JPH06218534A - Laser beam heating equipment - Google Patents

Laser beam heating equipment

Info

Publication number
JPH06218534A
JPH06218534A JP1006893A JP1006893A JPH06218534A JP H06218534 A JPH06218534 A JP H06218534A JP 1006893 A JP1006893 A JP 1006893A JP 1006893 A JP1006893 A JP 1006893A JP H06218534 A JPH06218534 A JP H06218534A
Authority
JP
Japan
Prior art keywords
laser beam
optical fiber
soldering
heated
printed wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1006893A
Other languages
Japanese (ja)
Inventor
Makoto Kayaba
誠 萱場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1006893A priority Critical patent/JPH06218534A/en
Publication of JPH06218534A publication Critical patent/JPH06218534A/en
Pending legal-status Critical Current

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  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To perform soldering and to remove electronic parts which are soldered without giving thermal stress to a printed wiring board and the electronic parts. CONSTITUTION:The laser beam heating equipment includes a laser beam oscillator 1 to output a laser beam, an optical fiber member 2 to lead the outputted laser beam from the laser beam oscillator 1 to an object member 4 to be heated and an optical system 3 to condense the laser beam led by the optical fiber member 2 on an object part of the object member to be heated and the cross-sectional shape of an object part side end of the optical fiber member is conformed to the desired shape to be heated of the object member 4 to be heated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はレーザ光を熱源とする加
熱装置に係り、特に高密度の表面実装部品をプリント配
線基板にリフロー半田付するのに好適なレーザ光加熱装
置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating device using a laser beam as a heat source, and more particularly to a laser beam heating device suitable for reflow soldering high density surface mount components to a printed wiring board.

【0002】[0002]

【従来の技術】近年の電子機器に対する小型高性能化の
要求に答えて、電子機器の実装密度の向上には著しいも
のがある。半導体集積回路の集積度の向上に伴い、LS
Iパッケージの端子数は増加し、端子ピッチは縮小する
傾向にあり、現在のカスタムLSIでは、250ピン前
後の端子数と、0.5mmの端子ピッチをもつQFP
(4方向端子型フラットパッケージ;quad fla
t package)型ICが主流となりつつある。
2. Description of the Related Art In response to recent demands for miniaturization and high performance of electronic equipment, there is a remarkable improvement in the packaging density of electronic equipment. As the integration degree of semiconductor integrated circuits is improved, LS
The number of terminals in the I package tends to increase and the terminal pitch tends to decrease. In the current custom LSI, the number of terminals around 250 pins and the QFP having a terminal pitch of 0.5 mm are used.
(Four-way terminal type flat package; quad fla
t package) type ICs are becoming mainstream.

【0003】また、抵抗器やコンデンサなどの受動回路
部品においても、チップ部品が多用され、その大きさ
が、1.6mm×0.8mmあるいは1.25mm×
0.6mmの品種(いわゆる1608部品や1206部
品)が使われ始めている。これらの部品を搭載するプリ
ント配線基板も、高密度実装に対応して、積層の多層
化、表面実装および配線パターンの高密度化が進んでい
る。
Chip components are also frequently used in passive circuit components such as resistors and capacitors, and their size is 1.6 mm × 0.8 mm or 1.25 mm ×.
0.6 mm products (so-called 1608 parts and 1206 parts) are beginning to be used. The printed wiring boards on which these components are mounted are also being multi-layered in layers, surface-mounted, and densified in wiring patterns in response to high-density mounting.

【0004】このような微細な端子ピッチを持つ電子部
品を、プリント配線基板に半田付する場合には、従来か
らの半田槽を使用するフロー半田付法では、端子間に半
田ブリッジができて好ましくない。このため、予めプリ
ント配線基板の半田付箇所に、クリーム半田をスクリー
ン印刷しておき、接着剤で電子部品を仮止めした後、加
熱して半田を熔かして半田付するリフロー半田付法が採
用されている。
In the case of soldering an electronic component having such a fine terminal pitch to a printed wiring board, a conventional flow soldering method using a solder bath is preferable because a solder bridge is formed between the terminals. Absent. For this reason, there is a reflow soldering method in which cream solder is screen-printed on the soldering points of the printed wiring board in advance, the electronic parts are temporarily fixed with an adhesive, and then the solder is heated to melt and solder the solder. Has been adopted.

【0005】このリフロー半田付法に用いられる加熱方
法には、プリント配線基板全体を加熱して半田付する一
括接続と、個々の電子部品毎に半田付する個別接続とが
ある。一括接続の加熱方法には、赤外線ランプ等から発
する赤外線を用いて加熱する赤外線リフローや、不活性
液体の飽和蒸気相の中にプリント配線基板を通して加熱
する蒸気相リフローや、熱風をプリント配線基板に吹き
付ける熱風リフローなどがある。また、個別接続の加熱
方法には、レーザ光を使うレーザ・リフローや、ヒータ
を接続部に当て、パルス電流を流すパルス・ヒートなど
がある。
Heating methods used in this reflow soldering method include a collective connection in which the entire printed wiring board is heated and soldered, and an individual connection in which each electronic component is soldered. As the heating method for batch connection, infrared reflow that heats using infrared rays emitted from an infrared lamp or the like, vapor phase reflow that heats through the printed wiring board in the saturated vapor phase of the inert liquid, or hot air to the printed wiring board. There is hot-air reflow to blow. In addition, as a heating method for individual connection, there are laser reflow using laser light, pulse heating in which a heater is applied to the connection portion, and pulse current is applied.

【0006】なお、従来プリント配線基板を修理するた
めに、電子部品を取り外す場合には、熱風を吹き付けて
加熱するか、取外し対象の電子部品形状に合わせた特殊
なコテ先を取り付けた半田ゴテで加熱する方法をとって
いた。
In order to repair a conventional printed wiring board, when removing an electronic component, hot air is blown to heat it, or a soldering iron with a special iron tip attached to the shape of the electronic component to be removed is attached. The method of heating was taken.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、従来の
一括接続のリフロー半田付方法では、半田付対象の電子
部品やプリント配線基板全体が加熱されるために、電子
部品や基板に熱的ストレスが加えられていた。この熱的
ストレスは、電子部品やプリント配線基板を構成する各
種の部材の熱膨張率の違いから機械的ストレスとなり、
これらの電気的接続点の信頼度を低下させ、場合によっ
ては、電子部品が故障したり、プリント配線基板が断線
するという問題点があった。
However, in the conventional reflow soldering method for collective connection, since the electronic parts to be soldered and the entire printed wiring board are heated, thermal stress is applied to the electronic parts and the board. It was being done. This thermal stress becomes mechanical stress due to the difference in the coefficient of thermal expansion of various members that make up electronic components and printed wiring boards,
There is a problem in that the reliability of these electrical connection points is reduced, and in some cases, electronic components may fail or the printed wiring board may be broken.

【0008】また、端子ピッチの縮小に対応して、プリ
ント配線基板の半田付ランドピッチ及びランド幅も縮小
され、この結果ランド間ブリッジを防止するために、半
田印刷の厚さは従来よりも薄くされることになる。この
ように、1つの半田付箇所の半田量が少なくなると、熔
融した半田のランドからの盛り上がりの高さも小さくな
る。このため、半田付時に加えられる熱によるプリント
配線基板の反りによる部品端子の平面からの浮き上がり
の高さが、溶融した半田のランドからの高さを超える確
率が高くなり、前記端子が半田付されないという不良が
発生するという問題点があった。
Further, in response to the reduction of the terminal pitch, the soldering land pitch and the land width of the printed wiring board are also reduced. As a result, in order to prevent the bridge between the lands, the thickness of the solder printing is thinner than before. Will be done. As described above, when the amount of solder in one soldering portion is reduced, the height of swelling of the molten solder from the land is also reduced. For this reason, the height of the component terminal rising from the plane due to the warp of the printed wiring board due to the heat applied during soldering becomes higher than the height of the molten solder from the land, and the terminal is not soldered. There is a problem that such a defect occurs.

【0009】また、故障した電子部品をプリント配線基
板から取り外して、新しい電子部品と交換する場合に
は、取外時および取付時の2回に亙って、プリント配線
基板の同じ箇所が長時間加熱されるために、熱的ストレ
スによるパターン剥離や周囲の電子部品の故障が生じや
すいという問題点があった。
In addition, when the defective electronic component is removed from the printed wiring board and replaced with a new electronic component, the same portion of the printed wiring board remains in the same position for a long time during the removal and the mounting. Since it is heated, there has been a problem that pattern peeling due to thermal stress and failure of surrounding electronic components are likely to occur.

【0010】また、個別接続ができる加熱方法であるレ
ーザ・リフローや、パルス・ヒートなどでは、熱的スト
レスの問題は無いものの、半田付対象の電子部品の端子
1本毎に、レーザ照射や、パルス電流の印加を行ってい
たために、半田付に時間が掛かり過ぎて生産性が極端に
悪くなるという問題点があった。さらに、レーザ・リフ
ローや、パルス・ヒートでは、故障した電子部品を取り
外すことができないという問題点もあった。
Laser heating, pulse heating, etc., which are heating methods that can be individually connected, do not cause thermal stress, but laser irradiation and / or laser irradiation can be performed for each terminal of the electronic component to be soldered. Since the pulse current is applied, there is a problem that the soldering takes too much time and productivity is extremely deteriorated. Further, there is a problem that the failed electronic component cannot be removed by laser reflow or pulse heat.

【0011】以上の問題点に鑑み、本発明の主要な課題
は、電子部品やプリント配線基板に与える熱的ストレス
を少なくして、高い信頼性を持つ半田付を行い、製品の
歩留まりを高めることである。また、本発明の別の課題
は、プリント配線基板や他の電子部品に与える熱的スト
レスを少なくして、故障した電子部品をプリント配線基
板から取り外すことである。
In view of the above problems, the main object of the present invention is to reduce the thermal stress applied to electronic parts and printed wiring boards, to perform soldering with high reliability, and to improve the yield of products. Is. Another object of the present invention is to reduce the thermal stress applied to the printed wiring board and other electronic components and remove the defective electronic component from the printed wiring board.

【0012】[0012]

【課題を解決するための手段】本発明においては、レー
ザ光を出力するレーザ発振器と、出力レーザ光を前記レ
ーザ発振器から被加熱対象部材まで導く光ファイバ部材
と、光ファイバ部材で導かれたレーザ光を被加熱対象部
材の対象部位へ集光する光学系とを含み、前記光ファイ
バ部材の前記対象部位側端部の断面形状を、対象部材に
所望する被加熱形状に合わせることにより前記課題を解
決するものである。また、本発明においては、被加熱対
象部材が半田付対象部材であり、かつ被加熱部位が半田
付対象部位であることができる。
According to the present invention, there is provided a laser oscillator for outputting a laser beam, an optical fiber member for guiding the output laser beam from the laser oscillator to a member to be heated, and a laser guided by the optical fiber member. An optical system for condensing light to a target portion of a target member to be heated, the cross-sectional shape of the end portion of the target portion of the optical fiber member, by adjusting the target member to be heated shape desired to solve the above problems. It is a solution. Further, in the present invention, the member to be heated may be the member to be soldered, and the portion to be heated may be the portion to be soldered.

【0013】[0013]

【作用】本発明のレーザ光加熱装置は、レーザ発振器に
よるレーザ光を熱源として、光ファイバ部材により、レ
ーザ光を半田付対象部品の半田付箇所まで導くととも
に、光ファイバ部材の半田付箇所側端部の形状を、半田
付対象部品の端子配列形状に合わせて成型することによ
り、半田付対象部品の端子部分のみを選択的に加熱する
ことができる。これにより、他の電子部品に熱的ストレ
スを加えることなく半田付することが可能となる。ま
た、故障した電子部品をプリント配線基板から取り外す
場合にも、他の電子部品に熱的ストレスを与えることな
く、故障部品を取り外すことができる。
In the laser light heating apparatus of the present invention, the laser light from the laser oscillator is used as a heat source to guide the laser light to the soldering point of the component to be soldered by the optical fiber member and the end of the optical fiber member at the soldering point side. It is possible to selectively heat only the terminal portion of the component to be soldered by molding the shape of the part according to the terminal arrangement shape of the component to be soldered. This makes it possible to solder other electronic components without applying thermal stress. Also, when removing a defective electronic component from the printed wiring board, the defective component can be removed without applying thermal stress to other electronic components.

【0014】[0014]

【実施例】次に、図面を参照して本発明の実施例を説明
する。図1(a)は、本発明のレーザ光加熱装置を半田
付装置に応用した第1の実施例の概略構成図である。同
図において、半田付の熱源であるレーザ発振器1から、
半田付対象部材である電子部品4まで、光ファイバ部材
である光ファイバ束2を用いてレーザ光を導く。光ファ
イバ束2の半田付対象側端部には、集光レンズを含む光
学系3が設けられており、半田付け箇所にレーザ光のエ
ネルギーを集中できるようになっている。レーザ発振器
1は、そのレーザ光出力を熱源として用いるので、発振
周波数の安定化や発振モードの制御は、簡略化すること
が可能である。
Embodiments of the present invention will now be described with reference to the drawings. FIG. 1A is a schematic configuration diagram of a first embodiment in which the laser light heating device of the present invention is applied to a soldering device. In the figure, from the laser oscillator 1 which is a heat source for soldering,
Laser light is guided to the electronic component 4 which is the soldering target member using the optical fiber bundle 2 which is the optical fiber member. An optical system 3 including a condenser lens is provided at the end of the optical fiber bundle 2 on the side to be soldered so that the energy of the laser light can be concentrated at the soldering location. Since the laser oscillator 1 uses the laser light output as a heat source, stabilization of the oscillation frequency and control of the oscillation mode can be simplified.

【0015】図1(a)における光ファイバ束2のレー
ザ発振器1側の断面A−Aを同図(b)に、また半田付
される電子部品4側の断面B−Bを同図(c)に示す。
本実施例では、光ファイバ束2のレーザ発振器側の断面
形状を円形としたが、これに限定されず、レーザ発振器
1の光出力端子形状に合わせればよい。
A cross section AA of the optical fiber bundle 2 on the laser oscillator 1 side in FIG. 1A is shown in FIG. 1B, and a cross section BB on the electronic component 4 side to be soldered is shown in FIG. 1C. ).
In the present embodiment, the cross-sectional shape of the optical fiber bundle 2 on the laser oscillator side is circular, but the shape is not limited to this and may be matched with the shape of the optical output terminal of the laser oscillator 1.

【0016】また、光ファイバ束2の電子部品4側の断
面形状を長方形としたが、光ファイバ束2は、多数の極
細い光ファイバを束ねた構造であるので、半田付される
電子部品4の端子形状に合わせて、種々の形状(例えば
円形、正方形など)に変化させることが可能である。
Although the cross-sectional shape of the optical fiber bundle 2 on the electronic component 4 side is rectangular, the optical fiber bundle 2 has a structure in which a large number of extremely thin optical fibers are bundled, so that the electronic component 4 to be soldered is used. It is possible to change into various shapes (for example, circle, square, etc.) according to the terminal shape of.

【0017】図2は、レーザ光による半田付の様子を示
す図であるが、光学系3には、光ファイバ束2で導かれ
たレーザ光の焦点を、電子部品4の端子の半田付部位に
合わせるための焦点装置6と、その焦点ツマミ7とが設
けられている。この焦点ツマミ7は、左右に回転させる
ことにより、光学系3全体の水平を保ちつつプリント配
線基板表面からの高さを上下に調節できるものである。
FIG. 2 is a diagram showing a soldering state by laser light. In the optical system 3, the focus of the laser light guided by the optical fiber bundle 2 is set at the soldering portion of the terminal of the electronic component 4. A focus device 6 for adjusting the focus and a focus knob 7 thereof are provided. By rotating the focus knob 7 to the left and right, the height from the surface of the printed wiring board can be adjusted up and down while keeping the entire optical system 3 horizontal.

【0018】次に、本発明のレーザ光加熱装置を用いた
半田付方法について説明する。所要の配線パターンの形
成と所要の積層加工が施されたプリント配線基板は、半
田付されるランド部分以外にレジストがスクリーン印刷
される。次いで、半田付されるランド部分に、クリーム
半田がスクリーン印刷される。次に、端子部分が予備半
田メッキされた電子部品を、接着剤でプリント配線基板
に仮止めする。ここまでは、通常のリフロー半田付と同
じである。
Next, a soldering method using the laser light heating apparatus of the present invention will be described. On a printed wiring board on which a required wiring pattern has been formed and a required lamination process has been performed, a resist is screen-printed on portions other than the land portion to be soldered. Next, cream solder is screen-printed on the land portion to be soldered. Next, the electronic component having the terminal portion preliminarily solder-plated is temporarily fixed to the printed wiring board with an adhesive. Up to this point, the process is the same as in normal reflow soldering.

【0019】一方、半田付装置においては、半田付され
る電子部品の形状に、光ファイバ端部の形状を合わせ
る。次いで、本装置の光学系3を電子部品4が仮止めさ
れたプリント配線基板上にセットする。このとき、焦点
ツマミ7を調節して、レーザ光の焦点が、半田付箇所に
一致するように合わせる。この焦点合わせは、半田付さ
れる電子部品4の位置を認識して、本装置の光学系3ま
たはプリント配線基板の相互位置を合わせる機構と、連
動させてもよい。
On the other hand, in the soldering apparatus, the shape of the end of the optical fiber is matched with the shape of the electronic component to be soldered. Next, the optical system 3 of this device is set on the printed wiring board to which the electronic component 4 is temporarily fixed. At this time, the focus knob 7 is adjusted so that the focus of the laser light is aligned with the soldering point. This focusing may be performed in conjunction with a mechanism for recognizing the position of the electronic component 4 to be soldered and adjusting the mutual positions of the optical system 3 of the present apparatus or the printed wiring board.

【0020】次いで、レーザ発振器1を発振させて、レ
ーザ光を電子部品4の半田付箇所に照射する。すると、
このレーザ光の熱により、スクリーン印刷された半田が
熔けて、前記電子部品4の端子が一括して半田付され
る。このとき、レーザ光は、半田付箇所のみに照射され
るので、他の電子部品や、プリント配線基板に熱的スト
レスを与えることが無い。
Next, the laser oscillator 1 is oscillated to irradiate the soldering points of the electronic component 4 with laser light. Then,
The heat of the laser light melts the screen-printed solder, and the terminals of the electronic component 4 are collectively soldered. At this time, since the laser light is applied only to the soldered portion, it does not give thermal stress to other electronic components and the printed wiring board.

【0021】尚、故障したプリント配線基板を修理する
などの目的で、電子部品をプリント配線基板から取り外
す場合も、本装置の光ファイバ端部の形状を電子部品に
合わせて、同様な手順で行える。
Even when the electronic component is removed from the printed wiring board for the purpose of repairing the faulty printed wiring board, the same procedure can be performed according to the shape of the end portion of the optical fiber of the present device to the electronic component. .

【0022】図3は、本発明の第2実施例である銘板刻
印機の概略構成図である。レーザ発振器1、光ファイバ
束2および光学系3は、前記第1の実施例と同じであ
る。本第2実施例の銘板刻印機は、半田付の代わりに、
プラスチック板10にレーザ光を照射することにより、
所望の刻印を施すことがを目的とするものである。この
目的のために、光ファイバ束2の光学系側端部を、刻印
を所望する文字パターンや図形パターンとする。本装置
を使用して刻印を行うと、従来の銘板刻印に使用されて
いた高価な金型が不要となる。
FIG. 3 is a schematic configuration diagram of a nameplate stamping machine according to the second embodiment of the present invention. The laser oscillator 1, the optical fiber bundle 2 and the optical system 3 are the same as those in the first embodiment. The nameplate stamping machine of the second embodiment is replaced by soldering,
By irradiating the plastic plate 10 with laser light,
The purpose is to give a desired marking. For this purpose, the end of the optical fiber bundle 2 on the side of the optical system is made into a character pattern or a graphic pattern for which marking is desired. When the marking is performed using this device, the expensive mold used for the conventional marking of the nameplate becomes unnecessary.

【0023】以上、好ましい実施例を説明したが、これ
は本発明の範囲を限定するものではない。当業者は本発
明の精神に基づき多様な変更を案出することが可能であ
ろう。例えば、前記実施例では、本発明の光ファイバ部
材に光ファイバ束を用いていたが、対象部位側端部の断
面形状を被加熱形状に合わせ得る限り、本発明はこの種
の光ファイバ束に限定されず、一体あるいは分割構成さ
れた光ファイバ部材も本発明の技術的範囲内である。
While the preferred embodiment has been described above, this is not meant to limit the scope of the invention. Those skilled in the art can devise various modifications based on the spirit of the present invention. For example, in the above embodiment, the optical fiber bundle was used for the optical fiber member of the present invention, but the present invention is applicable to this type of optical fiber bundle as long as the cross-sectional shape of the target site side end can be adjusted to the heated shape. There is no limitation, and an optical fiber member integrally or divided is also within the technical scope of the present invention.

【0024】[0024]

【発明の効果】以上説明した通り、本発明によれば、レ
ーザ光を導く光ファイバ束の形状を被加熱物の形状に合
わせることにより、加熱対象部位のみを加熱することが
できる。このため、加熱対象部位以外の部分に熱的スト
レスを与えることなく加熱することができるという効果
がある。また、本発明のレーザ光加熱装置を半田付に応
用することにより、プリント配線基板や電子部品に熱的
ストレスを与えることなく半田付できるという効果があ
る。
As described above, according to the present invention, only the heating target portion can be heated by matching the shape of the optical fiber bundle for guiding the laser light with the shape of the object to be heated. Therefore, there is an effect that the portion other than the heating target portion can be heated without applying thermal stress. Further, by applying the laser light heating apparatus of the present invention to soldering, there is an effect that soldering can be performed without applying thermal stress to the printed wiring board and electronic components.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例である半田付装置の概略
構成図。
FIG. 1 is a schematic configuration diagram of a soldering device according to a first embodiment of the present invention.

【図2】半田付装置の光学系の詳細図。FIG. 2 is a detailed view of an optical system of the soldering device.

【図3】本発明の第2の実施例である刻印装置の概略構
成図。
FIG. 3 is a schematic configuration diagram of a marking device that is a second embodiment of the present invention.

【図4】従来のレーザ半田付装置の概略図。FIG. 4 is a schematic view of a conventional laser soldering device.

【符号の説明】[Explanation of symbols]

1 レーザ発振器 2 光ファイバ部材 3 光学系 4 被加熱部材(被半田付部材) 5 プリント配線基板 6 焦点装置 7 焦点ツマミ 10 プラスチック板 1 Laser oscillator 2 Optical fiber member 3 Optical system 4 Heated member (soldered member) 5 Printed wiring board 6 Focus device 7 Focus knob 10 Plastic plate

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 レーザ光を出力するレーザ発振器と、 出力レーザ光を前記レーザ発振器から加熱対象部材まで
導く光ファイバ部材と、 光ファイバ部材で導かれたレーザ光を加熱対象部材の対
象部位へ集光する光学系とを含み、 前記光ファイバ部材の前記対象部位側端部の断面形状
を、対象部材に所望する被加熱形状に合わせることを特
徴とするレーザ光加熱装置。
1. A laser oscillator that outputs a laser beam, an optical fiber member that guides the output laser beam from the laser oscillator to a heating target member, and a laser beam that is guided by the optical fiber member to a target portion of the heating target member. An optical system for illuminating, wherein the cross-sectional shape of the end portion of the optical fiber member on the side of the target portion is matched with a desired heated shape of the target member.
【請求項2】 請求項1において、加熱対象部材が半田
付対象部材であり、かつ被加熱部位が半田付対象部位で
あることを特徴とするレーザ光加熱装置。
2. The laser light heating device according to claim 1, wherein the heating target member is a soldering target member and the heated region is a soldering target region.
JP1006893A 1993-01-25 1993-01-25 Laser beam heating equipment Pending JPH06218534A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1006893A JPH06218534A (en) 1993-01-25 1993-01-25 Laser beam heating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1006893A JPH06218534A (en) 1993-01-25 1993-01-25 Laser beam heating equipment

Publications (1)

Publication Number Publication Date
JPH06218534A true JPH06218534A (en) 1994-08-09

Family

ID=11740068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1006893A Pending JPH06218534A (en) 1993-01-25 1993-01-25 Laser beam heating equipment

Country Status (1)

Country Link
JP (1) JPH06218534A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5904868A (en) * 1994-06-16 1999-05-18 International Business Machines Corporation Mounting and/or removing of components using optical fiber tools
US8178390B2 (en) 2005-03-03 2012-05-15 Infineon Technologies Ag Semiconductor component and production method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5904868A (en) * 1994-06-16 1999-05-18 International Business Machines Corporation Mounting and/or removing of components using optical fiber tools
US8178390B2 (en) 2005-03-03 2012-05-15 Infineon Technologies Ag Semiconductor component and production method

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