JPH0621177A - Surface mounted semiconductor device - Google Patents

Surface mounted semiconductor device

Info

Publication number
JPH0621177A
JPH0621177A JP19598692A JP19598692A JPH0621177A JP H0621177 A JPH0621177 A JP H0621177A JP 19598692 A JP19598692 A JP 19598692A JP 19598692 A JP19598692 A JP 19598692A JP H0621177 A JPH0621177 A JP H0621177A
Authority
JP
Japan
Prior art keywords
junction
temperature
island
type semiconductor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19598692A
Other languages
Japanese (ja)
Inventor
Masanobu Yanagiya
正信 柳谷
Hayami Masago
早水 真砂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19598692A priority Critical patent/JPH0621177A/en
Publication of JPH0621177A publication Critical patent/JPH0621177A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a semiconductor device, in which the temperature at a semiconductor chip mounted on an island and sealed with a resin can be measured accurately and stably. CONSTITUTION:A semiconductor pellet is mounted on an island 11. A p-n junction provided between a p-type semiconductor 4 and an n-type semiconductor 5 is formed on the rear face of the island 11. These semiconductors 4 and 5 are connected to an outer lead 12a. While a voltage is supplied through the outer lead 12a to the P-n junction, the temperature at the pn-junction or around the pn-junction, namely the temperature at the semiconductor pellet, can be measured from its voltage, current, and so on.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明ははんだ等により実装を行
う表面実装型の半導体装置に関し、特にはんだ耐熱性試
験に用いるための温度測定機能を有する半導体装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface mount type semiconductor device mounted by soldering or the like, and more particularly to a semiconductor device having a temperature measuring function for use in a solder heat resistance test.

【0002】表面実装型の半導体装置のはんだ耐熱性試
験を行うために、従来ではパッケージ表面に温度計を設
けた半導体装置が提案されている。図3はその一例であ
り、リードフレーム1のアイランド11に半導体ペレッ
ト2が搭載され、樹脂7によりパッケージされ、リード
フレーム1の外部リード12が樹脂7から突出される。
そして、樹脂7の上面に熱電対8がエポキシ樹脂9等に
より一体的に固定される。この半導体装置では、はんだ
付けを行う際の熱処理温度を熱電対8で測定すること
で、半導体装置の耐熱信頼性を測定することができる。
In order to perform a solder heat resistance test on a surface mount type semiconductor device, a semiconductor device having a thermometer on the surface of the package has been conventionally proposed. FIG. 3 is an example thereof, in which the semiconductor pellets 2 are mounted on the islands 11 of the lead frame 1 and packaged with the resin 7, and the external leads 12 of the lead frame 1 are projected from the resin 7.
Then, the thermocouple 8 is integrally fixed to the upper surface of the resin 7 by the epoxy resin 9 or the like. In this semiconductor device, by measuring the heat treatment temperature at the time of soldering with the thermocouple 8, the heat resistance reliability of the semiconductor device can be measured.

【0003】[0003]

【発明が解決しようとする課題】このような半導体装置
では、熱電対8が樹脂7の外側に配置されているために
半導体ペレット2の温度を直接測定することができず、
樹脂7の外面と樹脂7内に封止された半導体ペレット2
との間に温度差が生じて信頼性の高い温度測定が難しい
という問題がある。又、熱電対8を固定する位置に応じ
て測定温度にばらつきが生じるという問題もある。本発
明の目的は、半導体ペレットの温度を正確にしかも安定
に測定することができる半導体装置を提供することにあ
る。
In such a semiconductor device, since the thermocouple 8 is disposed outside the resin 7, the temperature of the semiconductor pellet 2 cannot be directly measured.
The outer surface of the resin 7 and the semiconductor pellet 2 sealed in the resin 7
There is a problem that it is difficult to measure the temperature with high reliability because a temperature difference occurs between the two. There is also a problem that the measured temperature varies depending on the position where the thermocouple 8 is fixed. An object of the present invention is to provide a semiconductor device capable of accurately and stably measuring the temperature of a semiconductor pellet.

【0004】[0004]

【課題を解決するための手段】本発明は、半導体ペレッ
トを搭載するアイランドの裏面にP型半導体とN型半導
体とで構成されるPN接合を配設するとともに、これら
P型及びN型の各半導体を外部リードに接続し、かつこ
れら外部リードを通してPN接合に通電し、その際の電
圧,電流等からPN接合及びその近傍の温度を測定する
ように構成する。
According to the present invention, a PN junction composed of a P-type semiconductor and an N-type semiconductor is provided on the back surface of an island on which a semiconductor pellet is mounted, and each of these P-type and N-type semiconductors is arranged. The semiconductor is connected to external leads, the PN junction is energized through these external leads, and the temperature at the PN junction and its vicinity is measured from the voltage and current at that time.

【0005】[0005]

【実施例】次に、本発明について図面を参照して説明す
る。図1は本発明の第1実施例を示す図であり、同図
(a)は半導体装置の裏面側の断面図、(b)及び
(c)はそのA−A線,B−B線の拡大断面図である。
これらの図において、リードフレーム1のアイランド1
1の上面には図外の半導体ペレットが搭載され、外部リ
ード12に電気接続される。前記アイランド11の裏面
及びアイランド11と外部リード12との間には絶縁膜
3が形成され、この絶縁膜3の裏面にP型半導体膜4が
部分的に形成される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. 1A and 1B are views showing a first embodiment of the present invention. FIG. 1A is a cross-sectional view of the back surface side of a semiconductor device, and FIGS. 1B and 1C are lines AA and BB thereof. It is an expanded sectional view.
In these figures, island 1 of leadframe 1
A semiconductor pellet (not shown) is mounted on the upper surface of 1 and is electrically connected to the external lead 12. An insulating film 3 is formed on the back surface of the island 11 and between the island 11 and the external leads 12, and a P-type semiconductor film 4 is partially formed on the back surface of the insulating film 3.

【0006】そして、このP型半導体膜4の裏面一部に
はN型半導体層5が形成され、これらP型半導体膜4と
N型半導体素子5とでPN接合の温度計を構成してい
る。更に、前記絶縁膜3の裏面には前記P型半導体膜4
とN型半導体層5にそれぞれ電気接続される導電パター
ン6が形成され、外部リード12の一部12aにそれぞ
れ電気接続される。尚、前記P型半導体膜4,N型半導
体層5,及び導電パターン6等はアイランド11に搭載
した図外の半導体ペレットを封止する樹脂7によって一
体的に封止する。
An N-type semiconductor layer 5 is formed on a part of the back surface of the P-type semiconductor film 4, and the P-type semiconductor film 4 and the N-type semiconductor element 5 form a PN junction thermometer. . Further, the P-type semiconductor film 4 is formed on the back surface of the insulating film 3.
And conductive patterns 6 electrically connected to the N-type semiconductor layer 5 are formed, respectively, and electrically connected to the portions 12a of the external leads 12, respectively. The P-type semiconductor film 4, the N-type semiconductor layer 5, the conductive pattern 6 and the like are integrally sealed with a resin 7 that seals a semiconductor pellet (not shown) mounted on the island 11.

【0007】この構成によれば、外部リード12aを通
して導電パターン6に通電し、更にP型半導体膜4とN
型半導体層5とのPN接合に通電を行ない、この際の電
圧と電流をモニタすることにより、PN接合での温度、
即ちアイランド11と半導体ペレットの温度を測定する
ことができる。ここで、PN接合に加える電圧をXと
し、そのときの電流をYとすると、PN接合における温
度tには次の関係がある。Y∝eX/Kt
According to this structure, the conductive pattern 6 is energized through the external lead 12a, and the P-type semiconductor film 4 and N
The PN junction with the type semiconductor layer 5 is energized, and the voltage and current at this time are monitored to determine the temperature at the PN junction,
That is, the temperatures of the island 11 and the semiconductor pellet can be measured. Here, if the voltage applied to the PN junction is X and the current at that time is Y, the temperature t at the PN junction has the following relationship. Y∝e X / Kt

【0008】したがって、この半導体装置では、電圧,
電流に基づいて樹脂7で封止されたアイランド11、及
びこれに搭載された半導体ペレットの近傍の温度を測定
することができるため、耐熱性試験に際しての半導体ペ
レットの温度を正確に測定することができる。又、PN
接合をアイランド11の中心位置に設定することで、安
定した温度測定を行うことができる。
Therefore, in this semiconductor device, the voltage,
Since the temperature in the vicinity of the island 11 sealed with the resin 7 and the semiconductor pellet mounted thereon can be measured based on the electric current, the temperature of the semiconductor pellet during the heat resistance test can be accurately measured. it can. Also, PN
By setting the junction at the center of the island 11, stable temperature measurement can be performed.

【0009】図2は本発明の第2実施例を示す図であ
り、同図(a)は裏面側の断面図、(b)及び(c)は
そのC−C線,D−D線の拡大断面図である。これらの
図において、前記第1実施例と同一部分には同一符号を
付してある。この実施例においても、アイランド11の
裏面に設けた絶縁膜3上にP型半導体膜4を形成し、そ
の一部に不純物注入を行ってN型半導体層5を形成す
る。そして、P型半導体膜4とN型半導体層5をそれぞ
れ導電パターン6により外部リード12aに接続する。
FIG. 2 is a diagram showing a second embodiment of the present invention. FIG. 2 (a) is a sectional view of the back side, and FIGS. 2 (b) and (c) are its CC line and DD line. It is an expanded sectional view. In these figures, the same parts as those in the first embodiment are designated by the same reference numerals. Also in this embodiment, the P-type semiconductor film 4 is formed on the insulating film 3 provided on the back surface of the island 11, and the N-type semiconductor layer 5 is formed by implanting impurities in a part thereof. Then, the P-type semiconductor film 4 and the N-type semiconductor layer 5 are connected to the external leads 12a by the conductive patterns 6, respectively.

【0010】ここでは、導電パターン6の一方を直接ア
イランド11に電気接続することにより、PN接合をこ
のアイランド11と一体に形成された外部リード12、
即ちGNDリード(つりリード)に接続でき、温度計と
してのリードは他方の外部リード12aとして1本設け
るだけでよく、半導体装置におけるリードの有効利用を
図ることができる。外部リード12,12aを通してP
N接合に通電を行い、その際の電圧,電流等によりPN
接合乃至アイランド11の温度を測定することは第1実
施例と同じである。尚、PN接合の構成及びこれにつな
がる導電パターンの構成等は適宜変更できることはを言
うまでもない。
Here, by electrically connecting one side of the conductive pattern 6 directly to the island 11, the external lead 12 having a PN junction formed integrally with the island 11,
That is, it can be connected to a GND lead (hanging lead), and only one lead as a thermometer needs to be provided as the other external lead 12a, and the lead in the semiconductor device can be effectively used. P through the external leads 12, 12a
The N-junction is energized and PN is applied depending on the voltage and current at that time.
The measurement of the temperature of the junction or the island 11 is the same as in the first embodiment. Needless to say, the structure of the PN junction and the structure of the conductive pattern connected thereto can be changed as appropriate.

【0011】[0011]

【発明の効果】以上説明したように本発明は、半導体ペ
レットを搭載したアイランドにPN接合を配設し、この
PN接合に通電する際の電圧,電流等からPN接合の温
度、更にはアイランド及びこれに搭載された半導体ペレ
ットの極近傍の温度を測定することができ、信頼性上最
も重要な半導体ペレット温度を正確にしかも安定に測定
することができ、信頼性の高い耐熱性試験を行うことが
できる効果がある。
As described above, according to the present invention, the PN junction is arranged on the island on which the semiconductor pellet is mounted, and the temperature of the PN junction, the temperature of the PN junction, and the island and It is possible to measure the temperature in the immediate vicinity of the semiconductor pellet mounted on it, and to measure the temperature of the semiconductor pellet, which is the most important for reliability, accurately and stably, and to perform a highly reliable heat resistance test. There is an effect that can be.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例を示し、(a)は裏面側の
断面図、(b)及び(c)はそのA−A線,B−B線拡
大断面図である。
1A and 1B show a first embodiment of the present invention, in which FIG. 1A is a sectional view of a back surface side, and FIGS. 1B and 1C are enlarged sectional views taken along line AA and BB.

【図2】本発明の第2実施例を示し、(a)は裏面側の
断面図、(b)及び(c)はそのC−C線,D−D線拡
大断面図である。
2A and 2B show a second embodiment of the present invention, in which FIG. 2A is a cross-sectional view on the back surface side, and FIGS. 2B and 2C are enlarged cross-sectional views taken along the lines CC and DD.

【図3】従来の温度計を付設した半導体装置の断面図で
ある。
FIG. 3 is a sectional view of a semiconductor device provided with a conventional thermometer.

【符号の説明】[Explanation of symbols]

1 リードフレーム 2 半導体ペレット 3 絶縁膜 4 P型半導体膜 5 N型半導体層 6 導電パターン 11 アイランド 12,12a 外部リード DESCRIPTION OF SYMBOLS 1 Lead frame 2 Semiconductor pellet 3 Insulating film 4 P-type semiconductor film 5 N-type semiconductor layer 6 Conductive pattern 11 Island 12, 12a External lead

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 半導体ペレットを搭載するアイランドの
裏面にP型半導体とN型半導体とで構成されるPN接合
を配設するとともに、前記P型及びN型の各半導体を外
部リードに接続し、これら外部リードを通して前記PN
接合に通電し、その際の電圧,電流等からPN接合及び
その近傍の温度を測定するように構成したことを特徴と
する表面実装型の半導体装置。
1. A PN junction composed of a P-type semiconductor and an N-type semiconductor is provided on the back surface of an island on which a semiconductor pellet is mounted, and each of the P-type and N-type semiconductors is connected to an external lead, The PN through these external leads
A surface mount type semiconductor device characterized in that the junction is energized, and the temperature of the PN junction and its vicinity is measured from the voltage and current at that time.
JP19598692A 1992-06-30 1992-06-30 Surface mounted semiconductor device Pending JPH0621177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19598692A JPH0621177A (en) 1992-06-30 1992-06-30 Surface mounted semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19598692A JPH0621177A (en) 1992-06-30 1992-06-30 Surface mounted semiconductor device

Publications (1)

Publication Number Publication Date
JPH0621177A true JPH0621177A (en) 1994-01-28

Family

ID=16350317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19598692A Pending JPH0621177A (en) 1992-06-30 1992-06-30 Surface mounted semiconductor device

Country Status (1)

Country Link
JP (1) JPH0621177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996022596A3 (en) * 1995-01-19 1996-09-19 Conner Peripherals Inc Non-destructive in-situ landing velocity determination of magnetic rigid disk drives

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996022596A3 (en) * 1995-01-19 1996-09-19 Conner Peripherals Inc Non-destructive in-situ landing velocity determination of magnetic rigid disk drives

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