JPH06185876A - Air-tight structure for rotating roller of vacuum processing furnace - Google Patents
Air-tight structure for rotating roller of vacuum processing furnaceInfo
- Publication number
- JPH06185876A JPH06185876A JP35441592A JP35441592A JPH06185876A JP H06185876 A JPH06185876 A JP H06185876A JP 35441592 A JP35441592 A JP 35441592A JP 35441592 A JP35441592 A JP 35441592A JP H06185876 A JPH06185876 A JP H06185876A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- vacuum processing
- processing furnace
- gas
- zinc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、真空処理炉の回転ロー
ラの回転を円滑にするための真空処理炉の回転ローラの
気密構造の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in the airtight structure of a rotary roller of a vacuum processing furnace for smooth rotation of the rotary roller of the vacuum processing furnace.
【０００２】[0002]
【従来の技術】従来、真空処理炉の回転ローラの気密構
造としては、炉の下部炉壁を貫通する回転ローラは両端
を軸受により回転自在に軸承するとともに、気密ケーシ
ングの蓋を上記軸部が貫通し、蓋には軸封のためのシー
ル装置を取付けるようにして外気の侵入を防止して真空
処理炉の真空度を維持するようにしたものが知られてい
る（特開平３−５０４９１号公報）。2. Description of the Related Art Conventionally, as an airtight structure of a rotary roller of a vacuum processing furnace, a rotary roller penetrating a lower furnace wall of the furnace has its both ends rotatably supported by bearings, and a lid of an airtight casing is provided with the shaft portion. It is known that a through hole is provided and a sealing device for sealing the shaft is attached to the lid so as to prevent outside air from entering and maintain the degree of vacuum of the vacuum processing furnace (Japanese Patent Laid-Open No. 3-50491). Gazette).
【０００３】この形式の回転ローラの気密構造では、回
転ローラの軸部が蓋を貫通する箇所にシール装置が取付
けられて、シール材と軸部との接触により気密機能を発
揮するようにされている。かかる気密構造を用いて回転
ローラは円滑に回転されて、しかも、外気の侵入を防止
して真空処理炉の真空度を維持するようにされている。In the airtight structure of the rotating roller of this type, a sealing device is attached to a portion where the shaft portion of the rotating roller penetrates the lid, and the airtight function is exhibited by the contact between the sealing material and the shaft portion. There is. By using such an airtight structure, the rotating roller is smoothly rotated, and the outside air is prevented from entering to maintain the vacuum degree of the vacuum processing furnace.
【０００４】[0004]
【発明が解決しようとする課題】この真空処理炉が亜鉛
めっき鋼板屑を真空下にて加熱し、鋼板屑表面の亜鉛を
蒸発させて鋼板屑と亜鉛とに分離させる真空脱亜鉛炉で
ある場合、回転ローラの低温部表面に亜鉛蒸気が付着，
凝固し、回転ローラの回転を不円滑もしくは不能にさ
せ、上述したような脱亜鉛操作に支障を与える虞れがあ
る。When the vacuum treatment furnace is a vacuum dezincing furnace that heats galvanized steel scrap under vacuum to evaporate zinc on the surface of the scrap steel and separate it into steel scrap and zinc , Zinc vapor adheres to the low temperature surface of the rotating roller,
There is a possibility that the solidification may occur and the rotation of the rotary roller may be made unsmooth or impossible, and the dezincification operation as described above may be hindered.
【０００５】本発明は、上述した従来技術の問題点を解
決するためになされたものであり、回転ローラの炉壁貫
通部の間隙には気密流体が炉内を指向して導入されて蒸
発亜鉛が拡散侵入されることを回避できて回転ローラの
回転を円滑にできて、所定の真空度を維持できる真空処
理炉の回転ローラの気密構造を提供することを目的とす
る。The present invention has been made to solve the above-mentioned problems of the prior art. An airtight fluid is introduced into the gap between the rotary wall penetration portions of the rotary roller toward the inside of the furnace to evaporate zinc. It is an object of the present invention to provide an airtight structure for the rotating roller of the vacuum processing furnace, which can prevent the diffusion and intrusion of the rotating roller, can smoothly rotate the rotating roller, and can maintain a predetermined degree of vacuum.
【０００６】[0006]
【課題を解決するための手段】かかる目的を達成するた
めに、本発明では、真空処理炉の下部炉壁を貫通する回
転ローラを両端にて密封に軸承して上記炉の長手方向に
複数配設させるとともに、上記貫通部の間隙には気体が
上記炉内を指向して導入されることを特徴とするもので
ある。In order to achieve the above object, according to the present invention, a plurality of rotary rollers that penetrate the lower furnace wall of a vacuum processing furnace are hermetically supported at both ends and are arranged in the longitudinal direction of the furnace. The gas is introduced into the gap of the penetrating portion while being directed into the furnace.
【０００７】[0007]
【作用】このようにすれば、真空処理炉が真空脱亜鉛炉
であって、亜鉛めっき鋼板屑を真空下にて加熱し、鋼板
屑表面の亜鉛を蒸発させて鋼板屑と亜鉛とに分離させる
に際し、回転ローラの炉壁貫通部の間隙には気体が炉内
に指向して導入されて炉内からの蒸発亜鉛が拡散侵入さ
れることを回避できて回転ローラの回転を円滑にでき
て、かつ、所定の真空度を維持できる。In this way, the vacuum processing furnace is a vacuum dezincing furnace, and the galvanized steel scrap is heated under vacuum to evaporate the zinc on the scrap steel surface and separate it into steel scrap and zinc. At that time, it is possible to prevent gas from being introduced into the furnace through the furnace wall penetrating portion of the rotating roller toward the inside of the furnace so that zinc vaporized from the inside of the furnace is diffused and invaded, so that the rotating roller can smoothly rotate, Moreover, a predetermined degree of vacuum can be maintained.
【０００８】[0008]
【実施例】以下、図面を参照にして本発明の実施例につ
いて説明する。Embodiments of the present invention will be described below with reference to the drawings.
【０００９】図１は、本発明の一実施例を示す回転ロー
ラの気密構造の全体構造図、図２は、同断面図、図３
は、図２の要部拡大断面図、図４は同貫通部の拡大説明
図である。FIG. 1 is an overall structural view of an airtight structure of a rotary roller showing an embodiment of the present invention, FIG. 2 is a sectional view of the same, and FIG.
2 is an enlarged cross-sectional view of the main part of FIG. 2, and FIG. 4 is an enlarged explanatory view of the penetrating part.
【００１０】図１〜４において、１０はトンネル型の真
空処理炉を示し、例えば真空脱亜鉛炉について説明す
る。この真空処理炉１０は、亜鉛メッキ鋼板屑を収容し
たバスケット３２の移動方向にしたがい、装入帯１２，
装入遮断室１８，脱亜鉛帯１４，排出遮断室２０，排出
帯１６などが長手方向に配設されている。1 to 4, reference numeral 10 denotes a tunnel type vacuum processing furnace, and for example, a vacuum dezincing furnace will be described. The vacuum processing furnace 10 is arranged so that the charging zone 12, the charging zone 12,
A charging shutoff chamber 18, a dezincification zone 14, a discharge shutoff chamber 20, a discharge zone 16 and the like are arranged in the longitudinal direction.
【００１１】上記真空処理炉１０の下部炉壁５８を貫通
して複数の回転ローラ３４が長手方向に配設されてい
る。６０は上記貫通部を示すものである。回転ローラ３
４の両端は軸受７８にて軸承されローラ端部にはスプロ
ケット８０を取付けて駆動源３５に接続されて回転ロー
ラを回転させ、上記バスケット３２を断続的に移動させ
ている。真空処理炉１０の内部には床部ならびに両側部
に加熱手段４０，４２、例えば発熱体が複数配設されて
いる。そして、装入帯１２および脱亜鉛帯１４において
は、それぞれ所定温度の均一な高温雰囲気が保持され
る。また、真空処理炉１０の内部は所定の真空度に維持
されており、管路７０を介して真空系統６８に接続さ
れ、７２は排気管路を示す。そして、真空処理炉１０の
下方には導入路４８を介して複数の亜鉛回収室４６が連
設され、前記管路７０の一端は、この亜鉛回収室４６に
開口されて、亜鉛回収室４６の内部も所定の真空度に維
持されている。A plurality of rotating rollers 34 are arranged in the longitudinal direction through the lower furnace wall 58 of the vacuum processing furnace 10. Reference numeral 60 denotes the penetrating portion. Rotating roller 3
Both ends of 4 are supported by bearings 78, and a sprocket 80 is attached to the end of the roller and is connected to a drive source 35 to rotate the rotating roller and intermittently move the basket 32. Inside the vacuum processing furnace 10, heating means 40, 42, for example, a plurality of heating elements are provided on the floor and both sides. Then, in the charging zone 12 and the dezincification zone 14, a uniform high temperature atmosphere of a predetermined temperature is maintained. Further, the inside of the vacuum processing furnace 10 is maintained at a predetermined degree of vacuum, is connected to a vacuum system 68 via a pipe 70, and 72 is an exhaust pipe. A plurality of zinc recovery chambers 46 are continuously provided below the vacuum processing furnace 10 via an introduction passage 48, and one end of the pipe 70 is opened to the zinc recovery chamber 46, and the zinc recovery chamber 46 is The inside is also maintained at a predetermined degree of vacuum.
【００１２】上述したように、真空処理炉１０において
は鋼板屑を収容したバスケット３２は回転ローラ３４の
作動に伴い装入帯１２から装入されて脱亜鉛帯１４を経
て排出帯１６まで断続的に移動して炉１０外に抽出され
る。上記移動過程において脱亜鉛帯１４では常時、所定
の真空度に維持されており、装入帯１２においてはバス
ケット３２が装入された時点では内部は大気圧を呈して
いるが、装入が完了された時点からは仕切扉２２，２４
が閉鎖されて真空系統６８の管路７０と連通されて内部
の排気が開始され所定圧力まで減圧される。次いで、仕
切扉２４ならびに脱亜鉛帯１４の端部の仕切扉２６が開
放されて、バスケット３２は脱亜鉛帯１４内へ移動され
ると、仕切扉２４，２６が閉鎖されるとともに、管路７
０も閉鎖され、装入帯１２の図示しない復圧弁が開放さ
れて装入帯１２の内部は大気圧に復圧し、仕切扉２２が
開放されて次のバスケット３２が装入されるようにな
る。そして、排出帯１６においては装入帯１２における
動作と逆作動がなされ、排出帯１６にバスケット３２が
位置されていない場合、すなわち、装入帯１２にバスケ
ット３２が位置されている場合には仕切扉２８，３０が
閉鎖されて、しかも内部は所定の真空度に減圧されてい
る。As described above, in the vacuum processing furnace 10, the basket 32 containing the steel plate scraps is loaded from the charging zone 12 through the operation of the rotating roller 34 and then intermittently through the dezincification zone 14 to the discharge zone 16. And is extracted outside the furnace 10. In the moving process, the dezincification zone 14 is always maintained at a predetermined vacuum degree, and the charging zone 12 is at atmospheric pressure when the basket 32 is loaded, but the loading is completed. From the time it was released, the partition doors 22 and 24
Is closed and communicated with the pipe 70 of the vacuum system 68 to start exhausting the inside and reduce the pressure to a predetermined pressure. Next, when the partition door 24 and the partition door 26 at the end of the dezincification zone 14 are opened and the basket 32 is moved into the dezincification zone 14, the partition doors 24 and 26 are closed and the pipeline 7 is formed.
0 is also closed, the pressure-return valve (not shown) of the charging zone 12 is opened, the inside of the charging zone 12 is restored to atmospheric pressure, the partition door 22 is opened, and the next basket 32 is charged. . Then, in the discharge zone 16, the operation opposite to the operation in the charging zone 12 is performed, and when the basket 32 is not positioned in the discharge zone 16, that is, when the basket 32 is positioned in the charging zone 12, the partition is performed. The doors 28 and 30 are closed, and the inside is depressurized to a predetermined vacuum degree.
【００１３】そして、バスケット３２が脱亜鉛工程を終
えて排出帯１６内に移動され、引続き、仕切扉２８の閉
鎖および仕切扉３０の開放がなされて、排出帯１６の内
部は大気圧に復圧し、バスケット３２は真空処理炉１０
外に抽出され、次工程へと移動される。Then, the basket 32 is moved to the inside of the discharge zone 16 after the dezincification process, and then the partition door 28 is closed and the partition door 30 is opened, so that the inside of the discharge zone 16 is restored to the atmospheric pressure. The basket 32 is a vacuum processing furnace 10.
It is extracted outside and moved to the next step.
【００１４】上記仕切扉２４，２６は装入遮断室１８内
に、また仕切扉２８は排出遮断室２０内に夫々設置さ
れ、図示しない昇降機構を用いて開閉自在に作動され
る。The partition doors 24 and 26 are installed in the charging shut-off chamber 18, and the partition door 28 is installed in the discharge shut-off chamber 20, respectively, and are operated so as to be openable and closable by using an elevator mechanism (not shown).
【００１５】鋼板屑を収容したバスケット３２が脱亜鉛
帯１４内を移動する過程においては、鋼板屑は加熱手段
４０，４２を熱源とする減圧下の高温雰囲気のもとで加
熱され、所定温度まで昇温すると、鋼板屑表面の亜鉛は
蒸発し、亜鉛の蒸発分子が生成される。そして、気相内
に移動した亜鉛の蒸発分子は気体とともに脱亜鉛帯１４
内を流動して、導入路４８を通過して亜鉛回収室４６内
に流れ、回収箱５０に衝突して蒸発分子を捕集した後、
気体は管路７０を経て真空系統６８によって排気され
る。During the process in which the basket 32 containing the steel plate scraps moves in the dezincification zone 14, the steel plate scraps are heated in a high temperature atmosphere under reduced pressure using the heating means 40 and 42 as heat sources, and reach a predetermined temperature. When the temperature rises, zinc on the surface of the steel plate scraps evaporates, and evaporated molecules of zinc are generated. Then, the evaporated molecules of zinc that have moved into the gas phase are dezincified with the gas.
After flowing inside, passing through the introduction path 48 and flowing into the zinc recovery chamber 46, colliding with the recovery box 50 to collect the evaporated molecules,
The gas is exhausted by the vacuum system 68 via the line 70.
【００１６】亜鉛回収室４６の内壁面は冷却材が流通さ
れた冷却ジャケットからなる冷却面５２が形成されてい
るので低温雰囲気とされ回収箱５０の表面温度も亜鉛の
融点以下の低温度にされている。上記蒸発分子は回収箱
５０内において凝固を開始し、所要の凝固時間を経過し
て凝固が完結される。The inner wall surface of the zinc recovery chamber 46 is formed with a cooling surface 52 consisting of a cooling jacket in which a coolant is circulated, so that a low temperature atmosphere is provided and the surface temperature of the recovery box 50 is set to a low temperature below the melting point of zinc. ing. The vaporized molecules start to coagulate in the recovery box 50, and the coagulation is completed after the required coagulation time has elapsed.
【００１７】真空処理炉１０の脱亜鉛帯１４の炉壁構造
は、外周に炉殻５６を有し、内側には断熱壁５９が設け
られ、炉内の高温雰囲気に対し充分に断熱させて放散熱
の減少をはかっている。前記下部炉壁５８の貫通部６０
においては炉殻５６ならびに断熱壁５９が局所的に開口
されていて回転ローラ３４が配設されている。そして、
回転ローラ３４と断熱壁５９との間には断熱材料からな
る筒状のスリーブ材６２が挿入されていて、貫通部６０
においては充分な断熱のもとで表面を平滑化させてい
る。さらに、貫通部６０に位置された回転ローラ３４の
表面には断熱材料からなる保護材６４が被覆されるとと
もに回転ローラ３４の外表面とスリーブ材６２の内表面
との間には間隙６３が形成されている。貫通部６０にお
ける炉殻５６の外側には鋼材からなる取付筒６６が取付
けられ、６８は取付筒６６の端部の座板を示し、座板６
８にはフランジ６９を有する冷却室７７が気密に取付け
られている。冷却室７７の外側端部は軸受ホルダ７０が
一体構造にされている。冷却室７７には冷却材、例えば
水などが流通されて、軸受ホルダ７０などが冷却され
る。軸受ホルダ７０の外側端部にはシール金物７４が取
付けられるとともにシール材７５が内装されて回転ロー
ラ３４の軸部と密封されている。そしてこのシール金物
７４の外周には複数の気体導入口７６が開口されてお
り、外部からの気体、例えばＮ2 ガス系統に接続されて
いる。The furnace wall structure of the dezincification zone 14 of the vacuum processing furnace 10 has a furnace shell 56 on the outer periphery and a heat insulating wall 59 on the inner side, which is sufficiently insulated against the high temperature atmosphere in the furnace and released. We are trying to reduce heat dissipation. Penetration part 60 of the lower furnace wall 58
In FIG. 3, the furnace shell 56 and the heat insulating wall 59 are locally opened, and the rotating roller 34 is arranged. And
A tubular sleeve member 62 made of a heat insulating material is inserted between the rotating roller 34 and the heat insulating wall 59, and the through hole 60 is formed.
In, the surface is smoothed under sufficient heat insulation. Further, the surface of the rotating roller 34 located in the penetrating portion 60 is covered with a protective material 64 made of a heat insulating material, and a gap 63 is formed between the outer surface of the rotating roller 34 and the inner surface of the sleeve material 62. Has been done. A mounting tube 66 made of steel is attached to the outside of the furnace shell 56 in the penetrating portion 60, and 68 indicates a seat plate at the end of the mounting tube 66.
A cooling chamber 77 having a flange 69 is attached to 8 in an airtight manner. The bearing holder 70 is integrated with the outer end of the cooling chamber 77. A coolant such as water is circulated in the cooling chamber 77 to cool the bearing holder 70 and the like. A seal metal fitting 74 is attached to the outer end portion of the bearing holder 70, and a seal material 75 is internally provided to seal the shaft portion of the rotary roller 34. A plurality of gas introduction ports 76 are opened on the outer circumference of the metal seal 74, and are connected to a gas from the outside, for example, an N 2 gas system.
【００１８】Ｎ2 ガスは軸受７８と軸受ホルダ７０との
間の通路，内筒７３と軸部との間の通路，スリーブ材６
２内部の空間および前記間隙６３の通路を順次流れて真
空処理炉１０内を指向して導入される。このようにＮ2
ガスが炉内に導入されて蒸発亜鉛が下部炉壁５８の貫通
部６０から拡散侵入されることが回避できて、間隙６３
をはじめ軸受７８などにおける亜鉛付着の発生が防止で
きる。かくして回転ローラ３４の回転も円滑にできて、
バスケット３２の搬送を確実にし、しかも真空処理炉１
０における所定の真空度を維持できる。The N 2 gas is a passage between the bearing 78 and the bearing holder 70, a passage between the inner cylinder 73 and the shaft portion, and the sleeve member 6.
It is introduced into the vacuum processing furnace 10 by sequentially flowing through the space inside 2 and the passage of the gap 63. Thus N 2
It is possible to avoid that the gas is introduced into the furnace and the evaporated zinc diffuses and enters from the through portion 60 of the lower furnace wall 58, and the gap 63
It is possible to prevent zinc from adhering to the bearing 78 and the like. Thus, the rotation of the rotation roller 34 can be smoothly performed,
The vacuum processing furnace 1 ensures the transport of the basket 32
A predetermined degree of vacuum at 0 can be maintained.
【００１９】[0019]
【発明の効果】以上説明したように、本発明によれば真
空処理炉にて亜鉛めっき鋼板屑を脱亜鉛させるにさい
し、回転ローラの炉壁貫通部の間隙には気体が炉内を指
向して導入されて蒸発亜鉛が拡散侵入されることを回避
できて回転ローラの回転を円滑にできて、所定の真空度
を維持できるなど、多大な効果を奏する。As described above, according to the present invention, in degassing galvanized steel scrap in a vacuum processing furnace, gas is directed into the furnace through the furnace wall penetrating portion of the rotating roller. Therefore, it is possible to avoid the diffusion and penetration of the evaporated zinc that has been introduced as a result, the rotation of the rotating roller can be smoothly performed, and a predetermined degree of vacuum can be maintained.
【図１】本発明の一実施例を示す回転ローラの気密構造
の全体構成図。FIG. 1 is an overall configuration diagram of an airtight structure of a rotating roller according to an embodiment of the present invention.
【図２】同断面図。FIG. 2 is a sectional view of the same.
【図３】図２の要部拡大断面図。FIG. 3 is an enlarged cross-sectional view of a main part of FIG.
【図４】同貫通部の拡大説明図。FIG. 4 is an enlarged explanatory view of the penetrating portion.
１０…真空処理炉 ３４…回転ローラ ５８…下部炉壁 ６０…貫通部 ６３…間隙 ７８…軸受 10 ... Vacuum processing furnace 34 ... Rotating roller 58 ... Lower furnace wall 60 ... Penetration part 63 ... Gap 78 ... Bearing
───────────────────────────────────────────────────── フロントページの続き (71)出願人 000211123 中外炉工業株式会社 大阪府大阪市西区京町堀２丁目４番７号 (72)発明者 伊集院 光夫 千葉県八千代市上高野1780番地 川崎重工 業株式会社八千代工場内 (72)発明者 井上 岳彦 千葉県八千代市上高野1780番地 川崎重工 業株式会社八千代工場内 (72)発明者 岡田 裕二 愛知県豊田市トヨタ町１番地 トヨタ自動 車株式会社内 (72)発明者 藤尾 俊一 愛知県豊田市トヨタ町１番地 トヨタ自動 車株式会社内 (72)発明者 鈴木 和弘 愛知県豊田市鴻ノ巣町３丁目33番地 トヨ キン株式会社内 (72)発明者 関 忠 大阪府大阪市西区京町堀２丁目４番７号 中外炉工業株式会社内 (72)発明者 中谷 好良 大阪府大阪市西区京町堀２丁目４番７号 中外炉工業株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (71) Applicant 000211123 Chugai Furnace Industry Co., Ltd. 2-4-7 Kyomachibori, Nishi-ku, Osaka-shi, Osaka (72) Inventor Mitsuo Ijuin 1780, Uetakano, Yachiyo-shi, Chiba Kawasaki Heavy Industries Ltd. Company Yachiyo Factory (72) Inventor Takehiko Inoue 1780 Uetakano, Yachiyo-shi, Chiba Kawasaki Heavy Industries, Ltd. Yachiyo Factory (72) Inventor Yuji Okada 1 Toyota-cho, Aichi Prefecture Toyota Automobile Co., Ltd. (72 ) Inventor Shunichi Fujio 1 Toyota Town, Toyota City, Aichi Prefecture Toyota Automobile Co., Ltd. (72) Inventor Kazuhiro Suzuki 3-33 Konosu Town, Toyota City, Aichi Prefecture Toyokin Co., Ltd. (72) Inventor Seki Tadashi Osaka Prefecture Chugai Furnace Industry Co., Ltd. 2-4-7 Kyomachibori, Nishi-ku, Osaka (72) Inventor Yoshiyoshi Nakatani Osaka, Osaka Subdivision Kyomachibori 2-chome No. 4 No. 7 Chugai Ro Co., Ltd. in
Claims (1)
ーラを両端にて密封に軸承して上記炉の長手方向に複数
配設させるとともに、上記貫通部の間隙には気体が上記
炉内を指向して導入されることを特徴とする真空処理炉
の回転ローラの気密構造。1. A plurality of rotary rollers that penetrate a lower furnace wall of a vacuum processing furnace are hermetically supported at both ends to be arranged in a plurality in the longitudinal direction of the furnace, and a gas is present in a space between the penetrating portions in the furnace. The airtight structure of the rotary roller of the vacuum processing furnace, which is characterized by being introduced in the direction of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35441592A JP2843472B2 (en) | 1992-12-16 | 1992-12-16 | Airtight structure of rotating rollers in vacuum processing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35441592A JP2843472B2 (en) | 1992-12-16 | 1992-12-16 | Airtight structure of rotating rollers in vacuum processing furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06185876A true JPH06185876A (en) | 1994-07-08 |
| JP2843472B2 JP2843472B2 (en) | 1999-01-06 |
Family
ID=18437407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35441592A Expired - Lifetime JP2843472B2 (en) | 1992-12-16 | 1992-12-16 | Airtight structure of rotating rollers in vacuum processing furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2843472B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1403604A1 (en) * | 2002-09-26 | 2004-03-31 | IPEG S.p.A. dell'Ing. Mauro Poppi | Roller Kiln |
| WO2012130750A1 (en) * | 2011-03-25 | 2012-10-04 | Schwartz, Eva | Roller hearth furnace and method for heating workpieces |
| JP6878661B1 (en) * | 2020-07-29 | 2021-05-26 | 株式会社ノリタケカンパニーリミテド | Conveying roller support device for atmosphere heating furnace |
-
1992
- 1992-12-16 JP JP35441592A patent/JP2843472B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1403604A1 (en) * | 2002-09-26 | 2004-03-31 | IPEG S.p.A. dell'Ing. Mauro Poppi | Roller Kiln |
| WO2012130750A1 (en) * | 2011-03-25 | 2012-10-04 | Schwartz, Eva | Roller hearth furnace and method for heating workpieces |
| JP2014511988A (en) * | 2011-03-25 | 2014-05-19 | シュヴァルツ，エーファ | Roller hearth furnace and method for heating a workpiece |
| DE202011110724U1 (en) | 2011-03-25 | 2016-01-22 | Schwartz Gmbh | Roller hearth furnace for heating workpieces |
| US9423182B2 (en) | 2011-03-25 | 2016-08-23 | Schwartz Gmbh | Roller hearth furnace and method for heating workpieces |
| JP6878661B1 (en) * | 2020-07-29 | 2021-05-26 | 株式会社ノリタケカンパニーリミテド | Conveying roller support device for atmosphere heating furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2843472B2 (en) | 1999-01-06 |
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