JPH06201100A - Fluid feeder and piping cleaning device - Google Patents
Fluid feeder and piping cleaning deviceInfo
- Publication number
- JPH06201100A JPH06201100A JP4360819A JP36081992A JPH06201100A JP H06201100 A JPH06201100 A JP H06201100A JP 4360819 A JP4360819 A JP 4360819A JP 36081992 A JP36081992 A JP 36081992A JP H06201100 A JPH06201100 A JP H06201100A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- liquid
- pipe
- cleaning liquid
- types
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Pipeline Systems (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、流体供給装置及び配管
洗浄装置に関する。本発明は、各種の分野において流体
を供給する場合、及び配管を洗浄する場合に利用するこ
とができる。特に、例えば各種の半導体装置等の電子材
料の製造の際に流体を供給する場合や、配管を洗浄する
場合になどに利用することができる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid supply device and a pipe cleaning device. INDUSTRIAL APPLICABILITY The present invention can be used for supplying fluid in various fields and for cleaning pipes. In particular, it can be used, for example, when supplying a fluid when manufacturing electronic materials such as various semiconductor devices, or when cleaning piping.
【０００２】[0002]
【従来の技術及びその問題点】流体を供給する装置とし
て、洗浄液により配管を洗浄する配管洗浄装置がある。
従来より、既設の配管、例えば冷却水配管等の熱交換配
管や、排気ダクト配管などの内管に付着したスケール等
の洗浄には、ピグによるスケール等の除去・洗浄、ロボ
ットによるスケール等の除去・洗浄、イオン結合利用等
の物理的洗浄がある。しかしこれらはいずれも、汎用性
に欠けると言う問題がある。2. Description of the Related Art As a device for supplying a fluid, there is a pipe cleaning device for cleaning a pipe with a cleaning liquid.
Conventionally, for cleaning scales attached to existing pipes, such as heat exchange pipes such as cooling water pipes and inner pipes such as exhaust duct pipes, removal and cleaning of scales by a pig, removal of scales by a robot, etc. -There is physical cleaning such as cleaning and ionic bond utilization. However, all of them have a problem that they lack versatility.
【０００３】ピグは、これを配管内に入れることによ
り、これが流されて回転し、スケール等をこそぎ落とす
ように除去・洗浄するものであるので、直管や、やや屈
曲した程度の配管には適用できるが、段差があったり、
屈曲が激しく、曲がりくねった管には利用できない。ロ
ボットによるスケール等の除去・洗浄にも同様のことが
言える。またこれら手段は、細い配管には適用が難し
い。イオン結合利用の物理的洗浄は、発生させたイオン
とＳｉ等を結合させるものであり、流速がある程度大き
くないと（１ｍ／ｓｅｃ以上）、イオン化せず、起電力
で１ｍＶ程度を要するなど、条件が厳しく、汎用性に欠
ける。When the pig is put in the pipe, the pig is swept to rotate, and is removed and washed so as to scrape off scales and the like. Therefore, the pig is used for a straight pipe or a pipe having a slight bend. Is applicable, but there are steps
Not suitable for tortuous tubing, which has severe bending. The same applies to the removal and cleaning of scales by robots. Also, these means are difficult to apply to thin pipes. The physical cleaning using ionic bonding is to combine generated ions with Si etc. If the flow velocity is not high to some extent (1 m / sec or more), ionization does not occur and electromotive force requires about 1 mV. Is strict and lacks versatility.
【０００４】[0004]
【発明の目的】本発明は、様々の口径、様々の種類の配
管に適用できる洗浄装置その他の流体利用処理装置を提
供することを目的とし、また、これらの装置に適用でき
る流体供給装置を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a cleaning apparatus and other fluid utilization processing apparatus applicable to various diameters and various types of pipes, and a fluid supply apparatus applicable to these apparatuses. The purpose is to do.
【０００５】[0005]
【問題点を解決するための手段】本出願の請求項１の発
明は、加圧した流体を供給する流体供給装置において、
流体供給側には複数種の接続配管を有する配管接続部を
備えることを特徴とする流体供給装置であって、これに
より上記目的を達成するものである。The invention according to claim 1 of the present application provides a fluid supply device for supplying a pressurized fluid,
A fluid supply device, characterized in that it is provided with a pipe connecting portion having a plurality of types of connection pipes on the fluid supply side, and thereby achieves the above object.
【０００６】本出願の請求項２の発明は、加圧した液体
を供給する流体供給装置において、液体供給側と、供給
された液体が戻される液体受容側とを備え、液体を閉シ
ステムで循環させることを特徴とする流体供給装置であ
って、これにより上記目的を達成するものである。According to a second aspect of the present invention, in a fluid supply device for supplying a pressurized liquid, the liquid supply side and the liquid receiving side to which the supplied liquid is returned are provided, and the liquid is circulated in a closed system. A fluid supply device, characterized in that it achieves the above object.
【０００７】本出願の請求項３の発明は、加圧した液体
を供給する流体供給装置において、液体供給側と、供給
された液体が戻される液体受容側とを備え、液体供給側
及び液体受容側には各々複数種の接続配管を有する配管
接続部を備えることを特徴とする流体供給装置であっ
て、これにより上記目的を達成するものである。According to a third aspect of the present invention, in a fluid supply device for supplying a pressurized liquid, the liquid supply side and the liquid receiving side for returning the supplied liquid are provided, and the liquid supplying side and the liquid receiving side are provided. A fluid supply device, characterized in that each side is provided with a pipe connection part having a plurality of types of connection pipes, whereby the above object is achieved.
【０００８】本出願の請求項４の発明は、前記複数種の
接続配管が、口径が互いに異なる複数種の接続配管であ
ることを特徴とする請求項１または３に記載の流体供給
装置であって、これにより上記目的を達成するものであ
る。The invention according to claim 4 of the present application is the fluid supply apparatus according to claim 1 or 3, wherein the plurality of types of connection pipes are a plurality of types of connection pipes having different diameters. Thus, the above object is achieved.
【０００９】本出願の請求項５の発明は、液体を加圧す
る加圧部と、この加圧部をバイパスするバイパス管を備
えることを特徴とする請求項１ないし４のいずれかに記
載の流体供給装置であって、これにより上記目的を達成
するものである。The invention according to claim 5 of the present application is provided with a pressurizing portion for pressurizing the liquid, and a bypass pipe for bypassing the pressurizing portion, according to any one of claims 1 to 4. A supply device for achieving the above object.
【００１０】本出願の請求項６の発明は、戻された液体
をオーバーフロウさせるオーバーフロウ槽と、オーバー
フロウした液体を浄化する洗浄液浄化部とを備えること
を特徴とする請求項１ないし５のいずれかに記載の流体
供給装置であって、これにより上記目的を達成するもの
である。The invention according to claim 6 of the present application is provided with an overflow tank for overflowing the returned liquid and a cleaning liquid purifying section for purifying the overflowed liquid. The fluid supply device according to any one of the claims, which achieves the above object.
【００１１】本出願の請求項７の発明は、加圧した洗浄
液を被洗浄配管に供給して洗浄を行う配管洗浄装置にお
いて、洗浄液供給側には複数種の接続配管を有する配管
接続部を備えることを特徴とする配管洗浄装置であっ
て、これにより上記目的を達成するものである。According to a seventh aspect of the present invention, in a pipe cleaning apparatus for supplying pressurized cleaning liquid to a pipe to be cleaned for cleaning, the cleaning liquid supply side is provided with a pipe connecting portion having a plurality of types of connection pipes. A pipe cleaning apparatus characterized by the above, by which the above object is achieved.
【００１２】本出願の請求項８の発明は、加圧した洗浄
液を被洗浄配管に供給して洗浄を行う配管洗浄装置にお
いて、洗浄液供給側と、洗浄後の洗浄液が戻される洗浄
液受容側とを備え、洗浄液を閉システムで循環させるこ
とを特徴とする配管洗浄装置であって、これにより上記
目的を達成するものである。According to an eighth aspect of the present invention, in a pipe cleaning apparatus for supplying pressurized cleaning liquid to a pipe to be cleaned for cleaning, a cleaning liquid supply side and a cleaning liquid receiving side for returning the cleaning liquid after cleaning are provided. A pipe cleaning apparatus, characterized in that the cleaning liquid is circulated in a closed system, thereby achieving the above object.
【００１３】本出願の請求項９の発明は、加圧した洗浄
液を被洗浄配管に供給して洗浄を行う配管洗浄装置にお
いて、洗浄液供給側と、洗浄後の洗浄液が戻される洗浄
液受容側とを備え、洗浄液供給側及び洗浄液受容側には
各々複数種の接続配管を有する配管接続部を備えること
を特徴とする配管洗浄装置であって、これにより上記目
的を達成するものである。According to a ninth aspect of the present invention, in a pipe cleaning apparatus for supplying pressurized cleaning liquid to a pipe to be cleaned for cleaning, a cleaning liquid supply side and a cleaning liquid receiving side for returning the cleaning liquid after cleaning are provided. A pipe cleaning apparatus comprising a pipe connection part having a plurality of types of connection pipes on the cleaning liquid supply side and the cleaning liquid receiving side, respectively, thereby achieving the above object.
【００１４】本出願の請求項１０の発明は、前記複数種
の接続配管が、口径が互いに異なる複数種の接続配管で
あることを特徴とする請求項７または９に記載の配管洗
浄装置であって、これにより上記目的を達成するもので
ある。The invention according to claim 10 of the present application is the pipe cleaning apparatus according to claim 7 or 9, characterized in that the plurality of types of connection pipes are a plurality of types of connection pipes having mutually different diameters. Thus, the above object is achieved.
【００１５】本出願の請求項１１の発明は、洗浄液を加
圧する加圧部と、この加圧部をバイパスするバイパス管
を備えることを特徴とする請求項７ないし１０のいずれ
かに記載の配管洗浄装置であって、これにより上記目的
を達成するものである。The invention according to claim 11 of the present application is provided with a pressurizing section for pressurizing the cleaning liquid, and a bypass pipe for bypassing the pressurizing section, according to any one of claims 7 to 10. A cleaning device which achieves the above object.
【００１６】本出願の請求項１２の発明は、洗浄後の洗
浄液をオーバーフロウさせるオーバーフロウ槽と、オー
バーフロウした洗浄液を浄化する洗浄液浄化部とを備え
ることを特徴とする請求項７ないし１１のいずれかに記
載の配管洗浄装置であって、これにより上記目的を達成
するものである。The invention according to claim 12 of the present application comprises an overflow tank for overflowing the cleaning liquid after cleaning, and a cleaning liquid purifying section for cleaning the overflowed cleaning liquid. The pipe cleaning apparatus according to any one of the claims, which achieves the above object.
【００１７】[0017]
【作用】本発明によれば、様々の口径、様々の種類の配
管に適用できる流体利用処理装置等の流体供給装置を提
供できる。また、様々の口径、様々の種類の配管に適用
できる洗浄装置を提供できる。According to the present invention, it is possible to provide a fluid supply apparatus such as a fluid utilization processing apparatus which can be applied to pipes of various diameters and various types. Further, it is possible to provide a cleaning device that can be applied to pipes of various diameters and various types.
【００１８】[0018]
【実施例】以下本発明の実施例について、図面を参照し
て説明する。なお当然のことではあるが、本発明は実施
例により限定を受けるものではない。Embodiments of the present invention will be described below with reference to the drawings. Of course, the present invention is not limited to the embodiments.
【００１９】実施例１ この実施例は、本発明を、冷却用配管の洗浄装置として
具体化したものであり、特に、洗浄液を循環して利用す
るクロウズドシステムの洗浄装置として具体化したもの
である。Embodiment 1 This embodiment is one in which the present invention is embodied as a cleaning device for cooling pipes, and particularly as a cleaning device for a closed system in which a cleaning liquid is circulated and used. is there.
【００２０】本実施例は、図１に示すように、加圧した
流体である洗浄液１０を被処理対象である被洗浄対象７
（図２参照）に供給する装置１であって、流体供給側で
ある洗浄液供給側２には複数種の接続配管２１〜２４を
有する配管接続部（具体的には配管接続集合シリンダ）
を備えるものである。In this embodiment, as shown in FIG. 1, a cleaning liquid 10 which is a pressurized fluid is a cleaning target 7 which is a processing target.
(See FIG. 2), which is a device 1 that supplies fluid to a cleaning liquid supply side 2 that is a fluid supply side, and has a plurality of types of connection pipes 21 to 24 (specifically, a pipe connection assembly cylinder).
It is equipped with.
【００２１】上記液体供給側２に加え、供給された液体
（洗浄液）が戻される液体受容側３を備える。これによ
り、液体（洗浄液）を閉システムで循環させるようにし
た。図中、矢印で液体（洗浄液）の流れを示す。In addition to the liquid supply side 2, a liquid receiving side 3 for returning the supplied liquid (cleaning liquid) is provided. Thereby, the liquid (cleaning liquid) was circulated in a closed system. In the figure, arrows indicate the flow of liquid (cleaning liquid).
【００２２】液体受容側３にも、複数種の接続配管３１
〜３４を有する配管接続部（具体的には配管接続集合シ
リンダ）を備える。The liquid receiving side 3 also has a plurality of types of connection pipes 31.
To 34 (specifically, a pipe connection collecting cylinder).
【００２３】本実施例の複数種の接続配管２１〜２４
は、口径が互いに異なる複数種の接続配管である。例え
ば、１／８インチ、１／４インチ、３／８インチ、１／
２インチの各口径の丸管とすることができる（図２参
照）が、これは被処理対象（被洗浄対象）７に応じて適
宜設定すればよい。Plural kinds of connecting pipes 21 to 24 of this embodiment
Is a plurality of types of connecting pipes having different diameters. For example, 1/8 inch, 1/4 inch, 3/8 inch, 1 /
A round tube having a diameter of 2 inches can be used (see FIG. 2), but this may be appropriately set according to the processing target (cleaning target) 7.
【００２４】本実施例の洗浄装置１は、液体（洗浄液）
を加圧する加圧部４である高圧水ポンプ（例えば、１０
ｋｇ／ｃｍ2 以上の高圧水ポンプ）と、この加圧部４
（高圧水ポンプ）をバイパスするバイパス管５を備え
る。全圧が加わると、配管（パイプ）が破裂するおそれ
がある場合が出るが、このバイパス管５上のバイパスバ
ルブ５２で調整して、液体（洗浄液）をバイパス管５に
逃がすようにできる。図中、符号５１はバイパス管５上
の圧力計である。The cleaning apparatus 1 of this embodiment is a liquid (cleaning liquid).
A high-pressure water pump (for example, 10
High-pressure water pump (kg / cm 2 or more) and this pressurizing unit 4
A bypass pipe 5 that bypasses the (high-pressure water pump) is provided. When the total pressure is applied, there is a possibility that the pipe may burst, but by adjusting the bypass valve 52 on the bypass pipe 5, the liquid (cleaning liquid) can be released to the bypass pipe 5. In the figure, reference numeral 51 is a pressure gauge on the bypass pipe 5.
【００２５】本実施例の洗浄装置１は、被処理対象（被
洗浄対象）７から戻された液体（洗浄液）をオーバーフ
ロウさせるオーバーフロウ槽６１を備えるとともに、オ
ーバーフロウした液体（洗浄液）を浄化する液体（洗浄
液）浄化部６２を備える。本実施例のオーバーフロウ槽
６１は沈澱槽を兼ね、底部に沈澱物６４を溜めて、上部
上澄みをオーバーフロウさせ（オーバーフロウ液を図１
中、符号Ａで示す）、浄化部６２に導く。浄化部６２に
は液体（洗浄液）をろ過洗浄するフィルター６３を備え
る。オーバーフロウ槽６１と液体（洗浄液）浄化部６２
とで、液体（洗浄液）溜め置き槽６が構成される。The cleaning apparatus 1 of this embodiment is provided with an overflow tank 61 for overflowing the liquid (cleaning liquid) returned from the object to be processed (object to be cleaned) 7 and purifying the overflowed liquid (cleaning liquid). A liquid (cleaning liquid) purifying unit 62 is provided. The overflow tank 61 of this embodiment also serves as a settling tank, and the precipitate 64 is accumulated at the bottom to allow the upper supernatant to overflow (see the overflow solution in FIG.
(Indicated by the symbol A), and is guided to the purification unit 62. The purification unit 62 includes a filter 63 that filters and cleans a liquid (cleaning liquid). Overflow tank 61 and liquid (cleaning liquid) purifying unit 62
And constitute a liquid (cleaning liquid) reservoir tank 6.
【００２６】本実施例の装置１の接続構造例を図２に示
す。図２において、被処理対象（被洗浄対象）７は、冷
却水を使用している冷却設備（チラーユニット）であ
り、その冷却水配管のスケール除去洗浄にのために本実
施例の洗浄装置１を接続した。図２中、符号９１は冷却
水導入配管であり、９２は冷却水排出配管である。通常
は、冷却水導入配管９１，冷却水排出配管９２が冷却設
備に接続されているが、これら冷却水導入配管９１，冷
却水排出配管９２を冷却設備（被洗浄対象７）から外し
（例えば冷却水導入配管９１のＢで示す口を外し）、代
わりにフレキシブル配管８１，８２（ゴムホースなど）
を介して、冷却設備（被洗浄対象７）と本実施例の洗浄
装置１とを接続する。FIG. 2 shows an example of the connection structure of the device 1 of this embodiment. In FIG. 2, an object to be treated (object to be cleaned) 7 is a cooling facility (chiller unit) that uses cooling water, and the cleaning apparatus 1 of the present embodiment is used for scale removal cleaning of the cooling water pipe. Connected. In FIG. 2, reference numeral 91 is a cooling water introduction pipe, and 92 is a cooling water discharge pipe. Normally, the cooling water introduction pipe 91 and the cooling water discharge pipe 92 are connected to the cooling equipment, but the cooling water introduction pipe 91 and the cooling water discharge pipe 92 are removed from the cooling equipment (the object to be cleaned 7) (for example, cooling). Remove the port indicated by B of the water introduction pipe 91), instead, flexible pipes 81, 82 (rubber hoses, etc.)
The cooling equipment (the object 7 to be cleaned) and the cleaning device 1 of this embodiment are connected via the.
【００２７】ここで、被処理対象（被洗浄対象）７側の
配管の口径は、様々である。洗浄すべき冷却設備の配管
径が例えば１／２インチであれば、本実施例の洗浄装置
１の洗浄液供給側２の配管接続部（具体的には配管接続
集合シリンダ）の複数種の接続配管２１〜２４のうち、
１／２インチの径の配管２４に接続する。液体受容側３
についても、同様とする。このように、被処理対象（被
洗浄対象）７側の配管の口径に応じて、任意に接続を行
うことにより、様々な種類被処理対象（被洗浄対象）に
適用することが可能となり、きわめて汎用性に富む。Here, the diameter of the pipe on the side of the object to be processed (object to be cleaned) 7 is various. If the pipe diameter of the cooling equipment to be cleaned is, for example, 1/2 inch, a plurality of types of connection pipes of the pipe connection portion (specifically, pipe connection collecting cylinder) of the cleaning liquid supply side 2 of the cleaning device 1 of this embodiment. Of 21-24
Connected to a pipe 24 having a diameter of 1/2 inch. Liquid receiving side 3
The same shall apply to. In this way, it is possible to apply various types of objects to be processed (objects to be cleaned) by making arbitrary connections depending on the diameter of the pipe on the object to be processed (object to be cleaned) 7 side, Versatile.
【００２８】例えば、本実施例の装置１を、コンパクト
な運搬可能な構成にまとめ、例えば台車で運搬できるよ
うにすれば、被処理対象（被洗浄対象）７のところに容
易に持っていって洗浄を行えるので、非常に便利であ
る。For example, if the apparatus 1 of the present embodiment is assembled into a compact and transportable structure so that it can be transported by, for example, a dolly, it can be easily brought to the object to be treated (object to be cleaned) 7. It is very convenient because it can be washed.
【００２９】本実施例の洗浄装置１は、次のように作動
させることができる。The cleaning apparatus 1 of this embodiment can be operated as follows.
【００３０】洗浄液溜め置き槽６に洗浄液１０を入れ、
加圧部４である高圧水ポンプでフィルター６３を通して
洗浄液１０を吸い上げ、洗浄液供給側２の配管接続部
（配管接続集合シリンダ）へ送り、フレキシブル配管８
１を介して被処理対象（被洗浄対象）７の洗浄対象配管
を通らせ、更に、フレキシブル配管８２を介して洗浄液
受容側３の配管接続部（配管接続集合シリンダ）に返
し、洗浄液溜め置き槽６に回収する。The cleaning liquid 10 is put in the cleaning liquid reservoir tank 6,
The cleaning liquid 10 is sucked up by the high-pressure water pump which is the pressurizing unit 4 through the filter 63, and is sent to the piping connection portion (piping connection collecting cylinder) of the cleaning liquid supply side 2 and the flexible piping 8
The cleaning target pipe of the processing target (cleaning target) 7 is passed through 1 and returned to the cleaning liquid receiving side 3 to the pipe connection portion (pipe connection collecting cylinder) via the flexible pipe 82, and the cleaning liquid storage tank Collect in 6.
【００３１】この流れで循環を繰り返し、洗浄対象配管
をクリーニングする。フィルター６３は、回収された洗
浄液に含まれるスケール・ごみを除去し、再度洗浄対象
配管に循環させないようにするものである。バイパス管
５は、洗浄対象配管の耐圧に合わせて、洗浄液圧力を調
整するものである。The circulation is repeated by this flow to clean the pipe to be cleaned. The filter 63 removes scale and dust contained in the collected cleaning liquid so that the cleaning liquid is not circulated through the cleaning target pipe again. The bypass pipe 5 adjusts the cleaning liquid pressure in accordance with the pressure resistance of the pipe to be cleaned.
【００３２】洗浄液供給側２の配管接続部（配管接続集
合シリンダ）、及び洗浄液受容側３の配管接続部（配管
接続集合シリンダ）の各配管接続バルブは、小径用、大
径用等、口径に合わせて、複数種の接続配管のいずれか
に予め接続をしておく。加圧部４としては、１．５×１
０6 Ｐａ程度、あるいはそれ以下の圧力がかけられる高
圧水ポンプを選定しておくのが好ましい。The pipe connection valves of the cleaning liquid supply side 2 (pipe connection collecting cylinder) and the cleaning liquid receiving side 3 pipe connection part (pipe connection collecting cylinder) have different diameters for small diameter, large diameter, etc. In addition, it is connected in advance to one of a plurality of types of connection pipes. The pressure unit 4 is 1.5 × 1
It is preferable to select a high-pressure water pump that can apply a pressure of about 0 6 Pa or less.
【００３３】本実施例は洗浄装置であるが、その外任意
の流体供給装置に本発明が適用できることは言うまでも
ない。Although the present embodiment is a cleaning device, it goes without saying that the present invention can be applied to any other fluid supply device.
【００３４】[0034]
【発明の効果】本発明によれば、様々の口径、様々の種
類の配管に適用できる洗浄装置その他の流体利用処理装
置を提供することができ、また、これらの装置に適用で
きる流体供給装置を提供することができる。According to the present invention, it is possible to provide a cleaning apparatus and other fluid utilization processing apparatus applicable to various diameters and various types of pipes, and a fluid supply apparatus applicable to these apparatuses. Can be provided.
【図１】実施例１の配管洗浄装置（流体供給装置）の構
成図である。FIG. 1 is a configuration diagram of a pipe cleaning device (fluid supply device) according to a first embodiment.
【図２】実施例１の配管洗浄装置（流体供給装置）の接
続構造を示す図である。FIG. 2 is a diagram showing a connection structure of a pipe cleaning device (fluid supply device) according to the first embodiment.
１ 配管洗浄装置（流体供給装置） ２ 洗浄液供給側２（配管接続集合シリンダ） ２１〜２４ 接続配管 ３ 洗浄液受容側２（配管接続集合シリンダ） ３１〜３４ 接続配管 ４ 加圧部 ５ バイパス管 ６ 液体（洗浄液）溜め置き槽 ６１ オーバーフロウ槽６１ ６２ 液体（洗浄液）浄化部 ６３ フィルター 1 Pipe Cleaning Device (Fluid Supply Device) 2 Cleaning Liquid Supply Side 2 (Piping Connection Collecting Cylinder) 21-24 Connection Piping 3 Cleaning Liquid Receiving Side 2 (Piping Connection Collecting Cylinder) 31-34 Connection Piping 4 Pressurizing Section 5 Bypass Pipe 6 Liquid (Cleaning liquid) Reservoir storage tank 61 Overflow tank 61 62 Liquid (cleaning liquid) purification unit 63 Filter
Claims (12)
いて、 流体供給側には複数種の接続配管を有する配管接続部を
備えることを特徴とする流体供給装置。1. A fluid supply apparatus for supplying a pressurized fluid, wherein the fluid supply apparatus is provided with a pipe connection section having a plurality of types of connection pipes.
いて、 液体供給側と、供給された液体が戻される液体受容側と
を備え、 液体を閉システムで循環させることを特徴とする流体供
給装置。2. A fluid supply device for supplying a pressurized liquid, comprising: a liquid supply side; and a liquid receiving side to which the supplied liquid is returned, wherein the liquid is circulated in a closed system. apparatus.
いて、 液体供給側と、供給された液体が戻される液体受容側と
を備え、 液体供給側及び液体受容側には各々複数種の接続配管を
有する配管接続部を備えることを特徴とする流体供給装
置。3. A fluid supply device for supplying a pressurized liquid, comprising a liquid supply side and a liquid receiving side for returning the supplied liquid, and a plurality of types of connections are provided on each of the liquid supplying side and the liquid receiving side. A fluid supply device comprising a pipe connecting portion having a pipe.
なる複数種の接続配管であることを特徴とする請求項１
または３に記載の流体供給装置。4. The plurality of types of connecting pipes are a plurality of types of connecting pipes having different diameters.
Alternatively, the fluid supply device according to item 3.
イパスするバイパス管を備えることを特徴とする請求項
１ないし４のいずれかに記載の流体供給装置。5. The fluid supply device according to claim 1, further comprising a pressurizing unit for pressurizing the liquid, and a bypass pipe bypassing the pressurizing unit.
バーフロウ槽と、オーバーフロウした液体を浄化する洗
浄液浄化部とを備えることを特徴とする請求項１ないし
５のいずれかに記載の流体供給装置。6. The fluid supply apparatus according to claim 1, further comprising an overflow tank for overflowing the returned liquid and a cleaning liquid purifying unit for purifying the overflowed liquid. .
浄を行う配管洗浄装置において、 洗浄液供給側には複数種の接続配管を有する配管接続部
を備えることを特徴とする配管洗浄装置。7. A pipe cleaning apparatus for supplying pressurized cleaning liquid to a pipe to be cleaned for cleaning, wherein the cleaning liquid supply side is provided with a pipe connecting portion having a plurality of types of connection pipes. .
浄を行う配管洗浄装置において、 洗浄液供給側と、洗浄後の洗浄液が戻される洗浄液受容
側とを備え、 洗浄液を閉システムで循環させることを特徴とする配管
洗浄装置。8. A pipe cleaning device for supplying pressurized cleaning liquid to a pipe to be cleaned for cleaning, comprising a cleaning liquid supply side and a cleaning liquid receiving side for returning the cleaning liquid after cleaning, and circulating the cleaning liquid in a closed system. A pipe cleaning device characterized by:
浄を行う配管洗浄装置において、 洗浄液供給側と、洗浄後の洗浄液が戻される洗浄液受容
側とを備え、 洗浄液供給側及び洗浄液受容側には各々複数種の接続配
管を有する配管接続部を備えることを特徴とする配管洗
浄装置。9. A pipe cleaning apparatus for supplying pressurized cleaning liquid to a pipe to be cleaned for cleaning, comprising a cleaning liquid supply side and a cleaning liquid receiving side for returning the cleaning liquid after cleaning, the cleaning liquid supplying side and the cleaning liquid receiving side. A pipe cleaning device, characterized in that each side is provided with a pipe connection part having a plurality of types of connection pipes.
異なる複数種の接続配管であることを特徴とする請求項
７または９に記載の配管洗浄装置。10. The pipe cleaning device according to claim 7, wherein the plurality of types of connection pipes are a plurality of types of connection pipes having different diameters.
をバイパスするバイパス管を備えることを特徴とする請
求項７ないし１０のいずれかに記載の配管洗浄装置。11. The pipe cleaning apparatus according to claim 7, further comprising a pressurizing section for pressurizing the cleaning liquid, and a bypass pipe bypassing the pressurizing section.
オーバーフロウ槽と、オーバーフロウした洗浄液を浄化
する洗浄液浄化部とを備えることを特徴とする請求項７
ないし１１のいずれかに記載の配管洗浄装置。12. An overflow tank for overflowing the cleaning liquid after cleaning, and a cleaning liquid purification unit for cleaning the overflowed cleaning liquid.
11. The pipe cleaning device according to any one of 1 to 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4360819A JPH06201100A (en) | 1992-12-31 | 1992-12-31 | Fluid feeder and piping cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4360819A JPH06201100A (en) | 1992-12-31 | 1992-12-31 | Fluid feeder and piping cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06201100A true JPH06201100A (en) | 1994-07-19 |
Family
ID=18471060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4360819A Pending JPH06201100A (en) | 1992-12-31 | 1992-12-31 | Fluid feeder and piping cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06201100A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003276039A (en) * | 2002-03-26 | 2003-09-30 | Fuji Photo Film Co Ltd | Member washing method and solution film forming method using the same |
| JP2010142772A (en) * | 2008-12-22 | 2010-07-01 | Asahi Breweries Ltd | Jig and method for cleaning hot melt adhesive feed pipe |
| JP2014079675A (en) * | 2012-10-15 | 2014-05-08 | Takasago Thermal Eng Co Ltd | Flushing treatment method and flushing water treatment system |
| KR20170112470A (en) * | 2016-03-31 | 2017-10-12 | (주)동호플랜트 | Pipe cleaning apparatus and pipe cleaning method |
-
1992
- 1992-12-31 JP JP4360819A patent/JPH06201100A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003276039A (en) * | 2002-03-26 | 2003-09-30 | Fuji Photo Film Co Ltd | Member washing method and solution film forming method using the same |
| JP2010142772A (en) * | 2008-12-22 | 2010-07-01 | Asahi Breweries Ltd | Jig and method for cleaning hot melt adhesive feed pipe |
| JP2014079675A (en) * | 2012-10-15 | 2014-05-08 | Takasago Thermal Eng Co Ltd | Flushing treatment method and flushing water treatment system |
| KR20170112470A (en) * | 2016-03-31 | 2017-10-12 | (주)동호플랜트 | Pipe cleaning apparatus and pipe cleaning method |
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