JPH06224155A - Rf-ecr plasma etching apparatus - Google Patents

Rf-ecr plasma etching apparatus

Info

Publication number
JPH06224155A
JPH06224155A JP5029613A JP2961393A JPH06224155A JP H06224155 A JPH06224155 A JP H06224155A JP 5029613 A JP5029613 A JP 5029613A JP 2961393 A JP2961393 A JP 2961393A JP H06224155 A JPH06224155 A JP H06224155A
Authority
JP
Japan
Prior art keywords
plasma
magnetic field
substrate
etching apparatus
frequency waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5029613A
Other languages
Japanese (ja)
Other versions
JP2972477B2 (en
Inventor
Seiji Sagawa
誠二 寒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP5029613A priority Critical patent/JP2972477B2/en
Priority to US08/187,392 priority patent/US5401351A/en
Publication of JPH06224155A publication Critical patent/JPH06224155A/en
Application granted granted Critical
Publication of JP2972477B2 publication Critical patent/JP2972477B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32678—Electron cyclotron resonance

Abstract

PURPOSE:To enable a resonant magnetic field to be uniformly generated in a plasma etching apparatus by a method wherein high-frequency waves in a specific range of frequencies are used, and a magnetic field is applied to a substrate so as to make the line of magnetic force of a permanent magnet parallel to the substrate. CONSTITUTION:A coaxial cable 2 and an antenna 3 are provided inside a plasma generating chamber 1 for introducing discharging high-frequency waves into it. Electron cyclotron resonance takes place in the plasma generating chamber 1 by an electric field of frequency 100 to 500MHz introduced through this antenna 3 and a permanent magnet 8 installed on the upside of the plasma generating chamber 1, so that a resonant magnetic field is uniformly formed. By this setup, as high-frequency waves can be introduced into a plasma generating chamber 1 through an antenna, so that high-frequency waves are uniformly introduced into a plasma chamber even large in diameter, and uniform plasma can be generated. Furthermore, a waveguide and an air-core coil are not required to be used, high-frequency waves are introduced through a coaxial cable, and a magnetic field low in intensity can be used, so that a plasma etching apparatus can be lessened in size and simplified in structure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、エッチング装置に関
し、特に電子サイクロトロン共鳴現象を利用して生成し
たプラズマを用いて基板表面のエッチングを行うＥＣＲ
プラズマエッチング装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an etching apparatus, and more particularly to ECR for etching the surface of a substrate using plasma generated by utilizing the electron cyclotron resonance phenomenon.
The present invention relates to a plasma etching device.

【０００２】[0002]

【従来の技術】従来、この種のマイクロ波プラズマエッ
チング装置として、２つの例が知られている。第１の例
は、図４に示すような特開昭５６−１５５３５号公報記
載のエッチング装置である。この装置はマイクロ波４０
８による電子サイクロトロン共鳴放電中にエッチング試
料４１４をセットし、該試料のエッチング処理を行うも
のである。図中、４０１はプラズマ生成室、４０４はマ
イクロ波導入窓、４０５は導波管、４０７はガス導入
口、４０９は電子サイクロトロン共鳴点、４１０は基板
ホルダである。一方、第２の例は、図５に示すような特
開昭６０−１３４４２３号公報記載の装置である。この
エッチング装置は、プラズマ生成室５０１内に反応性ガ
スを導入し、マイクロ波と磁場を作用させてプラズマ生
成室内に反応性ガスプラズマを生成させ、磁気コイルに
よる発散磁界を利用して基板５１４を設置した反応室５
０２に導入するものである。図中、５０１はプラズマ生
成室、５０３はソレノイドコイル、５０４はマイクロ波
導入窓、５０５は導波管、５０６はマイクロ波電源、５
０７はガス導入口、５０９は電子サイクロトロン共鳴
点、５１０は基板ホルダ、５１３はプラズマ引き出し窓
である。2. Description of the Related Art Conventionally, two examples of this type of microwave plasma etching apparatus are known. The first example is an etching apparatus described in Japanese Patent Laid-Open No. 56-15535 as shown in FIG. This device is microwave 40
The etching sample 414 is set during the electron cyclotron resonance discharge of No. 8 and the sample is etched. In the figure, 401 is a plasma generation chamber, 404 is a microwave introduction window, 405 is a waveguide, 407 is a gas introduction port, 409 is an electron cyclotron resonance point, and 410 is a substrate holder. On the other hand, the second example is the device described in Japanese Patent Application Laid-Open No. 60-134423 as shown in FIG. This etching apparatus introduces a reactive gas into the plasma generation chamber 501, applies a microwave and a magnetic field to generate a reactive gas plasma in the plasma generation chamber, and utilizes the divergent magnetic field of the magnetic coil to move the substrate 514 to the substrate 514. Reaction room 5 installed
It will be introduced in 02. In the figure, 501 is a plasma generation chamber, 503 is a solenoid coil, 504 is a microwave introduction window, 505 is a waveguide, 506 is a microwave power source,
Reference numeral 07 is a gas inlet, 509 is an electron cyclotron resonance point, 510 is a substrate holder, and 513 is a plasma extraction window.

【０００３】[0003]

【発明が解決しようとする課題】しかし、上述した従来
の技術においては、２．４５ＧＨｚのマイクロ波を用い
ているため導波管が必要であり、かつ、共鳴を起こすた
めには９００Ｇ程度の高磁場が必要である。そのため、
装置が大きくなり複雑であるという問題点があった。ま
た、マイクロ波の均一な導入が難しく、均一なプラズマ
生成は難しかった。さらに、磁力線が基板に垂直に入射
するため、ポテンシャル分布が生じたり、基板バイアス
の均一印加が難しいという問題点があった。本発明の目
的は、このような従来の問題点を解決することにある。However, in the above-mentioned conventional technique, since a microwave of 2.45 GHz is used, a waveguide is required, and in order to cause resonance, a high waveguide of about 900 G is required. A magnetic field is needed. for that reason,
There is a problem that the device becomes large and complicated. Further, it was difficult to uniformly introduce microwaves, and it was difficult to uniformly generate plasma. Further, since the magnetic force lines are perpendicularly incident on the substrate, there are problems that a potential distribution is generated and it is difficult to apply a substrate bias uniformly. An object of the present invention is to solve such conventional problems.

【０００４】[0004]

【課題を解決するための手段】本発明は、基板のエッチ
ングを行うプラズマ生成室と、該プラズマ生成室内に放
電用の高周波を導入する同軸ケーブルおよびそれに接続
したアンテナと、前記プラズマ生成室内に電場と直交す
る磁場を印加するプラズマ生成用の永久磁石とを備え、
プラズマ生成室内で高周波によって発生する電場と該電
場と直交するプラズマ生成用の磁場とによっておこる電
子サイクロトロン共鳴現象を利用して処理ガスをプラズ
マ化し、該プラズマを設置された基板に照射して基板の
エッチングを行うＲＦ・ＥＣＲプラズマエッチング装置
であって、高周波周波数を１００〜５００ＭＨｚとする
ことを特徴とするＲＦ・ＥＣＲプラズマエッチング装置
である。ここで、永久磁石は、磁場の磁力線の向きが基
板に対して平行に印加されるように配置されることが望
ましい。またプラズマ生成室周辺には、プラズマ閉じこ
め用の磁場を生成する複数の磁石が設置されていること
が望ましい。According to the present invention, there is provided a plasma generating chamber for etching a substrate, a coaxial cable for introducing a high frequency for discharge into the plasma generating chamber, an antenna connected to the coaxial cable, and an electric field in the plasma generating chamber. And a permanent magnet for plasma generation that applies a magnetic field orthogonal to
The processing gas is turned into plasma by utilizing the electron cyclotron resonance phenomenon caused by the electric field generated by the high frequency in the plasma generation chamber and the magnetic field for plasma generation orthogonal to the electric field, and the substrate is irradiated with the plasma to irradiate the processing gas. An RF / ECR plasma etching apparatus for performing etching, wherein the high frequency is 100 to 500 MHz. Here, it is desirable that the permanent magnets be arranged so that the directions of the magnetic force lines of the magnetic field are applied in parallel to the substrate. Further, it is desirable that a plurality of magnets that generate a magnetic field for confining the plasma be installed near the plasma generation chamber.

【０００５】[0005]

【作用】本装置によれば、高周波の利用により、共鳴に
必要な磁場強度は３５〜１８０Ｇになるため、小型永久
磁石を用いることができる。また、アンテナにより高周
波を導入できるので小型化が可能であるとともに、均一
な電界を容易に実現できる。さらに、磁力線を基板に対
して平行に印加することで基板に印加するＲＦバイアス
を均一に印加できる。According to this device, the magnetic field strength required for resonance is 35 to 180 G by using high frequency, so that a small permanent magnet can be used. Further, since high frequency waves can be introduced by the antenna, miniaturization is possible and a uniform electric field can be easily realized. Further, by applying the magnetic force lines in parallel to the substrate, the RF bias applied to the substrate can be uniformly applied.

【０００６】[0006]

【実施例】次に本発明の実施例について説明する。図１
は本発明によるＲＦ・ＥＣＲプラズマエッチング装置の
一例の構成図である。本装置は、電子サイクロトロン共
鳴によってプラズマを生成するプラズマ生成室１と基板
搬送室（図示せず。）とが互いに隣接するように構成さ
れている。このプラズマ生成室１にはプラズマを生成す
るためのガスを導入するガス系が接続されるとともに、
放電用の高周波を導入するための同軸ケーブル２とアン
テナ（電極）３が設けられている。アンテナ（電極）３
の形状としては、図２（ａ）に示すような円板形状や、
図２（ｂ）に示すような分枝状のものが挙げられる。こ
のアンテナ（電極）３から導入される電界とプラズマ生
成室上部に設置された永久磁石８により電子サイクロト
ロン共鳴が生じる。磁石８は図３に示すように、ＮとＳ
が交互になるように配置されており、電子の運動がルー
プになるようにされている。この結果、磁力線の向きは
基板６に対して平行に印加され、電極３から２ｃｍ程度
の所に共鳴磁場が均一に生成される。ここで生成したプ
ラズマは、プラズマ生成室周辺に設置された複数の磁石
４により形成されたカスプ磁場により閉じこめられ、密
度を保ったまま基板６まで拡散で輸送される。基板６に
はイオンエネルギーを制御するために、数百ＫＨｚ〜１
３．５６ＭＨｚの高周波バイアスが印加される。EXAMPLES Next, examples of the present invention will be described. Figure 1
FIG. 1 is a configuration diagram of an example of an RF / ECR plasma etching apparatus according to the present invention. The present apparatus is configured such that a plasma generation chamber 1 for generating plasma by electron cyclotron resonance and a substrate transfer chamber (not shown) are adjacent to each other. A gas system for introducing a gas for generating plasma is connected to the plasma generation chamber 1, and
A coaxial cable 2 and an antenna (electrode) 3 for introducing a high frequency for discharging are provided. Antenna (electrode) 3
As the shape of, a disc shape as shown in FIG.
An example is a branched one as shown in FIG. 2 (b). An electron cyclotron resonance occurs due to the electric field introduced from the antenna (electrode) 3 and the permanent magnet 8 installed above the plasma generation chamber. The magnet 8 has N and S as shown in FIG.
Are arranged in an alternating manner so that the movement of electrons becomes a loop. As a result, the direction of the lines of magnetic force is applied in parallel to the substrate 6, and the resonance magnetic field is uniformly generated at a position about 2 cm from the electrode 3. The plasma generated here is confined by a cusp magnetic field formed by a plurality of magnets 4 installed around the plasma generation chamber, and is transported to the substrate 6 by diffusion while maintaining its density. In order to control the ion energy on the substrate 6, several hundred KHz to 1
A high frequency bias of 3.56 MHz is applied.

【０００７】[0007]

【発明の効果】以上説明したように、本発明によるＲＦ
・ＥＣＲプラズマエッチング装置はアンテナでＲＦを導
入することができるので、大口径プラズマチャンバに対
して均一に導入でき、均一なプラズマ生成が可能であ
る。さらに、導波管や空芯コイルを用いる必要がなく同
軸ケーブルで導入され、また低磁場でよいので、装置が
小型化・簡素化されるという効果がある。さらに、磁力
線の向きを基板に対して平行に印加することにより、均
一なＲＦバイアスが印加でき、その結果、高精度なエッ
チングが実現できるという効果がある。As described above, the RF according to the present invention
Since the ECR plasma etching apparatus can introduce RF by the antenna, it can be introduced uniformly into the large-diameter plasma chamber, and uniform plasma generation is possible. Furthermore, since it is not necessary to use a waveguide or an air-core coil, it is introduced by a coaxial cable, and a low magnetic field is sufficient, so that there is an effect that the device is downsized and simplified. Further, by applying the direction of the lines of magnetic force parallel to the substrate, a uniform RF bias can be applied, and as a result, highly accurate etching can be realized.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明によるＲＦ・ＥＣＲプラズマエッチング
装置の構成図である。FIG. 1 is a configuration diagram of an RF / ECR plasma etching apparatus according to the present invention.

【図２】本発明に用いられるプラズマ放電用高周波アン
テナの形状を示す図である。FIG. 2 is a diagram showing the shape of a high frequency antenna for plasma discharge used in the present invention.

【図３】本発明によるプラズマ生成室上部の永久磁石の
配置を示す平面図である。FIG. 3 is a plan view showing the arrangement of permanent magnets in the upper part of the plasma generation chamber according to the present invention.

【図４】従来例によるマイクロ波プラズマエッチング装
置の一例の構成図である。FIG. 4 is a block diagram of an example of a conventional microwave plasma etching apparatus.

【図５】従来例によるマイクロ波プラズマエッチング装
置の別の一例の構成図である。FIG. 5 is a configuration diagram of another example of a conventional microwave plasma etching apparatus.

【符号の説明】[Explanation of symbols]

１ プラズマ生成室 ２ 同軸ケーブル ３ アンテナ ４ プラズマ閉じこめ用磁石 ５ 基板ホルダ ６ 基板 ７ ＲＦ電源 ８ プラズマ生成用磁石 ４０７ ガス導入口 ４０８ マイクロ波 ４１４ エッチング試料 ５０１ プラズマ生成室 ５０２ 反応室 ５０６ マイクロ波電源 ５１２ 排気 ５１３ プラズマ引き出し窓 ５１４ 基板 DESCRIPTION OF SYMBOLS 1 Plasma generation chamber 2 Coaxial cable 3 Antenna 4 Plasma confinement magnet 5 Substrate holder 6 Substrate 7 RF power supply 8 Plasma generation magnet 407 Gas inlet 408 Microwave 414 Etching sample 501 Plasma generation chamber 502 Reaction chamber 506 Microwave power source 512 Exhaust 513 Plasma extraction window 514 Substrate

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 // Ｇ０１Ｎ 24/14 Ｇ０１Ｒ 33/64 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location // G01N 24/14 G01R 33/64

Claims (3)

【特許請求の範囲】[Claims] 【請求項１】 基板のエッチングを行うプラズマ生成室
と、該プラズマ生成室内に放電用の高周波を導入する同
軸ケーブルおよびそれに接続したアンテナと、前記プラ
ズマ生成室内に電場と直交する磁場を印加するプラズマ
生成用の永久磁石とを備え、プラズマ生成室内で高周波
によって発生する電場と該電場と直交するプラズマ生成
用の磁場とによっておこる電子サイクロトロン共鳴現象
を利用して処理ガスをプラズマ化し、該プラズマを設置
された基板に照射して基板のエッチングを行うＲＦ・Ｅ
ＣＲプラズマエッチング装置であって、高周波周波数を
１００〜５００ＭＨｚとすることを特徴とするＲＦ・Ｅ
ＣＲプラズマエッチング装置。1. A plasma generation chamber for etching a substrate, a coaxial cable for introducing a high frequency for discharge into the plasma generation chamber and an antenna connected thereto, and a plasma for applying a magnetic field orthogonal to an electric field in the plasma generation chamber. A permanent magnet for generation is provided, and the processing gas is turned into plasma by using an electron cyclotron resonance phenomenon generated by an electric field generated by a high frequency in the plasma generation chamber and a magnetic field for plasma generation orthogonal to the electric field, and the plasma is installed.・ E to irradiate the etched substrate to etch the substrate
A CR plasma etching apparatus, characterized in that the high frequency is 100 to 500 MHz.
CR plasma etching equipment. 【請求項２】 永久磁石は、磁場の磁力線の向きが基板
に対して平行に印加されるように配置される請求項１記
載のＲＦ・ＥＣＲプラズマエッチング装置。2. The RF / ECR plasma etching apparatus according to claim 1, wherein the permanent magnet is arranged so that the direction of the magnetic force lines of the magnetic field is applied parallel to the substrate. 【請求項３】 プラズマ生成室周辺には、プラズマ閉じ
こめ用の磁場を生成する複数の磁石が設置されている請
求項１または２記載のＲＦ・ＥＣＲプラズマエッチング
装置。3. The RF / ECR plasma etching apparatus according to claim 1, wherein a plurality of magnets for generating a magnetic field for confining the plasma are installed around the plasma generating chamber.
JP5029613A 1993-01-27 1993-01-27 RF / ECR plasma etching equipment Expired - Lifetime JP2972477B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP5029613A JP2972477B2 (en) 1993-01-27 1993-01-27 RF / ECR plasma etching equipment
US08/187,392 US5401351A (en) 1993-01-27 1994-01-27 Radio frequency electron cyclotron resonance plasma etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5029613A JP2972477B2 (en) 1993-01-27 1993-01-27 RF / ECR plasma etching equipment

Publications (2)

Publication Number Publication Date
JPH06224155A true JPH06224155A (en) 1994-08-12
JP2972477B2 JP2972477B2 (en) 1999-11-08

Family

ID=12280928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5029613A Expired - Lifetime JP2972477B2 (en) 1993-01-27 1993-01-27 RF / ECR plasma etching equipment

Country Status (2)

Country Link
US (1) US5401351A (en)
JP (1) JP2972477B2 (en)

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US8771538B2 (en) 2009-11-18 2014-07-08 Applied Materials, Inc. Plasma source design
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