JPH0617298Y2 - ウエハカウンタ - Google Patents

ウエハカウンタ

Info

Publication number
JPH0617298Y2
JPH0617298Y2 JP20022687U JP20022687U JPH0617298Y2 JP H0617298 Y2 JPH0617298 Y2 JP H0617298Y2 JP 20022687 U JP20022687 U JP 20022687U JP 20022687 U JP20022687 U JP 20022687U JP H0617298 Y2 JPH0617298 Y2 JP H0617298Y2
Authority
JP
Japan
Prior art keywords
wafer
plate
detection plate
guide
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20022687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01104725U (enrdf_load_stackoverflow
Inventor
章三 伊藤
譲 佐々原
伸 中巻
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP20022687U priority Critical patent/JPH0617298Y2/ja
Publication of JPH01104725U publication Critical patent/JPH01104725U/ja
Application granted granted Critical
Publication of JPH0617298Y2 publication Critical patent/JPH0617298Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP20022687U 1987-12-29 1987-12-29 ウエハカウンタ Expired - Lifetime JPH0617298Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20022687U JPH0617298Y2 (ja) 1987-12-29 1987-12-29 ウエハカウンタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20022687U JPH0617298Y2 (ja) 1987-12-29 1987-12-29 ウエハカウンタ

Publications (2)

Publication Number Publication Date
JPH01104725U JPH01104725U (enrdf_load_stackoverflow) 1989-07-14
JPH0617298Y2 true JPH0617298Y2 (ja) 1994-05-02

Family

ID=31490645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20022687U Expired - Lifetime JPH0617298Y2 (ja) 1987-12-29 1987-12-29 ウエハカウンタ

Country Status (1)

Country Link
JP (1) JPH0617298Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01104725U (enrdf_load_stackoverflow) 1989-07-14

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