JPH06187619A - Checking method for thin film magnetic head - Google Patents

Checking method for thin film magnetic head

Info

Publication number
JPH06187619A
JPH06187619A JP33634292A JP33634292A JPH06187619A JP H06187619 A JPH06187619 A JP H06187619A JP 33634292 A JP33634292 A JP 33634292A JP 33634292 A JP33634292 A JP 33634292A JP H06187619 A JPH06187619 A JP H06187619A
Authority
JP
Japan
Prior art keywords
head
thin film
supplied
film magnetic
noise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33634292A
Other languages
Japanese (ja)
Inventor
Kiyoto Nakai
清人 中井
Toru Kira
徹 吉良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP33634292A priority Critical patent/JPH06187619A/en
Publication of JPH06187619A publication Critical patent/JPH06187619A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/455Arrangements for functional testing of heads; Measuring arrangements for heads
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002Special dispositions or recording techniques
    • G11B2005/0005Arrangements, methods or circuits
    • G11B2005/001Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure
    • G11B2005/0013Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure of transducers, e.g. linearisation, equalisation
    • G11B2005/0016Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure of transducers, e.g. linearisation, equalisation of magnetoresistive transducers

Abstract

PURPOSE:To accurately check the noise characteristic of a thin film magnetic head by exciting the head by a built-in recording head coil. CONSTITUTION:An AC exciting current Ir is supplied to a built-in recording head coil 10 by a transmitter 12 and a constant current amplifier 13. Thus, a thin film magnetic head 20 is excited. This exciting current value is converted into voltage by a resistance 14 and supplied to an X axis of an oscilloscope 21. Then, a sense current Is is supplied from a constant current source 16 of a magneto-resistance effect element 1. The head output is amplified by an amplifier 17 and supplied to a Y axis of the oscilloscope 21. Then, a specific curve of the head output is observed in an X-Y display mode. Furthermore, a DC bias current Ib is supplied to a bias conductor 3 contained in the head 20 so than an MR characteristic curve is made as an optimum action point. Meanwhile, the output of the amplifier 17 is transmitted through a differentiation circuit and a circuit 18 which eliminates the basic wave of the AC exiting current Ir, and a signal Y' from which the noise is extracted is supplied to the Y axis of the oscilloscope 21. Thus, the noises can be measured with higher sensitivity.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、強磁性薄膜、フェラ
イト等からなる磁気コアと、一軸異方性を有する強磁性
薄膜に信号磁界を印加し、それを磁化容易軸方向の電気
抵抗変化として検出する磁気抵抗効果素子(以下MR素
子という)を具備して磁気記録媒体に記録された信号の
検出を行う薄膜磁気ヘッド(以下MRヘッドという)の
検査方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention applies a signal magnetic field to a magnetic core made of a ferromagnetic thin film, ferrite, etc. and a ferromagnetic thin film having uniaxial anisotropy, and uses it as an electric resistance change in the easy magnetization axis direction. The present invention relates to a method for inspecting a thin film magnetic head (hereinafter referred to as MR head) which includes a magnetoresistive effect element (hereinafter referred to as MR element) for detecting and which detects a signal recorded on a magnetic recording medium.

【0002】[0002]

【従来の技術】従来、MRヘッドは磁気テープ等の磁気
記録媒体に書き込まれた信号磁界を受ける事により、M
R素子内部の磁化方向が変化し、その磁化方向の変化に
応じたMR素子の、抵抗変化を、外部出力として取り出
すものである。
2. Description of the Related Art Conventionally, an MR head receives a signal magnetic field written on a magnetic recording medium such as a magnetic tape to generate an M
The magnetization direction inside the R element changes, and the resistance change of the MR element according to the change in the magnetization direction is extracted as an external output.

【0003】このように、MRヘッドは、磁束応答型の
ヘッドであり、磁気記録媒体の速度に依存せずに、信号
磁界を再生できる。
As described above, the MR head is a magnetic flux response type head and can reproduce the signal magnetic field without depending on the speed of the magnetic recording medium.

【0004】また、MRヘッドは、半導体の微細加工技
術を適用することにより、高集積化及び、多素子化が容
易であるので、高密度記録が行われる固定ヘッド式デジ
タルオーディオの再生用磁気ヘッド等として用いられて
いる。また、近年このような磁気抵抗効果型薄膜磁気ヘ
ッドをアナログテープの再生に用いることが行われてい
る。
Further, the MR head can be easily highly integrated and have a large number of elements by applying a semiconductor fine processing technique. Therefore, a magnetic head for reproducing a fixed head type digital audio for high density recording. It is used as such. Further, in recent years, such a magnetoresistive thin film magnetic head has been used for reproducing an analog tape.

【0005】このような磁気抵抗効果型薄膜磁気ヘッド
では、MR素子単体で構成したMRヘッドよりも、MR
素子をヘッド先端から離して、磁気記録媒体から発生し
た磁束を、ヘッド先端からMR素子部まで導くための磁
束導入路(ヨーク)を配置したヨーク型MRヘッド(Y
MRヘッド)と呼ばれる薄膜磁気ヘッドが、信号の分解
能の向上やMR素子の耐久性の向上に有利である事が知
られている。
In such a magnetoresistive effect thin-film magnetic head, the MR head is better than the MR head composed of a single MR element.
A yoke type MR head (Y) in which a magnetic flux introduction path (yoke) for guiding the magnetic flux generated from the magnetic recording medium from the head tip to the MR element part is arranged by separating the element from the head tip.
It is known that a thin film magnetic head called an MR head is advantageous for improving signal resolution and MR element durability.

【0006】また、記録ヘッドにおいても、磁気コア、
コイル巻き線等を半導体の微細加工技術を適用すること
により、磁性薄膜、導電性薄膜、絶縁膜により構成され
た誘導型薄膜磁気ヘッドが用いられている。
Also in the recording head, the magnetic core,
An induction type thin film magnetic head including a magnetic thin film, a conductive thin film, and an insulating film is used by applying a semiconductor fine processing technique to a coil winding or the like.

【0007】さらに、ヘッドのコンパクト化、記録−再
生ヘッドトラック位置のアライメントの高精度化のた
め、磁気抵抗効果型薄膜磁気ヘッドと誘導型薄膜磁気ヘ
ッドを一体に形成した複合型薄膜磁気ヘッドが開発され
ている。図2に複合型薄膜磁気ヘッドの斜視図を示す。
また、図3にその断面図を示す。図2、図3において、
7はMn−Zn、Ni−Znフェライト等の基板であ
り、その一部に溝が形成されガラス8が充填されてい
る。また記録ヘッド用コイル導体10が配置されてい
る。その上部に記録ギャップ6となる絶縁層を介して記
録ヘッドの磁気コアであり再生ヘッド磁気コアでもある
下部ヨーク5が形成されている。さらにその上部に再生
ギャップ9、バイアス導体3、MR素子1、MR素子リ
ード線2、上側ヨーク4により再生ヘッドが形成されて
いる。
Further, in order to make the head compact and to improve the alignment of the recording / reproducing head track position with high accuracy, a composite type thin film magnetic head in which a magnetoresistive thin film magnetic head and an inductive thin film magnetic head are integrally formed is developed. Has been done. FIG. 2 shows a perspective view of the composite type thin film magnetic head.
Further, FIG. 3 shows a sectional view thereof. 2 and 3,
Reference numeral 7 is a substrate of Mn-Zn, Ni-Zn ferrite or the like, in which a groove is formed and a glass 8 is filled in a part thereof. Further, the recording head coil conductor 10 is arranged. A lower yoke 5, which is a magnetic core of the recording head and also a reproducing head magnetic core, is formed on the upper portion of the recording layer via an insulating layer serving as a recording gap 6. A reproducing head is formed on the upper part of the reproducing gap 9, the bias conductor 3, the MR element 1, the MR element lead wire 2, and the upper yoke 4.

【0008】前記複合型薄膜磁気ヘッドにより再生する
場合、磁気記録媒体から発生した磁界は、上側ヨーク4
を通ってMR素子1に導かれ、下部ヨーク5、および磁
性基板7に分流し磁気記録媒体にもどる。そしてこの再
生過程における磁気ヘッド各部の磁化過程において、磁
化回転に起因する磁化のスイッチングによるノイズ、磁
壁移動に起因して生じるバルクハウセンノイズが発生
し、ヘッド出力にノイズが生じる場合がある。
When reproducing with the composite type thin film magnetic head, the magnetic field generated from the magnetic recording medium is generated by the upper yoke 4.
The magnetic field is guided to the MR element 1 via the magnetic field and is branched to the lower yoke 5 and the magnetic substrate 7 to return to the magnetic recording medium. Then, in the magnetization process of each part of the magnetic head in the reproducing process, noise due to magnetization switching due to magnetization rotation and Barkhausen noise due to domain wall movement may occur, and noise may occur in the head output.

【0009】従来では、YMRヘッドのノイズに対する
特性評価は、テープ摺動面法線方向の一様外部磁界、又
はYMRヘッド内に配置されたバイアス導体(図2の
3)に通電し発生する内部バイアス磁界、に応答するヘ
ッド出力におけるノイズの有無を調べることにより行わ
れていた。
Conventionally, the characteristics of the YMR head with respect to noise are evaluated by a uniform external magnetic field in the direction normal to the tape sliding surface or by an internal current generated by energizing a bias conductor (3 in FIG. 2) arranged in the YMR head. This was done by examining the head output for noise in response to a bias magnetic field.

【0010】[0010]

【発明が解決しようとする課題】従来のヘッドノイズ評
価方法では、前記バイアス導体による内部バイアス磁界
を用いる場合、バイアス導体に電流を流すことによる励
磁磁界はMR素子部、上部ヨーク部を強く磁化する。こ
のため下部ヨーク部を十分に磁化するためには、過大な
バイアス電流を使用しなければならず、MR素子部及び
上部ヨーク部を実際の再生動作時と比較し過大に磁化し
てしまうこととなり、磁気ヘッドの正確なノイズ特性を
評価することができない。また、一様外部磁界を用いる
方法においても、下部ヨーク部(記録コイル付近)を十
分に磁化することが出来ず、この部分のノイズ特性を正
確に評価することは困難である。
In the conventional head noise evaluation method, when the internal bias magnetic field generated by the bias conductor is used, the exciting magnetic field generated by passing a current through the bias conductor strongly magnetizes the MR element part and the upper yoke part. . Therefore, in order to sufficiently magnetize the lower yoke part, an excessively large bias current must be used, and the MR element part and the upper yoke part are excessively magnetized as compared with the actual reproducing operation. However, the accurate noise characteristics of the magnetic head cannot be evaluated. Even in the method using a uniform external magnetic field, the lower yoke portion (near the recording coil) cannot be sufficiently magnetized, and it is difficult to accurately evaluate the noise characteristic of this portion.

【0011】この発明はかかる従来の問題点を解決する
ためになされたものである。この発明の目的は、下部ヨ
ーク部から発生するノイズの有無を高感度に検出するこ
とが出来る薄膜磁気ヘッドの検査方法を提供することで
ある。
The present invention has been made to solve the above-mentioned conventional problems. An object of the present invention is to provide a method for inspecting a thin film magnetic head capable of detecting with high sensitivity the presence or absence of noise generated from a lower yoke portion.

【0012】[0012]

【課題を解決するための手段】上記課題を解決するため
に、本発明に記載の薄膜磁気ヘッドの検査方法は、内蔵
記録ヘッド用コイル(図2の10)に交流電流を通電
し、ヘッド出力におけるノイズ発生の有無を測定するこ
とを特徴としている。
In order to solve the above-mentioned problems, a method of inspecting a thin film magnetic head according to the present invention is designed so that an alternating current is passed through a built-in recording head coil (10 in FIG. 2) to output a head output. It is characterized by measuring the presence or absence of noise in the.

【0013】[0013]

【作用】本発明によれば、内蔵記録ヘッドコイルにより
励磁しているため、MR素子部、上部ヨーク部と比較
し、下部ヨーク部、特に記録コイル付近の磁気コアを適
切に磁化することが出来、下部ヨーク部、基板部でのノ
イズに対する良否を高感度に検査することを可能として
いる。
According to the present invention, since it is excited by the built-in recording head coil, it is possible to appropriately magnetize the lower yoke portion, especially the magnetic core near the recording coil, as compared with the MR element portion and the upper yoke portion. It is possible to inspect with high sensitivity whether or not the lower yoke portion and the substrate portion are good against noise.

【0014】[0014]

【実施例】以下、この発明に基づいた薄膜磁気ヘッドの
検査方法の実施例について図1ないし図5を参照して説
明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method of inspecting a thin film magnetic head according to the present invention will be described below with reference to FIGS.

【0015】まず、ヘッドの出力特性及びノイズ特性を
測定する方法をその測定系のブロック図(図1)を用い
て説明する。(なおヘッドは、磁気ヨーク等を省いて示
している。)内蔵記録ヘッドコイル10に発信器12、
定電流アンプ13により交流励磁電流Irを流し、薄膜
磁気ヘッド20を励磁する。この励磁電流値は抵抗14
により電圧に変換し、オシロスコープ21のX軸に入力
する。ヘッド内の磁気抵抗効果素子1(以下MR素子と
称す)に定電流源16よりセンス電流Isを流す。ヘッ
ド出力はアンプ17で増幅し、オシロスコープ21のY
軸に入力する。オシロスコープはX−Y表示モードにし
ヘッド出力の特性曲線(以下、MR特性曲線と称す)を
観測する。更に可変定電流源19よりヘッド内のバイア
ス導体3に直流バイアス電流Ibを流しMR特性曲線を
最適動作点にする。又、アンプ出力は、微分回路、交流
励磁電流Irの基本波除去回路18を通過させノイズを
抽出した信号Y′をオシロスコープ21のY軸に入力し
ノイズの有無を更に高感度に測定することができる。
First, a method for measuring the output characteristic and noise characteristic of the head will be described with reference to the block diagram of the measuring system (FIG. 1). (The head is shown without the magnetic yoke.) The built-in recording head coil 10 has an oscillator 12,
An alternating excitation current Ir is passed by the constant current amplifier 13 to excite the thin film magnetic head 20. This exciting current value is the resistance 14
Is converted into a voltage by and input to the X axis of the oscilloscope 21. A constant current source 16 supplies a sense current Is to a magnetoresistive effect element 1 (hereinafter referred to as an MR element) in the head. The head output is amplified by the amplifier 17, and the Y of the oscilloscope 21 is output.
Enter on the axis. The oscilloscope is set to the XY display mode and the characteristic curve of head output (hereinafter referred to as MR characteristic curve) is observed. Further, a direct current bias current Ib is made to flow from the variable constant current source 19 to the bias conductor 3 in the head so that the MR characteristic curve becomes the optimum operating point. Further, the amplifier output is passed through a differentiating circuit and a fundamental wave removing circuit 18 for the AC exciting current Ir to input a signal Y ', which is noise extracted, to the Y axis of an oscilloscope 21 to measure the presence or absence of noise with higher sensitivity. it can.

【0016】次に、この内蔵記録ヘッドコイルの電流に
よるヘッド各部の磁束密度の、MR素子部の磁束密度に
対する比を2次元有限要素法等により計算した結果を表
1に示す。
Next, Table 1 shows the results of calculation of the ratio of the magnetic flux density of each head portion due to the current of the built-in recording head coil to the magnetic flux density of the MR element portion by the two-dimensional finite element method or the like.

【0017】[0017]

【表1】 [Table 1]

【0018】また同表に内部バイアス磁界、一様外部磁
界について計算した結果も示す。下部ヨーク部、基板部
が他の部位と比較し著しく磁束密度が高い。また、一様
外部磁界及び内部バイアス磁界の場合と比較しても下部
ヨーク部(特に部位(H)、(I)、(J))、基板部
の磁束密度が高いことがわかる。すなわち、この励磁磁
界により、これらの部位が選択的に強く、磁化されるこ
とがわかる。
The table also shows the results of calculations for the internal bias magnetic field and the uniform external magnetic field. The lower yoke part and the substrate part have remarkably higher magnetic flux density than other parts. Further, it can be seen that the magnetic flux densities of the lower yoke portion (particularly the portions (H), (I), (J)) and the substrate portion are higher than those in the case of the uniform external magnetic field and the internal bias magnetic field. That is, it is understood that these magnetic fields are selectively and strongly magnetized by this exciting magnetic field.

【0019】上述した方法により測定した結果の一例を
以下に示す。
An example of the result measured by the above method is shown below.

【0020】図5(イ)、(ロ)、(ハ)は、それぞれ
内部バイアス磁界、一様外部磁界、内蔵記録ヘッドコイ
ル磁界で励磁した場合の、MR特性曲線を示す。また図
5の(ニ)、(ホ)、(ヘ)は、それぞれ内部バイアス
磁界、一様外部磁界、内蔵記録ヘッドコイル磁界で励磁
した場合のヘッド出力のノイズ抽出処理後の特性であ
る。
FIGS. 5A, 5B, and 5C show MR characteristic curves when excited by an internal bias magnetic field, a uniform external magnetic field, and a built-in recording head coil magnetic field, respectively. Further, (d), (e), and (f) in FIG. 5 are characteristics of the head output after noise extraction processing when excited by the internal bias magnetic field, the uniform external magnetic field, and the built-in recording head coil magnetic field, respectively.

【0021】図5の(イ)、(ニ)の内部のバイアス磁
界励磁による測定結果では、ノイズ検出できていない。
また図5(ロ)、(ホ)の一様外部磁界励磁による測定
結果では、MR特性曲線(図5(ロ))ではノイズは認
められず、ノイズ抽出出力(図5(ホ))で僅かにノイ
ズが観測されている。一方、図5(ハ)、(ヘ)の内蔵
記録ヘッドコイル磁界励磁による測定結果では、著しい
ノイズが検出できている。
In the measurement results of the internal bias magnetic field excitation shown in (a) and (d) of FIG. 5, noise cannot be detected.
In addition, in the measurement results by the uniform external magnetic field excitation shown in FIGS. 5B and 5E, noise is not recognized in the MR characteristic curve (FIG. 5B), and noise is small in the noise extraction output (FIG. 5E). Noise is observed in. On the other hand, in the measurement results of the built-in recording head coil magnetic field excitation shown in FIGS. 5C and 5F, significant noise can be detected.

【0022】この測定結果から明らかなように、この内
蔵記録ヘッドコイルの電流により励磁すると、一様外部
磁界及び内部バイアス磁界による励磁では検出すること
の出来ないノイズを容易に調べることが出来、ヘッドの
良否を適確に検査することが出来る。
As is clear from the measurement results, when excited by the current of the built-in recording head coil, noise which cannot be detected by the excitation by the uniform external magnetic field and the internal bias magnetic field can be easily investigated, and the head can be easily detected. The quality of can be accurately inspected.

【0023】また、本発明を適用しうるヘッドとして
は、記録ヘッドとヨーク型MRヘッドがコアとヨークの
部を共用しているヘッドであればよく、図2、3のヘッ
ド構造には、限られない。
Further, the head to which the present invention can be applied may be any head as long as the recording head and the yoke type MR head share the core and the yoke part, and the head structure shown in FIGS. I can't.

【0024】[0024]

【発明の効果】以上述べた本発明によれば、内蔵記録ヘ
ッドコイルにより励磁しているため、MR素子部、上部
ヨーク部と比較し、下部ヨーク部、特に記録コイル付近
の磁気コアを適切に磁化し、下部ヨーク部、基板部で発
生するノイズを高感度に測定することが出来、適確な薄
膜磁気ヘッドのノイズ特性の検査を可能としている。
According to the present invention described above, since it is excited by the built-in recording head coil, the lower yoke portion, particularly the magnetic core near the recording coil, is more appropriately compared with the MR element portion and the upper yoke portion. It is possible to measure the noise generated in the lower yoke part and the substrate part by magnetizing with high sensitivity, and it is possible to inspect the noise characteristics of the thin film magnetic head with accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明に基づいた実施例におけるMR特性曲
線及びノイズ測定ブロック図である。
FIG. 1 is a block diagram of an MR characteristic curve and noise measurement in an embodiment based on the present invention.

【図2】実施例に用いた、記録ヘッドを内蔵した薄膜磁
気ヘッドの構造を示す全体斜視図である。
FIG. 2 is an overall perspective view showing a structure of a thin film magnetic head having a built-in recording head used in an embodiment.

【図3】図2に示した薄膜磁気ヘッドの構造を示す断面
図である。
3 is a cross-sectional view showing the structure of the thin film magnetic head shown in FIG.

【図4】実施例において磁束密度の比を計算した薄膜磁
気ヘッド内のポイントを示す断面図である。
FIG. 4 is a cross-sectional view showing points in the thin-film magnetic head where the ratio of magnetic flux densities was calculated in the example.

【図5】この発明に基づいた実施例におけるMR特性曲
線及びノイズ測定結果を示す写真である。
FIG. 5 is a photograph showing an MR characteristic curve and noise measurement results in an example based on the present invention.

【符号の説明】[Explanation of symbols]

1 MR素子 2 MR素子リード 3 バイアス導体 4 上部ヨーク 5 下部ヨーク 6 記録ヘッドギャップ 7 基板 8 ガラス 9 再生ヘッドギャップ 10 記録ヘッドコイル 12 発信器 13 定電流アンプ 14 抵抗 16 定電流源 17 低ノイズアンプ 18 微分、フィルター回路 19 可変定電流源 20 磁気ヘッド 21 オシロスコープ 1 MR element 2 MR element lead 3 bias conductor 4 upper yoke 5 lower yoke 6 recording head gap 7 substrate 8 glass 9 reproducing head gap 10 recording head coil 12 oscillator 13 constant current amplifier 14 resistance 16 constant current source 17 low noise amplifier 18 Differentiation, filter circuit 19 Variable constant current source 20 Magnetic head 21 Oscilloscope

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 磁気抵抗効果素子を具備して磁気記録媒
体に記録された信号の検出を行う薄膜磁気ヘッドにおい
て、誘導型薄膜磁気ヘッドを内蔵している複合型薄膜磁
気ヘッドにおいて、前記内蔵記録ヘッド用コイル導体
に、交流電流を通電し前記複合型薄膜磁気ヘッドを励磁
し、前記磁気抵抗効果素子の出力特性におけるノイズの
発生の有無を測定したことを特徴とする薄膜磁気ヘッド
の検査方法。
1. A thin film magnetic head having a magnetoresistive effect element for detecting a signal recorded on a magnetic recording medium, wherein a composite thin film magnetic head having an inductive thin film magnetic head built therein is used. An inspection method for a thin film magnetic head, characterized in that an AC current is applied to the head coil conductor to excite the composite type thin film magnetic head, and whether or not noise is generated in the output characteristics of the magnetoresistive effect element is measured.
JP33634292A 1992-12-16 1992-12-16 Checking method for thin film magnetic head Pending JPH06187619A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33634292A JPH06187619A (en) 1992-12-16 1992-12-16 Checking method for thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33634292A JPH06187619A (en) 1992-12-16 1992-12-16 Checking method for thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH06187619A true JPH06187619A (en) 1994-07-08

Family

ID=18298131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33634292A Pending JPH06187619A (en) 1992-12-16 1992-12-16 Checking method for thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH06187619A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09120514A (en) * 1995-10-26 1997-05-06 Tdk Corp Method and device for inspecting magnetic head having magnetoresistive element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09120514A (en) * 1995-10-26 1997-05-06 Tdk Corp Method and device for inspecting magnetic head having magnetoresistive element

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