JPH0618556A - Inspection head - Google Patents

Abstract

PURPOSE:To obtain an insulation head wherein contact between a contact pin and a contact is securely and smoothly obtained regardless of irregular height thereof in the case where a conduction check of an open top socket for testing a semiconductor device is perform. CONSTITUTION:Constitution is perform in that a contact 12 in contact with a contact pin 3 of a socket 1 is slidably held through a compression spring 13 within a bracket 14 formed on a holder 16, pressed on the contact pin 3 with spring fort and brought into contact therewith.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection head for conducting a continuity check of an open top socket for testing a semiconductor device.

[0002]

2. Description of the Related Art FIG. 3 is a sectional view showing a conventional inspection head of this type, and FIG. 4 is a perspective view of the inspection head. In these figures, 1 is an open top socket (hereinafter,
2 is a substrate to which the socket 1 is attached, 3 is a contact pin embedded in the socket 1, 4 is a positioning hole formed in the central portion of the socket 1, and 11 is an inspection head. , 12 are contacts,
They are arranged as shown in FIG. 4, and each of them is arranged to be in pressure contact with the contact pin 3.

Reference numeral 16 is a holder to which the contact 12 is attached. Reference numeral 17 is a gripping portion, 18 is a cable whose one end is connected to the contactor 12, and 19 is a connector, and the other end of the cable 18 is connected. In addition, the contact 1
2, the holder 16 and the grip 17 are collectively referred to as an inspection head 11 here.

Next, the operation will be described. Socket 1
When the inspection head 11 descends from above, the contacts 12 come into contact with the contact pins 3 and can be made conductive.

[0005]

Since the conventional inspection head is constructed as described above, if all the heights of the surfaces of the contact pins 3 are not uniform, a contact failure occurs and all the contact pieces 12 come into contact with each other. It is necessary to repeat the mounting operation several times until it is done. Further, there is a problem that the contact pin 3 is damaged by the pressure shock applied to the contact pin 3 of the socket 1. Further, since the holder 16 does not have the guide portion, the contactor 12 and the contact pin 3 may be displaced from each other and may not be electrically connected.

Further, since the contacts 12 are arranged in an I-shape, if the contact pins 3 have a fine pitch, there is a risk of short-circuiting due to an enormous diameter due to soldering at the contact portion with the cable 18. It could not be applied to fine pitch.

The present invention has been made in order to solve the above-mentioned problems, and even if the height of the contact pins of the socket is not uniform, the contact with the contact can be surely obtained, and
In addition to being able to support fine pitch contact pins,
An object of the present invention is to provide an inspection head that does not have a connection portion with an external cable or a break in the cable.

[0008]

In the inspection head according to the present invention, each contact has elastic means so that each contact has elasticity and comes into contact with each contact pin.

Further, it is provided with a guide portion to be inserted into the positioning hole of the open top socket. further,
An elastic insulator is sealed at the connection with the external cable. Further, the contacts are arranged in a V shape alternately.

[0010]

In the present invention, since the contact element has elasticity and contacts the contact pin of the socket, even if the contact pins of the socket are not aligned, they can easily follow and contact.

Further, the holder according to the present invention is provided with the guide portion, and the positioning can be performed with high accuracy by aligning with the positioning hole of the socket.

Further, since the contactor and the external cable connecting portion of the present invention are sealed with the elastic insulator, the contactor is insulated and the cable disconnection can be prevented.

Further, since the contacts are alternately arranged in a V shape, connection with an external cable can be made even with a fine pitch.

[0014]

EXAMPLES Examples of the present invention will be described below. FIG. 1 is a sectional view showing an embodiment of the inspection head of the present invention. In FIG. 1, 11A indicates an inspection head according to the present invention, and the same reference numerals as those in FIG. 3 indicate the same components. In this embodiment, a pin-shaped contactor 12 is used.

Reference numeral 13 is a compression spring, and 14 is a bracket formed on the holder 16, in which the contact 1
2. The compression spring 13 is stored. 15 is the compression spring 13
Is a receptacle for holding between the contact 12 and the contact. 1
Reference numeral 7 denotes a grip portion, in which an elastic insulator 20 such as silicon rubber is sealed. And the bracket 14
The tip of the contact is squeezed so that the contactor 12 does not come off.

Next, the operation will be described. When the inspection head 11A is lowered from above the socket 1, the socket 1
The guide hole 16a of the holder 16 of the inspection head 11A is guided and fitted by the positioning hole 4 in the center of the position. When the inspection head 11A is further lowered, the contacts 12 come into contact with the respective contact pins 3. Further down, the contact 12 is pushed by the contact pin 3 and the compression spring 1
3 contracts, and the contact of all contact pins 3 is completed.

Although a contact probe is used as the contact 12 in the above embodiment, this contact 12
As shown in FIG. 2, a leaf spring having a spring property or the like may be used, and the same effect is obtained. The embodiment of FIG. 2 does not include the elastic insulator 20 of the embodiment of FIG. 1, but it goes without saying that the elastic insulator 20 may be provided in this embodiment as well.

Further, in each of the above embodiments, the holder 16 is provided with a pitch hole into which the contact probe is inserted, and the contact 12 is formed.
However, the same effect may be obtained by using square grooves or V grooves having the same pitch. Further, by arranging the contacts 12 alternately in the pitch holes, the square grooves, or the V grooves, it is possible to secure a space for soldering even when the lead pitch is as small as 0.5 mm.

[0019]

As described above, according to the present invention,
Since the contactor is pressed against the contact pin by the elastic means, even if there is some unevenness in the height of the contact pin, the contactor and the contact pin can be contacted smoothly and reliably, and the elastic means can be used. It also serves as a cushioning tool and does not damage the contact pin even when the contact pin and the contact pin are pressed against each other. Therefore, the life of the inspection head is extended.

Further, since the guide portion guides the insertion L positioning in the positioning hole of the socket, highly accurate positioning can be performed. Furthermore, the sealed elastic insulator prevents insulation between the contacts and disconnection of the cable.

Further, by arranging the contacts in a V shape alternately, it is possible to connect to the external cable even if the contacts have a fine pitch.

[Brief description of drawings]

FIG. 1 is a sectional side view showing an inspection head according to an embodiment of the present invention.

FIG. 2 is a sectional side view showing another embodiment of the present invention.

FIG. 3 is a sectional side view of a conventional inspection head.

FIG. 4 is a perspective view of a conventional inspection head portion.

[Explanation of symbols]

 1 Socket 2 Board 3 Contact Pin 4 Positioning Hole 11A Inspection Head 12 Contact 13 Compression Spring 14 Bracket 15 Receptacle 16 Holder 16a Guide 17 Grip 18 Cable 19 Connector 20 Elastic Insulator

Claims (4)

[Claims] 1. An inspection head having a plurality of contact elements, wherein each contact element is brought into contact with a plurality of contact pins provided in an open top socket to perform continuity check, and each contact element has its own contact pin. An inspection head characterized in that each of the contactors is provided with an elastic means so as to have elastic contact with each other. 2. An inspection head having a plurality of contactors, wherein each contactor is brought into contact with a plurality of contact pins provided in an open top socket to perform continuity check, and each contactor has its own contact pin. The inspection head is characterized in that each of the contactors is provided with an elastic means so as to make elastic contact with each other, and further has a guide portion for guiding the insertion into a positioning hole provided in the open top socket. . 3. An inspection head having a plurality of contact elements, wherein each contact element is brought into contact with a plurality of contact pins provided on an open top socket to perform continuity check, and each contact element has its own contact pin. An inspection head characterized in that each of the contactors is provided with elastic means so as to have elastic contact with each other, and an elastic insulator is sealed at a connection portion with an external cable. 4. An inspection head having a plurality of contact elements, wherein each contact element is brought into contact with a plurality of contact pins provided in an open top socket to perform continuity check, wherein each contact element has a respective contact pin. An inspection head characterized in that each contactor is provided with an elastic means so as to have elastic contact with each other, and a plurality of the contactors are alternately arranged in a V shape.