JPH06223713A - Manufacture of color cathode-ray tube - Google Patents

Manufacture of color cathode-ray tube

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Publication number
JPH06223713A
JPH06223713A JP884493A JP884493A JPH06223713A JP H06223713 A JPH06223713 A JP H06223713A JP 884493 A JP884493 A JP 884493A JP 884493 A JP884493 A JP 884493A JP H06223713 A JPH06223713 A JP H06223713A
Authority
JP
Japan
Prior art keywords
panel
automatically
exposure
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP884493A
Other languages
Japanese (ja)
Inventor
Satoshi Muto
里志 無藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP884493A priority Critical patent/JPH06223713A/en
Publication of JPH06223713A publication Critical patent/JPH06223713A/en
Pending legal-status Critical Current

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  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE:To carry out a numerous sort and small quantity production economically, easily, and at a high yield, by providing plural automatic quick disconnecting devices for panel and shaft, an automatic transfer device, and an exposing device to operate full-automatically including the regulation of the parts of the devices. CONSTITUTION:A means to control and to manage the full process of forming a fluorescent screen of the panel inner surface of a cathode-ray tube automatically is provided. Plural sets of automatic quick disconnecting devices 16 and 17 to install or to separate a shadow mask to a panel automatically under the management of the above means, and an automatic transfer device to transfer to a conveying device in order to render a specific combination of both members at any time are provided. Furthermore, an exposing device 1 to operate full-automatically devices 2 to 10 to form a black matrix and phosphor film group of three primary colors on the inner surface of the panel by using a means to discriminate and store the sorts and the specifications of the tube concurrently, including the regulation of the parts, is provided. And the exposing for the forming works is carried out in order automatically without using the manual work.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、大型で未だ比較的需要
の少ない高精細度カラー陰極線管などの多品種少量生産
に適した全自動製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fully automatic manufacturing method suitable for small-lot production of a wide variety of high-definition color cathode ray tubes and the like, which are large in size and still in relatively low demand.

【0002】[0002]

【従来の技術】カラー陰極線管の用途、使用量は、近
年、ますます広がって来たために、従来はカラー陰極線
管のパネル内面への螢光面形成工程には、最低でも、ブ
ラックマトリクス用、3原色螢光体膜用に、夫々専用露
光装置、合計4台を備え、しかも連続座席指定型にし
た、全自動製造装置のラインが一般的に用いられてき
た。このようなラインでは通常たとえば連続6座席を同
時に用い、露光装置合計24台程度が普通であって、1
日でカラー陰極線管1品種を容易に400〜1000本
程度製造することができる。
2. Description of the Related Art Since the use and usage of color cathode ray tubes have expanded more and more in recent years, at least for the black matrix, at least in the process of forming the fluorescent surface on the inner surface of the panel of the color cathode ray tube, A line of fully-automatic manufacturing devices, each equipped with a dedicated exposure device for the three primary color phosphor films, a total of four exposure devices, and having a continuous seat designation type, has been generally used. In such a line, for example, 6 consecutive seats are usually used at the same time, and a total of about 24 exposure apparatuses are common.
One type of color cathode ray tube can be easily manufactured in 400 to 1000 pieces per day.

【0003】単一品種の量産が容易な代りに、上記自動
ラインで品種切り換えを行う場合には、最低でも、ブラ
ックマトリクス用1台、螢光体膜用3台、合計4台の露
光装置の切り換えが必要で、膨大な工数を要する。さら
に大幅に仕様が異なる品種に切り換える場合などには、
前記4台の露光装置間で、それぞれ対応寸法を完全に合
わせないと、ブラックマトリクスの孔(実際には此の孔
がその下すなわち電子銃側に位置する螢光体膜の画面上
での発光面積を左右する)の位置と微細螢光体膜の位置
とのずれが生じることもあり、特に近年需要が増加して
いる超高精細度管などの場合には、上記、切り換え、調
整に数日も必要になってしまうことさえあった。なお、
ブラックマトリクスは、まずパネル内面にフォトレジス
ト膜を形成させ、これにパネルに組合せたシャドウマス
クの孔を介して露光して、露光個所のフォトレジスト膜
を残留させ、その後、全面にブラックマトリクス用黒鉛
膜を形成させ、次にフォトレジスト膜の現像剥脱作業を
行って、フォトレジスト膜上に重畳して形成されている
孔対応部分の黒鉛膜をフォトレジスト膜もろともリフト
オフして形成する。
In the case where a single product type is easily mass-produced but the product type is switched by the above-mentioned automatic line, at least one exposure device for black matrix, three for fluorescent film and a total of four exposure devices are used. It requires switching, and requires a huge number of man-hours. When switching to a product with significantly different specifications,
Unless the corresponding dimensions are perfectly matched among the four exposure apparatuses, the holes of the black matrix (actually, these holes emit light on the screen of the fluorescent film located thereunder, that is, on the electron gun side). (Which affects the area) may deviate from the position of the fine fluorescent film, and especially in the case of ultra-high definition tubes, etc., for which demand is increasing in recent years, it is necessary to perform the above switching and adjustment. Even the days were even needed. In addition,
The black matrix is formed by first forming a photoresist film on the inner surface of the panel, exposing it through the holes of the shadow mask combined with the panel, and leaving the photoresist film at the exposed portions, and then the black matrix graphite on the entire surface. After forming a film, the photoresist film is developed and exfoliated, and the graphite film corresponding to the holes formed so as to overlap the photoresist film is lifted off together with the photoresist film.

【0004】また、ブラックマトリクスと螢光体膜とを
同一の露光装置で行うことは、試作的、実験的に行われ
ることもあったが、図2に示すように、ブラックマトリ
クス形成用フォトレジスト膜の厚さは1μm程度である
のに対し、感光性螢光体膜の膜厚は30μm程度もあ
り、露光により両者に効果的に化学反応を起こさせるた
めには、フォトレジスト膜露光時よりも、螢光体膜露光
時には、露光光源をパネルに通常0.3〜0.6mm近
付ける必要があった。なお、図2中、11はパネルの内
面、12はシャドウマスク、12aはシャドウマスクの
孔の中心、13aはブラックマトリクス形成用フォトレ
ジスト膜露光時の光源中心、13bは螢光体膜露光時の
光源中心、13cは露光対象膜の膜厚相違に対応する光
源中心位置の変動寸法、14は一つの原色の微細な螢光
体膜、14aは露光時の微細螢光体膜の露光中心、15
はブラックマトリクス、15aはブラックマトリクス形
成用フォトレジスト膜に対する露光時の露光中心であ
る。また、ドット形螢光面の場合、ブラックマトリクス
の孔径よりも、その電子銃側に形成させる螢光体膜ドッ
ト径の方が大きく、従って、露光用光源の径も異ならせ
る必要があり、更に現在は3原色用電子ビームが螢光面
上で集束する方向に各色専用電子銃を1平面上に少しず
つ離して配列したインライン方式が主流になっているた
め、光源位置も、緑用装置ではパネル中心に対応させて
配置し、赤用、青用の装置では光源位置をパネル中心か
ら横にずれた位置にするなど、従来は、量産用設備で
は、ブラックマトリクス形成用と螢光体膜形成用とに、
それぞれ別の専用露光装置を用いるのが普通になってい
た。
[0006] Further, although the black matrix and the fluorescent substance film were formed on the same exposure apparatus in some cases as a trial or an experiment, as shown in FIG. 2, a black matrix forming photoresist was used. The film thickness is about 1 μm, whereas the film thickness of the photosensitive phosphor film is about 30 μm. However, when exposing the phosphor film, it was necessary to bring the exposure light source closer to the panel by 0.3 to 0.6 mm. In FIG. 2, 11 is the inner surface of the panel, 12 is the shadow mask, 12a is the center of the holes of the shadow mask, 13a is the center of the light source at the time of exposure of the photoresist film for forming the black matrix, and 13b is the time of exposure of the fluorescent film. The center of the light source, 13c is the variation size of the center position of the light source corresponding to the film thickness difference of the film to be exposed, 14 is the fine phosphor film of one primary color, 14a is the exposure center of the fine phosphor film at the time of exposure, 15
Is a black matrix, and 15a is an exposure center at the time of exposure to the photoresist film for forming a black matrix. Further, in the case of a dot-type fluorescent surface, the diameter of the fluorescent substance film dot formed on the electron gun side is larger than the hole diameter of the black matrix, and therefore the diameter of the exposure light source must be different, and Currently, the mainstream is the in-line method in which electron guns for each color are arranged slightly apart on one plane in the direction in which the electron beams for the three primary colors are focused on the fluorescent surface. It is arranged so as to correspond to the center of the panel, and the light source position is shifted laterally from the center of the panel for red and blue devices. Conventionally, for mass production equipment, for black matrix formation and phosphor film formation. For use,
It has become common to use different dedicated exposure devices.

【0005】[0005]

【発明が解決しようとする課題】通常のカラー陰極線管
は今や完全に量産品になっているとは言うものの、一方
では、品種の多様化も進み、すべての管種を多量生産す
る必要があるわけではない。月当たり1000本以下の
生産で済む品種、例えば精細度が非常に高く未だそれほ
ど需要の多くない超高精細度管などもあり、既述のよう
な量産設備で製造すると切り換え工数がかかり過ぎて不
経済であり、さりとて試作的設備では、やはり歩留が悪
く、工数もかかり過ぎるという問題が生じていた。
Although it can be said that ordinary color cathode ray tubes are now completely mass-produced products, on the other hand, diversification of varieties also progresses, and it is necessary to mass-produce all tube types. Do not mean. There are varieties that can produce less than 1000 pieces per month, such as ultra-high-definition tubes that have a very high definition and are not in much demand yet. If they are manufactured in the mass production equipment as described above, the switching man-hours will be too much and it will not be possible. It was economical, and the trial production facility had problems such as poor yield and too many man-hours.

【0006】本発明は、上記のような問題が発生せず、
仕様が高度な製品を含めて、多品種少量生産を、高い歩
留で、効率良く行えるカラー陰極線管の製造方法を提供
することを課題とする。
According to the present invention, the above problems do not occur,
An object of the present invention is to provide a manufacturing method of a color cathode ray tube capable of efficiently producing a wide variety of products in small quantities, including products with high specifications, with a high yield.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
に本発明においては、カラー陰極線管のパネル内面への
螢光面形成の全工程の制御と管理を自動的に行う手段を
備え、その管理下に、自動的に、パネルにシャドウマス
クを装着、又は、パネルに既装着のシャドウマスクをパ
ネルから分離させる、複数組の自動着脱装置と、特定の
パネルと、それに最初に装着された特定のシャドウマス
クとの組合せを所望時に随時再現できるように、両者の
移動を同期させながら、パネルとシャドウマスクとを、
夫々別に、搬送装置に載せ、又は、搬送装置から降ろす
複数の自動移載装置と、管の種類、仕様を工程への投入
時に自動的に識別記憶する手段とを併用して、パネルの
内面に、ブラックマトリクスおよび3原色それぞれの微
細螢光体膜群をフォトリソグラフィ技術により形成させ
るために、上記各形成作業夫々に応じて必要な装置各部
の調整をも含めて全て自動的に動作する露光装置1台に
よって、各形成作業用露光を、順次、人手を用いること
なく完全に自動的に行うようにした。
In order to solve the above problems, the present invention comprises means for automatically controlling and managing all steps of forming a fluorescent surface on the inner surface of a panel of a color cathode ray tube. Under control, automatically attach a shadow mask to the panel, or separate the shadow mask already attached to the panel from the panel, a plurality of sets of automatic attachment / detachment devices, a specific panel, and a specific first attached to it. The panel and the shadow mask are synchronized with the movement of both so that the combination with the shadow mask of can be reproduced at any time when desired.
Separately, a plurality of automatic transfer devices that are placed on or removed from the transfer device are used together with a means for automatically identifying and storing the type and specifications of pipes when they are put into the process, and , A black matrix and a group of fine fluorescent film for each of the three primary colors are formed by a photolithography technique, and an exposure apparatus that automatically operates including adjustment of each part of the apparatus necessary for each forming operation described above. With one unit, the exposure for each forming operation was sequentially and completely automatically performed without using any manpower.

【0008】なお、実施に際して具体的には、露光装置
に、比較的薄いブラックマトリクス形成用フォトレジス
ト膜と比較的厚い感光性螢光体膜との膜厚差に対応し
て、螢光体膜露光時にはフォトレジスト膜露光時より
も、露光装置の光源からパネルまでの距離を、所定長だ
け自動的に短くする(そのために例えば露光装置の光源
からパネルまでの光路の途中に、所定の厚さ、所定の屈
折率のガラス平板を、パネルシール面に平行に自動的に
挿入設置)機構や、インライン型電子銃対応で螢光体膜
の色の種類に対応して露光時の光源位置を、緑は中央
で、赤と青の時は夫々反対側の横側方に自動的に移動さ
せる機構などを設け、更に露光光源の長時間安定化を図
るために、ドット状螢光体膜群よりなる螢光面を形成さ
せる際の露光装置の光源として、ロングアーク超高圧水
銀灯を、アークから指定長離して設置した略半円筒状ま
たは平板状の遮光板で覆い、この遮光板に水銀灯管軸
(即ちアークの長さ方向)に直交する光透過用スリット
を設け、これら全体を水銀灯の管軸に直交する方向に、
管の種類に対応して定まるストロークだけ揺動させ、更
にスリット幅は揺動のストローク長に応じて可変とし、
また、この遮光板のスリット幅と揺動のストローク長
の、双方または何れか一方を、フォトレジスト膜露光時
と感光性螢光体膜露光時とで、管種に応じて自動的に変
更する機構を付加して設置する。
In practice, in practice, the exposure apparatus uses a phosphor film corresponding to the film thickness difference between the relatively thin black matrix forming photoresist film and the relatively thick photosensitive phosphor film. At the time of exposure, the distance from the light source of the exposure device to the panel is automatically shortened by a predetermined length as compared with the time of exposure of the photoresist film (for this reason, for example, a predetermined thickness is provided in the optical path from the light source of the exposure device to the panel. , A glass flat plate with a predetermined refractive index is automatically inserted in parallel with the panel seal surface) mechanism, or in-line type electron gun compatible with the light source position at the time of exposure according to the color type of the phosphor film, In the center of green, when red and blue, a mechanism to automatically move to the opposite lateral side, respectively, is provided.In order to stabilize the exposure light source for a long time, Light source for exposure equipment when forming a fluorescent surface Then, the long arc ultra-high pressure mercury lamp is covered with an approximately semi-cylindrical or flat shading plate installed at a specified distance from the arc, and the shading plate is orthogonal to the mercury lamp tube axis (that is, the arc length direction). A slit for light transmission is provided, and all of these are arranged in a direction orthogonal to the tube axis of the mercury lamp.
It is swung by a stroke determined according to the type of pipe, and the slit width is variable according to the stroke length of the swing.
Further, both or one of the slit width and the stroke length of the swing of the light shielding plate is automatically changed according to the tube type during the exposure of the photoresist film and the exposure of the photosensitive fluorescent substance film. Installed by adding a mechanism.

【0009】[0009]

【作用】各露光作業の前後に、フォトレジスト膜や各色
螢光体膜の塗布やそれらの膜の現像除去作業を行う必要
があるため、これらの作業個所との間の搬送に用いる自
動移載装置や、この装置の前後に必要な自動着脱装置を
増設する必要が生じてくることもあるが、露光装置の初
期設置価格特にレンズ系が高価なことや、試作装置的に
人手で運搬した場合の作業者の高騰した工賃を考慮すれ
ば、充分引き合う。また、露光装置に用いる光学レンズ
系が非常に微妙で、そのために露光台ごとにそれぞれ固
有の癖ができ易く、従来、品種切り換えに長い時間を要
する一因をなしていた。本発明では、露光装置はただ1
台だけであるから、光学系に癖があっても、それに適応
するように調整する作業は、品種毎に最初に1回だけ行
えば済む。そのために、調整作業は最適に行うことがで
き、製品の歩留は向上する。
[Function] Before and after each exposure operation, it is necessary to apply a photoresist film and each color fluorescent film and to develop and remove these films. Therefore, automatic transfer used for transportation to and from these work points. It may be necessary to add the equipment and the necessary automatic attachment / detachment equipment before and after this equipment, but the initial installation price of the exposure equipment, especially the lens system is expensive, or when the prototype equipment is manually transported. Considering the soaring wages of the workers in the above, it is enough to get the price. In addition, the optical lens system used in the exposure apparatus is very delicate, and as a result, it is easy for each exposure table to have its own peculiarity, which has conventionally been a cause of requiring a long time to switch the product type. In the present invention, there is only one exposure apparatus
Since there is only a table, even if the optical system has a habit, the work of adjusting to adapt to the habit only needs to be performed once for each product type. Therefore, the adjustment work can be optimally performed, and the product yield is improved.

【0010】[0010]

【実施例】実際に本発明を実施する場合に、既に既述の
ような多数の自動量産ラインを設置している工場では、
これらの自動量産ラインの一つで用いている例えば24
台の露光装置を、それぞれに新たに必要となる設備を付
加して本発明に係る露光装置に改造して多品種例えば2
4品種同時平行生産可能なラインにする方が経済的(例
えば自動着脱装置や自動移載装置や搬送装置は殆ど其の
ままでよい)である。図1は、0.28mmピッチ以下
の超高精細度カラーグラフィックス用陰極線管にまで対
応できるように改造して、多品種少量生産用ラインにし
た例を示す。このラインではインデックス時間を30s
とし、24座席24品種対応となり、1座席あたり1日
の着工数は120本となる。実際の使用に際しては24
品種以下であれば何品種でも良く、所要生産数に応じて
同一品種に複数の座席を当てれば、きめ細かく生産計画
に対応できる。図1のなかで、1は本発明に係る自動露
光装置24台と、それに付随する、露光後の各膜に対し
未露光未硬化部分を剥脱し膜の種類毎に廃液を集める現
像装置と自動移載装置とを備えた自動露光ライン、2は
フォトレジスト塗布機(12ポジション)、3は黒鉛膜
塗布機(24ポジション)、4は緑色螢光体膜塗布機
(24ポジション)、5は赤色螢光体膜塗布機(24ポ
ジション)、6は青色螢光体膜塗布機(24ポジショ
ン)、7はパネル洗浄機(12ポジション)、8は放置
個所(30ポジション)、9は後に行うメタルバック膜
形成に先立って螢光体などの膜の上に平滑で熱分解容易
な有機平滑膜を形成するためのフィルミング機(24ポ
ジション)、10はシャドウマスク洗浄機である。な
お、この螢光面形成ラインに投入される際のパネルには
シャドウマスクが組み合わされた状態になっている。な
お、それぞれ図示した個所には、自動シャドウマスク装
着装置16、自動シャドウマスク脱離装置17が配置さ
れている。
EXAMPLES When actually implementing the present invention, in a factory where a large number of automatic mass production lines as described above are already installed,
For example, 24 used in one of these automatic mass production lines
Each of the exposure apparatuses is newly modified by adding new necessary equipment to the exposure apparatus according to the present invention to produce a variety of products such as 2
It is more economical to use a line that enables parallel production of four types of products (for example, the automatic attachment / detachment device, the automatic transfer device, and the transfer device can be used as they are). FIG. 1 shows an example in which a production line for high-mix low-volume production has been remodeled to accommodate a cathode ray tube for ultra-high definition color graphics with a pitch of 0.28 mm or less. This line has an index time of 30 seconds
With 24 seats and 24 types, the number of starts per seat is 120. 24 in actual use
Any number of products may be used as long as they are less than or equal to the product type, and if a plurality of seats are assigned to the same product according to the required number of productions, it is possible to finely correspond to the production plan. In FIG. 1, 1 is an automatic exposure apparatus according to the present invention, and 24 automatic development apparatuses attached to the automatic exposure apparatus, which collect the waste liquid for each type of film by removing the unexposed uncured portion from each exposed film. Automatic exposure line equipped with transfer device, 2 photoresist coating machine (12 positions), 3 graphite film coating machine (24 positions), 4 green fluorescent film coating machine (24 positions), 5 red color Fluorescent film coating machine (24 positions), 6 is a blue fluorescent film coating machine (24 positions), 7 is a panel cleaning machine (12 positions), 8 is a leaving place (30 positions), 9 is a metal back to be performed later. A filming machine (24 positions) for forming a smooth and easily thermally decomposed organic smooth film on a film such as a fluorescent substance prior to film formation is a shadow mask cleaning machine. In addition, a shadow mask is combined with the panel when it is put into the fluorescent surface forming line. An automatic shadow mask mounting device 16 and an automatic shadow mask detaching device 17 are arranged at the illustrated positions.

【0011】露光装置改造には、既述のように、螢光体
の3原色に対応するレンズ系切り換え機構(なおブラッ
クマトリクス形成用フォトレジスト膜に対しては、本発
明でもパネル中心対応位置に光源を配置して1回だけ露
光する従来の設備と同様で差支えない)、インライン型
電子銃対応で螢光体膜の色の種類に対応して露光時に光
源位置を横に移動させる機構、螢光体膜露光時に光源と
パネルとの距離をブラックマトリクスと螢光体膜の膜厚
差に対応して0.3〜0.6mm程度短くするための
(例えばガラス平板を光路中に挿入する)機構、パネル
面上での光源からの距離変化による露光照度変動を補正
して一様にするための光量補正フィルタを切り換える機
構、ロングアーク超高圧水銀灯の遮光板のスリット幅や
揺動のストローク長を品種に応じて切り換える機構など
の付加設置が必要となる。なお、ドット型螢光面形成用
光源としてロングアーク超高圧水銀灯を用いるのは、遮
光板にスリットを設けて使用するため、たとえ光の利用
効率が低下しても、点光源に近いショートアーク超高圧
水銀灯では直流点灯で光源位置変動補正装置などが必要
となり、しかも寿命も比較的短く価格も高いのに対し、
ロングアーク超高圧水銀灯では交流で点灯可能で寿命も
長く、かつストライプ型螢光面を用いるテレビジョン受
像管製造用には極めて好都合などの利点があるからであ
る。
As described above, in order to modify the exposure apparatus, a lens system switching mechanism corresponding to the three primary colors of the fluorescent substance (for the photoresist film for forming a black matrix, the position corresponding to the panel center in the present invention is also used). This is the same as the conventional equipment that arranges a light source and exposes only once), and a mechanism that moves the light source position laterally during exposure according to the type of color of the phosphor film that supports in-line electron guns. To shorten the distance between the light source and the panel at the time of exposing the optical film by about 0.3 to 0.6 mm corresponding to the film thickness difference between the black matrix and the fluorescent film (for example, insert a glass flat plate into the optical path). Mechanism, mechanism that switches the light amount correction filter to correct and uniform the exposure illuminance fluctuation due to the distance change from the light source on the panel surface, slit width of the light shield plate of the long arc ultra-high pressure mercury lamp and the stroke length of oscillation Additional installation of such mechanism for switching depending on varieties is required. The long arc ultra-high pressure mercury lamp is used as a dot-type light source for forming the fluorescent surface because it uses a slit in the light-shielding plate. High-pressure mercury lamps require direct-current lighting and a light source position fluctuation correction device, and have a relatively short life and high price.
This is because the long arc ultra-high pressure mercury lamp can be lit by alternating current, has a long life, and is extremely convenient for manufacturing a television picture tube using a striped fluorescent surface.

【0012】[0012]

【発明の効果】以上説明したように本発明によれば、比
較的生産数量が少なくて済む現状ではやや特殊なカラー
陰極線管に適した多品種少量生産が、経済的に、比較的
容易に、高い歩留で実行できるようになる。
As described above, according to the present invention, it is possible to economically and relatively easily produce a large quantity of a wide variety of products suitable for a slightly special color cathode ray tube in the present situation that the production quantity is relatively small. You will be able to perform with a high yield.

【図面の簡単な説明】[Brief description of drawings]

【図1】既存の単一品種6本同時量産用の螢光面形成ラ
インを本発明により24品種同時平行生産可能なライン
に改造した多品種少量生産用螢光面形成ラインの概略構
成を示す図である。
FIG. 1 shows a schematic structure of a fluorescent surface forming line for multi-product small-quantity production in which an existing fluorescent surface forming line for six mass-produced single products is modified into a line capable of simultaneous parallel production of 24 kinds according to the present invention. It is a figure.

【図2】ブラックマトリクス形成用フォトレジスト膜露
光時と感光性螢光体膜露光時とで光源とパネルの間の距
離を変える必要があることを示す図である。
FIG. 2 is a diagram showing that it is necessary to change the distance between the light source and the panel during exposure of the photoresist film for forming a black matrix and during exposure of the photosensitive fluorescent substance film.

【符号の説明】[Explanation of symbols]

1…本発明に係る自動露光装置24台とそれに付随する
装置よりなる自動露光ライン、 2…フォトレジスト塗
布機、 3…黒鉛膜塗布機、4…緑色螢光体膜塗布機、
5…赤色螢光体膜塗布機、 6…青色螢光体膜塗布
機、 7…パネル洗浄機、 8…放置個所、 9…フィ
ルミング機、 10…シャドウマスク洗浄機、 16…
自動シャドウマスク装着装置、 17…自動シャドウマ
スク脱離装置。
DESCRIPTION OF SYMBOLS 1 ... Automatic exposure line consisting of 24 automatic exposure devices according to the present invention and devices associated therewith, 2 ... Photoresist coating machine, 3 ... Graphite film coating machine, 4 ... Green fluorescent film coating machine,
5 ... Red fluorescent film coating machine, 6 ... Blue fluorescent film coating machine, 7 ... Panel cleaning machine, 8 ... Standing place, 9 ... Filming machine, 10 ... Shadow mask cleaning machine, 16 ...
Automatic shadow mask mounting device, 17 ... Automatic shadow mask detaching device.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】カラー陰極線管のパネル内面への螢光面形
成工程において、自動的にパネルにシャドウマスクを装
着、又はパネルに既装着のシャドウマスクをパネルから
分離させる複数組の自動着脱装置と、特定のパネルとそ
れに最初に装着された特定のシャドウマスクとの両者の
移動を同期させながら、前記パネルとシャドウマスクと
を夫々別に搬送装置に載せ、又は搬送装置から降ろす複
数の自動移載装置と、管の種類、仕様を工程への投入時
に自動的に識別して記憶する手段とを併用して、パネル
の内面にブラックマトリクスおよび3色それぞれの螢光
体膜群をフォトリソグラフィ技術により形成させるため
に、上記各形成作業夫々に応じて全て自動的に動作する
露光装置1台によって、各形成作業用露光を順次、完全
に自動的に行うようにしたことを特徴とするカラー陰極
線管の製造方法。
1. A plurality of automatic attachment / detachment devices for automatically attaching a shadow mask to a panel or separating an already attached shadow mask from a panel in a step of forming a fluorescent surface on the inner surface of the panel of a color cathode ray tube. , A plurality of automatic transfer devices for separately loading or unloading the panel and the shadow mask on a carrier device while synchronizing the movement of both the particular panel and the particular shadow mask initially attached to it. And a means for automatically identifying and storing the type and specification of the tube at the time of inputting into the process, a black matrix and three groups of fluorescent film groups are formed on the inner surface of the panel by photolithography technology. In order to do so, the exposure for each forming operation is sequentially and completely automatically performed by one exposure apparatus that automatically operates according to each forming operation. Color cathode ray tube manufacturing method which is characterized in that the.
【請求項2】比較的薄いブラックマトリクス形成用フォ
トレジスト膜と比較的厚い感光性螢光体膜との膜厚差に
対応して、螢光体膜露光時にはフォトレジスト膜露光時
よりも露光装置の光源からパネルまでの距離を、所定長
だけ自動的に短くすることを特徴とする請求項1記載の
カラー陰極線管の製造方法。
2. An exposure device during exposure of a fluorescent film compared to during exposure of a photoresist film, corresponding to a film thickness difference between a relatively thin photoresist film for forming a black matrix and a relatively thick photosensitive phosphor film. 2. The method of manufacturing a color cathode ray tube according to claim 1, wherein the distance from the light source to the panel is automatically shortened by a predetermined length.
【請求項3】所定の順序で繰返し配設されたドット状の
3色螢光体膜よりなる螢光面を形成させる際の露光装置
の光源として、ロングアーク超高圧水銀灯をアークから
指定長離して設置した略半円筒状または平板状の遮光板
で覆い、この遮光板に水銀灯管軸に直交する光透過用ス
リットを設け、これら全体を水銀灯の管軸に直交する方
向に管の種類に対応して定まるストロークだけ揺動さ
せ、更にスリット幅を揺動のストローク長に応じて可変
にしたものを用いることを特徴とする請求項1または2
記載のカラー陰極線管の製造方法。
3. A long arc ultra-high pressure mercury lamp is separated from an arc for a specified length as a light source of an exposure device for forming a fluorescent surface composed of dot-shaped three-color fluorescent films repeatedly arranged in a predetermined order. It is covered with a semi-cylindrical or flat light-shielding plate that is installed on the light-shielding plate, and the light-shielding plate is provided with a slit for light transmission orthogonal to the axis of the mercury lamp tube. 3. A structure is used in which a corresponding stroke is determined and the slit width is made variable according to the stroke length of the oscillation.
A method for manufacturing the described color cathode ray tube.
JP884493A 1993-01-22 1993-01-22 Manufacture of color cathode-ray tube Pending JPH06223713A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP884493A JPH06223713A (en) 1993-01-22 1993-01-22 Manufacture of color cathode-ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP884493A JPH06223713A (en) 1993-01-22 1993-01-22 Manufacture of color cathode-ray tube

Publications (1)

Publication Number Publication Date
JPH06223713A true JPH06223713A (en) 1994-08-12

Family

ID=11704076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP884493A Pending JPH06223713A (en) 1993-01-22 1993-01-22 Manufacture of color cathode-ray tube

Country Status (1)

Country Link
JP (1) JPH06223713A (en)

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