JPH06204102A - On-off cover for spin drier and the like - Google Patents

Abstract

PURPOSE:To reduce the deterioration of the scavenging efficiency of a filter by intermittent duty. CONSTITUTION:In the on-off cover of a spin drier, etc., which covers the opening recess 2 of an apparatus body 1 to be operated intermittently so that the opening recess can be opened and closed and which is provided with a high-efficiency filter; a fan unit 8 is integrally annexed to the filter and is operated always so that a constant quantity of ventilation of the filter is made possible also at the time of non-operation of the apparatus body 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an opening / closing lid of a spin dryer or the like, and more particularly to a spin dryer or the like which is provided with a high-performance filter which covers the opening of the apparatus main body which is operated intermittently so as to be openable and closable. Regarding the lid.

[0002]

2. Description of the Related Art Conventionally, as shown in FIGS. 2 and 3, an opening of an apparatus main body 21 which is intermittently operated, such as a spin dryer, has a high performance in order to prevent dust from entering from the opening. It is openably / closably covered by an opening / closing lid 22 provided with a filter.

The opening / closing lid 22 constitutes a clean unit, and is hinged to the upper end of the apparatus main body 21 by a hinge (not shown), and the periphery of the opening and the silicon packing 23.
A rectangular frame-shaped unit case 24 that is airtightly contacted via a pre-filter, a pre-filter 25 attached to the unit case 24 so as to cover the upper opening thereof, and a pre-filter 25 attached to the unit case 24 to cover the lower opening thereof UL
It is composed of a PA filter 26 and an ionizer 28 located below the ULPA filter 26 and attached to the unit case 24 via an attachment frame 27.

The opening / closing lid 22 closes the opening when the apparatus body 21 is in operation, and filters dust in the air sucked into the apparatus body 21.

[0005]

However, in the opening / closing lid of the spin dryer or the like, a high-performance filter such as ULPA filter or HEPA filter is
If there is pulsation in the air flow, the dust adhering to the filter surface will separate and pass, and the dust collection efficiency will deteriorate. There is a problem that is not fully exerted.

[0006] Therefore, it is an object of the present invention to provide an opening / closing lid such as a spin dryer which can reduce deterioration of filter collection efficiency due to intermittent operation.

[0007]

In order to solve the above-mentioned problems, the opening / closing lid of the spin dryer or the like of the present invention covers the opening of the apparatus body operated intermittently so that it can be opened / closed, and a high-performance filter is provided. In an opening / closing device such as a spin dryer, the filter is integrally provided with a fan unit.

[0008]

In the above means, by constantly operating the fan unit, a certain amount of air can be ventilated through the filter even when the apparatus main body is not operating.

The blower fan is preferably thin.

[0010]

Embodiments of the present invention will now be described with reference to the drawings.

FIG. 1 is a schematic diagram of a spin dryer having an opening / closing lid according to an embodiment of the present invention.

In the figure, reference numeral 1 denotes an apparatus main body of a spin dryer which is operated intermittently. The apparatus main body 1 is provided with an opening concave portion 2 which opens upward, and an appropriate drive is provided in the opening concave portion 2. A turntable 4 which is rotated by the device 3 is housed. The rotary table 4 spins and spin-drys a semiconductor wafer (not shown) mounted on the upper surface thereof. The rotary table 4 is operated in synchronization with the rotary table 4 to discharge water vapor and the like generated during the drying. An intake / exhaust device (not shown) that inhales air from the upper part of the opening concave portion 2 and exhausts from the exhaust port 5 on the lower side thereof is provided in the main body 1.

On the other hand, the opening concave portion 2 of the apparatus main body 1 is covered with an opening / closing lid 6 provided with a high-performance filter so that it can be opened / closed because dust is mixed in with the intake / exhaust device as the air is sucked.

The opening / closing lid 6 is composed of a clean unit 7 and a thin fan unit 8 attached to the upper surface of the clean unit 7. The clean unit 7 is the same as that of FIGS. 2 and 3. 1, a rectangular frame-shaped unit case 10 which is hinged to the upper end of the unit 1 by a hinge (not shown) and is hermetically contacted with the peripheral portion of the opening recess 2 with the silicon packing 9 interposed therebetween. A pre-filter (not shown) attached to cover the upper part, a ULPA filter (not shown) attached to the unit case 10 so as to cover the lower part of the opening, and a pre-filter placed below the ULPA filter. And an ionizer (neither is shown) attached to the unit case 10 via.

In the spin dryer having the above structure,
The fan unit 8 of the opening / closing lid 6 is always operated so that a certain amount of air is passed through the ULPA filter of the clean unit 7 even when the apparatus body 1 is not operating.

Due to the ventilation during the non-operation, the apparatus body 1
Fluctuations in the air volume passing through the filter during operation and during non-operation are suppressed, and dust adhering to the filter surface does not fall off, and the dust collection efficiency does not deteriorate,
The original performance of the filter can be fully exerted.

Here, the fan unit 8 is constantly operated, and while the rotational speed of the intake / exhaust device is gradually changed as shown in Table 1, the main body 1 of the device is intermittently operated and the exhaust port 5 is operated. When the amount of dust emitted was measured comparatively by an airborne laser particle counter, it was found to be 0.1
The number of dust particles having a size of μm or more is shown in Table 1 together with that of the conventional one without the fan unit 8.

[0018]

[Table 1]

As a result, the intake / exhaust device is normally operated at a rotation speed of 600 rpm depending on the drying condition, but if the fan unit 8 is not installed, it is 0.1 μm.
Dust of 5 to 6 pieces / ft ³ was observed for m or more, but it was reduced to 2 to 3 pieces / ft ³ by mounting with the fan unit 8.

Further, by reducing the difference in the amount of passing air between when the apparatus body 1 is in operation and when it is not in operation (corresponding to the number of revolutions of the intake / exhaust device of the apparatus body, the change in the exhaust port empty cross-sectional area, etc.), 1 I was able to improve to ~ 2 / ft ³ level.

In the above-mentioned embodiment, the case where the opening / closing lid 6 is provided in the spin dryer has been described, but the present invention is not limited to this, and other intermittently operated ones can be applied.

[0022]

As described above, according to the opening / closing lid of the spin dryer or the like of the present invention, by constantly operating the fan unit, a certain amount of air can be ventilated through the filter even when the apparatus main body is not in operation. Therefore, fluctuations in the air volume passing through the filter during operation and non-operation of the device body are suppressed, dust that adheres to the filter surface does not drop off, and the dust collection efficiency does not deteriorate. The performance of can be fully demonstrated.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a spin dryer including an opening / closing lid according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of a conventional spin dryer.

FIG. 3 is a sectional view of an opening / closing lid of a conventional spin dryer.

[Explanation of symbols]

 1 Device Main Body 2 Opening Recess 4 Rotating Table 5 Exhaust Port 6 Open / Close Lid 7 Clean Unit 8 Fan Unit

Claims (1)

[Claims] 1. An opening / closing lid for a spin dryer or the like, which is provided with a high-performance filter that covers an opening of an apparatus body that is intermittently operated so as to be openable / closable, and a fan unit is integrally attached to the filter. Opening and closing lids for spin dryers, etc.