JPH0617298Y2 - ウエハカウンタ - Google Patents
ウエハカウンタInfo
- Publication number
- JPH0617298Y2 JPH0617298Y2 JP20022687U JP20022687U JPH0617298Y2 JP H0617298 Y2 JPH0617298 Y2 JP H0617298Y2 JP 20022687 U JP20022687 U JP 20022687U JP 20022687 U JP20022687 U JP 20022687U JP H0617298 Y2 JPH0617298 Y2 JP H0617298Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- plate
- detection plate
- guide
- switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 35
- 230000001105 regulatory effect Effects 0.000 claims description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 64
- 238000004140 cleaning Methods 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20022687U JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20022687U JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01104725U JPH01104725U (enrdf_load_stackoverflow) | 1989-07-14 |
JPH0617298Y2 true JPH0617298Y2 (ja) | 1994-05-02 |
Family
ID=31490645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20022687U Expired - Lifetime JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0617298Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-12-29 JP JP20022687U patent/JPH0617298Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01104725U (enrdf_load_stackoverflow) | 1989-07-14 |
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