device which is provided with a drug supply means for each unit dust collection mechanism. There is concern that the transport route may be blocked, or the chemical agent supply port tip may be blocked due to dew condensation due to temperature differences, and the pre-coat layer thickness unevenness that tends to occur during high-speed and short-time formation of the pre-coat layer may result in poor filtration performance. It is possible that it will decline.

【0023】[0023]

【課題を解決するための手段】本発明のプレコート式バ
グフィルタ装置における薬剤供給方法は、清浄ガス室と
濾過室及びホッパ室から成る複数の単位集じん機構によ
り構成されたバグフィルタ装置の濾過室内に設置された
濾布の表面に濾過作業を行う前段階でプレコート層を形
成するプレコート式バグフィルタ装置における薬剤供給
方法であって、前記単位集じん機構ごとに、薬剤供給装
置から供給される薬剤を空送手段によって調整弁を備え
た薬剤輸送経路を経て個別に供給するとともに、プレコ
ート層形成後は前記薬剤供給装置による薬剤の供給を停
止し、前記空送手段により前記薬剤輸送経路に残留する
薬剤を除去する。
SUMMARY OF THE INVENTION A chemical supply method in a precoat type bag filter device of the present invention is a bag filter device filter chamber constituted by a plurality of unit dust collecting mechanisms consisting of a clean gas chamber, a filter chamber and a hopper chamber. A method for supplying a drug in a precoat type bag filter device, wherein a precoat layer is formed in a stage before performing a filtering operation on the surface of a filter cloth installed in the device, wherein each unit dust collecting mechanism supplies the drug from the drug supply device. Are individually supplied by the air-delivery means via a drug delivery route provided with a regulating valve, and after the precoat layer is formed, the supply of the drug by the drug delivery device is stopped and the air-delivery means remains in the drug delivery route. Remove the drug.

【0024】また、本発明のプレコート式バグフィルタ
装置における薬剤供給方法は、清浄ガス室と濾過室及び
ホッパ室から成る複数の単位集じん機構により構成され
たバグフィルタ装置の濾過室内に設置された濾布の表面
に濾過作業を行う前段階でプレコート層を形成するプレ
コート式バグフィルタ装置における薬剤供給方法であっ
て、前記単位集じん機構ごとに、薬剤供給装置から供給
される薬剤を空送手段によって調整弁を備えた薬剤輸送
経路を経て個別に供給するとともに、プレコート層形成
終了前の段階でプレコート層の層厚を平均化せしめるよ
う上記薬剤供給装置による薬剤の供給量を減少させる。
Further, the chemical supply method in the precoat type bag filter device of the present invention is installed in the filter chamber of the bag filter device composed of a plurality of unit dust collecting mechanisms consisting of the clean gas chamber, the filter chamber and the hopper chamber. A method for supplying a drug in a precoat type bag filter device, wherein a precoat layer is formed on a surface of a filter cloth before performing a filtering operation, wherein a drug supplied from the drug supply device is fed by means for each unit dust collecting mechanism. In addition to individually supplying via the drug delivery path provided with a regulating valve, the amount of drug supplied by the drug supply device is reduced so that the layer thickness of the precoat layer is averaged before the completion of formation of the precoat layer.

【0025】[0025]

【作用】払い落し作業を終了した単位集じん機構のみ
に、必要にして十分な量の薬剤を薬剤供給装置から空送
手段によって調整弁を備えた薬剤輸送経路を経て個別に
供給して、濾過・中和作用を司るプレコート層を短時間
で形成した後、前記薬剤供給装置による薬剤の供給を停
止し、空送手段により上記薬剤輸送経路に残留する薬剤
を除去して該薬剤輸送経路の閉塞事故を防止する。
[Function] The necessary and sufficient amount of the medicine is individually supplied from the medicine supplying device to the unit dust collecting mechanism which has completed the cleaning operation by the emptying means through the medicine transportation route provided with the adjusting valve, and is filtered. After the precoat layer that controls the neutralizing action is formed in a short time, the supply of the drug by the drug supply device is stopped, and the drug remaining in the drug transport route is removed by the emptying means to block the drug transport route. Prevent accidents.

【0026】また、上述と同様にプレコート層を短時間
で形成する終了前の段階で薬剤供給装置による薬剤の供
給量を減少させることで、プレコート層の層厚の平均化
を図り、濾過性能を向上させる。
Further, similarly to the above, by reducing the supply amount of the drug by the drug supply device before the end of forming the precoat layer in a short time, the layer thickness of the precoat layer is averaged and the filtration performance is improved. Improve.

【0027】[0027]

【実施例】以下、本発明の一実施例を図面を参照して説
明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0028】図1及び図2は本発明に係るプレコート式
バグフィルタ装置における薬剤供給方法を実施するプレ
コート式バグフィルタ装置の概略構成を示し、図3は本
装置における濾布表面の付着状態を示し、図4は本装置
の概略フローを示している。
1 and 2 show a schematic structure of a precoat type bag filter device for carrying out the chemical supply method in the precoat type bag filter device according to the present invention, and FIG. 3 shows an adhered state of the filter cloth surface in this device. FIG. 4 shows a schematic flow of this device.

【0029】図1及び図2において、1はプレコート式
バグフィルタ装置を構成する複数個の単位集じん機構を
収納するケーシングであり、それぞれの単位集じん機構
は、複数の濾布2を懸架する仕切板3によって上部の清
浄ガス室4と下部の気体流入室5に区分されている。
In FIG. 1 and FIG. 2, reference numeral 1 is a casing for accommodating a plurality of unit dust collecting mechanisms constituting a precoat type bag filter device, and each unit dust collecting mechanism suspends a plurality of filter cloths 2. The partition plate 3 divides the upper clean gas chamber 4 and the lower gas inflow chamber 5.

【0030】前記清浄ガス室4は、気体流入室5に複数
の濾布2を介して連通された空間であり、各清浄ガス室
4は清浄ガス開閉弁41を介して、共通の清浄ガスダク
ト42に接続され、図示しない誘引通風機に連接されて
いる。
The clean gas chamber 4 is a space communicated with the gas inflow chamber 5 via a plurality of filter cloths 2, and each clean gas chamber 4 has a common clean gas duct 42 via a clean gas opening / closing valve 41. And is connected to an induction fan (not shown).

【0031】清浄ガス室4には、複数の濾布2の横1列
に対して、空気吹込管6が1本ずつ配設され、空気吹込
管6は空気開閉弁61を通じて空気ヘッダ62に接続さ
れ、図示しない圧縮空気源に連接されている。
In the clean gas chamber 4, one air blowing pipe 6 is provided for each horizontal row of a plurality of filter cloths 2, and the air blowing pipe 6 is connected to an air header 62 through an air opening / closing valve 61. And is connected to a compressed air source (not shown).

【0032】さらに、空気吹込管6の下部には、複数の
濾布2内に払い落し用圧縮空気を吹込むためのノズル6
3が該濾布2の開口部に対峙して配設されている。これ
ら空気吹込管6、空気開閉弁61、空気ヘッダ62、ノ
ズル63及び圧縮空気源によりダスト払い落し機構を構
成している。
Further, at the lower part of the air blowing pipe 6, a nozzle 6 for blowing blown compressed air into the plurality of filter cloths 2 is provided.
The filter cloth 3 is disposed so as to face the opening of the filter cloth 2. The air blowing pipe 6, the air opening / closing valve 61, the air header 62, the nozzle 63, and the compressed air source constitute a dust removing mechanism.

【0033】前記気体流入室5は、複数の隔壁11によ
り区画された複数の濾過室51と各濾過室51の下方に
連なり同じく区画されたホッパ室52に分割されてお
り、各ホッパ室52の下部には、濾布2から剥離・落下
する粉じん等を排出するための各単位集じん機構に共通
のダスト排出機構53が連接されている。
The gas inflow chamber 5 is divided into a plurality of filtration chambers 51 partitioned by a plurality of partition walls 11 and a hopper chamber 52 which is continuous below the filtration chambers 51 and is similarly partitioned. A dust discharging mechanism 53, which is common to each unit dust collecting mechanism for discharging dust and the like separated and dropped from the filter cloth 2, is connected to the lower portion.

【0034】前記複数のホッパ室52の外側には、主煙
道7が構築されており、この主煙道7より各ホッパ室5
2に至る分岐煙道71が配管されている。
A main flue 7 is constructed outside the plurality of hopper chambers 52. From the main flue 7, each hopper chamber 5 is constructed.
A branch flue 71 leading to 2 is piped.

【0035】上述した主煙道7と分岐煙道71とにより
含じん気体導入ダクトが構成されており、この気体導入
ダクトを介して各ホッパ室52には、図示しない焼却炉
または燃焼炉で発生したばいじんや酸性有害ガス等を含
む排ガス81が流入する。
A dust-containing gas introduction duct is constituted by the main flue 7 and the branch flue 71 described above, and each hopper chamber 52 is generated in the incinerator or combustion furnace (not shown) via this gas introduction duct. Exhaust gas 81 containing dust and soot and acidic harmful gas flows in.

【0036】前記各ホッパ室52には、有害ガス除去手
段が連設されている。有害ガス除去手段は、図4に示す
ように、薬剤供給装置Aと、空送手段Bと、薬剤輸送経
路Cとから構成されている。
A harmful gas removing means is continuously provided in each of the hopper chambers 52. As shown in FIG. 4, the harmful gas removing unit is composed of a drug supply device A, an air feeding unit B, and a drug transporting route C.

【0037】薬剤供給装置Aは、消石灰等の中和用薬剤
9を貯留する薬剤貯留槽91と、該薬剤貯留槽91の下
方に取付けられ、中和用薬剤9を単位集じん機構に所定
量供給するためのスクリューコンベア92及び定量供給
フィーダ93とで構成されている。
The chemical supply device A is installed below the chemical storage tank 91 for storing the neutralization chemical 9 such as slaked lime, and the neutralization chemical 9 is supplied to the unit dust collecting mechanism in a predetermined amount. It is composed of a screw conveyor 92 for supplying and a fixed quantity supply feeder 93.

【0038】空送手段Bは、前記薬剤供給装置Aから供
給される中和用薬剤9を前記薬剤輸送経路Cを経て各ホ
ッパ52に供給するもので、供給ブロア94で構成され
ている。
The emptying means B supplies the neutralizing chemical 9 supplied from the chemical supply device A to each hopper 52 via the chemical transport path C, and is composed of a supply blower 94.

【0039】薬剤輸送経路Cは、一端が前記供給ブロワ
94に連設されるとともに、一端側において前記薬剤供
給装置Aの定量供給フィーダ93から中和用薬剤9の供
給を受ける薬剤配管95と、該薬剤配管95から分岐さ
れて各単位集じん機構の各ホッパ室52にそれぞれ連通
された薬剤供給分岐管97と、各薬剤供給分岐管97に
設けられた薬剤調節弁96とから構成されている。
The medicine transporting route C has one end connected to the supply blower 94, and one end side which receives the supply of the neutralizing medicine 9 from the constant quantity supply feeder 93 of the medicine supply apparatus A, and a medicine pipe 95. It is composed of a medicine supply branch pipe 97 branched from the medicine pipe 95 and communicated with each hopper chamber 52 of each unit dust collecting mechanism, and a medicine control valve 96 provided in each medicine supply branch pipe 97. .

【0040】なお、図4においては各単位集じん機構を
左側から、、として、必要に応じてこれら各単位
集じん機構、、に配設された前記各構成部材の各
符号の後に当該単位集じん機構の番号を付与すること
で、前記各構成部材の符号を3桁とし区別する。
It should be noted that in FIG. 4, each unit dust collecting mechanism is arranged from the left side, and each unit dust collecting mechanism, if necessary, is followed by each reference numeral of each constituent member. By assigning the number of the dust mechanism, the reference numerals of the above-mentioned respective constituent members are differentiated into three digits.

【0041】次に、上述のように構成されたプレコート
式バグフィルタ装置により本発明の薬剤供給方法を実施
した場合におけるプレコート層形成と薬剤供給経路清掃
作業及び濾過作業から払い落しを経て濾過作業再開まで
の動作について説明する。
Next, when the drug supply method of the present invention is carried out by the precoat type bag filter device configured as described above, the precoat layer is formed, the drug supply route cleaning work and the filtration work are carried out, and then the filtration work is restarted. The operation up to is described.

【0042】例えば、図4における単位集じん機構が
後述する払い落し作業を終わったとし、該単位集じん機
構の薬剤調節弁961のみを開いて、有害ガス除去装
置からの中和用薬剤9を薬剤調節弁961、薬剤供給分
岐管971を経てホッパ室521に供給すれば、中和用
薬剤9は排ガス811に吹上げられて上昇し、複数の濾
布201の表面に到達して、短時間で図3に示す中和用
薬剤9のみによるプレコート層21を形成する。
For example, suppose that the unit dust collecting mechanism in FIG. 4 has finished the scrubbing work described later, and only the chemical regulating valve 961 of the unit dust collecting mechanism is opened to remove the neutralizing chemical 9 from the harmful gas removing device. When supplied to the hopper chamber 521 via the chemical regulating valve 961 and the chemical supply branch pipe 971, the neutralizing chemical 9 is blown up by the exhaust gas 811 and rises, reaches the surfaces of the plurality of filter cloths 201, and is short-timed. Then, the precoat layer 21 is formed only by the neutralizing agent 9 shown in FIG.

【0043】このようにプレコート層21が形成される
と、図4に示すスクリューコンベア92及び定量供給フ
ィーダ93を停止して薬剤貯留槽91からの中和用薬剤
9の供給を停止させるが、供給ブロワ94は作動状態を
継続させておき、この供給ブロワ94による空気の圧送
作用で薬剤配管95、薬剤調節弁961、及び薬剤供給
分岐管971内に残存する中和用薬剤9をホッパ室52
1内に排出して除去する。従って、薬剤供給経路Cが清
掃され、薬剤供給経路C内の残留薬剤の固化による閉塞
や薬剤供給分岐管971の出口周辺部での結露による薬
剤吸湿固着に起因する閉塞事故を防止できる。
When the precoat layer 21 is formed in this manner, the screw conveyor 92 and the fixed amount supply feeder 93 shown in FIG. 4 are stopped to stop the supply of the neutralizing chemical 9 from the chemical storage tank 91. The blower 94 is kept in an operating state, and the feed pipe 94 pushes air to pump the chemical pipe 95, the chemical regulating valve 961, and the neutralizing chemical 9 remaining in the chemical supply branch pipe 971 into the hopper chamber 52.
Discharge into 1 to remove. Therefore, it is possible to prevent the clogging accident due to the cleaning of the drug supply path C, the clogging due to the solidification of the residual drug in the drug supply path C, and the clogging of the drug supply branch pipe 971 due to the desorption of the drug due to the dew condensation on the periphery of the outlet.

【0044】そして、プレコート層形成後においては、
主煙道7から分岐煙道711に入った排ガス811がホ
ッパ室521に流入し、上昇して複数の濾布201の表
面に形成されたプレコート層21を通過する。その際、
排ガス811中に保有するばいじんをプレコート層21
に吸着・濾過させるとともに、同じく含有する酸性有害
ガスを中和用薬剤9との中和作用により除去して清浄ガ
ス82となり、清浄ガス室401に排出される。
After forming the precoat layer,
The exhaust gas 811 that has entered the branch flue 711 from the main flue 7 flows into the hopper chamber 521, rises, and passes through the precoat layer 21 formed on the surfaces of the plurality of filter cloths 201. that time,
Pre-coat layer 21 with soot and dust retained in exhaust gas 811
While being adsorbed and filtered by, the acidic harmful gas contained therein is removed by the neutralizing action with the neutralizing agent 9 to become the clean gas 82, which is discharged to the clean gas chamber 401.

【0045】これは、例えば図2の右側の単位集じん機
構の状態である。
This is the state of the unit dust collecting mechanism on the right side of FIG. 2, for example.

【0046】この濾過作業の継続に伴い、プレコート層
21の表面にばいじんが堆積し、図3に示すばいじん層
22を形成して行くが、このばいじん層22の成長によ
り排ガス81の通気抵抗が増大すれば、まず該当する単
位集じん機構、例えば図4の単位集じん機構の清浄ガ
ス開閉弁412を閉鎖して、その濾過室512内への排
ガス812の流入をしゃ断する。
As the filtration work continues, dust particles are deposited on the surface of the precoat layer 21 to form the dust layer 22 shown in FIG. 3, and the growth of the dust layer 22 increases the ventilation resistance of the exhaust gas 81. Then, first, the clean gas on-off valve 412 of the corresponding unit dust collecting mechanism, for example, the unit dust collecting mechanism of FIG. 4, is closed to block the inflow of the exhaust gas 812 into the filtration chamber 512.

【0047】続いて、この濾過室512に対応する空気
開閉弁612を開放して、図示しない空気源の圧縮空気
を、ノズル63から、上記濾過室512内の濾布202
内に短時間ジェット噴射させれば、清浄ガス室402内
の清浄ガス82は、ジェット噴流に誘起された2次気流
となり、噴射空気と共に濾布202内に逆流し、ジェッ
ト噴流の衝突波と2次空気の逆流効果により、濾布20
2表面に付着するプレコート層21及びばいじん層22
より成る捕集灰を剥離させることができる。
Subsequently, the air opening / closing valve 612 corresponding to the filtration chamber 512 is opened, and compressed air from an air source (not shown) is discharged from the nozzle 63 through the filter cloth 202 in the filtration chamber 512.
If the jet gas is jetted into the inside for a short time, the clean gas 82 in the clean gas chamber 402 becomes a secondary air flow induced by the jet jet, and flows back into the filter cloth 202 together with the jet air, and the collision wave of the jet jet and the 2 Due to the backflow effect of the secondary air, the filter cloth 20
2 Precoat layer 21 and dust layer 22 attached to the surface
The collected ash consisting of can be peeled off.

【0048】この噴射を単位集じん機構の濾布202
群の全ての列に対して行えば、この区画の払い落し作業
が完了する。
This spray is used as a unit dust collecting mechanism filter cloth 202.
If you have done this for all the columns of the group, the work of clearing this section is completed.

【0049】この払い落し作業の過程を示すものとし
て、図2の中央の単位集じん機構において、左端の濾布
2が、排ガス81の流入が停止されてプレコート層21
及びばいじん層22から成る捕集灰が付着している状
態、中央の濾布2が空気開閉弁61を開放してノズル6
3から圧縮空気を噴射して捕集灰を剥離せしめ、粉じん
が落下中の状態、右端の濾布2が前記の払い落し作業が
終了した状態を示している。
In order to show the process of this removal work, in the unit dust collecting mechanism in the center of FIG. 2, the filter cloth 2 at the left end is stopped by the exhaust gas 81 from flowing into the precoat layer 21.
In the state in which the collected ash composed of the dust layer 22 and the dust layer 22 is attached, the filter cloth 2 in the center opens the air opening / closing valve 61 to open the nozzle 6
3 shows a state in which compressed air is jetted from the nozzle 3 to separate the collected ash, dust is falling, and the filter cloth 2 at the right end is in a state in which the above-mentioned wiping operation is completed.

【0050】そして、剥離した捕集灰は、ホッパ室52
の底部に堆積した後、ダスト排出機構53により外部に
排出される。
Then, the separated collected ash is collected in the hopper chamber 52.
After being deposited on the bottom of the, the dust is discharged to the outside by the dust discharging mechanism 53.

【0051】以上の払い落し作業がおわれば、図4の清
浄ガス開閉弁412及び薬剤調節弁962を開放して、
薬剤供給分岐管972より中和用薬剤9を供給すれば、
図示しない誘引通風機の吸引力により、排ガス812が
上昇して複数の濾布2の表面に再びプレコート層21が
形成できる。
After the above-mentioned cleaning operation is completed, the clean gas on-off valve 412 and the medicine control valve 962 shown in FIG. 4 are opened,
If the neutralizing chemical 9 is supplied from the chemical supply branch pipe 972,
The exhaust gas 812 rises due to the suction force of an unillustrated draft fan, and the precoat layer 21 can be formed again on the surfaces of the plurality of filter cloths 2.

【0052】プレコート層21の形成作業が終われば、
前述の薬剤調節弁962及び薬剤供給分岐管972の清
掃作業を行った後、通常の濾過作業を再開する。
When the work of forming the precoat layer 21 is completed,
After the above-mentioned cleaning operation of the medicine regulating valve 962 and the medicine supply branch pipe 972, the normal filtration operation is restarted.

【0053】ここで、本方式は従来方式と比べ、プレコ
ート層21の形成に要する時間が遙に短いが、高速形成
であるがために、プレコートの層厚に不均一が生じ易
い。従って、プレコート層21の形成を終了する前の段
階で、定量供給フィダ93の回転数を低下せしめること
により、中和用薬剤9を少量ずつ供給する。これにより
中和用薬剤9は、通気抵抗が低く排ガス81の流速が早
くなる層厚の薄い個所に吸引付着されるために層厚を平
均化せしめることが可能となる。
Here, compared with the conventional method, the time required for forming the precoat layer 21 is much shorter, but since it is formed at a high speed, the precoat layer thickness is likely to be nonuniform. Therefore, at the stage before the formation of the precoat layer 21 is completed, the rotation speed of the fixed amount supply feeder 93 is reduced to supply the neutralizing agent 9 little by little. As a result, the neutralizing agent 9 is sucked and adhered to a thin portion where the ventilation resistance is low and the flow velocity of the exhaust gas 81 is high, so that the layer thickness can be averaged.

【0054】このような動作が、各濾過室51に対して
順次行われる。
Such an operation is sequentially performed for each filtration chamber 51.

【0055】本例では、払い落し作業開始条件を通気抵
抗増大で説明したが、清浄ガス室4または清浄ガスダク
ト42に排ガス濃度計を設置し、中和作用により中和用
薬剤9の反応が終わった事を検出してもよいし、通気抵
抗増大との組合せで行ってもよい。
In this example, the condition for starting the cleaning work was explained by increasing the ventilation resistance. However, an exhaust gas concentration meter is installed in the clean gas chamber 4 or the clean gas duct 42, and the reaction of the neutralizing agent 9 is completed by the neutralizing action. May be detected, or may be performed in combination with an increase in ventilation resistance.

【0056】このように払い落し作業を、ばいじんの堆
積による通気抵抗増加や薬剤の中和反応完了をもって行
うことでプレコート層厚を計画的に設定しておけば、反
応済薬剤のみを排出することができ、薬剤の効率的利用
が計られるのみでなく、排出する捕集灰の量が削減でき
るために、2次公害発生の因となる捕集灰の事後処理費
用が削減できる。
If the precoat layer thickness is systematically set by performing the cleaning work in this way by increasing the ventilation resistance due to the accumulation of dust and the completion of the neutralization reaction of the chemicals, only the reacted chemicals will be discharged. In addition to the efficient use of the chemicals, the amount of the collected ash discharged can be reduced, so that the post-treatment cost of the collected ash that causes secondary pollution can be reduced.

【0057】また、本例では、薬剤供給口97をホッパ
室52に配設したが、分岐煙道71の途中部に配設して
もよい。
In this example, the chemical supply port 97 is arranged in the hopper chamber 52, but it may be arranged in the middle of the branch flue 71.

【0058】さらに、排ガス流入制御用に清浄ガス開閉
弁41を設けたが、分岐煙道71中に排ガス開閉ダンパ
を挿入してもよい。
Further, although the clean gas on-off valve 41 is provided for controlling the exhaust gas inflow, an exhaust gas on-off damper may be inserted in the branch flue 71.

【0059】[0059]

【発明の効果】以上述べたように、本発明の方法によれ
ば、払い落し作業を終了した単位集じん機構のみに、必
要にして十分な量の薬剤を薬剤供給装置から空送手段に
よって調整弁を備えた薬剤輸送経路を経て個別に供給し
て、濾過・中和作用を司るプレコート層を短時間で形成
した後、通ガスする方式であるため、従来方式のように
除去率が低下することなく当初から高性能のばいじんや
浮遊物質の捕捉率及び酸性有害ガス除去率が得られ、装
置全体の性能を安定して継続させることができるととも
に、中和用薬剤の過剰供給がなくなるために、排出灰量
を減少せしめる事となり、薬剤費及び後処理費用の節減
が可能となる。
As described above, according to the method of the present invention, the necessary and sufficient amount of the medicine is adjusted from the medicine supply device by the air-feeding means only to the unit dust collecting mechanism which has finished the cleaning operation. Since it is a system that forms a precoat layer that controls filtration / neutralization in a short time by supplying it individually via a drug delivery route equipped with a valve and then passing gas, the removal rate decreases as in the conventional system. High efficiency dust and suspended matter trapping rate and acidic harmful gas removal rate can be obtained from the beginning without any problem, and the performance of the entire device can be stably continued, and the excessive supply of neutralizing agent is eliminated. As a result, the amount of ash discharged will be reduced, and it will be possible to reduce drug costs and post-treatment costs.

【0060】また、プレコート層形成後に薬剤供給装置
による薬剤の供給を停止し、空送手段により薬剤輸送経
路に残留する薬剤を除去することで、該輸送経路中に残
存する中和用薬剤による閉塞を防止するだけでなく、薬
剤供給口先端部の結露に起因する閉塞事故をも防止する
事ができる。
Further, the supply of the drug by the drug supply device is stopped after the precoat layer is formed, and the drug remaining in the drug transport route is removed by the air-feeding means, so that the drug is blocked by the neutralizing drug remaining in the transport route. In addition to preventing the above, it is possible to prevent a blocking accident due to dew condensation on the tip of the drug supply port.

【0061】さらに、プレコート層を短時間で形成する
終了前の段階で、薬剤供給装置による薬剤の供給量を減
少させてプレコート層の層厚の平均化を図ることで、濾
過性能を向上させることができる。
Further, before the completion of forming the precoat layer in a short time, the amount of the drug supplied by the drug supply device is reduced to average the layer thickness of the precoat layer, thereby improving the filtration performance. You can

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るプレコート式バグフィルタ装置に
おける薬剤供給方法を実施するプレコート式バグフィル
タ装置の概略構成を示す側面視の断面図である。
FIG. 1 is a cross-sectional side view showing a schematic configuration of a precoat type bag filter device for carrying out a drug supply method in a precoat type bag filter device according to the present invention.

【図2】本発明に係るプレコート式バグフィルタ装置の
概略構成を示す正面視と図1のX−X断面とを合成した
図である。
FIG. 2 is a diagram in which a front view showing a schematic configuration of a precoat type bag filter device according to the present invention and a cross section taken along line XX of FIG. 1 are combined.

【図3】濾布表面における付着・堆積状態を示す拡大図
である。
FIG. 3 is an enlarged view showing a state of adhesion and deposition on the surface of the filter cloth.

【図4】本発明に係るプレコート式バグフィルタ装置の
概略フローを示した図である。
FIG. 4 is a diagram showing a schematic flow of a precoat type bag filter device according to the present invention.

【図5】従来のプレコート式バグフィルタ装置の概略を
示す側面視の断面図である。
FIG. 5 is a side sectional view showing an outline of a conventional precoat type bag filter device.

【図6】図5におけるY−Y断面図である。6 is a sectional view taken along line YY in FIG.

【図7】従来のプレコート式バグフィルタ装置の概略を
示す正面視の断面図である。
FIG. 7 is a cross-sectional front view showing the outline of a conventional precoat type bag filter device.

【符号の説明】[Explanation of symbols]

2 濾布 21 プレコート層 51 濾過室 52 ホッパ室 9 中和用薬剤 96 薬剤調整弁 A 薬剤供給装置 B 空送手段 C 薬剤輸送経路 2 Filter cloth 21 Precoat layer 51 Filtration chamber 52 Hopper chamber 9 Neutralizing chemical agent 96 Chemical regulating valve A Chemical feeding device B Pneumatic feeding means C Chemical transportation route

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 清浄ガス室と濾過室及びホッパ室から成
る複数の単位集じん機構により構成されたバグフィルタ
装置の濾過室内に設置された濾布の表面に濾過作業を行
う前段階でプレコート層を形成するプレコート式バグフ
ィルタ装置における薬剤供給方法であって、 前記単位集じん機構ごとに、薬剤供給装置から供給され
る薬剤を空送手段によって調整弁を備えた薬剤輸送経路
を経て個別に供給するとともに、プレコート層形成後は
前記薬剤供給装置による薬剤の供給を停止し、前記空送
手段により前記薬剤輸送経路に残留する薬剤を除去する
ことを特徴とするプレコート式バグフィルタ装置におけ
る薬剤供給方法。
1. A precoat layer at a stage before performing a filtering operation on a surface of a filter cloth installed in a filter chamber of a bag filter device composed of a plurality of unit dust collecting mechanisms including a clean gas chamber, a filter chamber and a hopper chamber. A method for supplying a drug in a precoat type bag filter device, wherein each of the unit dust collecting mechanisms individually supplies the drug supplied from the drug supply device through a drug transport path provided with an adjusting valve by an air feeding means. In addition, after the precoat layer is formed, the supply of the drug by the drug supply device is stopped, and the drug remaining in the drug transport route is removed by the emptying means, and the drug supply method in the precoat bag filter device is characterized. .
【請求項2】 清浄ガス室と濾過室及びホッパ室から成
る複数の単位集じん機構により構成されたバグフィルタ
装置の濾過室内に設置された濾布の表面に濾過作業を行
う前段階でプレコート層を形成するプレコート式バグフ
ィルタ装置における薬剤供給方法であって、 前記単位集じん機構ごとに、薬剤供給装置から供給され
る薬剤を空送手段によって調整弁を備えた薬剤輸送経路
を経て個別に供給するとともに、プレコート層形成終了
前の段階でプレコート層の層厚を平均化せしめるよう上
記薬剤供給装置による薬剤の供給量を減少させることを
特徴とするプレコート式バグフィルタ装置における薬剤
供給方法。
2. A precoat layer at a stage before performing a filtering operation on a surface of a filter cloth installed in a filter chamber of a bag filter device composed of a plurality of unit dust collecting mechanisms including a clean gas chamber, a filter chamber and a hopper chamber. A method for supplying a drug in a precoat type bag filter device, wherein each of the unit dust collecting mechanisms individually supplies the drug supplied from the drug supply device through a drug transport path provided with an adjusting valve by an air feeding means. In addition, the drug supply method in the precoat type bag filter device is characterized in that the amount of the drug supplied by the drug supply device is reduced so that the layer thickness of the precoat layer is averaged before the completion of the precoat layer formation.
JP5016491A 1993-02-03 1993-02-03 Drug supply method in pre-coat type bag filter device Expired - Fee Related JP2558048B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP5016491A JP2558048B2 (en) 1993-02-03 1993-02-03 Drug supply method in pre-coat type bag filter device
KR1019930015036A KR970010162B1 (en) 1993-02-03 1993-08-03 Operation control method for precoat type bag filter device
TW82106267A TW224946B (en) 1993-02-03 1993-08-05 An operation control method for the filter apparatus of pre-coated pocket type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5016491A JP2558048B2 (en) 1993-02-03 1993-02-03 Drug supply method in pre-coat type bag filter device

Publications (2)

Publication Number Publication Date
JPH06226023A true JPH06226023A (en) 1994-08-16
JP2558048B2 JP2558048B2 (en) 1996-11-27

Family

ID=11917764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5016491A Expired - Fee Related JP2558048B2 (en) 1993-02-03 1993-02-03 Drug supply method in pre-coat type bag filter device

Country Status (1)

Country Link
JP (1) JP2558048B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5855651A (en) * 1994-11-29 1999-01-05 Asahi Denka Kogyo K.K. Method for processing waste gas exhausted from chemical vapor and deposition equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435713A (en) * 1977-08-26 1979-03-16 Nec Corp Magnetic card reader
JPS63240962A (en) * 1987-03-28 1988-10-06 Nippon Oil & Fats Co Ltd Device for spraying resin mortar
JPH0195256U (en) * 1987-12-18 1989-06-23
JPH0455645A (en) * 1990-06-26 1992-02-24 Kanebo Ltd Method for preventing clogging of water humidifying nozzle for air conditioning

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435713A (en) * 1977-08-26 1979-03-16 Nec Corp Magnetic card reader
JPS63240962A (en) * 1987-03-28 1988-10-06 Nippon Oil & Fats Co Ltd Device for spraying resin mortar
JPH0195256U (en) * 1987-12-18 1989-06-23
JPH0455645A (en) * 1990-06-26 1992-02-24 Kanebo Ltd Method for preventing clogging of water humidifying nozzle for air conditioning

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5855651A (en) * 1994-11-29 1999-01-05 Asahi Denka Kogyo K.K. Method for processing waste gas exhausted from chemical vapor and deposition equipment

Also Published As

Publication number Publication date
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