JPH06168247A - Processing function expressing method for production process resource - Google Patents

Abstract

PURPOSE:To provide the processing function expressing method for production process resources to flexibly express the work processing function of production process resources required for providing a performance evaluation system flexible and rich in versatility to quantatively evaluate and analyze the performance of various production process lines. CONSTITUTION:A work W put in order and accumulated inside a buffer Bi part is selected, the parts size of the work is compared with a processing parts size to be simultaneously processed by the server of a main processing part P2i, main processing parts are generated at a preprocessing part P1i by simultaneously dividing the work within the range of the processing parts size, the respective main processing parts are successively processed by the server of the main processing part P2i, all the processed parts of this processed work are collected and simultaneously restored to the work, and the respective transition destinations of next processing, abandonment and re-processing are designated.

Description

Detailed Description of the Invention

[0001]

The present invention relates to various production resources (equipment).
The production process of the production equipment in the line performance evaluation system that quantitatively evaluates and analyzes the production amount of the production line, the line performance such as lead time, the operating rate of each production equipment, the status of work in progress, etc. The present invention relates to a method of expressing the processing function of a production process resource for modeling the processing function of the same.

[0002]

2. Description of the Related Art Conventionally, the processing function of the production resources (equipment) used in the production line is one. FIG. 4 shows an example thereof.

The production process resource Ei in the conventional model shown in FIG. 4 includes a buffer Bi for holding a work waiting to be processed, a work processing unit Pi, and a destination of the work which has been processed according to a predetermined process table. It is represented by a relatively simple model such that it is composed of the transition destination determination unit J that determines.

[0004]

Since the conventional model has a relatively simple structure as described above, for example,
There is a problem that it cannot be applied when there are multiple processing units (servers) in the work processing unit, such as a device with a multi-chamber structure such as in semiconductor manufacturing equipment, which can perform etching and film formation in each chamber. It was Further, the conventional model is premised on processing on a lot-by-lot basis, and in the case of equipment with different numbers of sheets to be processed, equipment that has a pre-processing unit such as processing a part of a lot together or processing in a divided manner is handled. However, it is very difficult to optimize the operation of the device by using these functions.

The present invention has been made in view of the above,
The purpose of this is a production process resource that can flexibly express the work processing function of the production process resource necessary to realize a flexible and versatile performance evaluation system that quantitatively evaluates and analyzes the performance of various production process lines. It is to provide a processing function expression method of.

[0006]

In order to achieve the above object, a method for expressing a processing function of a production process resource according to the present invention is
A method of expressing a processing function of a production process resource such as a manufacturing device used in a production process, which defines a processing order of a workpiece which is an object to be processed by the production process resource. The maximum processing that can be processed at one time by the server which is the processing part of the processing part and the part size of the work by selecting a single or a plurality of works in the buffer part Each of the main processing parts is sequentially compared with a pre-processing unit that compares a unit processing part size and generates a main processing part that is a processing part obtained by collectively dividing the work within the range of the processing part size. The main processing unit composed of a single or continuous plural independent servers to be processed and all the processing parts of the work processed by the main processing unit are collected and And a post-processing unit that specifies the transition destinations of the next process, disposal, and re-processing for the work, and the pre-processing unit, the post-processing unit, and the main processing unit. The point is to specify the processing time for each server.

[0007]

In the method of expressing the processing function of the production process resource according to the present invention, the work that is aligned and accumulated in the buffer unit is selected, and the part size of the work and the processing part size that can be processed at one time by the server of the main processing unit are selected. By comparison, the pre-processing unit generates main processing parts obtained by collectively dividing the work within the range of the processing part size, and sequentially processing each of the main processing parts by the parts of the main processing unit. All the processed parts of the work are collected and collectively restored to the work, and the transition destinations of the next process, disposal, and reprocessing are designated.

[0008]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing a production process processing function model for implementing a processing function expressing method of a production process resource according to an embodiment of the present invention. This model is used for each production process resource Ei of a production process line. A buffer portion Bi for arranging and accumulating the workpieces Wi to be processed according to a certain standard that defines the processing sequence, a single or a plurality of workpieces Wi in the buffer Bi, and a part size Ps of the workpiece and a succeeding book. The maximum processing unit Os (processing part size) of the processing section of the processing section P2i is compared, and a processing part (main processing part) w obtained by dividing the work Wi within the range of the processing part size Os is collectively generated. The pre-processing portion P1i and a plurality of independent processing units (servers) Sin (n = 1 to 1) in which the processing parts are single or continuous.
k), the main processing part P2i for sequentially processing the main processing part w and all the main processing parts of the work Wi processed by the main processing part P2i are collected and collectively restored to the work Wi. The work is composed of a post-processing portion P3i for designating each transition destination of the next process, disposal, and reprocessing for the work.

The buffer of the above model is a buffer that is virtually provided to collect statistical information such as the amount of work such as materials and parts that try to occupy the resource, the waiting time, and the like. This means a work for manually or automatically loading a work transferred from a resource into the resource and supplying a processing part obtained by dividing the work into an appropriate size to the main processing section. This processing means the preprocessing section P1i. It means an operation or work for performing processing such as processing, assembling, etc., specified for the processing part supplied from. The post-processing includes a step of collecting and inspecting the work that has undergone the main processing, allocating the work to the next work, deciding the resource, preparatory work for transferring the work to these transition destinations, and the like. Further, in the model of the present embodiment, by specifying the processing time as a parameter to each server of the pre-processing unit P1i, the post-processing unit P3i, and the main processing unit P2i, a plurality of types of processing conditions ( Recipe) can be defined and registered.

Next, the function of the model of the embodiment shown in FIG. 1 will be described. FIG. 2 is an explanatory diagram for explaining an example of a work processing process using the production process processing function model of the embodiment of FIG. The work Wn that has arrived at the production process resource Ei enters the buffer Bi, and the work priorities of the works are compared with the other works W1, Wm, ... It In the case of the same figure, the work Wn that has just arrived is the highest priority processing work, and the order is W1, Wm, Wo, .... Further, in the production process resource Ei, as shown in FIG. 2A, a work Wk (the number of parts is 50) having a different recipe from the works Wn and W1 is processed, and the main processing unit P2.
i (Number of servers = 5, 1 server main processing part size Os
= 10) in the second server S2, the final main processing part w
ke (10) is processed, and other main processing parts wkd, w
kc, wkb, wka are the third, fourth and fifth servers S, respectively
3, S4, S5 and the post-processing section P3i. After a certain time has passed, all the processing parts of the work Wk are processed by the post-processing section P3i.
After entering, it is restored to the original work, the transition destination is designated as the process resource of the next process, and is discharged from the resource as shown in FIG. 2B.

Next, from the buffer of the resource Ei, a work Wn (the number of parts is 15) which is a work of the highest priority processing and which can be completed until the main processing before the falling time of the resource Ei on the day is selected and the preprocessing is performed, As shown in FIG. 2B, the first main processing part wna (10 parts) is processed by the main processing unit P2.
Start with the first server S1 of i. At this point, the preprocessing unit P
Since the last main processed part wnb (the number of parts is 5) of the work Wn is left in 1i, it is checked whether or not the highest priority work of the waiting work in the buffer is the same recipe as the preceding work, and if the same recipe If it is a work, select it and perform preprocessing. In the example of FIG. 2B, the highest priority processing work W1 (the number of parts 2
5) is a work having the same recipe as the preceding work Wn.

On the other hand, the processing part wna of the first server, which has been processed by the first server S1, is transferred to the second server S2, and the part size of the remaining main processing parts wnb (the number of parts is 5) of the preprocessing unit P1i. Is less than the processing part size (10) designated by the server of the main processing unit P2i, and is merged with a part of the parts of the workpiece of the same recipe selected next, and the main processing part number is set to 10 and the first server It is put into S1 (FIG. 2 (c)). Here, if the main processing part size of each server of the main processing unit P2i of the resource Ei is 20, the work W1 of the same recipe is also selected at the same time when the work Wn is selected, and the part (15) of the work Wn is selected. The part (5) of the work W1 is merged, and the main processing part (20)
Will be generated and input to the first server S1. The merging operation can be selected by designating whether or not to execute the resource Ei in advance and validating or invalidating the merging operation for the resource Ei.

The remaining main processing parts w1a (10) and w1b (10) of the work W1 of the preprocessing unit P1i are sequentially loaded when the first server S1 becomes empty. In this way, when all the main processing parts are present in the main processing part P2i having a plurality of servers, pipeline processing is performed in which the server having the maximum processing time is rate-determining. When the combined main processing parts arrive at the post-processing section P3i, the post-processing is performed on the processed main processing parts wna and wnb of the work Wn, and the work Wn is formed again. At this time, the part (5) of the work W1 of the same recipe included in the processed part wnb is separated from the part wnb and left in the post-processing unit P3i, and the subsequent processed parts w1a, w1.
Wait for b to arrive. The work Wn for which the post-processing has been completed receives the transition destination designation of the next process (N), disposal (D), and reprocessing (rework) (R) and proceeds to each transition destination (FIG. 2 (d)). The transition destination designation designates the yield of the work produced by the production process resource. For example, by designating the probabilities of the above three types of transition destinations for each recipe registered in the resource, one of the probabilities Selected.

FIG. 3 shows an example of processing a work according to the model of the present embodiment in the case where the resources used in each of the two consecutive steps of the production process have the same processing part size of the main processing unit of both resources (inter-resource processing). FIG. 6 is a diagram illustrating a pipeline process of FIG.

Work Wm selected by the first resource Ei (the number of servers is 1, the processing part size Os = 25) of the resources.
The (part size 50) is divided into two main processing parts wm1 and wm2 of size 25 each by the pre-processing unit P1i of the resource and sequentially main processed, and then the buffer of the second resource Ej is directly received without post-processing. (Fig. 3 (a)). Second
In the resource buffer, the first processing part wm of the work Wm
When 1 arrives at the buffer, the processing order in the second resource Ej is determined together with other waiting works. When the processing part wm1 is selected by the second resource Ej, the part wm1 is selected.
Is directly input to and processed by the server (the number of servers is 1) of the main processing unit P2j of the second resource Ej (FIG. 3 (b)).

With the second resource Ej, the main processing part wm
When 1 is selected and the main processing is started, any other work or part is not selected and is occupied by the main processing parts wm1 and wm2 until the subsequent main processing part wm2 finishes the post processing (FIG. 3 (b). )). However, in the first resource Ei, if the work of the same recipe as the work Wm can be selected when the work Wm is selected, the work Wm and the parts of the work of the same recipe are combined as in the embodiment shown in FIG. Then, the above pipeline processing can be performed.
Similar to the merge operation, the pipeline processing between the two resources is selected in advance by designating whether or not the resources Ei and Ej can be executed and enabling or disabling the post-processing of the first resource and the pre-processing of the second resource. it can.

[0018]

As described above, according to the present invention,
Since the processing functions of production process resources are expressed separately in the pre-processing section, main processing section, and post-processing section, the resource utilization rate can be collected separately for each processing function, and compared to the conventional expression method. The production capacity of resources can be evaluated in detail. Further, since the processing part size of the main processing unit and the number of servers can be arbitrarily specified by parameters, various processing modes of resources can be easily expressed, and it is possible to reduce the time for creating a resource work processing model. The work processing model is highly versatile and flexible. Further, it is easy to reflect various operating conditions of the resources such as merging of works in the production process resources, pipeline processing or pipeline processing between resources, and it is possible to achieve a flexible production process performance evaluation system.

[Brief description of drawings]

FIG. 1 is a diagram showing a production process processing function model for implementing a processing function expression method of a production process resource according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram of work processing by a production process resource expressed by the model shown in FIG.

FIG. 3 is an explanatory diagram of work processing by a production process resource expressed by the model shown in FIG.

FIG. 4 is an explanatory diagram showing a conventional method of expressing production process resources.

[Explanation of symbols]

 Bi buffer Ei resource P1i pre-processing unit P2i main processing unit P3i post-processing unit Si1-Sik server Wi-work

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Junro Nose 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nihon Telegraph and Telephone Corporation

Claims (6)

[Claims] 1. A method of expressing a processing function of a production process resource, which expresses a processing process function of a production process resource such as a manufacturing apparatus used in a production process, wherein a workpiece, which is an object to be processed by the production process resource, is provided. A buffer unit for accumulating and accumulating according to a certain standard that defines the processing order, and a single or a plurality of works in the buffer unit are selected, and the part size of the work and the server which is the processing unit of the subsequent main processing unit once A pre-processing unit that compares the size of a processing part, which is the maximum processing unit that can be processed in the above process, and generates a main processing part, which is a processing part obtained by collectively dividing the work within the range of the size of the processing part; A main processing unit including a single or continuous plurality of independent servers that sequentially process each of the parts, and all processing parts of the work processed by the main processing unit. And a post-processing unit that collects and restores the work collectively to the work, and specifies each transition destination of the next process, disposal, and re-processing for the work, the pre-processing unit, the post-processing unit, and A method of expressing a processing function of a production process resource, characterized in that a processing time is designated for each server of this processing unit. 2. In the pre-processing unit, the pre-processing of a preceding work which is a previously processed work and a work of different processing conditions in which any one of the pre-processing unit, the main processing unit and the post-processing unit has different processing time is performed. It is started when all the main processing parts of the preceding work have been processed by all the processing parts of the model, and the processing times of the preceding work and the pre-processing part, the main processing part, and the post-processing part are all the same processing condition. 2. The method for expressing a processing function of a production process resource according to claim 1, wherein the pre-processing of the work is started when only the final main processing part of the preceding work is left in the pre-processing section. 3. The pre-processing unit does not select a work which does not end this processing before a suspension time such as a start-up start or maintenance start time, which is scheduled for a production process resource. The method for expressing a processing function of a production process resource according to claim 1. 4. The processing part of the main processing unit, the processing part of which has finished processing of the front server, can start the processing of the rear server, when the processing of the processing part of the rear server has finished. A method for expressing the processing capacity of the described production process resource. 5. The method for expressing the processing function of a production process resource according to claim 1, wherein the post-processing started in the post-processing unit before the suspension time of the production process resource can be continued after the suspension time. 6. A post-processing unit for a first resource and a pre-processing unit for a second resource when used in two consecutive steps of a production process and when the processing parts sizes of the main processing unit of both resources are equal. The processing function expression method of the production process resource according to claim 1, wherein the processing part is processed by omitting.