JPH0619084Y2 - Inductively coupled plasma optical emission spectrometer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an inductively coupled plasma optical emission spectrometer (hereinafter simply referred to as ICP-AES).

[Outline of device]

Separate from the carrier gas supplied to the nebulizer,
By introducing gas directly into the spray chamber and adjusting the gas flow rate into the spray chamber, the gas flow rate into the plasma is adjusted, the temperature of the plasma is adjusted, and conditions suitable for the analysis of any element are created.

[Conventional technology]

In ICP-AES, the optimum conditions for analysis differ for each element. At this time, the conditions are the height of the light emitting portion, the flow rate of gases, and the plasma output. At the beginning of the development of ICP-AES, all adjustments were made manually, but due to the lack of speed of analysis, attempts have been made to change the flow rate of the carrier gas stepwise among these conditions [ JP 61-14547].

[Problems to be solved by the invention]

When the flow rate of the carrier gas flowing to the nebulizer is changed by adjusting the gas flow rate to change the plasma conditions, the gas injection holes from the nebulizer are narrow, and the pressure applied to the nebulizer must be changed. However, it takes time for the pressure applied to the nebulizer to change. Especially when decompressing, it may take as long as one minute, and it is not swift when analyzing many elements sequentially.

[Means for solving problems]

In addition to the carrier gas, an injection hole for introducing a gas for changing the plasma conditions into the spray chamber is provided in the spray chamber, and a flow rate control mechanism for introducing an optimum amount of this gas into each element is provided. A control circuit is provided to control the flow rate control mechanism from a computer that executes an analysis.

[Action]

During the analysis, the computer calculates the optimum flow rate for each element.
The flow rate control mechanism is instructed to flow into the spray chamber to optimize the plasma conditions. At this time, since the gas does not pass through the nebulizer, the increase / decrease of the gas occurs quickly, and the analysis is performed quickly.

〔Example〕

 Hereinafter, the implementation will be described in detail with reference to the drawings.

FIG. 1 shows an embodiment of the present invention.

Of the gases controlled by the gas controller 10, two flow paths are directly introduced into the torch tube 1, and above the torch tube 1,
Inductively coupled with a high frequency generated from a work coil (not shown), and inductively coupled plasma is generated above the torch tube 1. At this time, the sample 6 is the gas controller.
From the inside of the innermost tube of the torch tube 1, after being sucked by the gas sprayed in the spray chamber 2 via the nebulizer 5 and atomized, and the particle size is sorted in the spray chamber 2, Is introduced into the inductively coupled plasma generated in the upper part of the torch tube 1, dissociated in the inductively coupled plasma and thermally excited, and then emits light peculiar to the element in the sample 6, The element contained in the sample 6 is analyzed by observing the light with a spectroscope.

When analyzing elements individually or in sequence, the gas flow rate introduced into the spray chamber 2 from the nebulizer adapter 4 from the computer 9 through the control circuit 8 through the control circuit 8 is optimal for the element to be analyzed. Optimal conditions for analysis are obtained by setting the amount.

FIG. 2 shows another embodiment of the present invention in which the flow rate control mechanism is of a stepped type and has two stages.
The gas is directly introduced.

[Effect of device]

According to the present invention, by controlling the flow rate of gas introduced into plasma, optimum conditions for analysis can be realized for each element without impairing the speed of analysis.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a sectional view of another embodiment of the present invention, and FIG. 3 is a sectional view of another embodiment. 1 …… Torch tube 2 …… Spraying chamber 3 …… Drain bin 4 …… Nebulizer adapter 5 …… Nebulizer 6 …… Sample 7 …… Flow control mechanism 8 …… Control circuit 9 …… Computer 10 …… Gas controller

Claims (1)

[Scope of utility model registration request] 1. A nebulizer for sucking and atomizing a sample by a carrier gas from a gas controller, a spray chamber for selecting a particle size of the sample atomized by the nebulizer, and an inductively coupled high frequency wave to the spray chamber. And a torch pipe connected to the spray chamber for plasma-converting the particle size-selected sample, and provided in the sprayer to introduce gas into the spray chamber from the gas controller, separately from the carrier gas. An inductively coupled plasma emission spectroscopic analyzer comprising: the gas introduction hole and a flow rate control mechanism for controlling the flow rate of the gas introduced into the atomizer from the gas introduction hole.