JPH0617231A - Light transmissive window having hard film and its production - Google Patents
Light transmissive window having hard film and its productionInfo
- Publication number
- JPH0617231A JPH0617231A JP17307492A JP17307492A JPH0617231A JP H0617231 A JPH0617231 A JP H0617231A JP 17307492 A JP17307492 A JP 17307492A JP 17307492 A JP17307492 A JP 17307492A JP H0617231 A JPH0617231 A JP H0617231A
- Authority
- JP
- Japan
- Prior art keywords
- film
- glass
- light
- window
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、腕時計やＥＰ−ＲＯＭ
などに用いられる透光窓に関するものである。BACKGROUND OF THE INVENTION The present invention relates to a wristwatch and EP-ROM.
The present invention relates to a translucent window used for such purposes.
【０００２】[0002]
【従来の技術】従来から、腕時計には文字盤を覆うため
の透光窓が備えられている。例えば図２に概略断面図を
示すように、時計枠２を覆うように透光窓１が備えら
れ、時計枠２と接着剤３によって接合するようになって
いる（実開昭６３−１６７２９２号公報等参照）。この
時計用の透光窓１の材質としては、アクリル樹脂、ソー
ダ石灰ガラス、硼珪酸ガラスなどの樹脂やガラスが一般
的に用いられているが、高級な腕時計には、より耐摩耗
性に優れた単結晶サファイアも用いられている。2. Description of the Related Art Conventionally, a wristwatch has a translucent window for covering a dial. For example, as shown in the schematic cross-sectional view of FIG. 2, a light-transmitting window 1 is provided so as to cover the timepiece frame 2, and the timepiece frame 2 and the adhesive 3 are joined together (Japanese Utility Model Publication No. 63-167292). (See gazette, etc.). As the material of the light transmitting window 1 for the timepiece, resins such as acrylic resin, soda lime glass, borosilicate glass, and glass are generally used. Single crystal sapphire is also used.
【０００３】一方、ＥＰ−ＲＯＭやＣＣＤ素子収納用パ
ッケージなどにも透光窓が備えられている。例えば、Ｅ
Ｐ−ＲＯＭパッケージの断面図を図３に示すように、セ
ラミック製のキャップ５とベース６からなり、キャップ
５に透光窓１を備え、ベース６には半導体素子を収納す
るためのキャビティ部６ａを備えている。そして、この
キャビティ部６ａに備えた半導体素子に、上記透光窓１
から紫外線などの光を照射することでメモリーの消去を
行うようになっている。この透光窓１の材質は、通常ガ
ラスが用いられるが、より強度を高め、セラミックスと
熱膨張率を一致させるために単結晶サファイアも用いら
れている（特公昭５７−４１１０２号公報等参照）。On the other hand, a translucent window is also provided in an EP-ROM, a package for accommodating CCD elements and the like. For example, E
As shown in FIG. 3, which is a sectional view of the P-ROM package, a ceramic cap 5 and a base 6 are provided, the cap 5 is provided with a light-transmitting window 1, and the base 6 has a cavity portion 6a for accommodating semiconductor elements. Is equipped with. Then, the light-transmitting window 1 is added to the semiconductor element provided in the cavity portion 6a.
The memory is erased by irradiating it with light such as ultraviolet rays. Although glass is usually used as the material of the translucent window 1, single crystal sapphire is also used in order to increase the strength and match the coefficient of thermal expansion with that of ceramics (see Japanese Patent Publication No. 57-41102). .
【０００４】さらに、図示していないが、ＰＯＳ装置の
バーコード読み取り用の透光窓や投影機用載物台にも、
単結晶サファイアが用いられている（実開昭６０−５９
２４４号公報等参照）。Further, although not shown, a transparent window for reading a bar code of a POS device or a stage for a projector,
Single crystal sapphire is used (Shokaisho 60-59)
244, etc.).
【０００５】[0005]
【発明が解決しようとする課題】ところが、上記樹脂や
ガラスからなる透光窓は、硬度がせいぜいビッカース硬
度１０００ｋｇ／ｍｍ2 程度と低いため、耐摩耗性が低
く、簡単に傷が入りやすいという問題点があった。その
ため、製造工程や使用中に傷が入りやすく透光性が悪く
なってしまうという不都合があった。However, the translucent window made of the above resin or glass has a low Vickers hardness of 1000 kg / mm 2 at the most, so that it has low wear resistance and is easily scratched. There was a point. Therefore, there is a problem in that the light-transmitting property is deteriorated because the scratches are likely to occur during the manufacturing process and during use.
【０００６】一方、単結晶サファイアからなる透光窓
は、硬度が高く傷がつきにくいという特徴を持っている
ものの、単結晶体であるから製造が容易ではなく、しか
も所定形状に加工することが困難であり、製造コストが
高いという問題点があった。On the other hand, the light-transmissive window made of single crystal sapphire has a feature that it is hard and is not easily scratched, but since it is a single crystal, it is not easy to manufacture and it can be processed into a predetermined shape. It is difficult and the manufacturing cost is high.
【０００７】[0007]
【課題を解決するための手段】上記に鑑みて本発明は、
ガラスからなる本体の表面に厚みが０．５〜３．０μｍ
の透光性をもったＡｌ2 Ｏ3 膜を形成して透光窓を構成
したものである。In view of the above, the present invention provides:
The thickness of the body of glass is 0.5-3.0 μm
The Al 2 O 3 film having a light-transmitting property is formed to form a light-transmitting window.
【０００８】[0008]
【作用】本発明によれば、透光窓の表面にＡｌ2 Ｏ3 膜
を形成したため、表面の硬度を高くして傷を付けにくく
できるとともに、本体がガラスであるから製造が容易で
低コストとできる。According to the present invention, since the Al 2 O 3 film is formed on the surface of the light-transmitting window, the hardness of the surface can be increased to prevent scratches, and since the main body is glass, the manufacturing is easy and the cost is low. Can be
【０００９】[0009]
【実施例】以下、本発明の実施例を説明する。EXAMPLES Examples of the present invention will be described below.
【００１０】図１に断面図を示すように、本発明の透光
窓１は、ソーダ石灰ガラスや硼珪酸ガラスなどのガラス
からなる本体１２の表面にＡｌ2 Ｏ3 膜１１を形成して
なるものである。そして、この透光窓１は、表面が硬度
の高いＡｌ2 Ｏ3 膜１１からなるため、傷が付きにく
く、また本体１２はガラスからなるため、加工が容易で
製造コストを低くできる。なお、この透光窓１におい
て、Ａｌ2 Ｏ3 膜１１は本体１２のすべての表面に形成
する必要はなく、耐摩耗性を必要とする表面にのみ形成
すればよい。As shown in the sectional view of FIG. 1, the transparent window 1 of the present invention comprises an Al 2 O 3 film 11 formed on the surface of a main body 12 made of glass such as soda lime glass or borosilicate glass. It is a thing. The light-transmissive window 1 is hard to be scratched because the surface is made of the Al 2 O 3 film 11 having high hardness, and the main body 12 is made of glass, so that it is easy to process and the manufacturing cost can be reduced. In the transparent window 1, the Al 2 O 3 film 11 does not have to be formed on all the surfaces of the main body 12, and may be formed only on the surface requiring abrasion resistance.
【００１１】このような本発明の透光窓１の使用例は以
下の通りである。An example of the use of such a transparent window 1 of the present invention is as follows.
【００１２】まず、図２に腕時計の概略断面図を示すよ
うに、時計枠２を覆うように、本発明の透光窓１が接着
剤３で接合されている。このようにして得られた腕時計
は使用中に透光窓１に傷が付きにくく、長期間優れた透
光性を保ち良好に使用することができる。First, as shown in the schematic sectional view of the wristwatch in FIG. 2, the transparent window 1 of the present invention is bonded with an adhesive 3 so as to cover the timepiece frame 2. The wristwatch obtained in this manner is less likely to be scratched by the transparent window 1 during use, and can be used favorably for a long period of time while maintaining excellent translucency.
【００１３】また、図３にＥＰ−ＲＯＭパッケージの断
面図を示すように、セラミック製のキャップ５とベース
６からなり、上記キャップ５に本発明の透光窓１を接着
することでＥＰ−ＲＯＭパッケージを構成している。さ
らに、図示していないが、ＰＯＳ用のバーコード読み取
り窓など、本発明の透光窓１はさまざまな用途に用いる
ことができる。Further, as shown in the sectional view of the EP-ROM package in FIG. 3, the EP-ROM comprises a ceramic cap 5 and a base 6, and the translucent window 1 of the present invention is bonded to the cap 5. Make up the package. Further, although not shown, the translucent window 1 of the present invention can be used for various purposes such as a bar code reading window for POS.
【００１４】なお、図１に示す本発明の透光窓１におい
て、Ａｌ2 Ｏ3 膜１１の厚みｔは０．５〜３．０μｍの
範囲内としたものが良いが、これは厚みｔが３．０μｍ
を超えるとＡｌ2 Ｏ3 膜１１に黒ずみが出たり、透光性
が悪くなってしまい、一方厚みｔが０．５μｍより小さ
いとＡｌ2 Ｏ3 膜１１に干渉ジマが生じやすくなってし
まうためである。そして、厚みｔが０．５〜３．０μｍ
のＡｌ2 Ｏ3 膜１１を形成した透光窓１は直線透過率が
８０％以上となり、時計等に用いるには充分な透光性を
示している。In the transparent window 1 of the present invention shown in FIG. 1, the thickness t of the Al 2 O 3 film 11 is preferably in the range of 0.5 to 3.0 μm. 3.0 μm
When the thickness t exceeds 0.5, darkness appears in the Al 2 O 3 film 11 or the light-transmitting property deteriorates, while when the thickness t is less than 0.5 μm, interference bleeding is likely to occur in the Al 2 O 3 film 11. Is. And, the thickness t is 0.5 to 3.0 μm.
The light transmissive window 1 having the Al 2 O 3 film 11 has a linear transmittance of 80% or more, which shows sufficient light transmissivity for use in a timepiece or the like.
【００１５】また、上記Ａｌ2 Ｏ3 膜１１を備えた透光
窓１の製造方法は、ガラスからなる本体を所定形状に加
工した後、プラズマＣＶＤ法やイオンプレーティング法
などによって、その表面に厚みｔが０．５〜３．０μｍ
となるようにＡｌ2 Ｏ3 膜１１を被着すれ良いが、膜付
け時の温度は２００〜５００℃の範囲内としたものが良
い。これは、膜付け時の温度が２００℃よりも低いとＡ
ｌ2 Ｏ3 膜１１の接合強度が低く、簡単に剥離してしま
うためであり、一方膜付け時の温度が５００℃よりも高
いと本体１２を成すガラス自体が強度劣化したり、変形
を生じるためである。さらに、よりＡｌ2 Ｏ3 膜１１の
接合強度を高くするためには、イオンプレーティング法
で、４００〜５００℃で膜付けした後、再度Ａｒ雰囲気
中で膜付け時と同程度の温度で熱処理すれば良い。Further, in the method of manufacturing the translucent window 1 provided with the Al 2 O 3 film 11, the main body made of glass is processed into a predetermined shape, and then the surface thereof is subjected to plasma CVD or ion plating. Thickness t is 0.5 to 3.0 μm
The Al 2 O 3 film 11 may be adhered so that the temperature becomes as follows, but the temperature at the time of applying the film is preferably in the range of 200 to 500 ° C. This is A when the temperature at the time of film attachment is lower than 200 ° C.
This is because the l 2 O 3 film 11 has a low bonding strength and is easily peeled off. On the other hand, if the temperature at which the film is attached is higher than 500 ° C., the glass itself forming the main body 12 is deteriorated in strength or deformed. This is because. Furthermore, in order to further increase the bonding strength of the Al 2 O 3 film 11, the film is applied by an ion plating method at 400 to 500 ° C., and then a heat treatment is performed again in an Ar atmosphere at the same temperature as the film application. Just do it.
【００１６】実験例１ 図１に示す本発明の透光窓１として、時計用のものを試
作した。本体１２を硼珪酸ガラスにより直径３０ｍｍ、
厚み１ｍｍの円盤状とし、この片側表面のみにＡｌ2 Ｏ
3 膜１１を形成した。Ａｌ2 Ｏ3 膜１１の形成方法は、
表１に示すようにプラズマＣＶＤ法またはイオンプレー
ティング法（ＩＰ）とし、処理温度、膜の厚みｔを種々
に変化させた。 Experimental Example 1 As a transparent window 1 of the present invention shown in FIG. The body 12 is made of borosilicate glass and has a diameter of 30 mm,
A disk with a thickness of 1 mm was formed, and Al 2 O was formed only on the surface on one side.
3 The film 11 was formed. The method for forming the Al 2 O 3 film 11 is as follows.
As shown in Table 1, the plasma CVD method or the ion plating method (IP) was used, and the processing temperature and the film thickness t were variously changed.
【００１７】得られた透光窓１について、波長６００ｎ
ｍの光の直線透過率、膜付け後の状態、実装評価後の表
面状態を調べた。なお、実装評価とは、一般的な時計の
評価テストのうち、透光窓１の表面にサンドブラストに
よる粒子噴射テストを行った後の傷の発生状況を調べた
ものである。そして、これらの結果を総合して評価を行
った。結果は表１に示す通りである。With respect to the obtained transparent window 1, a wavelength of 600n
The linear transmittance of m light, the state after the film was attached, and the surface state after the mounting evaluation were examined. The mounting evaluation is a check of the occurrence of scratches on the surface of the light-transmissive window 1 after a particle injection test by sandblasting, which is one of the evaluation tests of general watches. Then, these results were comprehensively evaluated. The results are shown in Table 1.
【００１８】[0018]
【表１】 [Table 1]
【００１９】この結果より、比較例であるＡｌ2 Ｏ3 膜
１１を形成しないもの（Ｎｏ．１３）に比べて、Ａｌ2
Ｏ3 膜１１を形成した本発明実施例は傷が付きにくく、
また充分な直線透過率を示すことがわかる。特に、Ａｌ
2 Ｏ3 膜１１の厚みを０．５〜３．０μｍとし、膜付け
温度を２００〜５００℃としたもの（Ｎｏ．２〜４、
７、９〜１２）は、いずれも直線透過率が８４％以上と
充分に高く、しかも実装評価後の傷がほとんど付いてい
ないなど、優れた結果を示した。From these results, as compared with the comparative example in which the Al 2 O 3 film 11 is not formed (No. 13), Al 2
The embodiment of the present invention in which the O 3 film 11 is formed is hard to be scratched,
It can also be seen that it exhibits a sufficient linear transmittance. In particular, Al
The thickness of the 2 O 3 film 11 is 0.5 to 3.0 μm, and the film deposition temperature is 200 to 500 ° C. (No. 2 to 4,
Nos. 7, 9 to 12) all showed excellent results such that the linear transmittance was 84% or more, which was sufficiently high, and there were almost no scratches after mounting evaluation.
【００２０】実験例２ 次に、上記と同様にして、Ａｌ2 Ｏ3 膜１１の接合強度
をより厳しい試験で測定した。表２に示すようにさまざ
まな条件で膜付けを行った透光窓１について、Ａｌ2 Ｏ
3 膜１１をダイヤモンド圧子で引っ掻き、剥離が生じる
までの接合強度を測定した。結果は表２に示す通りであ
る。 Experimental Example 2 Next, the bonding strength of the Al 2 O 3 film 11 was measured by a more severe test in the same manner as described above. As shown in Table 2, with respect to the translucent window 1 which was film-formed under various conditions, Al 2 O
3 The film 11 was scratched with a diamond indenter, and the bonding strength until peeling was measured. The results are shown in Table 2.
【００２１】[0021]
【表２】 [Table 2]
【００２２】この結果より明らかに、ＣＶＤ法によるも
の（Ｎｏ．１６）や、イオンプレーティング法でも温度
が３００℃と低いもの（Ｎｏ．１４，１５）では接合強
度が低かった。これに対し、イオンプレーティング法で
温度を４５０℃と高くしたものは膜の接合強度が高く、
中でもＡｒ雰囲気中で再度熱処理したもの（Ｎｏ．１
７）は、最も優れた接合強度を示した。From this result, it is apparent that the bonding strength was low in the CVD method (No. 16) and the ion plating method in which the temperature was as low as 300 ° C. (Nos. 14 and 15). On the other hand, when the temperature is increased to 450 ° C by the ion plating method, the bonding strength of the film is high,
Among them, those heat-treated again in Ar atmosphere (No. 1
7) showed the best bonding strength.
【００２３】なお、上記Ｎｏ．１４〜１８の実施例は、
いずれも通常の時計などとして使用するには問題ない程
度の接合強度を有している。そして、特に厳しい環境で
使用するような場合は、Ａｌ2 Ｏ3 膜付け方法として上
記のように、イオンプレーティング法を用い、４００〜
５００℃で膜付けした後、再度Ａｒ雰囲気中で膜付け時
と同程度の温度で熱処理したものが良いことがわかる。The above No. Examples 14-18 are:
Both have sufficient joint strength to be used as ordinary watches. And, when it is used in a particularly harsh environment, the ion plating method is used as the Al 2 O 3 film forming method as described above.
It can be seen that it is preferable that the film is applied at 500 ° C. and then heat-treated again in the Ar atmosphere at the same temperature as the film application.
【００２４】[0024]
【発明の効果】このように本発明によれば、ガラスから
なる本体の表面に厚み０．５〜３．０μｍのＡｌ2 Ｏ3
膜を形成して透光窓を構成したことによって、表面が硬
度の高いＡｌ2 Ｏ3 膜からなるため傷が付きにくく、し
かも本体はガラスであるから加工が容易で低コストとす
ることができ、透光性を高くすることができる。そのた
め、時計、半導体パッケージ、ＰＯＳ装置などのさまざ
まな分野に好適な透光窓を提供することができる。As described above, according to the present invention, Al 2 O 3 having a thickness of 0.5 to 3.0 μm is formed on the surface of the body made of glass.
By forming the film to form the light-transmitting window, the surface is made of an Al 2 O 3 film having high hardness, so that it is not easily scratched, and since the main body is glass, it can be easily processed at low cost. It is possible to increase the translucency. Therefore, it is possible to provide a transparent window suitable for various fields such as a timepiece, a semiconductor package, and a POS device.
【図１】本発明の硬質膜を備えた透光窓を示す断面図で
ある。FIG. 1 is a sectional view showing a translucent window provided with a hard film of the present invention.
【図２】透光窓を用いた腕時計を示す概略断面図であ
る。FIG. 2 is a schematic cross-sectional view showing a wristwatch using a transparent window.
【図３】透光窓を用いたＥＰ−ＲＯＭパッケージを示す
断面図である。FIG. 3 is a cross-sectional view showing an EP-ROM package using a transparent window.
１・・・透光窓 １１・・Ａｌ2 Ｏ3 膜 １２・・本体 ２・・・時計枠 ３・・・接着剤1 ... Translucent window 11 ... Al 2 O 3 film 12 ... Main body 2 ... Watch frame 3 ... Adhesive
Claims (2)
５〜３．０μｍの透光性をもったＡｌ2 Ｏ3 膜を形成し
たことを特徴とする硬質膜を有する透光窓。1. The surface of a body made of glass has a thickness of 0.
A light-transmitting window having a hard film formed by forming an Al 2 O 3 film having a light-transmitting property of 5 to 3.0 μm.
後、その表面に、ＣＶＤ法またはイオンプレーティング
法により、２００〜５００℃の温度で、厚みが０．５〜
３．０μｍのＡｌ2 Ｏ3 膜を被着する工程からなる硬質
膜を有する透光窓の製造方法。2. A glass main body is processed into a predetermined shape, and the surface thereof is subjected to a CVD method or an ion plating method at a temperature of 200 to 500 ° C. and a thickness of 0.5 to
A method for manufacturing a light-transmitting window having a hard film, which comprises a step of depositing an Al 2 O 3 film having a thickness of 3.0 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17307492A JPH0617231A (en) | 1992-06-30 | 1992-06-30 | Light transmissive window having hard film and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17307492A JPH0617231A (en) | 1992-06-30 | 1992-06-30 | Light transmissive window having hard film and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0617231A true JPH0617231A (en) | 1994-01-25 |
Family
ID=15953728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17307492A Pending JPH0617231A (en) | 1992-06-30 | 1992-06-30 | Light transmissive window having hard film and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617231A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006028749A1 (en) * | 2006-06-20 | 2007-12-27 | Universität Bielefeld | Production of a transparent aluminum oxide protective layer on a glass substrate for household glassware comprises feeding aluminum-containing precursor compounds into a coating chamber containing a glass substrate and further processing |
| US7407606B2 (en) | 2003-07-23 | 2008-08-05 | Ishihara Sangyo Kaisha, Ltd. | Electroconductive powder and method for production thereof |
| US7514124B2 (en) | 2003-07-23 | 2009-04-07 | Kansai Paint Co., Ltd. | White electrically conductive primer composition and method for forming multilayer coating film |
-
1992
- 1992-06-30 JP JP17307492A patent/JPH0617231A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7407606B2 (en) | 2003-07-23 | 2008-08-05 | Ishihara Sangyo Kaisha, Ltd. | Electroconductive powder and method for production thereof |
| US7514124B2 (en) | 2003-07-23 | 2009-04-07 | Kansai Paint Co., Ltd. | White electrically conductive primer composition and method for forming multilayer coating film |
| DE102006028749A1 (en) * | 2006-06-20 | 2007-12-27 | Universität Bielefeld | Production of a transparent aluminum oxide protective layer on a glass substrate for household glassware comprises feeding aluminum-containing precursor compounds into a coating chamber containing a glass substrate and further processing |
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