JPH061838U - Direct acting guide device - Google Patents

Abstract

(57) [Summary] [Purpose] Increase load capacity to improve rigidity. Reduce the weight of the cage. [Structure] A plurality of pockets 11 and 12 are formed in two rows in the upper and lower direction between a linear guide rail and a moving body, and a cage 3 which is movable with respect to both is interposed, and a ball is provided in each pocket 11 and 12. It is a direct-acting type guide device that holds 13. The upper pocket 11 and the lower pocket 12 are formed in a staggered shape in the front-rear direction. The upper pocket 11 is opened upward.
The lower pocket 12 is opened downward.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a direct-acting type guide device used for linear movement of a table such as a semiconductor manufacturing device, OA equipment, and measuring equipment.

In this specification, front and rear, left and right refer to the moving direction of a moving body.

[0003]

[Prior art]

 Conventionally, as this type of linear motion guide device, a linear guide rail, a moving body that moves along the guide rail, and a guide rail and a moving body are interposed between the guide rail and the moving body. It consists of a retainer that can move and balls that are retained in a plurality of pockets formed in two rows above and below the retainer. The pocket has a hole shape, and the upper pockets are the lower pockets. It is known that it is formed right above each pocket.

In this direct-acting guide device, since the balls are held by the cage at intervals in the moving direction, adjacent balls do not come into contact with each other, and the circulation path provided in the moving body is used for the ball. Since there is no need to invert the ball as in the direct-acting guide device of the type that circulates, the movement is smooth. Another advantage is that the number of parts is reduced and the manufacturing cost is reduced.

[0005]

[Problems to be solved by the device]

 However, when the conventional linear motion guide device is applied to a miniature type linear motion guide device, the following problems arise due to the cage pockets formed as described above. . In other words, it is not possible to increase the size and number of balls in a limited space, which reduces load capacity and rigidity.

An object of the present invention is to provide a direct-acting guide device that solves the above problems.

[0007]

[Means for Solving the Problems]

 The direct-acting guide device according to the present invention includes a linear guide rail, a moving body that moves along the guide rail, and a guide rail and the moving body. A direct-acting guide device comprising a movable retainer and balls held in a plurality of pockets formed in upper and lower rows of the retainer, wherein an upper pocket and a lower pocket are provided. Are formed in a staggered shape in the front-rear direction, and the upper pocket is opened upward and the lower pocket is opened downward.

[0008]

[Action]

 If the upper and lower pockets of the cage are formed in a staggered shape in the front-rear direction, the size of the ball will be larger than that of the conventional cage, despite the limited size of the cage. In addition to being able to do so, the number can be increased. Further, when the upper pocket is opened upward and the lower pocket is opened downward, the weight can be reduced as compared with the conventional cage having the hole-shaped pocket.

[0009]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings.

1 and 2 show the overall structure of a direct-acting guide device, and FIG. 3 shows a cage.

1 and 2, the linear guide device includes a linear guide rail (1) and a moving body (2) having a substantially inverted U-shaped cross section and moving across the guide rail (1). Between the left and right sides of the guide rail (1) and the left and right leg portions (2a) of the moving body (2), and can move with respect to the guide rail (1) and the moving body (2). It is provided with a plate-shaped cage (3).

The ridges (1a) extending in the front-rear direction are formed on both left and right sides of the guide rail (1), and the ball guide grooves (4) extending in the front-rear direction are formed on the upper and lower sides of the ridge (1a). Are formed. A groove (1b) extending in the front-rear direction is formed on the upper surface of the guide rail (1) over the entire length. The bottom wall portion (1c) of the groove (1b) is formed with a screw hole (5) penetrating the groove in the vertical direction. Such a guide rail (1) is formed by shaving, and the screw hole (5) is formed from below the bottom wall portion (1c). The guide rail (1) is fixed on, for example, a bed (6) of a semiconductor manufacturing apparatus. That is, as shown in FIG. 2, insert a bolt (7) having a shaft portion (7a) having an outer diameter smaller than the inner diameter of the screw hole (5) from above into the screw hole (5), It is fixed by screwing it into the screw hole (8) formed in the bed (6). Since the screw hole (5) is formed from below the bottom wall portion (1c), when forming the screw hole (5), burrs do not occur on the bottom surface of the bottom wall portion (1c). There is no need to deburr the bottom wall (1c) so that it adheres to the upper surface of the bed (6). The head (7b) of the bolt (7) is housed in the groove (1b) so as not to project upward from the upper surface of the guide rail (1). In addition, it may be necessary to fix the guide rail (1) from below the bed.In this case, replace the bed with the screw hole (8) with the guide rail (1). Screw hole (5) with an inner diameter larger than that of the screw hole (5) is used.In this screw hole, insert a bolt from below into the screw hole (5) formed in the bottom wall part (1c). It becomes possible to fix by screwing.

On the left and right legs (2a) of the moving body (2), which face the left and right sides of the guide rail (1), two upper and lower ball guide grooves facing the ball guide groove (4) are provided. (9) is formed. Further, a screw hole (10) is formed through the connecting portion (2b) that connects the upper ends of the left and right leg-shaped portions (2a) of the moving body (2) in the vertical direction. Such a moving body (2) is formed by press working, and the screw hole (10) is formed from above the connecting portion (2b). The moving body (2) is fixed to the lower surface of a table (not shown) of the semiconductor manufacturing apparatus, for example. That is, it is fixed by screwing it into a screw hole (10) from above through a bolt (not shown) into a burrow hole formed in the table and having an inner diameter larger than that of the screw hole (10). Since the screw hole (10) is formed from above the connecting portion (1b), burrs do not occur on the upper surface of the connecting portion (2b) when forming the screw hole (10). It is not necessary to perform deburring to bring 2b) into close contact with the bottom surface of the table.

An escape groove (3a) into which the ridge (1a) is inserted is formed over the entire length of the surface of the cage (3) that faces the left and right side surfaces of the guide rail (1). On the cage (3), a plurality of pockets (11) (12) are formed in two rows in the upper and lower direction so as to correspond to both ball guide grooves (4) (5). Each pocket (11) (12) A ball (13) is retained therein. As shown in FIG. 3, the upper row pockets (11) and the lower row pockets (12) are staggered in the front-rear direction, that is, in a staggered arrangement. Further, the upper pocket (11) is opened upward and the lower pocket (12) is opened downward.

In such a structure, when the moving body (2) moves with respect to the guide rail (1), the retainer (3) moves in the same direction as the moving body (2) at about half the speed of the moving body (2). . If the upper row pockets (11) and the lower row pockets (12) of the cage (3) are formed in a staggered shape in the front-rear direction, the cage (3) has a limited size. Among them, the size of the balls (13) can be relatively large and the number thereof can be large, so that the load capacity is increased and the rigidity is improved. Further, if the upper pocket (11) is opened upward and the lower pocket (12) is opened downward, the weight can be reduced.

[0016]

[Effect of device]

 According to the linear guide device of the present invention, as described above, the size of the ball can be made larger than that of the conventional device in the limited size of the cage. Since the number can be increased, the load capacity is increased and the rigidity is improved. Moreover, since the upper pocket is opened upward and the lower pocket is opened downward, the weight of the cage can be reduced.

[Brief description of drawings]

FIG. 1 is a plan view showing the overall structure of a direct-acting guide device according to the present invention.

FIG. 2 is an enlarged sectional view taken along line II-II in FIG.

FIG. 3 is a side view showing a cage.

[Explanation of symbols]

 1 Guide rail 2 Moving body 3 Cage 11 Pocket 12 Pocket 13 Ball

Claims (1)

[Scope of utility model registration request] 1. A linear guide rail, a moving body that moves along the guide rail, and a retainer that is interposed between the guide rail and the moving body and that is movable with respect to the guide rail and the moving body. , A direct-acting guide device comprising balls respectively held in a plurality of pockets formed in upper and lower two rows in a cage, wherein the upper pocket and the lower pocket are staggered in the front-rear direction. A direct-acting guide device, which is formed so that the upper pocket is opened upward and the lower pocket is opened downward.