JPH06181042A - Manipulation mechanism for sample support member and cluster - Google Patents

Abstract

PURPOSE:To provide a manipulation mechanism for a sample support member in which a sample can be safely turned upside-down and the processing of the sample can be performed from the down side as well, thereby making it feasible to deal with a variety of processings. CONSTITUTION:A sample support member 1 is constituted of a platform 2 for fixing a sample 20 and a stub for supporting the platforms 2 and has a groove 4 to insert a fork. A post 9 is fitted into the space 3c of the stub, and the hook part 5b of a pair of lock levers 5 is inserted into the part 9c of small diameter of the post with a twisting coil spring 7, so that the sample support member 1 is locked into the post 9. A fork 8 is inserted into the fork inserting groove 4, and when lock lever abutting surfaces 5a are pressed by the fork 8 to come close to each other, the lock levers 5 fluctuate with the center 6 of fluctuation acting as a fulcrum and the hook part 5b is opened to release a lock. Thereby, since the lock and the release action are performed by making with the movement of the fork, they can be operated by one- touch, so that the structure is simplified. Also, even when the sample support member comes apart from the post, the fork is inserted into the fork inserting groove to support the sample support member, and therefore, even when the fork is rotated by 180 deg. to turn the sample support member upside-down, it is not fallen off.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample support member operating mechanism and a cluster, for example, a sample support member operating mechanism for a vacuum apparatus and a cluster including an assembly of a plurality of vacuum chambers.

[0002]

2. Description of the Related Art Analyzing methods and analyzers such as X-ray photoelectron spectroscopy, Auger electron spectroscopy and scanning electron microscope are useful for chemically and physically useful surfaces and interfaces of semiconductors, magnetic materials and metallic materials. It has become an indispensable means in the field of electronics as a means of obtaining information.

Particularly recently, the composition and structure of the surface of a thin film,
Since there are many demands for analysis of electronic state, surface adsorption, trace impurities, etc., the above-mentioned analysis method and its equipment are actively used for development of new materials, management of manufacturing process and analysis of reliability of products and devices. Has been done. For such surface analysis, to prevent surface contamination, ultra high vacuum (vacuum degree: 10 ^-10 T
orr or less or 10 ^-8 Pa or less) is required.

In such an ultra-vacuum device, recently, a so-called cluster (that is, processing condition) has been provided by attaching a film forming function to obtain chemical / physical information during the film forming process and by attaching a plurality of analyzers. It has been attempted to obtain reliable surface information on materials and devices by constructing an assembly of a plurality of different vacuum chambers).

At this time, a sample operation system is required which can reliably transport the experimental sample from the chamber of the load lock (sample exchange chamber) or the film forming chamber to the correct position of the analysis chamber (main chamber). The approaches to the conventional commercially available sample handling mechanism can be classified into the following a, b, and c.

(A). FIG. 19 shows a sample stage 54 supporting the sample holder and an articulated fork 58 used for attaching and detaching the sample holder to and from the stage. FIG. 19 (a) shows an openable arm 58a. FIG. 3B is a perspective view of a fork 58 having the above, and FIG. 7B is a perspective view of the sample stage 54 having the sample supporting tray 53.

The sample 20A is set on a cylindrical sample holder 51 having two annular grooves 52A and 52B. The sample stage 54 includes a tray 53 (socket) having a cutout 53a that can be fitted into the groove 52A, and the sample holder 51 is supported by the tray 53 with the groove 52A fitted into the cutout 53a.

That is, the fork 58 is reciprocally connected to a drive portion (not shown) and is connected to the groove 52B of the sample holder 51.
The sample holder 51 is set on the tray 53 by moving forward with the arm 58a inserted thereinto, inserting the sample holder 51 into the cutout portion 53a of the tray 53, and fitting the sample holder 51 into the groove 52A. When the fork 58 is retracted as it is, the sample holder 51 is supported on the tray 53.

Next, in order to take out the sample holder 51 from the tray 53, after inserting the arm 58a of the fork 58 into the groove 52B and retracting the fork 58, the sample holder 51 is detached from the tray 53 while being supported by the fork 58. To do. This mechanism is used by Surface Science Instruments (USA).

(B) FIG. 20 (a) is a plan view of a drive rod 66 for driving a so-called wobble type fork 68 and a fork 68 attached to this rod, FIG. 20 (b).
FIG. 7 is an enlarged plan view of the fork 68.

In this mechanism, the fork 68 has a pair of arms.
Samples 69 and 69 are used, and a sample (not shown) is clamped by the arms 69 and 69 to transfer the sample. The tip end side of the drive rod 66 is surrounded by a bellows 67. This mechanism is used by Vacuum Generator and Sienta Instruments (both in the United States).

FIG. 21 (a) is a perspective view of the sample stage 74, FIG. 21 (b) is a plan view of the sample holder 71, and FIG. 21 (c) is a sectional view of the holder.

In this mechanism, the sample holder 71 is set in the sample stage 74, and the sample holder 71 is sandwiched by a pair of leaf springs 76, 76 provided on the inner periphery of the sample stage 74 and fixed to the sample stage 74. ing. The sample holder 71 is
It has a cylindrical shape, and an annular groove 71a is provided on the outer peripheral surface thereof. A fork 78 shown by a virtual line is inserted into the annular groove 71a,
The sample holder 71 is transferred.

With respect to the sample stage 74, the sample holder 71 is
It is transferred by a fork 78 and fixed by leaf springs 76, 76.

On the upper surface of the sample holder 71, a pair of linear leaf springs 72, 72 are provided at symmetrical positions so as to sandwich the sample 20B like an imaginary line. Leaf springs 72, 72
Are fixed by bolts 73, 73 in any direction so that the direction in the free state can be selected according to the size of the sample 20B.

In the sample exchange chamber, the sample holder 71 is a fork 78.
It is manually attached to and then introduced into the vacuum system. Next, the sample holder 71 is guided onto the sample stage 74, and the sample stage 74 moves up and is fixed to the socket constituted by the leaf springs 76, 76. Next, when the fork 78 is retracted, the fork spring (not shown) is loosened and the fork 78 is separated from the sample holder 71.

[0017]

In order to safely transfer the sample holder 51, in the mechanism (a) described above, a fork 58 is provided with a claw-shaped arm 58a which can be opened and closed, and which is configured as a joint mechanism. It is necessary to securely hold the holder 51.
Such a complicated structure increases the cost of the fork. Also, in general, the sample holder 51
Position in the vertical or near vertical direction, for example M
Sample 20 for film formation such as BE (Molecular Beam Epitaxy)
When A is attached downward (that is, the holder 51 is turned upside down), such attachment itself is impossible.

In the mechanism of B, the sample is physically sandwiched by the swing arms 69, 69 of the fork 68 and lifted to be placed on the analysis table. However, the movement is extremely awkward and the sample is vacuumed. May fall to the bottom of the room.

In the mechanism of C, if the fork spring is loosely tightened with respect to the sample holder 71, there is always a risk of dropping the sample. Further, the leaf springs 72, 72 cannot increase the force for holding the sample, and therefore cannot completely invert the sample downward.

Furthermore, what can be said in common with the above-mentioned mechanisms (a), (b) and (c) is that electrical connection for preventing electrostatic charge-up is impossible. Because between the arm and / or fork and the sample manipulating part (manipulator),
This is because the pin-socket connection cannot be easily performed. Therefore, the above-mentioned surface analysis cannot be sufficiently performed due to the static electricity accumulated in the sample holder.

The present invention has been made in view of the above circumstances, and has a simple structure, can easily hold and release the sample, can safely transfer the sample, and can turn the sample upside down. And a sample support member operating mechanism (in particular, a sample passing mechanism for an ultra-high vacuum device or an ultra-high vacuum surface analyzer) and a cluster composed of a plurality of vacuum chambers. Is intended to provide.

[0022]

That is, the present invention comprises a sample fixing part and a supporting part for supporting the sample fixing part,
A sample support member having a transfer means insertion groove, and a state in which the sample support member is supported by being inserted into the transfer means insertion groove,
Transferring means for transferring and / or rotating the sample supporting member by a predetermined angle, fixing means for detachably fixing the sample supporting member, and reciprocating movement of the transferring means with respect to the transferring means insertion groove. The present invention relates to a sample support member operating mechanism having locking means for respectively unlocking and locking the sample support member with respect to the fixing means in conjunction with the means.

The operating mechanism according to the present invention comprises a sample table and a stub for supporting the sample table, and a sample support member having transfer fork insertion grooves on the same side surface on opposite sides, and the transfer table. A fork for transporting the sample support member in a predetermined direction while being inserted into a fork insertion groove for supporting the sample support member, and a post for detachably fixing the stub, When the transfer fork is moved forward with respect to the transfer fork insertion groove, the stub is unlocked from the post in conjunction with the transfer fork inserted in the transfer fork insertion groove, and When the transfer fork is returned to the transfer fork insertion groove, the stub is removed when the transfer fork is removed from the transfer fork insertion groove. For a vacuum device having a lock lever provided on the stub so as to be locked with respect to the post and an elastic biasing means (for example, a torsion coil spring) for biasing the lock lever in the locking direction. It is desirable to be configured as a sample table operating mechanism of.

In the present invention, the sample supporting member is provided with a first terminal, and the fixing means (for example, the post) of the sample supporting member is provided with a second terminal connected to the first terminal, It is desirable in that the charge of the sample support member is discharged through the second terminal to sufficiently perform surface analysis and the like.

In the present invention, while the sample support member is locked by the fixing means (for example, a post), the elastic biasing means (for example, compression coil) for urging the sample support member in the direction of separating from the fixing means (for the post). It is desirable to provide a spring on at least one of the fixing means (for example, the post) and the sample support member.

The present invention further includes the sample support member operating mechanism (described in any one of claims 1 to 4),
Also provided is a cluster composed of an assembly of a plurality of vacuum chambers.

[0027]

EXAMPLES Examples of the present invention will be described below.

1 and 2 show a state in which a sample support member 1 having a stub 3 is supported by a post 9 and locked, FIG. 1 being a sectional view taken along the line II of FIG. 2, and FIG. II of 1
It is a II sectional view.

The sample support member 1 is composed of a platform 2 for supporting the sample 20 by, for example, attachment and a stub 3 integral with the platform, and a fitting portion 9a of a post 9 is fitted into a post fitting space 3c of the stub 3, Supported by post 9. Lock levers 5 and 5 are attached to the stub 3 so as to be swingable about swing centers 6 and 6. The post 9 is provided vertically upward or vertically downward in a vacuum chamber (not shown).

The lock levers 5 and 5 lock the sample support member 1 on the post 9 as follows. The tip ends of the torsion coil springs 7, 7 inserted into the recesses 3a provided in the upper portion of the stub 3 contact the contact surface 3b of the recess 3a and the contact surface 5a of the lock lever 5, respectively, and the torsion coil spring 7,
By the urging force of 7, the hook portions 5b, 5b at the tip of the lever
Is fitted into, for example, the small diameter portion 9c of the post 9 that is directed vertically upward, and thus the sample support member 1 is locked to the post 9.

A steel ball 11 biased upward by a compression coil spring 12 is inserted into a blind hole 9b provided in an upper portion of a fitting portion 9a of the post 9, and a ball provided on the stub 3 as a part of a spherical surface. The steel ball 11 contacts the receiving surface 3g, and the stub 3
(That is, the sample support member 1) is fixed to the post 9 without play. Reference numeral 10 in FIG. 1 is a lid for preventing the steel ball 11 from protruding from the blind hole 9b.

The sample support member 1 includes a platform 2
A pair of fork insertion grooves 4 and 4 are provided in the joint area between the stub 3 and the stub 3 so as to be located in the same plane. Figure 1
The fork 8 for transferring the sample is common in a state where it is not inserted into the fork insertion groove 4 and a state where it is inserted,
The fork 8 is shown in phantom in FIG. 1 and in solid in FIG.

As shown in FIG. 2, the pair of arms 8a, 8a of the fork 8 are formed as recesses on the opposing surfaces, and the first contact surfaces 8b, 8b for the lock lever 5 and the second contact on the back side are formed. For the time being, 8c and 8c are formed. In Figure 2,
The state where the first contact surfaces 8b, 8b of the fork 8 contact the lock levers 5, 5 and the sample support member 1 is locked to the post 9 is shown.

In FIGS. 3 and 4, the sample support member 1 has the post 9
4 shows a state in which the lock is released with respect to FIG.
III-III line sectional drawing, FIG. 4 is the IV-IV line sectional view of FIG.

In FIGS. 3 and 4, the fork 8 advances from the position of FIG. 2 as shown by the arrow A of FIG. 4, and the second contact surface 8c,
8c contacts the lock levers 5 and 5. Contact surface 8c-8
The distance between c is smaller than the distance between the contact surfaces 8b-8b. Therefore, in the state shown in FIG. 3, the respective upper end sides of the lock levers 5 and 5 are pushed inward by the contact surfaces 8c and 8c of the fork 8, and the torsion coil springs 7 and 7 are contracted against the biasing force. The lock levers 5 and 5 rotate around the swing centers 6 and 6 in opposite directions by a predetermined angle. As a result, the hook portions 5b, 5 on the lower end side of the lock levers 5, 5 are
b is opened as shown, disengaged from the small diameter portion 9c of the post 9 and unlocked.

To summarize the above-mentioned operation, first, in the locked state of FIGS. 1 and 2, the arm 8a of the fork 8 is
8a is inserted into the insertion groove 4 as shown by an imaginary line in FIG. 1, and is further advanced in the direction of arrow A as shown in FIG.
Rotate 5 to unlock from post 9. At this time, the steel ball 11 pushes the stub 3 upward by the restoring force of the spring 12 of the post 9, and as shown in FIG. 3, the height of the fork 8 remains constant and the hook portion 5b of the lever 5 locks. Back to the stub 3 and the fork 8
To come in contact with from below.

After releasing the lock, when the post 9 is lowered as shown by the arrow B in FIG. 3 to separate from the stub 3 (see FIG. 6), the lever 7 is moved by the spring force of the spring 7 as shown in FIG. The upper end of 5 is pressed tightly against the arm 8a of the fork 8 so that it can be strongly sandwiched between the spring 7 and the arm 8a.

Therefore, the sample supporting member 1 can be grasped by the fork 8 and conveyed to a predetermined position as it is (however, in the state of FIG. 5, the sample supporting member 1 is immediately lowered by its own weight to some extent). 2a around the platform 2
Hits the fork 8 so that the fork 8 does not come off from the groove 4). Moreover, since the clamping force is sufficient, the sample support member 1 can be turned upside down (that is, the sample 20 is turned downward) by rotating the fork 8 around its center line.

In this case, since the holding force is strong and the arm 8a of the fork 8 is locked in the groove 4 by the peripheral portions 2a and 3d of the platform 2 and the stub 3, the sample support by the fork 8 is carried out. The supporting state of the member 1 becomes good, and the sample supporting member 1 is not displaced vertically and does not drop.

As described above, according to the present example, both the unlocking and the locking of the sample support member 1 are performed by one-touch by the movement of the fork 8, so that the operating mechanism is very simple. Therefore, the sample can be held and transported reliably.

In this example, when transferring the sample, the locks shown in FIGS. 3 and 4 are released as described above, and then, as shown in FIG.
As shown in the side view, the post 9 descends to the state shown in the sectional view in FIG. In FIG. 6, the sample 20 is attached to the tray 19 and attached to the platform 2 via the tray 19, but the tray 19 is omitted in FIGS. 1, 3, and 5.

In the state shown in FIGS. 5 and 6, the fork 8 moves while holding the sample support member 1 and escapes from one vacuum chamber to place the sample support member 1 at a position facing the post in the other vacuum chamber. Position it. Then, the post can be lifted to obtain the same state as in FIG. 3, and the fork 8 can be further retracted to the position shown in FIG. 2 to obtain the locked state of FIGS. 1 and 2. When the fork 8 is further retracted, it is removed from the sample support member.

In FIG. 6, the fork insertion grooves 4, 4 (FIG. 1,
In FIGS. 3 and 5), the fork before being inserted is shown by an imaginary line. As shown in FIGS. 2 and 4, the fork 8 is formed with inclined surfaces 8d and 8d on the inner side surfaces of the arms 8a and 8a on the front end side so as to facilitate the insertion into the grooves 4 and 4.

Another important point of the mechanism according to the present example is that the stub 3 and the post 9 are provided with wiring for allowing static electricity generated in the sample 20 to escape to the ground circuit. This will be described with reference to FIGS. 7 and 9 to 11.

FIG. 7 is a sectional view taken along line VII-VII of FIG. 1, FIG. 8 is a side view of the sample support member 1 in the state of FIG. 1, and FIG. 9 is a sectional view of a state in which the post 9 descends and is separated from the stub 3. ,
FIG. 10 is a plan view of the post 9, and FIG. 11 is a front view of the post 9.

The post fitting space 3c and the post 9 have a regular octagonal cross section. As shown in FIG. 9, lead wires 14 and terminal pins 15 connected to the lead wires 14 are fixed by a filler 18 in a plurality of through holes 3e provided near the center of the upper portion of the stub 3.

The post 9 is also provided with a plurality of through holes 9e at positions facing the through holes 3e of the stub including the lid 10, and the socket 16 is fixed to the upper end of the through hole 9e by the filling material 18. The lead wire 17 connected to the socket 16 is led out of the post 9 through the through hole 9e and connected to a ground circuit (not shown).

The upper portion of the post 9 is fitted into the space 3c of the stub 3 so that the sample support member 1 is fixed to the post 9 as shown in FIG. The lines 14 and 17 are electrically connected. Although not shown in FIG. 9, a lead wire 17 connected to each socket 16
In addition to the ground circuit, a lead wire that is connected to a bias power supply, other power supply, etc. according to the purpose, or connected to a thermocouple for temperature measurement can expand the effectiveness and application range of the device. it can.

In this way, the stub 3 is fixed to the post 9, and at the same time, the sample 20 on the stub 3 is grounded via the platform 2, and further via the lead wire 14, the pin 15, the socket 16 and the lead wire 17. become. As a result,
The static electricity that tends to be accumulated in the sample 20 can be effectively released, and for example, the surface analysis measurement for the sample 20 can be performed well.

Next, a cluster composed of an assembly of a plurality of vacuum chambers into which a sample is loaded will be described. FIG. 12 shows a sample exchange chamber 31, a central distribution chamber for sending a sample to a predetermined vacuum chamber.
FIG. 33 is a schematic plan view showing the arrangement of 33, a sample processing chamber 41, and a sample analysis chamber 46.

The sample exchange chamber 31, the sample processing chamber 41 and the sample analysis chamber 46 are connected to the central distribution chamber 33 by the sample transfer chambers 22, 23 and 24, respectively. Sample exchange chamber 31, sample transfer chamber 22,
In the central distribution chamber 33, a fork 8A fixed to the tip of an arm 21A inserted through an arm cover 25A, a drive unit 26A.
It is housed so that it can reciprocate.

Sample processing chamber 41, sample transfer chamber 23, central distribution chamber
The fork 8B fixed to the tip of the arm 21B inserted through the arm cover 25B is housed in the 33 so that the fork 8B can be reciprocated and rotated by a predetermined angle (180 degrees in this example) by the drive unit 26B. This reciprocal motion and rotation is due to the magnetically coupled push-pull feedthrough.
h-pull feedthrough)
The same applies to 26A and the drive unit 26C described later).

Sample analysis chamber 46, sample transfer chamber 24, central distribution chamber
The fork 8C fixed to the tip of the arm 21C inserted through the arm cover 25C is housed in the 33 so as to be reciprocally moved by the drive unit 26C and rotatable by a predetermined angle (180 degrees in this example) if necessary.

In the central distribution chamber 33, there are provided, for example, two posts, 9B and 9C, which are similar to the above-mentioned posts 9. Both of these are mounted on a turntable (not shown) (which will be described later with reference to FIG. 16).
Each arm 21A, 21B, 21C is rotated in the forward and reverse directions.
It can be located on the extension line of. The turntable can also move up and down. In FIG. 12, one post 9B is in an empty state, and the other post 9C shows a state in which the sample support member 1 is fixed.

FIG. 13 is a front view of a concrete example of the sample exchange chamber 31. The sample exchange chamber 31 has a door 31a, and a post 9A similar to the above-mentioned post 9 is provided inside in an upward direction. Figure
13 shows a state in which the sample support member 1 to which the sample 20 is attached is supported and locked by the post 9A, and further supported and transported by the fork 8A (however, the door 31a is opened for easy understanding). ing. The door 31a is provided for taking out a sample which has been processed and analyzed, or for loading a new sample and setting it on the sample support member.

The sample exchange chamber 31 is connected to a vacuum pump 32 located therebelow, and the vacuum pump 32 is driven to create an ultrahigh vacuum in the cluster in FIG.

14 and 15 show a concrete example of the central distribution chamber 33. FIG. 14 is a plan view and FIG. 15 is a front view. Central distribution room 33
Has a circular chamber 34, and one connecting pipe 36 and seven connecting pipes 35 are connected to the chamber 34 radially at equal angular intervals in eight directions.

For example, the connection pipe 36 is connected to the sample transfer chamber 23 in the direction of the sample processing chamber 41, and the connection pipes 35, 35, 35 in the direction orthogonal to the extension line of the connection pipe 36 are in the direction of the sample exchange chamber 31, respectively. It is connected to the sample transfer chamber 22, the sample transfer chamber 24 in the direction of the sample analysis chamber 46, and the arm cover 25C.

The remaining connecting pipes 35, 35, 35, 35 in the oblique direction are provided as spares to have versatility so that they can be connected to vacuum chambers other than the above. The chamber 34 has a window 39 for observing the inside on the upper side, and connecting tubes 37, 37, 38 connected to other tubes are provided on the lower surface.

In the central distribution chamber 33, a turntable 40 shown in FIG.
Is provided. The turntable 40 is rotatable about a center 40a, and a plurality of post mounting holes or projections 40b are provided at six positions on the same circumference at equal intervals. Each of the posts fixed to the rotary table 40 by the holes or the projections 40b revolves around the center 40a by the rotation of the rotary table 40 and can be located at a predetermined position.

FIG. 17 is a schematic front view of the inside of the sample processing chamber. In this example, the sample is treated by performing the molecular beam irradiation MB on the sample 20 from the molecular beam irradiation gun 43 below the MBE (molecular beam crystal growth). Therefore, the sample processing room
A post 9D similar to the above-mentioned post 9 is provided in the inside of 41 via a support bar 42 vertically downward, and the sample 20 is set downward. In the figure, 44 and 45 are operation parts of a vertical and horizontal position adjusting mechanism (manipulator) of the post 9D.

In addition to the above MBE, the sample is processed by vapor deposition, sputtering, ion plating or other film forming process, by a sputter ion gun for surface cleaning other than film forming, and by cleaving the sample. Good to have

FIG. 18 is a schematic front view of the inside of the sample analysis chamber 46. A bracket 47 provided in the sample analysis chamber 46 is provided with a post 9E similar to the above-described post 9 vertically above. The sample 20 is analyzed by the analyzer 48 (XR in the figure indicates an X-ray for analysis, etc.).

The analysis instrument 48 is an ultrahigh vacuum analyzer, for example, X-ray photoelectron spectroscopy (XPS) analysis, vacuum ultraviolet photoelectron spectroscopy (UPS) analysis, Auger electron spectroscopy (AES) analysis, secondary ion mass (SIMS) analysis. And other analytical equipment, scanning tunneling microscope (STM), reflection high-energy electron diffraction (R
HEED) device, low-speed electron diffraction (LEED) device, electric field ion microscope (FIM), etc.

Thus, it becomes possible to analyze the chemical information at the interface, the electronic state, the crystal growth process, etc. by MBE, and obtain useful information about the surface and interface of the electronic material such as semiconductor. In the figure, 49 and 50 are operation parts of the horizontal and vertical position adjusting mechanism (manipulator) of the post 9E.

Next, the procedure of sample transfer in the cluster will be described.
This will be described with reference to FIGS.

First, the door 31a shown in FIG. 13 is opened to support the sample support member 1 on which the sample 20 is set on the post 9A in the sample exchange chamber 31, and the door 31a is closed (post 9 of the sample support member 1).
The support to A and the removal described later may be performed manually or automatically). Then, the vacuum pump 32 is driven to evacuate the inside of the cluster to an ultrahigh vacuum.

Next, the fork 8A is moved downward in FIG.
After moving to the left of 13 to support the sample support member 1 as described above and unlock the post 9A, the post 9A
Goes down. Then, the fork 8A further moves forward, and the sample support member 1 is supported and locked by the post 9B provided vertically above the central distribution chamber 33 as described above. Then, the fork 8A returns to the original position.

Next, the rotary table of the central distribution chamber 33 is rotated 180 degrees and positioned in the transfer chamber 23, and then the fork 8B is moved to the position shown in FIG.
The sample support member 1 on the post 9B is supported in the upward direction, the sample support member 1 on the post 9B is supported, the lock is released from the post 9B, the post 9B is further lowered, and then the fork 8B is returned.

The fork 8B rotates 180 degrees during the backward movement to turn the sample support member 1 upside down. The sample support member 1 turned upside down is supported by a post 9D provided vertically downward in the sample processing chamber 41 in an upside-down direction of FIGS. 1 and 3.
It is locked and a predetermined process (for example, MBE) is performed.

During this time, the fork 8B is further moved back and separated from the sample support member 1. Even if the fork 8B is turned upside down as described above, the fork 8B strongly holds the stub 3 and is inserted into the fork insertion groove (4 in FIG. 1).
Even if the sample support member 1 is turned upside down, the sample support member 1 does not come off and fall. Further, the locking operation for the post 9D may be similarly performed in the opposite direction (downward) to that described above.

When the processing is completed, the fork 8B is moved back again and turned upside down, and then the sample support member 1 is moved to the central distribution chamber.
It is handed over to the post in 33 and locked.
Next, the fork 8B moves back.

Then, the rotary table of the central distribution chamber 33 is rotated by 90 degrees, and the sample support member 1 thus delivered is moved to the transfer chamber 24.

Next, the fork 8C moves leftward in FIG. 12 to support the sample support member 1 supported by the post 9B, unlocks the post 9B, and disengages the post 9B. The fork 8C further moves forward.

By this forward movement, the sample support member 1 is loaded into the sample analysis chamber 46, and is further supported and locked by the post 9E provided vertically above in the analysis chamber. After that, the fork 8C is moved back and the sample is analyzed.

When the analysis is completed, the fork 8C again moves back into the analysis chamber 46 to support the sample support member 1 and the post 9C.
E is unlocked and descends. Next, the fork 8C supporting the sample support member 1 is returned, and the sample support member 1 is supported by the post waiting in the central distribution chamber 33 and locked. Next, the posts 9B and 9C are rotated 90 degrees, and the sample support member 1 is located at the position facing the fork 8A as before.

Next, when the fork 8A moves forward to support the sample support member 1, the post 9B is unlocked and descends. Next, the fork 8A returns to the sample exchange chamber 31,
The door 31a is opened and the sample support member 1 is taken out. Then, the next sample is set, another prepared sample support member 1 is set on the post 9A, and the state returns to the state of FIG.

In the central distribution chamber 33, the posts 9B, 9
Although C is provided, three such posts (or more) are provided so that the sample support member on which the next sample is set stands by in the central distribution chamber 33 during sample processing and / or sample analysis. good. In this case, the rotation angles of the posts 9B and 9C in the forward and reverse directions may be angles according to the number of them. In addition, during sample exchange in the sample exchange chamber 31,
If the inside of the cluster other than the sample exchange chamber 31 is kept at a high vacuum by a vacuum pump provided separately from the vacuum pump 32, the operating efficiency of the cluster can be increased.

Although the embodiments of the present invention have been described above, various modifications can be added to the above embodiments based on the technical idea of the present invention.

For example, the shapes of the stub 3, the post 9 and the like can be selected as appropriate. Although the post was fitted into the stub, this may be reversed, and the sample side may be made into a post shape, and this may be fitted into and fixed to the cylindrical fixing portion. Also, the lock lever 5
The shape may be an appropriate shape, and the number may be one pair or two or more to make the lock more reliable. The shape and arrangement of the groove 4 may be variously changed.

Further, in place of the torsion coil spring 7 and / or the compression coil spring 12, various kinds of springs or elastic biasing means other than springs can be adopted. Further, the compression coil spring or the elastic biasing means instead of the compression coil spring may be provided on either or both of the post 9 and the sample support member 1.

Further, it is also possible to provide a merry-go-round type sample stand on the cluster and perform processing and analysis in the process of orbiting the sample support member.

Furthermore, the orientation of the main surface of the sample 20 may be upward or downward, or may be oriented in any suitable direction such as a horizontal orientation by selecting the rotation angle of the fork.

[0084]

As described above, in the operating mechanism according to the present invention, the transfer means is inserted into the transfer means insertion groove of the sample support member, and when the transfer means reciprocates, the locking means is interlocked with the transfer means. Since the locking means is unlocked and locked with respect to the fixing means, the locking and unlocking can be performed with one touch by the interlocking, and the structure and operation thereof can be simplified. Further, the locking means ensures that the sample support member is fixed to the fixing means.

Further, since the transfer means is moved and / or rotated by a predetermined angle while the sample support member is supported by the insertion of the transfer means into the transfer means insertion groove, the transfer can be performed safely. At the same time, for example, it is possible to perform the processing such as MBE or vapor deposition with the main surface of the sample facing downward during the processing, and to face the sample upward during the analysis to facilitate the analysis, so that various kinds of processing can be dealt with. Even when the orientation is reversed, the sample support member is supported by the transfer means, so that it is possible to prevent an accident such as dropping.

Further, since the cluster having a plurality of vacuum chambers has the operation mechanism of the present invention, the sample can be processed and analyzed in these vacuum chambers, and the process and the analysis are the same. It is performed continuously in the cluster, and both the processing and analysis steps can be rapidly performed.

[Brief description of drawings]

FIG. 1 is a cross-sectional view (cross-sectional view taken along line I-I of FIG. 2) showing a state in which a sample support member is locked to a post in an example of the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a cross-sectional view (cross-sectional view taken along the line III-III in FIG. 4) showing a state where the lock between the sample support member and the post is released.

4 is a sectional view taken along line IV-IV in FIG.

FIG. 5 is a cross-sectional view of the sample support member with the post detached.

FIG. 6 is a side view showing a state in which the post is lowered and separated from the sample support member.

7 is a sectional view taken along line VII-VII of FIG.

FIG. 8 is a side view of the sample support member in the state of FIG.

FIG. 9 is a cross-sectional view showing a state where the post is lowered and separated from the sample support member.

FIG. 10 is a plan view of the same post.

FIG. 11 is a front view of the post.

FIG. 12 is a schematic plan view of the same cluster.

FIG. 13 is a front view of the sample exchange chamber.

FIG. 14 is a plan view of the central distribution chamber.

FIG. 15 is a front view of the central distribution chamber.

FIG. 16 is a plan view of a turntable in the central distribution chamber.

FIG. 17 is a schematic front view of the inside of the sample processing chamber.

FIG. 18 is a schematic front view of the inside of the sample analysis chamber.

19A and 19B show a sample support mechanism of a conventional example, FIG. 19A is a perspective view of a fork, FIG. 19B is a perspective view of a sample stage and an enlarged view of a part thereof.

FIG. 20 shows another fork of another conventional example, FIG. 20 (a) is a plan view of a fork drive rod and a fork attached thereto, and FIG. 20 (b) is an enlarged plan view of the fork.

21A and 21B show another conventional sample stage and sample holder, in which FIG. 21A is a perspective view of the sample stage, FIG. 21B is a plan view of the sample holder, and FIG. FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Sample support member 2 ... Platform 3 ... Stub 3a ... Spring insertion recess 3c ... Post insertion space 4 ... Fork insertion groove 5 ... Lock lever 5b ... Hook Part 6 ... Oscillation center 7 ... Torsional coil spring 8, 8A, 8B, 8C ... Fork 9, 9A, 9B, 9C, 9D, 9E ... Post 9a ... Fitting part 9b ...・ Blind hole 9c ・ ・ ・ Small diameter part (lock part) 11 ・ ・ ・ Steel ball 12 ・ ・ ・ Compression coil spring 14,17 ・ ・ ・ Lead wire 15 ・ ・ ・ Pin 16 ・ ・ ・ Socket 20 ・ ・ ・ Sample 21A , 21B, 21C ... Arms 22, 23, 24 ... Sample transfer chamber 26A, 26B, 26C ... Drive unit 31 ... Sample exchange chamber 32 ... Vacuum pump 33 ... Central distribution chamber 40・ ・ ・ Rotating table 41 ・ ・ ・ Sample processing chamber 42 ・ ・ ・ Support bar 43 ・ ・ ・ Molecular beam irradiation gun 46 ・ ・ ・ Sample analysis chamber 48 ・..Analytical instruments

Claims (5)

[Claims] 1. A sample support member comprising a sample fixing part and a support part for supporting the sample fixing part, and having a transfer means insertion groove, and a sample support member inserted into the transfer means insertion groove to support the sample support member. In this state, a transfer means for transferring the sample support member and / or rotating the sample support member by a predetermined angle, a fixing means for removably fixing the sample support member, and a reciprocating motion of the transfer means with respect to the transfer means insertion groove. A sample support member operating mechanism comprising: lock means for releasing and locking the sample support member with respect to the fixing means in conjunction with the transfer means. 2. A sample support member comprising a sample stage and a stub for supporting the sample stage and having transfer fork insertion grooves in the same plane on opposite side surfaces, and the transfer fork insertion groove. A transfer fork for transferring and / or rotating the sample support member in a predetermined direction in a state of being inserted and supporting the sample support member, a post for detachably fixing the stub, and the transfer fork insertion During the forward movement of the transfer fork with respect to the groove, the stub is unlocked from the post by interlocking with the transfer fork inserted into the transfer fork insertion groove, and the transfer fork is inserted. When the transfer fork is returned to the groove, the stub is locked to the post when the transfer fork is removed from the transfer fork insertion groove. The sample stage operating mechanism for a vacuum device, comprising a lock lever provided on the stub so as to be in a closed state, and an elastic biasing means for biasing the lock lever in the locking direction. The operating mechanism described in. 3. The sample support member is provided with a first terminal,
The operation mechanism according to claim 1, wherein the fixing means of the sample support member is provided with a second terminal connected to the first terminal. 4. An elastic urging means for urging the sample support member in a direction to separate from the fixing means in a state where the sample support member is locked to the fixing means, is provided with a fixing means and a sample support member. Provided on at least one,
The operation mechanism according to claim 1. 5. A cluster comprising an assembly of a plurality of vacuum chambers, the cluster having the sample support member operating mechanism according to claim 1. Description: